JPS63296882A - Inner-circumference washer for closed-end tubular body - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to an apparatus for cleaning the inner periphery of a quartz electric furnace used in a part of the manufacturing process of semiconductor wafers.

Conventional technology The electric furnace used as part of the semiconductor wafer manufacturing process is a relatively long tubular body, and in the old days it was laid horizontally.
Cleaning was done using a cleaning tool with a handle that was approximately the same length as the length of the pipe, but since cleaning in this way required a relatively large work area, the next generation
Patent Application No. 45066 filed in 1982 (Patent Application No. 45066) published an invention in which the pipe body is installed vertically, a nozzle head from which cleaning liquid is spouted from the upper opening is suspended, and the nozzle head is moved up and down to perform cleaning work. 1982-190281) and 1982 Patent Application No. 45067 (JP-A-60-190)
There is a prior art (No. 282).

Problems to be Solved The object to be cleaned using the above-mentioned prior art is a completely cylindrical body with both ends open. Therefore, the nozzle head for spraying the cleaning liquid is suspended from the upper opening, and the sprayed cleaning liquid is suspended from the upper opening. After cleaning, the liquid could be discharged from the lower opening after flowing along the inner periphery of the furnace, but the usage of this electric furnace and its equipment have changed over time. Modern quartz tube electric furnaces are converting to the form of a cylinder with a hemispherical bottom. It is not possible to wash an object to be cleaned whose shape has changed in this way using the prior art methods and devices described above.

Means for Solving the Problems In view of the above-mentioned matters, the present invention relates to a device for cleaning the inner periphery of the latest quartz tube electric furnace having the shape described above or a bottomed tubular body having the shape.

A plurality of horizontal axes protrude horizontally and radially from a central base that rotates horizontally around a vertical axis at equal angles, and a plurality of injection holes are provided for injecting a plurality of cleaning liquids directed upward onto each horizontal axis. The nozzle heads formed in this way are installed so that each of the nozzle heads can rotate vertically within a range of 180 degrees above the horizontal position, and all the nozzle heads formed in this way It is constructed so that the bottomed tube body, which is the object to be cleaned, can be covered and engaged with the bottomed tube body facing down with its bottom portion facing upward.

Embodiment Next, an embodiment of the present invention will be described with reference to the drawings.The bottomed pipe body (1) to be washed is turned upside down, and an upper plate (2) with a drainage facility is installed in which the opening can be installed. A vertical shaft (4) is passed through the bearing (3) and connected to the upper plate (2) and a rotation source (5) such as a motor installed at the bottom to obtain rotational movement. (2) A central base (6) is fixed to the second protruding part, and a plurality of horizontal axes (7) are radially aligned horizontally from the outer periphery of the central base (6) at equal angles. A nozzle head (8) is installed on each of the horizontal shafts (7). A plurality of injection holes (9) are opened on the upper surface of this nozzle head (8), and each injection hole (9) has the above-mentioned vertical axis (4), central base (6) and horizontal axis (7). A cleaning liquid supply path (10) passing through is provided and connected to a supply source QD at its base end.

The nozzle head (8) having the injection hole (9) rotates at a minimum rotation angle of 90 degrees from the horizontal position to the vertical position with the horizontal axis (7) as its center. is rotated back and forth within an arbitrarily set angle range up to the maximum rotation angle. There are a plurality of embodiments of the configuration for rotating.

Embodiment 1 A diagonal cam a (30) is recessed on the outer surface of the nozzle head (8), and a pin (31) to be engaged with the cam groove (30) is attached to the vertical shaft (4). The outer tube (32) is attached to the arm (32) connected to the vertical shaft (4).
Slide it to move it up and down.

Embodiment 2 A nozzle head (8) and a horizontal shaft (7) are fixed, and the horizontal shaft (7) is rotatably supported at the edge of the central base (6), and each horizontal shaft (7) is The bevel gear (33) provided at the end meshes with the bevel gear (34) provided on the rotating shaft of the motor (35) installed on the upper part of the central base (6), and the bevel gear (33) meshes with the motor (35). ) to transmit power.

