JPS63292636A - Apparatus for opening of plastic mold seal - Google Patents

Abstract

PURPOSE:To prevent a peripheral environment from being contaminated by providing generated gas treating means for adsorbing or decomposing generated gas generated from waste liquid used to open a plastic mold seal with generated gas treatment agent. CONSTITUTION:Generated gas treatment agent of adsorbent, such as liquid or solid active charcoal or catalyst, such as palladium, platinum is stored in advance in a generated treating gas tank 25. Accordingly, generated gas generated from waste liquid fed through a pipe 57 connected to a neutralization tank 55, generated gas generated from chemical or waste liquid fed through pipes 29H, 59 of a chemical reservoir 29 and generated gas generated from chemical through a pipe 15 connected to a reagent jar 13 and a pipe 23 are all fed to the tank 25. The gases fed to the tank 25 are dissolved, adsorbed or decomposed by a generated gas treatment agent to render it nondetrimental.

Description

[Detailed Description of the Invention] [Purpose of the Invention] (Industrial Application Field) The present invention melts and removes a part of a plastic mold of a semiconductor chip, a capacitor, a hybrid IC, etc. sealed with plastic, and is used for failure analysis. This is a plastic mold opening device that can be used for inspection and quality checking, and particularly relates to an opening device for treating toxic gases generated from chemical solutions or waste liquids used in the opening process.

(Prior art) Conventionally, an unsealing device that mainly uses concentrated sulfuric acid or fuming nitric acid as a chemical solution is used to dissolve and remove a part of a plastic mold such as a semiconductor chip, a capacitor, or a hybrid IC sealed in plastic. has been developed and used.

When unsealing a plastic molded specimen using these plastic mold opening devices, the chemical solution is temporarily stored in a chemical storage tank and then sent to the unsealing device. A plastic-molded specimen such as a semiconductor chip is set in an unsealing section, and the specimen is unsealed using a chemical solution sent to an unsealing processing device.

The chemical liquid used in the unsealing processing device is temporarily stored as waste liquid in a waste liquid storage tank via a waste liquid discharge device.

(Problems to be Solved by the Invention) By the way, toxic gas is generated from waste liquid, and the system has not been designed to completely dispose of the generated gas.

In addition, in order to prevent the release of toxic gases, for example, concentrated F
In the case of a-acid, it is disposed of after being cooled to about room temperature.

There are problems in that the surrounding environment is contaminated by toxic and corrosive gases generated from the waste liquid, and other equipment is damaged.

The purpose of the present invention is to improve the above-mentioned problems by treating corrosive gases generated from chemical liquids or waste liquids so as not to release them into the atmosphere, thereby preventing pollution of the surrounding environment and damage to other equipment. The purpose of this invention is to provide a Plus Deck mold opening device.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention provides a plastic-molded container that is pre-filled in the opening part with a chemical solution sent from a chemical solution supply means. A plastic comprising a processing means for unsealing a sample, a waste liquid discharging means for discharging the chemical solution used in the unsealing process as waste liquid, and a generated gas processing means for processing the gas generated from the chemical liquid or waste liquid. This is a mold opening device.

(Function) By employing the plastic mold opening device of the present invention, the chemical solution used in the opening process, for example, by the opening process means, is discharged from the waste liquid outlet 4J+output means to, for example, the neutralization process device 11. The generated scum generated from the waste liquid is sent to the generated gas processing means. Within the generated gas treatment means, the generated gas is dissolved, adsorbed, or decomposed by the generated gas treatment agent, rendered harmless, and exhausted. Therefore, the surrounding environment is not contaminated and other equipment is not damaged.

(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

Referring to FIG. 1, a plastic mold opening device 1
For example, a chemical solution supplying means 3 consisting of a reagent bottle containing a chemical solution such as fuming nitric acid or Fuchisulfur M is used, and a chemical solution is transmitted from the chemical solution supplying means 3 to unseal the specimen PM molded in a plus deck. an unsealing processing means 5, a waste liquid discharging means 7 for discharging the chemical solution used in the unsealing processing means 5 as waste liquid, and a neutralizing agent or diluent mixed into the waste liquid in the waste liquid discharging means 7 to perform neutralization treatment. It consists of a neutralization treatment means 9 for carrying out the neutralization, and a generated gas treatment means 11 for treating at least the generated gas generated from the waste liquid.

Note that the reagent bottle containing a chemical solution such as fuming nitric acid or concentrated sulfuric acid refers to a bottle that is normally commercially available, and means that it has not been transferred.

