JPS6329942U - - Google Patents
Info
- Publication number
- JPS6329942U JPS6329942U JP12332386U JP12332386U JPS6329942U JP S6329942 U JPS6329942 U JP S6329942U JP 12332386 U JP12332386 U JP 12332386U JP 12332386 U JP12332386 U JP 12332386U JP S6329942 U JPS6329942 U JP S6329942U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum
- exhaust system
- semiconductor manufacturing
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12332386U JPS6329942U (enExample) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12332386U JPS6329942U (enExample) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329942U true JPS6329942U (enExample) | 1988-02-27 |
Family
ID=31014320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12332386U Pending JPS6329942U (enExample) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329942U (enExample) |
-
1986
- 1986-08-13 JP JP12332386U patent/JPS6329942U/ja active Pending
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