JPS6331028U - - Google Patents

Info

Publication number
JPS6331028U
JPS6331028U JP12268486U JP12268486U JPS6331028U JP S6331028 U JPS6331028 U JP S6331028U JP 12268486 U JP12268486 U JP 12268486U JP 12268486 U JP12268486 U JP 12268486U JP S6331028 U JPS6331028 U JP S6331028U
Authority
JP
Japan
Prior art keywords
pedestal
rotary disk
vacuum chamber
loading
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12268486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12268486U priority Critical patent/JPS6331028U/ja
Publication of JPS6331028U publication Critical patent/JPS6331028U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP12268486U 1986-08-08 1986-08-08 Pending JPS6331028U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12268486U JPS6331028U (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12268486U JPS6331028U (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Publications (1)

Publication Number Publication Date
JPS6331028U true JPS6331028U (enrdf_load_stackoverflow) 1988-02-29

Family

ID=31013105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12268486U Pending JPS6331028U (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Country Status (1)

Country Link
JP (1) JPS6331028U (enrdf_load_stackoverflow)

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