JPS6329967U - - Google Patents
Info
- Publication number
- JPS6329967U JPS6329967U JP12279186U JP12279186U JPS6329967U JP S6329967 U JPS6329967 U JP S6329967U JP 12279186 U JP12279186 U JP 12279186U JP 12279186 U JP12279186 U JP 12279186U JP S6329967 U JPS6329967 U JP S6329967U
- Authority
- JP
- Japan
- Prior art keywords
- reflection mirror
- partial reflection
- excimer laser
- oscillator
- laser oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12279186U JPS6329967U (en:Method) | 1986-08-07 | 1986-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12279186U JPS6329967U (en:Method) | 1986-08-07 | 1986-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329967U true JPS6329967U (en:Method) | 1988-02-27 |
Family
ID=31013313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12279186U Pending JPS6329967U (en:Method) | 1986-08-07 | 1986-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329967U (en:Method) |
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1986
- 1986-08-07 JP JP12279186U patent/JPS6329967U/ja active Pending