JPS63291395A - Light source device - Google Patents
Light source deviceInfo
- Publication number
- JPS63291395A JPS63291395A JP12379887A JP12379887A JPS63291395A JP S63291395 A JPS63291395 A JP S63291395A JP 12379887 A JP12379887 A JP 12379887A JP 12379887 A JP12379887 A JP 12379887A JP S63291395 A JPS63291395 A JP S63291395A
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- lamps
- lamp
- light source
- source device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 abstract description 3
- 229910052793 cadmium Inorganic materials 0.000 abstract description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052753 mercury Inorganic materials 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 229910052725 zinc Inorganic materials 0.000 abstract description 2
- UFHFLCQGNIYNRP-VVKOMZTBSA-N Dideuterium Chemical compound [2H][2H] UFHFLCQGNIYNRP-VVKOMZTBSA-N 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 As or their halides Chemical class 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光源装置に係り、特にマイクロ波を用いた平面
照射に好適な光源装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a light source device, and more particularly to a light source device suitable for planar irradiation using microwaves.
マイクロ波を用いた光源装置の例としては米国特許３，
８７２，３４９号（υｎ１ｔａｄ ５ｔａｔｅｓ Ｐａ
ｔｅｎｔ。Examples of light source devices using microwaves include U.S. Patent 3,
No. 872,349 (υn1tad 5tates Pa
tent.
３．８７２，３４９）がある、上記従来例は、マイクロ
波の電源に空胴共振器を接続し、上記空胴共振器の内部
にランプを設置している。上記空胴共振器内には電磁波
の定在波が生じ、上記定在波の山の部分にランプを設置
すると、上記ランプ内に誘導放電を生じ発光する。上記
装置の利点は、上記ランプに電極を必要としないことで
ある。したがって、ランプの構造は極めて単純になる。In the above-mentioned conventional example, which is available in Japanese Patent No. 3,872,349), a cavity resonator is connected to a microwave power source, and a lamp is installed inside the cavity resonator. A standing wave of electromagnetic waves is generated within the cavity resonator, and when a lamp is installed at the peak of the standing wave, an induced discharge is generated within the lamp and light is emitted. An advantage of the device is that no electrodes are required in the lamp. Therefore, the structure of the lamp becomes extremely simple.
また、電極の消耗や電極からの不純物の放出もなくなる
ので、ランプの寿命も伸び、さらに、ランプ内に封入す
る物質に対しても、電極との反応を考える必要がないた
め１選択の自由度が大きくなる。In addition, there is no need to wear out the electrodes or release impurities from the electrodes, which extends the life of the lamp.Furthermore, there is no need to consider reactions with the electrodes for the substances sealed in the lamp, giving you greater freedom in selecting substances. becomes larger.
上記従来技術で使用されるランプの形状は、直管状ある
いは球状であるが、平面を一様に照らすことには配慮さ
れていない、一方、現在は半導体製造プロセスなどで、
光源を利用することが多くなっている。このような特殊
利用では、しばしば平面を一様に照射することが要求さ
れる。The shape of the lamp used in the above-mentioned conventional technology is straight tube or spherical, but it does not take into account uniform illumination of a flat surface.
Light sources are increasingly being used. Such special applications often require uniform illumination of a plane.
本発明の目的は、平面を一様に照射できる光源装置を得
ることにある。An object of the present invention is to obtain a light source device that can uniformly illuminate a plane.
上記目的は、空胴を平板上とし、その中に複数本のラン
プを配し、かつ、その広い面の中央付近に導波管の軸方
向に沿った細長い電力供給用の穴を開けることで達成で
きる。The above purpose is to make the cavity on a flat plate, arrange multiple lamps inside it, and make a long and narrow hole for power supply along the axial direction of the waveguide near the center of the wide surface. It can be achieved.
電力供給穴を細長くすることで、空胴内のより広いはん
いに均一に電力を供給できる。これによりランプ光出力
の面均−性が良くなる。By making the power supply hole elongated, power can be uniformly supplied to a wider area within the cavity. This improves the surface uniformity of the lamp light output.
以下、本発明の一実施例を図により説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第１図は本発明の全体構成図である。平板形の空胴１の
中に直管形ランプ２が複数本配置されている。ランプ２
の中には、たとえば希ガス、希ガスとＨｇ、Ｃｄ、Ｚｎ
、Ａｓなどの各種金属あるいはこれらのハロゲン化物、
ヨウ素９重水素などが封入されている。紫外線を利用す
る場合は、ランプ２は石英などの紫外線透過物質でつく
る。ランプ２は高周波の誘導放電で点灯するので電極を
つける必要がない、マイクロ波電力は、マイクロ波電源
６から導波管５と電力供給穴４を通して、空胴１に入る
。マイクロ波電源６は、たとえば周波数２．４５ＧＨｚ
、波長１２．２４ｍのマグネトロンである。空胴１
の少なくとも一面は光を取り出すため、金網３になって
いる。本構成により。FIG. 1 is an overall configuration diagram of the present invention. A plurality of straight tube lamps 2 are arranged in a flat plate-shaped cavity 1. lamp 2
Among them, for example, rare gases, rare gases and Hg, Cd, Zn.