The chemical solution supply means 3 includes a reagent bottle 13 containing a chemical solution such as fuming nitric acid or Fuchi tvII acid;
Piping 15 for sucking air into the tank and reagent bottle 1
It is comprised of piping 17, 19 and a first plunger pump 21 for transmitting the chemical liquid in 3 to the unsealing processing means 5.

Of course, one end of a pipe 15.17 is connected to the reagent bottle 13. At the other end of the pipe 15, an ON-OFFFF controlled variable closing valve M V + is attached for sucking air into the reagent bottle 13 from the outside. The piping 13
One end of the pipe 23 is connected to the middle of the pipe 23.
The other end is a part of the gas processing means 11 'C:'d
The pipe 23 is connected to the inside of the V gas processing tank 25. An on-off control valve MV7 is installed in the middle of the pipe 23.

One end of the piping 17 is connected to the reagent bottle 13, and the (l!! end of the piping 17 is connected to the first plunger pump 2.
1 cylinder chamber 21S.

An on-off control valve MV2 is installed in the middle of the pipe 17.

One end of the pipe 19 passes through, for example, a box-shaped heating tank 27 that is a part of the opening/closing processing means 5.
It communicates with a chemical reservoir 29 housed inside. The other end of the pipe 19 is connected to the other end of the pipe 17, which is connected to the first plunger pump 21. Moreover, piping 1
An on-off valve MV3, which is controlled ON-OFF by a timer, is set in the middle.

The first plunger pump 21 has a cylinder chamber 21S,
A plunger 21P that reciprocates and covers the inside of the cylinder chamber 21S
and a drive motor M2 for reciprocating the plunger 2IP. A detection switch 1-A1 is provided on one side wall of the cylinder chamber 21S to detect whether a certain amount of chemical liquid has been supplied into the cylinder chamber 21S.

The on-off valves MV+, MVy, MV2 and MV3
is opened and closed in conjunction with the first plunger pump 21.

With the above configuration, when the on-off valve MV+ is turned ON and opened, and then the on-off valve MV2 is turned on and opened, and the drive motor M2 is driven to operate the first plunger pump 21, the plunger 21P moves to the right in FIG. do. As a result, air is sucked into the reagent bottle 13 from the piping 15. The chemical liquid in the reagent bottle 13 is once sucked into the cylinder chamber 218 through the piping 17 together with air. Next, when the plunger 2IP is moved to the left in FIG. 1, the air and the chemical solution return to the reagent bottle 11 through the pipe 17.

Note that the on-off valve MV3 is in an OFF state. When the on-off valve MV7 is turned on and opened, and the on-off valve MV+ is turned off and closed, air and chemical gas are sent through the pipe 23 into the generated gas processing tank 25 and are bubbled.

Then, the drive motor M of the first plunger pump 21
2 to move the plunger 2IP to the right in FIG. By switching A1, a certain amount of wave is transmitted into the cylinder chamber 21S. Next, the on-off valve MV
2 is turned OFF, the on-off valve MV3 is turned ON, and then the plunger 2MP is moved to the left in FIG. The reagent bottles 13 containing chemical solutions such as fuming nitric acid and concentrated sulfuric acid are stored in the heating tank 27, which is a part of the unsealing processing means 5, and are sent to the chemical reservoir 29. It can be used as a chemical solution supply device for the chemical solution supply means 3 in the current state, and since there is no operation to transfer the chemical solution to a dedicated chemical storage tank like in the past, the dangerous work associated with the transfer operation is eliminated and it is safe to handle. Furthermore, when the chemical solution in the reagent bottle 13 is used up, it is only necessary to replace it with a new reagent bottle 13, which improves work efficiency.

Furthermore, even when using fuming nitric acid as the chemical solution,
Since the corrosive gas generated in large quantities is recovered into the generated gas treatment tank 25 via the piping 15.23, it does not contaminate the surrounding environment and damage to other equipment is prevented.

When transmitting waves from the reagent bottle 13 to the unsealing processing means 5, air is first removed from the reagent bottle 13, the piping 17, and the cylinder chamber 218 of the first plunger pump 21, so that the wave of the chemical liquid can be transmitted smoothly. Can be done.

