JPS6331028U - - Google Patents
Info
- Publication number
- JPS6331028U JPS6331028U JP12268486U JP12268486U JPS6331028U JP S6331028 U JPS6331028 U JP S6331028U JP 12268486 U JP12268486 U JP 12268486U JP 12268486 U JP12268486 U JP 12268486U JP S6331028 U JPS6331028 U JP S6331028U
- Authority
- JP
- Japan
- Prior art keywords
- pedestal
- rotary disk
- vacuum chamber
- loading
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12268486U JPS6331028U (enExample) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12268486U JPS6331028U (enExample) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331028U true JPS6331028U (enExample) | 1988-02-29 |
Family
ID=31013105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12268486U Pending JPS6331028U (enExample) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331028U (enExample) |
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1986
- 1986-08-08 JP JP12268486U patent/JPS6331028U/ja active Pending