JPS63311643A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPS63311643A JPS63311643A JP14823587A JP14823587A JPS63311643A JP S63311643 A JPS63311643 A JP S63311643A JP 14823587 A JP14823587 A JP 14823587A JP 14823587 A JP14823587 A JP 14823587A JP S63311643 A JPS63311643 A JP S63311643A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- optical recording
- recording medium
- kinds
- recording layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 229910052777 Praseodymium Inorganic materials 0.000 claims abstract 2
- 229910052732 germanium Inorganic materials 0.000 claims abstract 2
- 229910052735 hafnium Inorganic materials 0.000 claims abstract 2
- 229910052742 iron Inorganic materials 0.000 claims abstract 2
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Landscapes
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光磁気記録媒体の光磁気記録層の組成に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the composition of a magneto-optical recording layer of a magneto-optical recording medium.
(従来の技術〕
光磁気メモリの研究は、1957年にMnB11膜上に
熱ペンを用いて記録を行い、その書き込み磁区を磁気光
学効果により観察したのが、その端諸であると言われて
いる。その後レーザの発展に刺激されて、MnB1系の
材料を中心に精力的な研究が行われてきたが、レーザ光
源ならびに、周辺技術が未熟であった為、実用化には至
らなかった。(Prior art) Research on magneto-optical memory is said to have started in 1957, when recording was performed on an MnB11 film using a hot pen, and the written magnetic domain was observed using the magneto-optic effect. Since then, stimulated by the development of lasers, intensive research has been carried out mainly on MnB1-based materials, but because the laser light source and peripheral technology were still immature, practical application was not achieved.
その後、1970年代における光情報処理関連技術の進
展、及び非晶質希土類遷移金属合金薄膜に代表される、
新しい磁性薄膜材料の研究が進み、G d F e
1T b F e % D y −F e SG
d−Co等の合金薄膜が開発されてきた。これらの材料
は、一般に次の様な特徴を有している。After that, advances in optical information processing related technology in the 1970s, as typified by amorphous rare earth transition metal alloy thin films,
As research into new magnetic thin film materials progresses, G d Fe
1T b Fe % D y −F e SG
Alloy thin films such as d-Co have been developed. These materials generally have the following characteristics.
G d −F e s G d −Co等の補償点記録
用光磁気記録媒体は、キューリ一点記録用光磁気記録媒
体に比較し、カー回転角が大きく、光再生特性は優れて
いるものの保磁力が小さく(数百エルステッド)、1μ
m径程度の微小ビットが安定に得られない。又、Tb−
Fe1Dy−Fe等のキューリ一点記録用光磁気記録媒
体は、逆に保持力が大きく(数キロエルステッド)、1
μm程度の微小ビットを安定に得ることが出来るものの
、カー回転角が小さく、光再生特性があまり良くない。Magneto-optical recording media for compensation point recording, such as G d -F e s G d -Co, have a larger Kerr rotation angle and superior optical reproduction characteristics compared to magneto-optical recording media for Curie single point recording, but have low coercive force. is small (several hundred Oersteds), 1μ
It is not possible to stably obtain small bits with a diameter of m. Also, Tb-
On the contrary, magneto-optical recording media for Curie single point recording such as Fe1Dy-Fe have a large coercive force (several kilo Oersteds) and
Although it is possible to stably obtain minute bits on the order of μm, the Kerr rotation angle is small and the optical reproduction characteristics are not very good.
これら2元合金薄膜の欠点を補うため、多元化の方向が
示され、特開昭59−EiB854、特開昭59−84
358.あるいは電信学研資、02M80−44 (1
980)31等に記述されている。In order to compensate for the drawbacks of these binary alloy thin films, the direction of diversification was suggested, and
358. Or Telegraph Research Fund, 02M80-44 (1
980) 31 etc.
しかしながら、従来技術では、カー回転角、キ1リ一温
度、反射率等光磁気配sBの初期磁気特性のみ注目し、
耐環境性あるいは繰り返し録再特性等の信頼性及び、製
造時の作業性等については記述されていない。However, the conventional technology focuses only on the initial magnetic properties of the magneto-optical distribution sB, such as the Kerr rotation angle, the primary temperature, and the reflectance.
