JPS63293413A - Encoder - Google Patents

Encoder

Info

Publication number
JPS63293413A
JPS63293413A JP13069987A JP13069987A JPS63293413A JP S63293413 A JPS63293413 A JP S63293413A JP 13069987 A JP13069987 A JP 13069987A JP 13069987 A JP13069987 A JP 13069987A JP S63293413 A JPS63293413 A JP S63293413A
Authority
JP
Japan
Prior art keywords
track
signal
significant bit
absolute
bit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13069987A
Other languages
Japanese (ja)
Other versions
JPH0640012B2 (en
Inventor
Akira Ishizuka
公 石塚
Tetsuji Nishimura
西村 哲治
Masaaki Tsukiji
築地 正彰
Satoru Ishii
哲 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13069987A priority Critical patent/JPH0640012B2/en
Priority to DE19873737278 priority patent/DE3737278A1/en
Priority to GB8725680A priority patent/GB2197146B/en
Publication of JPS63293413A publication Critical patent/JPS63293413A/en
Priority to US07/759,950 priority patent/US5129725A/en
Publication of JPH0640012B2 publication Critical patent/JPH0640012B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To detect the absolute quantity of displacement such as the rotation and movement of a body to be detected with high resolution by arranging a track for the least significant digit bit and a track for a 2nd following lower- order bit at a maximum distance. CONSTITUTION:The outermost peripheral track 21 of a code part 1C for absolute signal generation is used as the track for the least significant digit bit which generates a least-significant digit bit signal and the track 22 for the 2nd following lower-order digit bit which generates a following lower-order digit bit signal is provided at the innermost periphery so that they are at the maximum distance from each other. Consequently, the incidence deviation of luminous flux when luminous flux is made incident linearly on the code part 1C to generate the absolute signal, i.e. the inclination from the direction crossing the rotating direction of a rotary disk at right angles, e.g. an error in readout timing when the luminous flux is incident slantingly is reduced to minimize a decrease in detection accuracy. Consequently, the absolute quantity of the displacement such as the rotation and movement of the object body is detected with high resolution.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は被測定物体の回転状態や移動状態等の変位を測
定するエンコーダに関し、特に被測定物体に設けたビッ
ト信号を発生させる為の2進符号化したコートより成る
トラックを複数設けたトラック部の該トラックの配置を
適切に設定することにより、該トラック部に入射させた
光束より電気的なデータを得、これより特に該被測定物
体の絶対的な変位状態を高精度に求める際に好適なエン
コータに関するものである。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to an encoder for measuring the displacement of an object to be measured such as its rotational state or moving state, and particularly relates to an encoder for measuring the displacement of an object to be measured, such as a rotating state or a moving state. By appropriately setting the arrangement of the tracks of a track section having a plurality of tracks consisting of a base-coded coat, electrical data can be obtained from the light beam incident on the track section, and from this, especially the object to be measured can be obtained. The present invention relates to an encoder suitable for obtaining the absolute displacement state of a with high accuracy.

(従来の技術) 従来より被測定物体の回転、移動、位置等の検出や回転
機構の回転量、回転速度等の検出を行う測定装置として
充電的なエンコーダが多く利用されている。
(Prior Art) Rechargeable encoders have conventionally been widely used as measuring devices for detecting the rotation, movement, position, etc. of an object to be measured, and for detecting the rotation amount, rotation speed, etc. of a rotating mechanism.

第4図は従来の被測定物体の変位状態の絶対量を測定す
る為の所謂アブソリュート型のエンコーダの一例を示す
概略図である。同図において51は回転軸50を中心に
回転する回転円板であり、該回転円板51上には任意の
(量子化された)角度位置に応じて2値化したデータ要
素を発生させるべく同心円状に複数のトラック56が設
けられている。そして各トラック56には光学的に2値
化されたデータ、例えば透過領域と不透過領域より成る
複数のスリット52が設けられている。
FIG. 4 is a schematic diagram showing an example of a conventional absolute type encoder for measuring the absolute amount of the displacement state of an object to be measured. In the same figure, 51 is a rotating disk that rotates around the rotation axis 50, and on the rotating disk 51, binary data elements are generated according to arbitrary (quantized) angular positions. A plurality of tracks 56 are provided concentrically. Each track 56 is provided with optically binarized data, for example, a plurality of slits 52 each consisting of a transparent area and a non-transparent area.

