JPS6330692B2 - - Google Patents
Info
- Publication number
- JPS6330692B2 JPS6330692B2 JP56030742A JP3074281A JPS6330692B2 JP S6330692 B2 JPS6330692 B2 JP S6330692B2 JP 56030742 A JP56030742 A JP 56030742A JP 3074281 A JP3074281 A JP 3074281A JP S6330692 B2 JPS6330692 B2 JP S6330692B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- ferromagnetic thin
- magnetic recording
- recording medium
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005294 ferromagnetic effect Effects 0.000 claims description 28
- 230000005291 magnetic effect Effects 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 description 36
- 239000010410 layer Substances 0.000 description 19
- 239000010408 film Substances 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000011029 spinel Substances 0.000 description 5
- 229910052596 spinel Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000003487 electrochemical reaction Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
Description
【発明の詳細な説明】
本発明は、例えば少なくともCoもしくはFeを
含む強磁性薄膜を基体上に配した磁気記録媒体に
関し、簡単な構造にして前記強磁性薄膜における
腐食の問題を容易に解決しようとするものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium in which a ferromagnetic thin film containing at least Co or Fe is disposed on a substrate, and the present invention aims to easily solve the problem of corrosion in the ferromagnetic thin film with a simple structure. That is.
最近、Co、Co―Ni、Co―Cr等の少なくとも
Coを含む強磁性薄膜あるいはFe、Co―Fe等の少
なくともFeを含むスピネル系酸化物強磁性薄膜
が種々の方法にて基体上に積層され、磁気記録媒
体として、実用され始めている、該媒体の大きな
特徴として、前記強磁性薄膜の厚みを極めて薄く
構成する事が出来るため、前記媒体に記録された
信号を再生するに際し、厚み損失を少なくする事
が出来る。従つて、短波長での再生が優利になる
点をあげる事が出来る。しかし先に記した少なく
ともCoを含む強磁性薄膜あるいはスピネル系酸
化物強磁性薄膜は材料組成そのものが腐食に対し
て弱いという重大な問題をかかえている。 Recently, at least Co, Co-Ni, Co-Cr, etc.
Co-containing ferromagnetic thin films or spinel-based oxide ferromagnetic thin films containing at least Fe such as Fe, Co-Fe, etc. are laminated on a substrate by various methods, and these media are beginning to be put into practical use as magnetic recording media. A major feature is that the thickness of the ferromagnetic thin film can be made extremely thin, so that thickness loss can be reduced when reproducing signals recorded on the medium. Therefore, it is possible to point out the advantages of reproduction at short wavelengths. However, the above-mentioned ferromagnetic thin film containing at least Co or spinel-based oxide ferromagnetic thin film has a serious problem in that the material composition itself is susceptible to corrosion.
又前記少なくともCoを含む強磁性薄膜の場合、
磁気記録媒体としてのすぐれた磁気特性を有させ
るために斜め蒸着法に依り積層させると柱状構造
の粒子の集合体からなる膜となり柱状体と柱状体
の間のすきまを通した粒界腐食が生じる。 In the case of the ferromagnetic thin film containing at least Co,
In order to have excellent magnetic properties as a magnetic recording medium, when laminated using an oblique deposition method, the film becomes a film consisting of an aggregate of particles with a columnar structure, and intergranular corrosion occurs through the gaps between the columns. .
更に、ノイズ対策の問題として、強磁性薄膜を
厚み方向に例えば３分割し、分割された該強磁性
薄膜間の中間層膜としてAl、Cr等の金属膜が配
されているが、該中間層膜と前記強磁性薄膜との
間で電気化学的な腐食が生じることがある。 Furthermore, as a noise countermeasure problem, a ferromagnetic thin film is divided into three parts in the thickness direction, and a metal film such as Al or Cr is arranged as an intermediate layer film between the divided ferromagnetic thin films. Electrochemical corrosion may occur between the membrane and the ferromagnetic thin film.