There is no description of reliability such as environmental resistance or repeated recording/playback characteristics, workability during manufacturing, etc.
そこで本発明は、かかる問題点を解決するもので、その
目的とするところは、初期特性及び長期信頼性に優れ、
製造の容易な光磁気記録媒体を提供することにある。Therefore, the present invention is intended to solve such problems, and its purpose is to have excellent initial characteristics and long-term reliability,
The object of the present invention is to provide a magneto-optical recording medium that is easy to manufacture.
本発明の光磁気記録媒体は、磁化の向きが膜面に垂直で
、上向きか下向きかの二値をとる非晶質光磁気記録層に
、光を照射し記t211再生・消去を行う、光磁気記録
媒体において、合金の一般式を(LRxl−IRI−x
)yA、−y−−BZとする時
0<x<0.5
Q、1<y<0.5
0<z<0.01
LRは7% Las Ces PrlNd15mが1種
以上、HRはGd、Tbs Dyが1種以上、AはF
e s Co 、N 1が1種以上、BはT js
Zrs Hft Sis Gez Pbが1種以上から
成る光磁気記録層を有することを特徴とする。In the magneto-optical recording medium of the present invention, an amorphous magneto-optical recording layer in which the direction of magnetization is perpendicular to the film surface and has a binary value of upward or downward is irradiated with light to perform recording and erasing. In magnetic recording media, the general formula of the alloy is (LRxl-IRI-x
)yA, -y--BZ, 0<x<0.5 Q, 1<y<0.5 0<z<0.01 LR is 7% Las Ces PrlNd15m is one or more types, HR is Gd, Tbs Dy is one or more types, A is F
e s Co , N 1 is one or more types, B is T js
It is characterized by having a magneto-optical recording layer consisting of one or more types of Zrs Hft Sis Gez Pb.
〔実施例1〕
第1図は、本発明において、光磁気記録媒体としての特
性をチェックする為に採用した、光磁気記録媒体の構造
を示す断面図である。[Example 1] FIG. 1 is a sectional view showing the structure of a magneto-optical recording medium employed in the present invention to check the characteristics of the magneto-optical recording medium.
1及び5は基板で、通常ガラスあるいは透光性プラスチ
ック(ポリカーボネート、エポキシ、ポリメチルメタク
リレート、アモルファスポリオレフィン等)が使用され
、ここではポリカーボネートを使用した。 ′
2は保護層で、透光性の化合物膜(酸化物、窒化物、硫
化物等で例えばAfl −o s、 si、。1 and 5 are substrates, which are usually made of glass or translucent plastic (polycarbonate, epoxy, polymethyl methacrylate, amorphous polyolefin, etc.), and polycarbonate was used here. '2 is a protective layer, which is a light-transmitting compound film (oxide, nitride, sulfide, etc., such as Afl-os, si, etc.).
s 、A I2 N SS 1 s N a 、Z n
S等) が使用され、ここではAρ:5i=3ニアの
窒化膜を使用した。3は光磁気記録層、4は接1w層で
ある。s, A I2 N SS 1 s N a , Z n
S, etc.), and here a nitride film with Aρ:5i=3 near was used. 3 is a magneto-optical recording layer, and 4 is a contact 1w layer.
4の接着層は、 紫外線硬化樹脂あるいは熱硬化性樹脂
等透光性接着剤であれば使用可能であるが、ここではH
DDA (ヘキサンジオールジアクリレート) 、TM
PTA ()リメチロールプロパントリアクリレート)
を7:3に配合した紫外線硬化樹脂を使用した。For the adhesive layer in step 4, any translucent adhesive such as ultraviolet curing resin or thermosetting resin can be used, but here H
DDA (hexanediol diacrylate), TM
PTA ()limethylolpropane triacrylate)
An ultraviolet curable resin containing a 7:3 ratio of 7:3 was used.