53は固定スリット列であり各トラック56上に設けた
スリットから選択的に光束を通過させる為に複数の開口
を有している。54は複数の投光素子を有する投光手段
、55は複数の受光素子を有する受光手段であり、両手
段は回転円板51及び固定スリット列53を挟んで各投
光素子と各受光素子が各々該固定スリット列53の各開
口に各々対応するように配置されている。
A fixed slit array 53 has a plurality of openings for selectively passing the light beam from the slits provided on each track 56. 54 is a light projecting means having a plurality of light projecting elements, and 55 is a light receiving means having a plurality of light receiving elements. They are arranged so as to correspond to each opening of the fixed slit row 53, respectively.

同図に示す構成において受光手段55には投光手段54
の各投光素子から放射される光束がスリット52及び固
定スリット53を通過して入射してくる。このとき各受
光素子の出力信号の組合せから回転円板51の絶対回転
位置を求めている。
In the configuration shown in the figure, the light receiving means 55 includes a light projecting means 54.
The luminous flux emitted from each light projecting element passes through the slit 52 and the fixed slit 53 and enters. At this time, the absolute rotational position of the rotating disk 51 is determined from the combination of output signals of each light receiving element.

一般に投光手段54からの光束を直接若しくは光学系を
介して回転円板51上のトラック56に線状に照射する
場合には回転円板51の回転方向と直交する方向に線状
に照射するのが精度上好ましい。
Generally, when the light beam from the light projecting means 54 is linearly irradiated onto the track 56 on the rotating disk 51 directly or via an optical system, it is linearly irradiated in a direction perpendicular to the direction of rotation of the rotating disk 51. is preferable in terms of accuracy.

しかしながら何らかの原因で光束を傾いて照射□した場
合には各々トラックのうち最も離れた2つのトラック間
の情報の読み取りのタイミングが最も大きくずれてくる
However, if the light beam is irradiated at an angle for some reason, the timing of reading information between the two tracks that are farthest apart from each other will be most deviated.

一般にロータリーエンコーダーやリニアエンコーダー等
におけるトラックの所謂グレイ2進コードパターンは上
位ビット(Most 51gn1ficant[1it
 )信号を発生させるトラックから下位ビット(Lea
st 51gn1ficant Bit )信号を発生
させるトラックへと内周から外周若しくは片側から他の
側にかけて、又はその逆に順次配列されている。即ちト
ラックの両端が最下位ビット用トラックと最上位ビット
用トラックとなっている。
In general, the so-called gray binary code pattern of tracks in rotary encoders, linear encoders, etc.
) signal from the track that generates the lower bit (Lea
They are arranged sequentially from the inner circumference to the outer circumference or from one side to the other, or vice versa, from the track that generates the st51gn1ficant Bit ) signal. That is, both ends of the track are a track for the least significant bit and a track for the most significant bit.

この場合最上位ビット用トラックは1回転当りのビット
信号の変化が少ないから情報の読み取りタイミングがず
れているか否かを判断するのが非常に難しくなり、この
為測定積度を大きく低下させる一原因となっている。
In this case, since the bit signal of the track for the most significant bit changes little per revolution, it becomes extremely difficult to determine whether or not the timing of reading information is off, which is one of the causes of a large drop in measurement accuracy. It becomes.

(発明が解決しようとする問題点) 本発明はビット信号発生用パターンを設けた複数のトラ
ックより成るトラック部を被検物体上に設ける際、それ
らのトラックの配置を適切に設定することにより、トラ
ック部に入射させる線状光束が被検出物体の移動方向と
直交する方向と多少類いて入射しても被検出物体の回転
や移動等の変位の絶対量を高分解能で検出することので
きるエンコーダの提供を目的とする。
(Problems to be Solved by the Invention) When the present invention provides a track portion consisting of a plurality of tracks provided with a bit signal generation pattern on an object to be inspected, by appropriately setting the arrangement of the tracks, An encoder that can detect with high resolution the absolute amount of displacement such as rotation or movement of an object to be detected even if the linear light beam incident on the track section is incident in a direction somewhat orthogonal to the direction of movement of the object to be detected. The purpose is to provide.