以上の問題は、磁気記録媒体としての信頼性に
かかわる重要な問題があるが、これらの問題を同
時に解決する有力な方法は今の所見い出されてい
ない。 Although the above-mentioned problems are important problems related to reliability as a magnetic recording medium, no effective method for simultaneously solving these problems has been found so far.
本発明は従来における前述のような問題を解決
しようとするもので以下にその説明を行う。 The present invention is intended to solve the above-mentioned conventional problems, and will be explained below.
本発明による磁気記録媒体は図に示すように、
ポリエチレンテレフタレート、ポリイミド、ポリ
アミド等からなるプラスチツクフイルムやステン
レス、アルミニウム等の非磁性材料で構成された
基体１上に、Co、Co―Ni、Co―Cr等の少なく
ともCoを含む強磁性薄膜あるいはFe、Co―Fe等
の少なくともFeを含むスピネル系酸化物強磁性
薄膜２を配し、強磁性薄膜２上に非磁性のαFe2-〓
O3薄膜からなる中間層膜３（０δ≪１）を配
し、中間層膜３上には再び上記同様の材料からな
る強磁性薄膜４を配し、続いて強磁性薄膜４上に
は同じくαFe2-〓O3薄膜からなる中間層膜５を配
し、中間層膜５上にはさらに強磁性薄膜６を配し
た３層からなる磁性層を有する。 As shown in the figure, the magnetic recording medium according to the present invention has the following features:
A ferromagnetic thin film containing at least Co such as Co, Co--Ni, Co--Cr, etc. or Fe, A spinel-based oxide ferromagnetic thin film 2 containing at least Fe such as Co--Fe is arranged, and a non-magnetic αFe 2-
An intermediate layer 3 (0δ≪1) made of an O 3 thin film is disposed, and a ferromagnetic thin film 4 made of the same material as above is again disposed on the intermediate layer 3. An intermediate layer 5 made of an αFe 2- 〓O 3 thin film is disposed, and a ferromagnetic thin film 6 is further disposed on the intermediate layer 5 to form a three-layer magnetic layer.
なおここで強磁性薄膜２，４，６を少なくとも
Coを含む強磁性薄膜で構成させる場合には、斜
め蒸着法に依り積層、もしくはスパツタリング法
を用いガス圧、電極間電圧、電流等を制御する事
に依り積層される。又少なくともFeを含むスピ
ネル系酸化物磁性薄膜で構成させる場合には、酸
素雰囲気中で蒸着速度、基材の温度、酸素量等を
制御する事によりFeを蒸発させて積層される。 Note that here, the ferromagnetic thin films 2, 4, and 6 are at least
When a ferromagnetic thin film containing Co is used, it is laminated by an oblique evaporation method or by sputtering by controlling gas pressure, interelectrode voltage, current, etc. Further, in the case of forming a spinel-based oxide magnetic thin film containing at least Fe, the layer is laminated by evaporating Fe by controlling the deposition rate, the temperature of the base material, the amount of oxygen, etc. in an oxygen atmosphere.
一方中間層膜３，５を構成するα―Fe2-〓O3薄
膜３，５も酸素雰囲気中で蒸着速度、基材の温
度、酸素量等を制御する事に依り、Feを蒸発さ
せて積層される。 On the other hand, the α-Fe 2- 〓 O 3 thin films 3 and 5 constituting the intermediate layer films 3 and 5 are also evaporated by controlling the deposition rate, substrate temperature, oxygen amount, etc. in an oxygen atmosphere. Laminated.
以上のように本発明による磁気記録媒体は基体
１上に非磁性の中間層膜３，５及び強磁性薄膜
２，４，６を互い違いに積層し、該中間層膜とし
てαFe2-〓O3（０δ≪１）薄膜を少くとも１層に
用いた多層構造になつている。 As described above, the magnetic recording medium according to the present invention has the nonmagnetic intermediate layers 3, 5 and the ferromagnetic thin films 2, 4, 6 alternately laminated on the substrate 1, and the intermediate layers are αFe 2- 〓O 3 (0δ<<1) It has a multilayer structure using at least one thin film.
