JPS6330350U - - Google Patents

Info

Publication number
JPS6330350U
JPS6330350U JP12251286U JP12251286U JPS6330350U JP S6330350 U JPS6330350 U JP S6330350U JP 12251286 U JP12251286 U JP 12251286U JP 12251286 U JP12251286 U JP 12251286U JP S6330350 U JPS6330350 U JP S6330350U
Authority
JP
Japan
Prior art keywords
ion beam
ion source
ion
pores
extracting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12251286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0734924Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986122512U priority Critical patent/JPH0734924Y2/ja
Publication of JPS6330350U publication Critical patent/JPS6330350U/ja
Application granted granted Critical
Publication of JPH0734924Y2 publication Critical patent/JPH0734924Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1986122512U 1986-08-09 1986-08-09 イオン源 Expired - Lifetime JPH0734924Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986122512U JPH0734924Y2 (ja) 1986-08-09 1986-08-09 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986122512U JPH0734924Y2 (ja) 1986-08-09 1986-08-09 イオン源

Publications (2)

Publication Number Publication Date
JPS6330350U true JPS6330350U (US06650917-20031118-M00005.png) 1988-02-27
JPH0734924Y2 JPH0734924Y2 (ja) 1995-08-09

Family

ID=31012767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986122512U Expired - Lifetime JPH0734924Y2 (ja) 1986-08-09 1986-08-09 イオン源

Country Status (1)

Country Link
JP (1) JPH0734924Y2 (US06650917-20031118-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046272A (ja) * 1990-04-25 1992-01-10 Hitachi Ltd イオンビームスパッタリング装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645600A (en) * 1979-09-19 1981-04-25 Hitachi Ltd Perforated ion source assembly* adjustment* and device therefor
JPS58108699A (ja) * 1981-12-21 1983-06-28 株式会社日立製作所 中性粒子入射装置用イオン源の電極組立方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645600A (en) * 1979-09-19 1981-04-25 Hitachi Ltd Perforated ion source assembly* adjustment* and device therefor
JPS58108699A (ja) * 1981-12-21 1983-06-28 株式会社日立製作所 中性粒子入射装置用イオン源の電極組立方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046272A (ja) * 1990-04-25 1992-01-10 Hitachi Ltd イオンビームスパッタリング装置

Also Published As

Publication number Publication date
JPH0734924Y2 (ja) 1995-08-09

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