(問題点を解決するための手段) 被測定物体に連絡したビット信号を発生させる複数のト
ラックを有するトラック部に光束を入射させ、該トラッ
ク部からの光信号を得て、該被検物体の変位状態を検出
するエンコーダにおいて、該トラック部の複数のトラッ
クのうち最下位ビット信号を発生させる最下位ビット用
トラックとその次の下位のビット信号を発生させる第2
下位ビット用トラックとを最も離して配置したことであ
る。
(Means for solving the problem) A light beam is made incident on a track section having a plurality of tracks that generate bit signals connected to the object to be measured, and an optical signal from the track section is obtained. In an encoder that detects a displacement state, among a plurality of tracks of the track unit, a least significant bit track generates a least significant bit signal, and a second least significant bit track generates the next least significant bit signal.
The reason is that the lower bit track is placed farthest away from the lower bit track.

(実施例) 第1図は本発明をロータリーエンコーダに適用したとき
の一実施例の光学系の概略図である。同図において1は
回転用のチャート板であり不図示の被測定物体に連結さ
れている。IAはインクリメンタル信号を発生させる為
の格子部であり、チャート板1の外周部に回転軸10を
中心に放射状上に規則的に配列されている。2Aは読み
取り装置で格子部IAを介してインクリメンタル信号を
得ている。
(Embodiment) FIG. 1 is a schematic diagram of an optical system of an embodiment when the present invention is applied to a rotary encoder. In the figure, reference numeral 1 denotes a rotating chart plate connected to an object to be measured (not shown). IA is a grid section for generating incremental signals, and is regularly arranged radially around the rotation axis 10 on the outer periphery of the chart board 1. 2A is a reading device which obtains incremental signals via the grid section IA.

1Bは必要に応じて設けられる基準位置信号を得る為の
基準位置格子部であり、格子部IAの内側に隣接して設
けられている。2Bは読み取り装置であり基準位置格子
部IBを介して基準位置信号を得ている。ICはアブソ
リュート信号を得る為の符号部であり、透過部と遮光部
による2進数のコードより成り、基準位置格子部IBの
内側に隣接して設けられている。2Cは読み取り装置で
あり、符号部ICを介してアブソリュート信号を得てい
る。Lは光束、3Aは反射手段でありチャート板1上の
格子部IAに入射し、回折してきた回折光を元の位置に
入射させるべく反射させている。
Reference numeral 1B denotes a reference position grid section for obtaining a reference position signal, which is provided as needed, and is provided adjacent to the inside of the grid section IA. 2B is a reading device which obtains a reference position signal via the reference position grid section IB. The IC is a code section for obtaining an absolute signal, and is composed of a binary code formed by a transmitting section and a light shielding section, and is provided adjacent to the inside of the reference position grid section IB. 2C is a reading device, which obtains an absolute signal via the code section IC. L is a luminous flux, and 3A is a reflecting means, which reflects the diffracted light that is incident on the grating section IA on the chart board 1 and diffracted so as to be incident on the original position.

本実施例ではチャート板1上の各々の格子部に入射させ
た光束の直接反射光、直接透過光若しくは反射又は透過
の回折光を各々の読み取り装置により検出することによ
り、各々所定の信号を得ている。
In this embodiment, each predetermined signal is obtained by detecting the directly reflected light, the directly transmitted light, or the reflected or transmitted diffracted light of the light beam incident on each grating portion on the chart board 1 using each reading device. ing.

例えば光源からの光束をチャート板1上の格子部IAに
入射させ、格子部IAからの透過光束を検出し、このと
きの周期数を計数したり、若しくは格子部IAから生ず
る2つの回折光を互いに干渉させて干渉縞を形成し、こ
のときの干渉縞の明暗を計数することにより被測定物体
の回転状態を求めている。
For example, a light beam from a light source is made incident on the grating part IA on the chart board 1, a transmitted light beam from the grating part IA is detected, and the number of periods at this time is counted, or two diffracted lights generated from the grating part IA are detected. They interfere with each other to form interference fringes, and the rotational state of the object to be measured is determined by counting the brightness and darkness of the interference fringes.

