JPS63288430A - Optical track tracing device - Google Patents

Optical track tracing device

Info

Publication number
JPS63288430A
JPS63288430A JP12243887A JP12243887A JPS63288430A JP S63288430 A JPS63288430 A JP S63288430A JP 12243887 A JP12243887 A JP 12243887A JP 12243887 A JP12243887 A JP 12243887A JP S63288430 A JPS63288430 A JP S63288430A
Authority
JP
Japan
Prior art keywords
light
track
light receiving
photodetector
track deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12243887A
Other languages
Japanese (ja)
Inventor
Kenichi Yasuda
憲一 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12243887A priority Critical patent/JPS63288430A/en
Publication of JPS63288430A publication Critical patent/JPS63288430A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an accurate track deviation detection signal by correcting the track deviation detection signal due to a first light receiving part for track deviation detection by the medium inclination detection signal due to a second light receiving part. CONSTITUTION:First light receiving parts 10a and 10b of a photodetector for track deviation detection are arranged for a totally diffracted luminous flux 17, and second light receiving parts 18a and 18b of a photodetector for medium inclination detection are arranged in the area to which the diffracted luminous flux 17 is not projected. That is, not only the totally diffracted luminous flux 17 is moved in parallel but also the distribution of light intensity of this luminous flux 17 is changed when the medium is inclined. Consequently, the differential output signal of light receiving parts 10a and 10b of the photodetector for track deviation detection is corrected with the differential output signal of light receiving parts 18a and 18b of the photodetector for medium inclination detection, and the latter differential output signal is controlled to a minimum. Thus, stable track deviation control is performed.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、光デイスク装置において、光源からの光の
位置と情報記録媒体上のトラックの位置との相対関係を
適切に位置決め制御するための光学的トラック追跡装置
に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for appropriately positioning and controlling the relative relationship between the position of light from a light source and the position of a track on an information recording medium in an optical disk device. The present invention relates to an optical track tracking device.

〔従来の技術〕[Conventional technology]

従来技術として、特開昭59−191143号公報に示
された回折現象を利用した光学的トラック追跡装置の概
要を第3図〜第13図により説明する。
As a prior art, an outline of an optical track tracking device using a diffraction phenomenon disclosed in Japanese Patent Laid-Open No. 59-191143 will be explained with reference to FIGS. 3 to 13.

第3図は、回折型トラックずれ検出方式による光デイス
ク装置で、半導体レーザ(1)から出た光をコリメータ
レンズ(2)で平行光束とし、ハーフミラき −(3)で反射させて対物レンズ(4)に4X1回転す
るディスク状の情報記録媒体(5)にスポットを結像さ
せる。情報記録媒体(5)上にはトラック(6)が設け
てあり、光ビームが照射されると、その反射光に回折現
象が生じる。すなわち、反射光はO次回折束束(7)と
+1次回折光束(8)と−1次回折光束(9)K分離さ
れ、さらにトラック(6)の中心とスポットの中心ずれ
(トラックずれ)に応じて、0次回折光束(7)の位相
に対し、+1次回折光束(8)と−1次回折光束(9)
の位相が逆方向にずれる。媒体(5)から反射したこれ
らの回折光束は、レンズ(4)により再度平行光束とな
り、ハーフミラ−(3)を通ってトラック方向(図では
紙面に垂直な方向)に関して対称に2分割された光検出
器(10a)と(10b)に達する。
Figure 3 shows an optical disk device using a diffraction-type track deviation detection method, in which light emitted from a semiconductor laser (1) is converted into a parallel beam by a collimator lens (2), reflected by a half-mirror lens (3), and then reflected by an objective lens ( 4) A spot is imaged on a disk-shaped information recording medium (5) that rotates 4×1. A track (6) is provided on the information recording medium (5), and when the track (6) is irradiated with a light beam, a diffraction phenomenon occurs in the reflected light. That is, the reflected light is separated into an O-order diffracted beam (7), a +1st-order diffracted beam (8), and a -1st-order diffracted beam (9). According to
phase shifts in the opposite direction. These diffracted light beams reflected from the medium (5) are turned into parallel light beams again by the lens (4), and then pass through the half mirror (3) into two symmetrical beams with respect to the track direction (in the figure, perpendicular to the plane of the paper). Detectors (10a) and (10b) are reached.

第4図は、トラック(6)により回折分離される0次回
折光束(力と+1次回折光束(8)、 −1次回折光の 束(9)〆形状および分離される方向を示している。
FIG. 4 shows the shape and separation direction of the 0th-order diffracted light beam (force), the +1st-order diffracted light beam (8), and the -1st-order diffracted light beam (9), which are diffracted and separated by the track (6).