, various metals such as As or their halides,
Contains iodine, deuterium, etc. When using ultraviolet light, the lamp 2 is made of an ultraviolet-transmissive material such as quartz. Since the lamp 2 is lit by high-frequency induced discharge, there is no need to attach electrodes.Microwave power enters the cavity 1 from the microwave power source 6 through the waveguide 5 and the power supply hole 4. The microwave power source 6 has a frequency of 2.45 GHz, for example.
, a magnetron with a wavelength of 12.24 m. Cavity 1
At least one side of the screen is made of wire mesh 3 to extract light. Due to this configuration.
複数本のランプ２が同時に点灯し、平面を照射すること
ができる。A plurality of lamps 2 can be lit at the same time to illuminate a flat surface.
第２図は第１図の空ＷＡ１部分のＡ−Ａ断面図である０
本発明に従い、電力供給穴４は細長く、かつ、空胴１の
上面（広い面）の中央付近と導波管５の中心軸方向を結
合するように開いている。電力供給穴４をこのように開
けることにより、空胴１内に均一に電力が供給されラン
プ２の光出力の面均−性が良くなる。Figure 2 is a sectional view taken along line A-A of the empty WA1 portion in Figure 1.
According to the present invention, the power supply hole 4 is elongated and opened so as to connect the vicinity of the center of the upper surface (wide surface) of the cavity 1 and the central axis direction of the waveguide 5. By opening the power supply hole 4 in this manner, power is uniformly supplied into the cavity 1, and the surface uniformity of the light output of the lamp 2 is improved.
次に、マイクロ波電源６としてマグネトロン（周波数２
．４５±０．０１ＧＨｚ）を用い実験を行なった結果を
述べる。導波管２は断面が１０．９ａｍ Ｘ ５ 、５
ｔｘでＪＴＳ規格番号ＷＲＪ−２に相当する。空胴１
は厚さ６１で他の辺はａ ＝ ３５ ｃｓ 。Next, a magnetron (frequency 2
．． 45±0.01 GHz). The waveguide 2 has a cross section of 10.9 am x 5,5
tx and corresponds to JTS standard number WRJ-2. Cavity 1
has a thickness of 61 and the other sides are a = 35 cs.
ｂ＝２５ａｍ（第２図参照）である、ランプ２は直径２
０ ｍ ’、長さ３０〔で、Ａｒ ２．５Ｔｏｒｒと
Ｈｇが封入しである。このランプを、電給供給穴４がつ
いている面から３ｍはなして第２図に示す配置と同じに
７本等間際で並べた。ランプ２が軸方向を被う長さく第
２図中ｄ）は２２ｔ５である。以上の条件で、電力供給
穴４の大きさを変えて、ランプ２の紫外線出力（Ｈｇ＃
線２５４ｎｍ）の面分布を測定した０ｗＩＩ定したラン
プは中央のランプ２−１と一番はじのランプ２−２で、
Ｘ方向に検出器を動かして紫外線を測定した。検出器は
受光面の大きさが１ ｒｍ Ｘ ６ ｗａのホトダイオ
ードである。b = 25 am (see Figure 2), lamp 2 has a diameter of 2
0 m', length 30 [, and filled with Ar 2.5 Torr and Hg. Seven of these lamps were arranged at a distance of 3 m from the surface on which the power supply hole 4 was attached, and equally spaced in the same arrangement as shown in FIG. The length d) of the lamp 2 in the axial direction is 22t5. Under the above conditions, by changing the size of the power supply hole 4, the ultraviolet output of the lamp 2 (Hg #
The lamps for which the surface distribution of the line (254 nm) was measured were the central lamp 2-1 and the first lamp 2-2.
The ultraviolet light was measured by moving the detector in the X direction. The detector is a photodiode with a light-receiving surface size of 1 rm x 6 wa.
ホトダイオード前面に、波長２５’ ４ ｎ ｍの光の
みを通す干渉フィルターと、厚さ３．５１でホトダイオ
ードと同じ大きさのスリットを重ねて置いた。In front of the photodiode, an interference filter that only passes light with a wavelength of 25'4 nm and a slit with a thickness of 3.51 mm and the same size as the photodiode were placed overlappingly.