Since a large amount of chemical solution is not stored in the unsealing processing means 5 and only one dose of chemical solution is transmitted each time the unsealing process is performed, even if the chemical solution leaks from the unsealing processing means 5, there will be no serious damage. You will no longer suffer from

For example, when fuming nitric acid is used as the chemical solution, water is supplied into the heating tank 27, which is a part of the unsealing processing means 5.
Heating with a heater 31 provided in the heating tank 27, for example, about 6
Maintain a constant temperature of about 0°C. Further, a stirrer 33 is provided inside the heating tank 27 in order to keep the temperature inside the heating tank 27 uniform. Furthermore, in order to keep the temperature inside the heating tank 27 constant, a temperature sensor 35 is installed inside the heating tank 27.
be.

By supplying water into the heating tank 27, heating it with the heater 31, turning on the stirrer 33, and detecting the temperature with the temperature sensor 35, the water is uniformly heated to 0N at a constant temperature of, for example, about 60°C. -Controlled OFF.

Note that when concentrated sulfuric acid is used as the chemical, oil can be used instead of water to maintain the temperature inside the heating tank 27 at a constant high humidity level.

One end of the piping 19 is communicated with a chemical reservoir 29 provided in the heating tank 27, and the piping 19 in the heating tank 27 forms a spiral portion 19C, such as a coil shape. Thus, a certain amount of the chemical liquid is sucked up from the reagent bottle 13 and transferred to the pipe 17.1.
9 and further into the heating tank 27 is a'-3 pipe 19.
The drug solution is sent to the drug reservoir 29 through the spiral portion 19C. At this time, since the heating tank 27 is maintained at a constant temperature, the spiral portion 19C of the pipe 19 in the heating tank 27 functions as a so-called heat exchanger, and the chemical solution passing through the spiral portion 19C is transferred to the heating tank 27. The mulberry liquid is heated to approximately the same temperature as the warm melon in 27 and sent to the mulberry liquid reservoir 29.

In addition, on the left side wall portion in FIG. 1 inside the heating tank 27,
A plurality of liquid level detection sensors LA3 and LA4.

is installed to detect the level of water or oil in the heating 1ff27, for example.

Therefore, during the wave transmission process from the reagent bottle 13 of the chemical liquid supply means 3 to the two chemical liquid reservoirs of the unsealing processing means 5,
The chemical liquid is heated to a constant temperature while being continuously transmitted in a pipe 19 having a spiral portion 19C provided in a heating tank 27 heated to a constant temperature, for example. Since there is no means for storing and heating the chemical liquid in a heating tank as in the past, the wave transmission time can be significantly shortened. Furthermore, since a separate heating tank is not installed, space can be saved.

Further, the chemical liquid is only transmitted in one dose, and even if the chemical liquid leaks from the spiral portion 19C of the pipe 19, it will only flow into the heating tank 27 and be diluted, and the unsealing processing means 5
The danger inside will be much less.

The unsealing processing means 5 includes a heating tank 27. It consists of a mulberry liquid reservoir 29 and a second plunger pump 39 for reciprocally injecting the chemical solution into an appropriate number of opening parts, for example, two opening parts 37A and 37B. That is, three second plunge pumps 1 and 3 are provided at the lower part of the heating tank 27, approximately at the center thereof, and the operating portion of the second plunger pump 39 is immersed in the heating WJ 27. The second plunger pump 39 includes a cylinder 398, a plunger t39P, and a drive motor M+ for reciprocating the plunger 39P.The cylinder 39S forms a -L cylinder chamber 393z and a lower cylinder chamber 39S2.
A plurality of holes 1 are provided in the upper wall of the upper cylinder chamber 37S1.
is bored, and the liquid in the heating tank 27 flows into and out of the upper cylinder chamber 39S1 through this hole H.

A second heat sink provided at the upper part of the heating tank 27 at approximately the center of the heating tank 27
An appropriate number of opening parts, for example, two fifl sealing parts 3, are placed at appropriate intervals from the three plunger pumps and at positions facing each other.
78, 37B is installed.The opening part 37A,
37B consists of a double tube with an open top. A plastic molded specimen P M such as a semiconductor chip to be opened is placed on the upper surface of the unsealing parts 37A and 37B.
h<It is set upside down.

At the bottom of each unsealing part 37△, 37B, there is an internal intoxication IA.
, 41B, and an opening section 37A.

It extends to the second side of 37B. Inner tube 41A
, 4.1B are connected to one ends of piping 43A, 43B, and the other ends of piping 43A, 43 are connected via piping 45 to the lower part of cylinder 39S.