〔実施例2〕
光磁気配0層、保護層をスパッタリング法により形成し
た光磁気記録媒体を作成した。構造は第1図に示す構造
で、光磁気記録層の組成を(Ces、eiPre、*s
DYゆ、、)。、。[Example 2] A magneto-optical recording medium was prepared in which a magneto-optical distribution layer and a protective layer were formed by sputtering. The structure is shown in Figure 1, and the composition of the magneto-optical recording layer is (Ces, eiPre, *s
DY Yu,,). ,.
a (Fe*、sCO*、a)0.yA−xBxとし
Bの成分、及びZの値をm1表に示す。a (Fe*, sCO*, a) 0. Assuming yA-xBx, the component of B and the value of Z are shown in the m1 table.
第 1 表
ここでS−1〜5−22は、本発明の範囲に属するサン
プルであり5−23〜5−31は、本発明の範囲から外
れる比較例のサンプルである。Table 1 Here, S-1 to 5-22 are samples belonging to the scope of the present invention, and 5-23 to 5-31 are samples of comparative examples that are outside the scope of the present invention.
第2表に、前記サンプルのCNR,及び70”CX90
%RH環境下での信頼性 (BERが初期値から5X1
0−’増加するまでの時間)を示す。Table 2 shows the CNR of the sample and 70"CX90
Reliability under %RH environment (BER is 5X1 from initial value)
0-'time until increase).
第 2 表
表より明らかな如く、本発明のサンプルは、比較例に比
べ、CNRが2〜3dB高く、信頼性試験においても3
倍以上の耐久性を有する。As is clear from Table 2, the sample of the present invention has a CNR higher than that of the comparative example by 2 to 3 dB, and also achieved 3 dB in the reliability test.
It has more than twice the durability.
(実施例3〕
実施例2と同様にして光磁気記録媒体を作成した。光磁
気記録層の組成を
(Ys、t@Ndゆ、、、Gdl 、、Tbゆ。(Example 3) A magneto-optical recording medium was prepared in the same manner as in Example 2. The composition of the magneto-optical recording layer was (Ys, t@Nd, , Gdl, , Tb).
1)1.!6 (Fe*、sCO* 、sNi
@。1)1. ! 6 (Fe*, sCO*, sNi
@.
+、)1.@I−z−13z としBの成分、及び2の値を第3表に示す。+,)1. @I-z-13z The components of B and the values of 2 are shown in Table 3.
第3表
第4表に、前記サンプルのCNR,及び70゜C×90
%RH環境下での信頼性(BERが初期値から5X10
−’増加するまでの時間)を、示す。Table 3 and Table 4 show the CNR of the sample and 70°C x 90
%Reliability under RH environment (BER is 5X10 from initial value)
−'time until increase).
第 4 表
表より明らかな如く、本発明のサンプルは、CNRが約
52dBと高(、信頼性試験においても2000時間以
上の良好な結果を示した。As is clear from Table 4, the sample of the present invention had a high CNR of about 52 dB (and also showed good results in the reliability test for more than 2000 hours).
なお比較の為、光磁気記録層に
(Y* −ts Nd* −+s Gd* 、6 Tb
−。For comparison, (Y* -ts Nd* -+s Gd*, 6 Tb
−.
s)e、sa (Fe*、@CO*、5Nie。s) e, sa (Fe*, @CO*, 5Nie.
1)1.@&
を用いた光磁気メディアを作成し、同様に特性評価を行
ったところ、CNRは49.1〜49゜9dB、 信
頼性試験は700〜800Hであった。1)1. When a magneto-optical media using @& was similarly evaluated, the CNR was 49.1 to 49°9 dB, and the reliability test was 700 to 800 H.
〔実施例4〕
実施例2と同様にして光磁気記録媒体を作成した、光磁
気配DIiIの組成を、
(C84,tSm@、+Tlbo−*)e、a (F
e*−5Nf*、*)*、5−zBx としBの成分、
及びZの値を第5表に示す。[Example 4] A magneto-optical recording medium was prepared in the same manner as in Example 2, and the composition of the magneto-optical distribution DIiI was (C84, tSm@, +Tlbo-*)e, a (F
e*-5Nf*, *)*, 5-zBx and the component of B,
and Z values are shown in Table 5.
第 5 表
第6表に、前記サンプルのCNR,及び70゜CX90
%RH環境下での信頼性(BERが初期値から5810
−’増加するまでの時間)を示す。Table 5 Table 6 shows the CNR of the sample and the 70°CX90
%Reliability under RH environment (BER is 5810 from initial value)
−'time until increase).
