JPS6329958U - - Google Patents

Info

Publication number

JPS6329958U

JPS6329958U JP12367386U JP12367386U JPS6329958U JP S6329958 U JPS6329958 U JP S6329958U JP 12367386 U JP12367386 U JP 12367386U JP 12367386 U JP12367386 U JP 12367386U JP S6329958 U JPS6329958 U JP S6329958U

Authority

JP

Japan

Prior art keywords

sputtering

deposited

layers

base layer

integrated circuit

Prior art date

1986-08-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
• 229910052719 titanium Inorganic materials 0.000 claims description 3
• 239000010936 titanium Substances 0.000 claims description 3
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
• 239000010931 gold Substances 0.000 claims description 2
• 229910052737 gold Inorganic materials 0.000 claims description 2
• 229910001120 nichrome Inorganic materials 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 238000004544 sputter deposition Methods 0.000 claims 3
• 238000000151 deposition Methods 0.000 claims 1
• 239000003990 capacitor Substances 0.000 description 2
• 239000010409 thin film Substances 0.000 description 1