第2図は第1図の符号部IC部分のみを示す説明図であ
る。本実施例では最外周のトラック21を最下位ビット
信号を発生させる最下位ビット用トラックとし、その次
の下位のビット信号を発生させる第2下位ビット用トラ
ック22を最内周に設け、双方のトラックを最も離して
配置している。これにより符号部ICに光束を線状入射
させアブソリュート信号を得る際の光束の入射ずれ、即
ち回転円板の回転方向と直交する方向からの傾き、例え
ば同図の点線で示すように光束が傾いて入射したときの
読み取りタイミング誤差を少なくし、検出精度の低下が
最も少なくなるようにしている。
FIG. 2 is an explanatory diagram showing only the code part IC portion of FIG. 1. In this embodiment, the outermost track 21 is used as the least significant bit track that generates the least significant bit signal, and the second least significant bit track 22 that generates the next least significant bit signal is provided on the innermost circumference. Tracks are placed farthest apart. As a result, when the luminous flux is linearly incident on the code part IC and an absolute signal is obtained, the incidence deviation of the luminous flux, that is, the inclination from the direction perpendicular to the rotating direction of the rotating disk, for example, the inclination of the luminous flux as shown by the dotted line in the same figure. This reduces the read timing error when the light is incident on the sensor, thereby minimizing the drop in detection accuracy.

第3図(A) 、 (B)は各々最下位ビット用トラッ
ク21と第2下位ビット用トラック22を読み取り装置
2Cで読み取ったときの出力信号の説明図である。同図
(A)は最下位ビット用トラック21からの出力信号、
同図(B)は第2下位ビット用トラックからの出力信号
である。
FIGS. 3A and 3B are explanatory diagrams of output signals when the least significant bit track 21 and the second least significant bit track 22 are read by the reading device 2C, respectively. The figure (A) shows the output signal from the least significant bit track 21,
FIG. 2B shows an output signal from the second lower bit track.

第3図(A) 、 (B)において実線は正常な状態、
即ち光束が符号部ICの回転方向と直交して入射し、か
つ隣接しているトラックからの光束が混入していないと
きの出力信号である。又、破線は光束が符号部ICの回
転方向と直交する方向から傾いて入射したときの出力信
号である。
In Figures 3 (A) and (B), the solid lines indicate the normal state;
That is, this is an output signal when the light beam is incident perpendicularly to the rotational direction of the code section IC and no light beam from an adjacent track is mixed. Moreover, the broken line is an output signal when the light beam is incident obliquely from a direction perpendicular to the rotation direction of the code section IC.

尚、一点鎖線は出力信号を1.0の2進数に変換する際
の基準レベル値であり、この基準レベル値と交差するタ
イミングで出力信号値を反転させて2進数を得ている。
The one-dot chain line is a reference level value when converting the output signal into a binary number of 1.0, and the output signal value is inverted at the timing of crossing this reference level value to obtain the binary number.

第3図(A)、(B)に示すように最外周の最下位ビッ
ト用トラックと最内周の第2下位ビット用トラックは読
み取りタイミングのずれが矢印に示すように互いに逆向
きに生じるので双方のずれは最大となる。
As shown in FIGS. 3(A) and 3(B), the reading timing difference between the outermost track for the least significant bit and the innermost track for the second least significant bit occurs in opposite directions as shown by the arrows. The deviation between the two is maximum.

この為、本実施例では読み取りタイミングの変化の大き
い双方のずれを利用して、このときのずれか最少となる
ように符号部ICへの光束の入射状態を調整することに
より、同時に他のビット信号発生用のトラックとのずれ
及び他のトラック間の相互差をそれ以下におさえ、これ
により高精度な検出を可能としている。
For this reason, in this embodiment, by making use of the deviation between the two sides that have a large change in reading timing, and adjusting the incident state of the light flux to the code section IC so as to minimize the deviation at this time, other bits can be read at the same time. The deviation from the signal generation track and the mutual difference between other tracks are suppressed to less than this, thereby enabling highly accurate detection.

尚、本実施例において最内周に最下位ビット用トラック
21を配置し、最外周に第2下位ビット用トラックを配
置しても良い。
In this embodiment, the least significant bit track 21 may be placed on the innermost circumference, and the second least significant bit track 21 may be placed on the outermost circumference.

又、本実施例はそのままリニアエンコーダに適用するこ
とができる。
Further, this embodiment can be applied as is to a linear encoder.