第 6 表
ここでU−1〜U−12は、本発明の範囲に属するサン
プルであり、U−13〜U−16は、本発明の範囲から
外れる、 比較例のサンプルである。Table 6 Here, U-1 to U-12 are samples belonging to the scope of the present invention, and U-13 to U-16 are samples of comparative examples that are outside the scope of the present invention.
表より明らかな如く、本発明のサンプルは、比較例に比
べ、CNRが2〜3dB高(、信頼性試験においても3
倍以上の耐久性を存する。As is clear from the table, the CNR of the sample of the present invention is 2 to 3 dB higher than that of the comparative example (and 3 dB higher in the reliability test).
It has more than twice the durability.
〔実施例5〕
実施例2における5−17、実施例3におけるT−8、
実施例4におけるu−12、及び比較例として実施例3
と同様、
(Y、、、、Nd、、、、Gdl 、、Tb@ 。[Example 5] 5-17 in Example 2, T-8 in Example 3,
u-12 in Example 4 and Example 3 as a comparative example
Similarly, (Y,,,,Nd,,,,Gdl,,Tb@.
*)e、si (Fe*、sCO*、sNlm。*) e, si (Fe*, sCO*, sNlm.
、)。、。,). ,.
を用いた光磁気メディアを作成し、繰り返し録再特性を
評価した。We created magneto-optical media using this technology and evaluated its repeated recording and replay characteristics.
900γpmt消去パワー4.5mW、記録パワー4m
W、 読み出しパワー1.2mWの条件で、 単一周
波数の記録ピット長に対応する時間(〒)の変化を調べ
た。900γpmt Erase power 4.5mW, Recording power 4m
The change in time (〒) corresponding to the recording pit length of a single frequency was investigated under the conditions of W and read power of 1.2 mW.
この結果を第2図に示す。The results are shown in FIG.
ここで11は5−17.12はT−8,13はU−12
,14は比較例に対応する。Here 11 is 5-17.12 is T-8, 13 is U-12
, 14 correspond to the comparative example.
図から明らかな如<、Bとしての元素を添加する事によ
り、繰り返し録再特性は大中に向上し、本実施例以外の
他の成分系に関しても、この傾向は同様であった。As is clear from the figure, by adding the element B, the repeated recording and reproducing characteristics were greatly improved, and this tendency was the same for other component systems other than the present example.
又、本発明の組成系は、スパッタリング時に、光磁気記
録層のプレスパツタ時間が、従前の約4分の1で済むと
いう利点を有しており、成膜工程の高速化に大きな効果
が見られた。Furthermore, the composition system of the present invention has the advantage that during sputtering, the pre-sputtering time for the magneto-optical recording layer can be reduced to about one-fourth of the conventional method, which has a significant effect on speeding up the film-forming process. Ta.
以上詳述した如く、本発明によれば、磁化の向きが膜面
に垂直で、上向きか下向きかの二値をとる非晶質光磁気
記録層に光を照射し、 記録・再生・消去を行う光磁気
記録媒体において、合金の一般式を
(LRx HR+ −x ) y Al−−z Bzと
する時
0<X<0.5
Q、f<y<0.5
0<z<0.01
LRはYN La1Cet Prs Nd55mが1種
以上、HRltGd、Tb、Dyが111以上、AはF
e 1Co 1N iが1種以上、BはT I N
ZrXHf、S 1SGe、Pbがta以上から成る
光磁気記録層を用いる事により、 初期特性は勿論、信
頼性が優れ、スパッタリング条件の制約が緩い光磁気媒
体が得られ、コンピュータ用外部メモリ、フライリング
システム等各種用途の光メモリに応用が可能である。As detailed above, according to the present invention, light is irradiated onto the amorphous magneto-optical recording layer whose magnetization direction is perpendicular to the film surface and has a binary value of either upward or downward, thereby performing recording, reproduction, and erasing. In the magneto-optical recording medium to be used, when the general formula of the alloy is (LRx HR+ -x) y Al--z Bz, 0<X<0.5 Q, f<y<0.5 0<z<0.01 LR is one or more YN La1Cet Prs Nd55m, HRltGd, Tb, Dy is 111 or more, A is F
e 1Co 1N i is one or more types, B is T I N
By using a magneto-optical recording layer consisting of ZrXHf, S1SGe, and Pb of ta or more, it is possible to obtain a magneto-optical medium that has excellent initial characteristics and reliability, and has less restrictions on sputtering conditions, and is suitable for external memory for computers, fly rings, etc. It can be applied to optical memories for various uses such as systems.