Embodiment 3 As in Embodiment 2, one link (37) is attached to the rotary shaft of the motor (35) via a crank (36), with the gears (33) meshing with each horizontal shaft (7). The nozzle head (8) is freely pivotally supported by a shaft (38) to transmit the swing motion to the nozzle head (8).

Embodiment 4 (not shown) Similar to Embodiment 2, the bevel gears (33) of each horizontal shaft (7) are engaged, and the motor (35) is placed at a position corresponding to one horizontal shaft (7). The gears fixed to the central base (6) and fixed to the rotating shaft of the motor (35) and the horizontal shaft (7) are engaged with each other.

Embodiment 5 (not shown) A horizontal shaft (7) that is fixed to each nozzle head (8) and has a gear installed in the middle is rotatably supported by the central base (6), and a gear that meshes with the gear. Each of the motors (35) having a rotating shaft equipped with a motor (35) is fixed to the central base (6).

The present invention configured as described in ``2'' has the object to be cleaned (1) of the bottom pipe body resting face down on the top plate (2) so as to cover the entire cleaning device of the present invention. A cleaning action can be performed by uniformly spraying the cleaning liquid over the entire inner circumference.

That is, the cleaning device inside the object to be cleaned (1) has a plurality of nozzle heads (8) that are arranged at the same time around the central base (6).
The minimum rotation angle is 90 degrees from the horizontal position to the vertical position, with the horizontal axis (7) that supports the nozzle head (8) as the axial center position. The maximum rotation angle is 180 degrees,
It can reciprocate on a vertical plane within a set angle within the range from the minimum rotation angle to the maximum rotation angle, and the injection hole (
9) The cleaning liquid sprayed from the body to be cleaned (which is a bottomed tube body)
Since the entire surface area of the inner surface of 1) is evenly pressed, the attached dirt is washed away, flows down and falls onto the upper plate (2), and is discharged to the appropriate place from the drainage section provided. It is something that will be done.

Effects The first purpose of this invention is to clean the inner periphery of a bottomed tube.
If the bottom is placed downward as a matter of common sense, the cleaning liquid naturally exhibits a stagnation form, and the dirt removal and cleaning effect can be expected only when the pressure fluid is jetted, so if the cleaning liquid causes a stagnation phenomenon, Since the jetting action is inhibited, the force-bottomed tube must be installed upside down with its opening at the bottom end. Under this reversed installation situation, the washing liquid in the form of pressurized fluid is applied from the built-in washing device. The washing body (1) is characterized by being able to spray and wash the entire inner circumferential area of the washing body (1) without wasting any space, and also to be able to carry out the washing work without allowing any residual cleaning liquid to remain after washing due to the laws of nature. It is something.

[Brief explanation of the drawing]

Fig. 1 is an overall front view, Fig. 2 is an enlarged plan view of the device, Fig. 3 is a side view of Fig. 2, and Fig. 4 is a partially cutaway plan schematic diagram for explaining embodiment 2. , FIG. 5 is a partially cutaway schematic plan view for explaining the third embodiment. (])...Object to be cleaned (4)...Vertical axis, (6)...
...Central base, (7)...Horizontal axis, (8)...To nozzle/nod, (9)...Injection hole.

Claims (1)

[Claims] A plurality of horizontal axes protrude horizontally and radially from a central base that rotates horizontally around a vertical axis at equal angles, and a plurality of injection holes are provided for injecting a plurality of cleaning liquids directed upward onto each horizontal axis. The nozzle heads formed in this way are installed so that each of the nozzle heads can rotate vertically within a range of 180 degrees above the horizontal position, and all the nozzle heads formed in this way 1. A device for cleaning the inner periphery of a bottomed tubular body, characterized in that the bottomed tubular body, which is an object to be cleaned, can be covered and engaged with the bottomed tubular body in a face down state with its bottom facing up.