紫外線の強度はランプ最冷部の温度により変わってしま
う、温度差による誤差を防ぐためにランプ２の一部を空
Ｍ１の外に出して、この部分の温度を４０℃一定に保っ
た。測定の結果を第３図と第４図に示す、第３図は電力
供給穴の大きさをｅ＝５ｃｓ＋、 ｆ ＝ １０ｃｓ＊
（ｆ ／ ｄ ＝０．４５）とした場合、第４図はｅ＝
＝５ｍ、ｆ＝１７ｃｍ（ｆ／ｄ＝０．７７）とした場合
の紫外線強度分布である。グラフかられかるように、電
力供給穴４の長さｆを、ランプが導波管の軸方向を被う
長さｄの約４分の３以上開けることにより、良い紫外線
面均一性が得られる。The intensity of ultraviolet rays changes depending on the temperature of the coldest part of the lamp.To prevent errors due to temperature differences, a part of the lamp 2 was exposed outside the air M1, and the temperature of this part was kept constant at 40°C. The measurement results are shown in Figures 3 and 4. In Figure 3, the size of the power supply hole is e = 5cs +, f = 10cs *
(f / d = 0.45), Fig. 4 shows e =
This is the ultraviolet light intensity distribution when = 5 m and f = 17 cm (f/d = 0.77). As can be seen from the graph, good uniformity of the ultraviolet light surface can be obtained by making the length f of the power supply hole 4 more than about three quarters of the length d that the lamp covers in the axial direction of the waveguide. .
次に、電力供給穴４の長さｆは１７１一定として、幅ｅ
をｌｃｎ、３ａｓ、５Ｑｌと変えて実験した。Next, assuming that the length f of the power supply hole 4 is constant 171, the width e
Experiments were conducted by changing lcn, 3as, and 5Ql.
その結果、ｅが小さくなると空胴１に電力が入りにくく
なることがわかった。ｅ＝３ｍ、すなわち、導波管の接
続面幅１０．９６ｍの約１０分の３以上にすれば、少し
電力は入りにくいが均一性はｅ＝５１と同等になる。θ
＝１１ではうまく電力が入らなかった。As a result, it was found that as e becomes smaller, it becomes difficult for electric power to enter the cavity 1. If e=3 m, that is, approximately 3/10 or more of the width of the connecting surface of the waveguide, 10.96 m, it will be a little harder to input power, but the uniformity will be equivalent to e=51. θ
Power did not come on properly at =11.
次に空胴１の大きさを変えて実験した。前述の空胴１（
大きさａ ＝３５ｍ、 ｂ ＝ ２５ｃｎ）は、共振周
波数！ ＝ ２ 、４５６ Ｇ Ｈｚ を持つ。つま
り、マグネトロンの周波数で共振する。そこで、共振し
ない寸法（ａ ＝ ３３ｃｍ、 ｂ ＝ ２５ｃｍ）に
変えて、同様の実験を行なった。その結果、電力供給穴
４の大きさがｅ＝５ｃｓ、ｆ＝１７ａｍのときは、ラン
プ２は均一に光った。つまり１本発明は、空胴１が共振
する場合もしない場合も成り立つ。Next, we experimented by changing the size of cavity 1. The aforementioned cavity 1 (
Size a = 35m, b = 25cn) is the resonant frequency! = 2, with 456 GHz. In other words, it resonates at the magnetron's frequency. Therefore, a similar experiment was conducted by changing the dimensions to non-resonant dimensions (a = 33 cm, b = 25 cm). As a result, when the size of the power supply hole 4 was e=5 cs and f=17 am, the lamp 2 illuminated uniformly. In other words, the present invention is applicable whether or not the cavity 1 resonates.
また電力供給穴４の位置は、中心から±５１程度ずれて
も効果は変わらなかった。穴の幅を大きくすれば、もつ
とずらしてもかまわない。Further, even if the position of the power supply hole 4 was shifted by about ±51 from the center, the effect did not change. If you make the hole wider, it doesn't matter if it is shifted.
第５図、第６図は電力供給穴４の開は方の別実流側であ
る。穴は一個でなく、複数個開けても面積がほぼ同じな
ら同様の効果が得られる。5 and 6 show different actual flow sides of the opening of the power supply hole 4. The same effect can be obtained even if multiple holes are made instead of just one, as long as the area is approximately the same.
次にランプ２の並び方は、第２図に示した並び方と直角
方向でも、ななめでも良い、ランプ２の形状も直管に限
らず１球形のものを複数個波べてもよい、しかし、第２
図の並び方が、中央付近で強く発生するプラズマが左右
に広がるので最も良い。Next, the arrangement of the lamps 2 may be perpendicular or diagonal to the arrangement shown in FIG. 2
The best way to arrange the figures is because the plasma that is generated strongly near the center spreads to the left and right.