(発明の効果) 本発明によれば複数のトラックのうち最下位ビット用ト
ラックとその次の下位の第2下位ビット用トラックとを
最も離して配置し、双方のトラックからの出力信号値を
単に調整することにより、装置の相互組立が容易となり
被検物体への光束の入射位置誤差を軽減することが出来
、高精度、高分解能のエンコーダ、特に高精度なアブソ
リュートエンコーダを達成することができる。
(Effects of the Invention) According to the present invention, the track for the least significant bit and the track for the second least significant bit, which is the next lower order, are arranged farthest among the plurality of tracks, and the output signal values from both tracks are simply By adjusting, mutual assembly of the devices becomes easy and errors in the incident position of the light beam on the object to be measured can be reduced, and a highly accurate and high resolution encoder, especially a highly accurate absolute encoder, can be achieved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明をロータリーエンコーダに適用したとき
の一実施例の概略図、第2図は第1図の一部分の説明図
、第3図(A) 、 (B)は第1図の実施例から得ら
れる出力信号の説明図である。第4図は従来のエンコー
ダの説明図である。 図中、1はチャート板、IAはインクリメンタル信号発
生用の格子部、IBは基準位置格子部、ICはアブソリ
ュート信号発生用の符号部、2A、2B、2Cは読み取
り装置、3Aは反射手段、10は回転軸、21は最下位
ビット用トラック、22は第2下位ピット用トラック、
23は入射光束である。 第  1   図 (A) (B) 夷  4  口
FIG. 1 is a schematic diagram of an embodiment when the present invention is applied to a rotary encoder, FIG. 2 is an explanatory diagram of a part of FIG. 1, and FIGS. 3 (A) and (B) are implementations of FIG. 1. FIG. 3 is an illustration of the output signal obtained from the example. FIG. 4 is an explanatory diagram of a conventional encoder. In the figure, 1 is a chart board, IA is a grid section for generating incremental signals, IB is a reference position grid section, IC is a code section for generating absolute signals, 2A, 2B, and 2C are reading devices, 3A is a reflecting means, and 10 is a rotating shaft, 21 is a track for the lowest bit, 22 is a track for the second lower pit,
23 is an incident light beam. Figure 1 (A) (B) 夷 4 口

Claims (1)

【特許請求の範囲】[Claims] (1)被測定物体に連絡したビット信号を発生させる複
数のトラックを有するトラック部に光束を入射させ、該
トラック部からの光信号を得て、該被検物体の変位状態
を検出するエンコーダにおいて、該トラック部の複数の
トラックのうち最下位ビット信号を発生させる最下位ビ
ット用トラックとその次の下位のビット信号を発生させ
る第2下位ビット用トラックとを最も離して配置したこ
とを特徴とするエンコーダ。
(1) In an encoder that makes a light beam enter a track section having a plurality of tracks that generate bit signals connected to the object to be measured, obtains an optical signal from the track section, and detects the displacement state of the object to be measured. , characterized in that among the plurality of tracks of the track section, a least significant bit track that generates the least significant bit signal and a second least significant bit track that generates the next least significant bit signal are arranged most apart. encoder.
JP13069987A 1986-11-04 1987-05-27 Encoder Expired - Lifetime JPH0640012B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13069987A JPH0640012B2 (en) 1987-05-27 1987-05-27 Encoder
DE19873737278 DE3737278A1 (en) 1986-11-04 1987-11-03 METHOD AND DEVICE FOR OPTICALLY DETECTING THE POSITION OF AN OBJECT
GB8725680A GB2197146B (en) 1986-11-04 1987-11-03 An encoder for detecting the displacement of an object to be measured
US07/759,950 US5129725A (en) 1986-11-04 1991-09-17 Method of optically detecting position of object and position detecting apparatus using the method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13069987A JPH0640012B2 (en) 1987-05-27 1987-05-27 Encoder

Publications (2)

Publication Number Publication Date
JPS63293413A true JPS63293413A (en) 1988-11-30
JPH0640012B2 JPH0640012B2 (en) 1994-05-25

Family

ID=15040505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13069987A Expired - Lifetime JPH0640012B2 (en) 1986-11-04 1987-05-27 Encoder

Country Status (1)

Country Link
JP (1) JPH0640012B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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