JPS6329933U - - Google Patents
Info
- Publication number
- JPS6329933U JPS6329933U JP12359886U JP12359886U JPS6329933U JP S6329933 U JPS6329933 U JP S6329933U JP 12359886 U JP12359886 U JP 12359886U JP 12359886 U JP12359886 U JP 12359886U JP S6329933 U JPS6329933 U JP S6329933U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- etching rate
- lower electrode
- upper electrode
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 2
- 230000005684 electric field Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12359886U JPS6329933U (enExample) | 1986-08-12 | 1986-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12359886U JPS6329933U (enExample) | 1986-08-12 | 1986-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329933U true JPS6329933U (enExample) | 1988-02-27 |
Family
ID=31014848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12359886U Pending JPS6329933U (enExample) | 1986-08-12 | 1986-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329933U (enExample) |
-
1986
- 1986-08-12 JP JP12359886U patent/JPS6329933U/ja active Pending
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