第1図は本発明の実施例に基づく光磁気記録媒体の構造
を示す断面図。
m2図は本発明の実施例における、繰り返し録再特性の
評価図。
以 上
出願人 セイコーエプソン株式会社
代理人 弁理士 最 上 務 他1名 ;、、、−7
;/、夕 墓板
λ 体重
3 丸砥鬼會己↑亀4
弘 訣44
茅 /IZ
I豪ワ退1− 1ii状 (IjQ )¥ 2
口FIG. 1 is a sectional view showing the structure of a magneto-optical recording medium according to an embodiment of the present invention. The m2 diagram is an evaluation diagram of repeated recording and reproducing characteristics in an example of the present invention. Applicant Seiko Epson Co., Ltd. Agent Patent Attorney Tsutomu Mogami and 1 other person;,,,-7
;/, Yu Tomb board λ Weight 3 Marutoki Kaiki ↑ Turtle 4 Hirotsu 44 Kaya /IZ I go away 1-1ii state (IjQ) ¥ 2
mouth
Claims (1)
二値をとる非晶質光磁気記録層に、光を照射し記録・再
生・消去を行う、光磁気記録媒体において、合金の一般
式を (LR_xHR_1_−_x)_yA_1_−_y_z
B_zとする時 0<x<0.5 0.1<y<0.5 0<z<0.01 LRはY、La、Ce、Pr、Nd、Smが1種以上、
HRはGd、Tb、Dyが1種以上、AはFe、Co、
Niが1種以上、BはTi、Zr、Hf、Si、Ge、
Sm、Pbが1種以上から成る、光磁気記録層を有する
ことを特徴とする光磁気記録媒体。(1) In magneto-optical recording media, in which recording, reproduction, and erasing are performed by irradiating light onto an amorphous magneto-optical recording layer whose magnetization direction is perpendicular to the film surface and has a binary value of upward or downward, alloy The general formula of (LR_xHR_1_-_x)_yA_1_-_y_z
When B_z is 0<x<0.5 0.1<y<0.5 0<z<0.01 LR is one or more of Y, La, Ce, Pr, Nd, and Sm,
HR is one or more of Gd, Tb, Dy, A is Fe, Co,
Ni is one or more kinds, B is Ti, Zr, Hf, Si, Ge,
A magneto-optical recording medium comprising a magneto-optical recording layer comprising one or more of Sm and Pb.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14823587A JPS63311643A (en) | 1987-06-15 | 1987-06-15 | Magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14823587A JPS63311643A (en) | 1987-06-15 | 1987-06-15 | Magneto-optical recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63311643A true JPS63311643A (en) | 1988-12-20 |
Family
ID=15448275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14823587A Pending JPS63311643A (en) | 1987-06-15 | 1987-06-15 | Magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63311643A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0770996A3 (en) * | 1995-10-28 | 1998-01-28 | Samsung Electronics Co., Ltd. | Amorphous alloy of light rare earth-transition metal and semi-metal, magneto-optical recording layer and magneto-optical disk adopting the layer |
-
1987
- 1987-06-15 JP JP14823587A patent/JPS63311643A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0770996A3 (en) * | 1995-10-28 | 1998-01-28 | Samsung Electronics Co., Ltd. | Amorphous alloy of light rare earth-transition metal and semi-metal, magneto-optical recording layer and magneto-optical disk adopting the layer |
US6331338B1 (en) | 1995-10-28 | 2001-12-18 | Samsung Electronics Co., Ltd. | Amorphous alloy of light rare earth-transition metal and semi-metal, magneto-optical recording layer made of the alloy, and magneto-optical disk adopting the layer |
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