JPS6329945U - - Google Patents

Info

Publication number
JPS6329945U
JPS6329945U JP12412286U JP12412286U JPS6329945U JP S6329945 U JPS6329945 U JP S6329945U JP 12412286 U JP12412286 U JP 12412286U JP 12412286 U JP12412286 U JP 12412286U JP S6329945 U JPS6329945 U JP S6329945U
Authority
JP
Japan
Prior art keywords
semiconductor
container
cartridge
view
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12412286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12412286U priority Critical patent/JPS6329945U/ja
Publication of JPS6329945U publication Critical patent/JPS6329945U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP12412286U 1986-08-13 1986-08-13 Pending JPS6329945U (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12412286U JPS6329945U (US06653308-20031125-C00199.png) 1986-08-13 1986-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12412286U JPS6329945U (US06653308-20031125-C00199.png) 1986-08-13 1986-08-13

Publications (1)

Publication Number Publication Date
JPS6329945U true JPS6329945U (US06653308-20031125-C00199.png) 1988-02-27

Family

ID=31015846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12412286U Pending JPS6329945U (US06653308-20031125-C00199.png) 1986-08-13 1986-08-13

Country Status (1)

Country Link
JP (1) JPS6329945U (US06653308-20031125-C00199.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JP2009182332A (ja) * 2008-01-30 2009-08-13 Asm Internatl Nv ウェハボート

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JP2009182332A (ja) * 2008-01-30 2009-08-13 Asm Internatl Nv ウェハボート

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