また、複数本あるランプ２の形状封入物は全部同じにす
ると後のメインテナンスがやり易くなるので都合が良い
。Furthermore, it is convenient if the plurality of lamps 2 have the same shape of enclosures, as this makes later maintenance easier.
次に、空胴１の厚さはマイクロ波波長の２分の１以下に
するのが良い、なぜならば、こうすると電界の波は厚さ
方向にはのらず、ランプ２をこの方向に動かしても明る
さが変わらないからである。Next, the thickness of the cavity 1 should be less than half the microwave wavelength, because in this way the electric field waves will not propagate in the thickness direction, and the lamp 2 will move in this direction. This is because the brightness does not change.
つまり、ランプ２を金網３に極力近づけて、光の取り出
し効率を上げることができる。また、ランプ２を電力供
給口４から離すと、つまり金網３に近づけると、空胴１
内により均一に電力がとどくので光の均一性もよくなる
。In other words, the light extraction efficiency can be increased by bringing the lamp 2 as close as possible to the wire mesh 3. Furthermore, when the lamp 2 is moved away from the power supply port 4, that is, when it is brought closer to the wire mesh 3, the cavity 1
Since the power is distributed more evenly within the interior, the uniformity of the light is also improved.
本発明によれば、空胴１内に電力が均一に入るので、ラ
ンプ２の光出力面均一性がよくなる。電力供給穴４の大
きさがｅ＝５３でｆ＝１０ｍと１７１を比較すると、ラ
ンプの紫外線出力の最大値と最小値の比は前者が４２％
、後者が６２％となり２０％よくなる。According to the invention, the uniformity of the power in the cavity 1 improves the uniformity of the light output surface of the lamp 2. When comparing power supply hole 4 size e=53 and f=10m with 171, the ratio of maximum and minimum UV output of the lamp is 42% in the former.
, the latter is 62%, which is 20% better.
第１図は本発明の全体構成図、第２図と第５図と第６図
は第１図のＡ−Ａ断面図、第３図と第４図は紫外線出力
の面分布である。FIG. 1 is an overall configuration diagram of the present invention, FIGS. 2, 5, and 6 are sectional views taken along the line AA in FIG. 1, and FIGS. 3 and 4 are planar distributions of ultraviolet output.
Claims (1)
胴、および、該空胴内に設置される複数本のランプから
なる装置において、該空胴を平板状とし、その広い面の
中央付近に導波管の軸に沿つて細長い電力供給穴を開け
たことを特徴とする光源装置。 ２、前記細長い穴は、ランプが導波管軸方向を被う長さ
の４分の３以上にわたつて開いていることを特徴とする
第１項記載の光源装置。 ３、前記細長い穴の幅は、導波管断面長辺の１０分の３
以上であることを特徴とする第１項あるいは第２項記載
の光源装置。 ４、前記平板状空胴の厚さは、マイクロ波の波長の２分
の１以下であることを特徴とする第１から第３項までの
いずれか１つの項記載の光源装置。[Claims] 1. In a device consisting of a microwave power source, a waveguide, a cavity, and a plurality of lamps installed in the cavity, which are electrically connected, the cavity is formed into a flat plate. A light source device characterized in that a long and narrow power supply hole is formed near the center of the wide surface along the axis of the waveguide. 2. The light source device according to item 1, wherein the elongated hole is open over three quarters or more of the length of the lamp in the axial direction of the waveguide. 3. The width of the elongated hole is 3/10 of the long side of the waveguide cross section.
The light source device according to item 1 or 2, which is characterized by the above. 4. The light source device according to any one of items 1 to 3, wherein the thickness of the flat cavity is one-half or less of the wavelength of the microwave.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12379887A JPS63291395A (en) | 1987-05-22 | 1987-05-22 | Light source device |
| US07/155,507 US4933602A (en) | 1987-03-11 | 1988-02-12 | Apparatus for generating light by utilizing microwave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12379887A JPS63291395A (en) | 1987-05-22 | 1987-05-22 | Light source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63291395A true JPS63291395A (en) | 1988-11-29 |
Family
ID=14869575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12379887A Pending JPS63291395A (en) | 1987-03-11 | 1987-05-22 | Light source device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63291395A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535825A (en) * | 1978-09-06 | 1980-03-13 | Itsuki Ban | Lighter equipped with watch |
| JPS61253762A (en) * | 1985-05-07 | 1986-11-11 | Canon Inc | Lighting fixture |
-
1987
- 1987-05-22 JP JP12379887A patent/JPS63291395A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535825A (en) * | 1978-09-06 | 1980-03-13 | Itsuki Ban | Lighter equipped with watch |
| JPS61253762A (en) * | 1985-05-07 | 1986-11-11 | Canon Inc | Lighting fixture |
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