さて中間層膜３，５を構成するαFe2-〓O3薄膜
は、耐食性に関して極めて安定な薄膜であるの
で、仮に最上層部の強磁性薄膜６が水酸基OH-
あるいは酸素によつて酸化され即ち腐食をうけて
も中間層膜３，５の部分で上記反応が内部方向に
進行するのを遮断させる事が出来る。 Now, since the αFe 2- 〓O 3 thin film that constitutes the intermediate layer films 3 and 5 is an extremely stable thin film in terms of corrosion resistance, suppose that the ferromagnetic thin film 6 in the uppermost layer has hydroxyl groups OH -
Alternatively, even if the interlayer films 3 and 5 are oxidized by oxygen, that is, corroded, the above reaction can be blocked from proceeding inward.
更に中間層膜３，５としてのαFe2-〓O3薄膜は
酸化物であるため、強磁性薄膜２，４，６との間
で電気化学的な反応が生じるのは極めて抑制され
る。 Furthermore, since the αFe 2- 〓O 3 thin film serving as the intermediate layer films 3 and 5 is an oxide, electrochemical reactions between it and the ferromagnetic thin films 2, 4, and 6 are extremely suppressed.
次に具体的な実施例を説明する。 Next, a specific example will be described.
実施例 １
図における基体１としてポリエチレンテレフタ
レートからなるプラスチツクフイルムを選び中間
層膜３，５としてはαFe2O3薄膜を形成した。中
間層３，５の各々の厚みは200〔Å〕である。斜め
蒸着法により積層され組成がCo0.9Ni0.1である強
磁性薄膜２，４，６の各々の厚みは250〔Å〕であ
る。以上のような構成の磁気記録媒体と、比較の
ための従来の磁気記録媒体即ち中間層膜３，５と
してAl薄膜を用いた磁気記録媒体とについて共
に次の試験を行つた。なお従来の磁気記録媒体に
おける各々の中間層膜及び強磁性薄膜の厚みは、
本発明による磁気記録媒体におけるのと概ね同一
である。Example 1 A plastic film made of polyethylene terephthalate was selected as the substrate 1 in the figure, and αFe 2 O 3 thin films were formed as the intermediate layers 3 and 5. The thickness of each of intermediate layers 3 and 5 is 200 [Å]. The thickness of each of the ferromagnetic thin films 2, 4, and 6, which are laminated by oblique vapor deposition and have a composition of Co 0.9 Ni 0.1 , is 250 [Å]. The following tests were conducted on the magnetic recording medium having the above structure and a conventional magnetic recording medium for comparison, that is, a magnetic recording medium using Al thin films as the intermediate layer films 3 and 5. The thickness of each intermediate layer film and ferromagnetic thin film in conventional magnetic recording media is as follows:
This is generally the same as in the magnetic recording medium according to the present invention.
試験として温度が40〔℃〕、湿度が95％である恒
温恒湿の環境の中に、約800時間放置したところ、
従来のものでは腐食を受けた部分が随所に見られ
たが、本発明によるものでは腐食部を検知するに
いたらなかつた。 As a test, we left it in a constant temperature and humidity environment with a temperature of 40 [℃] and humidity of 95% for about 800 hours.
In the conventional device, corroded portions were seen everywhere, but in the device of the present invention, no corroded portions could be detected.
又、温度が30〔℃〕、湿度が60％である恒温、恒
湿の環境の中に約１年近く放置したところ、従来
のものでは、ノイズレベルが初期の頃と比べて極
めて劣化しており、顕微鏡で観察したところ、電
気化学的な反応による腐食と考えられる部分が随
所に見られた。 In addition, when the conventional model was left in a constant temperature and humidity environment of 30 [℃] and humidity of 60% for about a year, the noise level was significantly worse than when it was first used. When it was observed under a microscope, corrosion that was thought to be caused by electrochemical reactions was found everywhere.