For example, one end of piping 49A, 49B is connected to the left and right diagonal lower parts of external pipes 47A, 4.7B of unsealing parts 37Δ, 37B, and the other end of piping 49A, /19B is communicated with the chemical reservoir 29. There is.

For example, approximately at the center of the lower part of the chemical solution reservoir 29,
One end of the piping 51 is connected, and the other end of the piping 51 is connected to the cylinder chamber 21S of the first plunger pump 21. An on-off valve MV4 with ○If-OFF control is provided in the middle of the pipe 51. This on-off valve MV
4 is opened and closed in conjunction with the first plunger pump 21.

With the above configuration, when the drive motor M1 of the second plunger pump 39 is stopped driving, the plunger 39P first moves upward. When plunge ↑・39P moves upward,
The chemical liquid temporarily stored in the chemical liquid reservoir 29 is transferred to the pipe 49Δ,
49B, the outer tube 4A of the unsealing part 37A, 37B,
Sent to 47B.

The chemical liquid sent to the outer tubes 47A and 47B is injected upward. Since the specimen PM, which is molded with a plus deck molded in the space between 1 and 2, is preset on the upper surface of the opening parts 37A and 37B, the chemical solution is sprayed onto the desired part of the specimen PM, and the treatment is carried out in the same month.

The unsealed chemical solution is stored in the inner tubes 41A and 41B.

The air is sucked into the lower cylinder chamber 39S2 through the pipes 43A and 43B and further through the pipe 45. In addition, the upper cylinder chamber 39
The liquid contained in S1 is pushed out into the heating tank 27.

Next, when the plunger 39P moves downward, the chemical solution temporarily sucked into the lower cylinder chamber 39S2 flows into the pipe 45.
From there, through pipes 43A and 43B, respectively, an inner cylinder pipe 41A,
Sent to 41B. The chemical solution sent to the inner tubes 4IA and 41B is injected upward to perform an unsealing process on the specimen PM. The chemical liquid used for the unsealing process is in the outer tubes 47A, 47B,
The liquid is returned to the chemical reservoir 29 via pipes 49A and 49B.

In this way, the plunger 3 of the second plunger pump 39
By reciprocating 9P a predetermined number of times, the opening part 3
The specimens PM set in 7A and 37B are subjected to unsealing processing to perform desired unsealing processing. The number of reciprocating movements of the plunger 39P of the plunger pump 39, that is, the reciprocating time can be appropriately determined depending on the type of chemical solution, the shape and size of the sample PM, or the opening rate.

Therefore, a pump such as the second plunger pump 3 for injecting the heated chemical solution into the unsealing parts 37A and 37B is used.
Since the cylinder 398 and the like as two operating parts are immersed in the heating tank 27 in the unsealing processing means 5, the operating parts such as the cylinder 398 are maintained at approximately the same temperature as the constant temperature inside the heating tank 27. . As a result, the temperature of the heated chemical liquid transmitted to the operating parts such as the cylinder 398 of the second plunger pump 39 is maintained at a constant temperature without decreasing and is injected into the opening parts 37A and 37B.

Further, even if the heated chemical liquid leaks from an operating part such as the cylinder 39S of the second plunger pump 39, the leaked chemical liquid flows into the heating tank 27 and is only diluted, but does not flow out to the outside. The handling of chemical solutions is much safer than before, and there is less danger.

Since the second plunger pump 39 is used as a pump for injecting the chemical solution into the unsealing parts 37A and 37B,
Since the chemical liquid injection pressure can be high and the quantitative properties of the chemical liquid can be ensured, the reaction time can be shortened, and the unsealing process time can be shortened.

Further, since the injection pressure of the second plunger pump 39 can be high, not only one opening section but also a plurality of opening sections can be provided, so that the amount of opening processing can be greatly improved. Moreover, it is particularly effective when fuming nitric acid, which reacts slowly, is used. After unsealing the preset specimen PM, the second plunger pump 3
When the drive motor M+ 9 is stopped, the plunger 39P is stopped at the lower part, and the chemical liquid is temporarily collected in the chemical liquid reservoir 29 as waste liquid. Next, when the on-off valve MV4 is turned on and the drive motor M2 of the first plunger pump 21 is driven to move the plunger 2IP to the right in FIG. It will be sucked into the cylinder chamber 21S through.
□ One end of a pipe 53 is connected to the middle of the pipe 51 near the first plunger pump 21 side, and the other end of the pipe 53 is communicated with a neutralization tank 55 that is a part of the neutralization processing means 9. ing. Moreover, there is an 0N-OF in the middle of the pipe 53.
An on-off valve MV5 which is controlled by F is provided. Open/close valve MV
5 is opened and closed in conjunction with the first plunger pump 21.

