JPS6329932U - - Google Patents

Info

Publication number
JPS6329932U
JPS6329932U JP12331586U JP12331586U JPS6329932U JP S6329932 U JPS6329932 U JP S6329932U JP 12331586 U JP12331586 U JP 12331586U JP 12331586 U JP12331586 U JP 12331586U JP S6329932 U JPS6329932 U JP S6329932U
Authority
JP
Japan
Prior art keywords
load section
electrodes
plasma
capacitor
matching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12331586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12331586U priority Critical patent/JPS6329932U/ja
Publication of JPS6329932U publication Critical patent/JPS6329932U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Drying Of Semiconductors (AREA)
JP12331586U 1986-08-13 1986-08-13 Pending JPS6329932U (US06582424-20030624-M00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12331586U JPS6329932U (US06582424-20030624-M00016.png) 1986-08-13 1986-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12331586U JPS6329932U (US06582424-20030624-M00016.png) 1986-08-13 1986-08-13

Publications (1)

Publication Number Publication Date
JPS6329932U true JPS6329932U (US06582424-20030624-M00016.png) 1988-02-27

Family

ID=31014304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12331586U Pending JPS6329932U (US06582424-20030624-M00016.png) 1986-08-13 1986-08-13

Country Status (1)

Country Link
JP (1) JPS6329932U (US06582424-20030624-M00016.png)

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