一方本発明によるものではノイズレベルの変動
が極めて少ないものがあつた。 On the other hand, in some cases according to the present invention, fluctuations in noise level were extremely small.
なお本実施例において強磁性薄膜がCo0.9Ni0.10
からなる場合をとりあげているが、Co1-xNixな
る組成においてｘが０＜ｘ＜0.3である範囲で概
ね上記と同じ結果が得られた。 In this example, the ferromagnetic thin film is Co 0.9 Ni 0.10
However, in the composition Co 1-x Ni x , roughly the same results as above were obtained in the range where x satisfies 0<x<0.3.
実施例 ２
図における基体１としてAlフイルムを選び、
またαFe2O3からなる中間層膜３，５の各々の厚
みを400〔Å〕とし、酸素雰囲気中で積層されCo
を５％含むスピネル系酸化物強磁性薄膜２，４，
６の各々の厚みを1000〔Å〕とした磁気記録媒体
と従来の磁気記録媒体即ち中間層膜３，５として
Cr膜を用いた磁気記録媒体とについて共に実施
例１におけるのと同様な試験を行つた所、実施例
１と同じく本発明に依る磁気記録媒体の方が極め
て良好な媒体である事を示す結果が得られた。Example 2 Al film was selected as the substrate 1 in the figure,
In addition, the thickness of each of the interlayer films 3 and 5 made of αFe 2 O 3 was set to 400 [Å], and Co was laminated in an oxygen atmosphere.
Spinel-based oxide ferromagnetic thin film containing 5% of
6 with a thickness of 1000 Å and a conventional magnetic recording medium, that is, as intermediate layer films 3 and 5.
When a test similar to that in Example 1 was conducted on a magnetic recording medium using a Cr film, the results showed that the magnetic recording medium according to the present invention was a much better medium as in Example 1. was gotten.
以上のように本発明によると強磁性薄膜におけ
る腐食の問題を容易に解決することができる。 As described above, according to the present invention, the problem of corrosion in ferromagnetic thin films can be easily solved.
図は本発明による磁気記録媒体の構成を示す断
面図である。
１…基体、２，４，６…強磁性薄膜、３，５…
中間層膜。
The figure is a sectional view showing the structure of a magnetic recording medium according to the present invention. 1...Substrate, 2,4,6...Ferromagnetic thin film, 3,5...
Interlayer membrane.
Claims (1)
挟む複数層の強磁性膜を基体上に設けたことを特
徴とする磁気記録媒体。 ２ 強磁性膜がCoとFeの少なくとも一方を含む
ことを特徴とする特許請求の範囲第１項記載の磁
気記録媒体。[Claims] 1. A magnetic recording medium characterized in that a plurality of ferromagnetic films sandwiching an intermediate layer film made of αFe 2- 〓O 3 (0δ≪1) are provided on a substrate. 2. The magnetic recording medium according to claim 1, wherein the ferromagnetic film contains at least one of Co and Fe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56030742A JPS57147130A (en) | 1981-03-03 | 1981-03-03 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56030742A JPS57147130A (en) | 1981-03-03 | 1981-03-03 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57147130A JPS57147130A (en) | 1982-09-10 |
| JPS6330692B2 true JPS6330692B2 (en) | 1988-06-20 |
Family
ID=12312125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56030742A Granted JPS57147130A (en) | 1981-03-03 | 1981-03-03 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57147130A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0477091U (en) * | 1990-11-19 | 1992-07-06 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59185024A (en) * | 1983-04-04 | 1984-10-20 | Matsushita Electric Ind Co Ltd | Magnetic recording medium |
| SG96659A1 (en) * | 2001-11-08 | 2003-06-16 | Inst Data Storage | Laminated antiferromagnetically coupled media for data storage |
-
1981
- 1981-03-03 JP JP56030742A patent/JPS57147130A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0477091U (en) * | 1990-11-19 | 1992-07-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57147130A (en) | 1982-09-10 |
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