In the neutralization tank 55, a predetermined amount of a neutralizing liquid, for example, which is water mixed with an alkaline neutralizing agent such as sodium carbonate, is supplied and stored in advance. Alternatively, only water may be simply supplied into the neutralization tank 55 for dilution. In addition,
First plunger pump 21. Second plunger pump 39
is controlled by detecting the position using, for example, a microswitch.

With the above configuration, the on-off valve MV4 is turned off and the on-off valve MV5 is turned on. When the plunger 2IP is further moved to the left in FIG. 1, a certain amount of waste liquid that has been sucked into the cylinder chamber 218 is sent to the neutralization tank 55 via the piping 53.

The waste liquid sent to the neutralization tank 55 is neutralized with the neutralization liquid and rendered harmless.

For example, one end of a pipe 57 is connected to the upper surface of the neutralization tank 55, and the other end of the pipe 57 is connected to the inside of the generated gas processing tank 25.

A pipe 29 +-1 extends upward from a portion of the upper surface of the chemical reservoir 29, for example, on the right side in FIG. 1, and is in contact with the upper surface of the heating tank 27. On one side wall of the pipe 29H is a pipe 59.
One end of the pipe 59 is connected to the other end of the pipe 57, and the other end of the pipe 59 is connected to the other end of the pipe 57.

In the generated treatment gas tank 25, a liquid or solid adsorbent such as activated carbon or a generated residue treatment agent such as a catalyst such as palladium or platinum is stored in advance.

Therefore, the gas generated from the waste liquid passes through the pipe 57 communicating with the neutralization tank 55, and the pipe 2 of the chemical reservoir 29
Generated gas generated from the chemical liquid or waste liquid passes through the five 9H1 pipes, and gas generated from the chemical liquid passes through the pipe 15 and pipe 23 communicating with the reagent bottle 13, and is sent to the generated gas processing tank 25.

The generated gas sent to the generated gas treatment tank 25 is rendered harmless by being dissolved, adsorbed, or decomposed by the generated gas treatment agent.

Since no significant generated gas is exhausted from the unsealing device 1, the surrounding environment is not contaminated. Further, since the generated gas does not adhere to other devices in the vicinity, other devices will not be damaged.

The present invention is not limited to the IC embodiment described above, but can be implemented in other forms by making appropriate changes. For example, in the above embodiment, the specimen PM
Although the second plunger pump 37 is used to inject a chemical solution to perform the opening process, a high-pressure pump such as a gear pump other than the plunger pump may be used. Alternatively, the specimen may be immersed in a chemical solution, and a predetermined portion of the specimen may be unsealed while stirring the chemical solution. Furthermore, the chemical solution is not limited to concentrated sulfuric acid or fuming nitric acid, but may also be a dissolvable chemical solution that dissolves the PM of the specimen. Furthermore, not only liquids, but also vapors, vapors, and liquids may be used. I don't mind.

[Effects of the Invention] As can be understood from the description of the embodiments above, according to the present invention, a plastic mold opening device is equipped with a generated gas treatment means for treating generated gas generated from a chemical solution or waste liquid. Therefore, for example, the generated gas generated from the waste liquid that has passed through the waste liquid discharge means is dissolved, adsorbed, or decomposed by the generated gas treatment agent in the generated gas treatment means, and is rendered harmless and exhausted. Therefore, the surrounding environment will not be contaminated and the equipment will not be damaged.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram illustrating a Plus Deck mold opening device. [Explanation of the symbols showing the main parts of the drawing] 1...Plastic mold opening device 3...Medicinal solution supply means
5... Unsealing processing means 7... Waste liquid discharge means
9... Neutralization processing means 11... Generated gas processing means 1
3... Reagent bottle 25... Generated gas processing tank 27
... Heating tank 29 ... Mulberry liquid reservoirs 37A, 37B ... Unsealing section 39 ... Second plunger pump 55 ... Neutralization tank

Claims (1)

[Claims] An unsealing means for unsealing a plastic-molded specimen set in advance in an unsealing part using a chemical sent from a chemical supply means; and a waste liquid discharge means for discharging the chemical used in the unsealing means as waste liquid. 1. A plastic mold opening device comprising: a generated gas treatment means for treating generated gas generated from the chemical solution or waste liquid.