第5図は、第3図および第4図においてO次回折光束(
7)の回折される方向から、対物レンズ(4)を通して
各回折光束を見た図で、対物レンズ(4)の開口瞳(4
a)で±1次回折光束(8)と(9)の一部分が遮へい
される。開口瞳(4a)の中央AA(O次回折光束と±
1次回折光の中心を通る線分上)における光強度分布断
面を第6図(a) 、 (b) 、 (c) ItC示
す。図(a)の’l?(12)はトラックずれかないと
きの光強度分布断面で、半導体レーザのように中心が強
い発光光束を用いるため、中心部が強い光強度分布とな
る。トラックずれが生じると、0次回折光(7)の位相
に対して+1次と一1次の回折光(8) 、 (9)の
位相が逆方向にずれるため、図(b)の場合、−1次と
0次の回折光(9) 、 f力が干渉して強め合い、+
1次と0次の回折光(8) 、 (7)が弱め合う結果
、光強度分布断面は実m(13’)のようになる。また
、図(c)は図(b)とは逆方向のトラックずわが生じ
た場合で、光強度分布断面は実線(14)のようになる
。図(b)とfc)での破騙(12)は、図(a)にお
ける実線(12)を示している。また、第5図の開口m
 (4a )の中央からはずれ、かつ、AAに平行なり
Bにおける(12aL(13a)、(14a)で示す。
Figure 5 shows the O-order diffracted light flux (
This figure shows each diffracted light beam passing through the objective lens (4) from the direction of diffraction of the light beam (7).
In a), a portion of the ±1st-order diffracted light beams (8) and (9) is blocked. Center AA of the aperture pupil (4a) (O-order diffracted light flux and ±
6(a), (b), and (c) show cross sections of the light intensity distribution on a line segment passing through the center of the first-order diffracted light. 'l? in figure (a)? (12) is a cross section of the light intensity distribution when there is no track deviation, and since the emitted light beam is strong at the center like a semiconductor laser, the light intensity distribution is strong at the center. When a track shift occurs, the phases of the +1st-order and 11th-order diffracted lights (8) and (9) shift in the opposite direction to the phase of the 0th-order diffracted light (7), so in the case of figure (b), - The 1st-order and 0th-order diffracted light (9), the f-force interfere and strengthen each other, +
As a result of the first-order and zero-order diffracted lights (8) and (7) weakening each other, the cross section of the light intensity distribution becomes a real m(13'). Further, Figure (c) shows the case where track waviness occurs in the opposite direction to Figure (b), and the light intensity distribution cross section is as shown by the solid line (14). The break (12) in figures (b) and fc) indicates the solid line (12) in figure (a). Also, the opening m in Fig. 5
It is off the center of (4a) and parallel to AA, as shown by (12aL (13a), (14a)) in B.

第6図、第7図から、開口瞳(4a)を通過する第80
と第9図は、縞6図と第7図で示す光強度分布断面にお
ける光強度がトラックずれによって変化する部分(15
)と変化しない部分(16)を示す。よって第5図にお
いて領域(L5)の光強度変化を検出すれば、トラック
ずれ信号を得ることができる。この領域(15)は、光
検出器面上での検出光束の直径をφと1゛ると、検出光
束の光軸を中心とする直径φの円が、前記中心からトラ
ック方向とは垂直な両方向に一定距離だけ離れた2点を
中心とする、直径−の2つのHにそれぞれ重なる′?A
域であって、上記3つの円が重なる領域を含まない領域
である。
From FIGS. 6 and 7, the 80th line passing through the aperture pupil (4a)
and FIG. 9 show the portion (15
) and the unchanged part (16) are shown. Therefore, by detecting the change in light intensity in the area (L5) in FIG. 5, a track deviation signal can be obtained. In this area (15), if the diameter of the detection light beam on the photodetector surface is φ and 1, then a circle with a diameter φ centered on the optical axis of the detection light beam is perpendicular to the track direction from the center. ′? overlaps two H’s with a diameter of −, centered on two points a certain distance apart in both directions. A
This is an area that does not include the area where the above three circles overlap.

第3図の2分割光検出器(10a)と(10b)は上述
のJiL33J!により、光束を2分割光検出器(10
a)と(lOb)とで等分の領域に分割し、トラックず
れによるそれぞれの光強度分布変化を検出するものであ
り、光検出器(10a)と(10b)の出力を差動増幅
器(1工)に入力し、その差を検出することによりトラ
ックずれ信号が得られる。このトラックずれ信号に応じ
て、光ビームをトラック方向に垂直な方向に移動させる
ことにより、光スポットがトラックの中心を追従するよ
う制御する。光ビームを移動させるトラッキング手段と
しては、例えば、対物レンズO周りに取付けたアクチュ
エータにトラックずれ信号を供給して対物レンズを移動
させる手段、ガルバノミラ−等の光偏向手段、あるいは
光ヘツド全体を移動させる手段など周知のものがある。
The two-split photodetectors (10a) and (10b) in FIG. 3 are the above-mentioned JiL33J! splits the luminous flux into two photodetectors (10
A) and (lOb) are divided into equal areas, and each light intensity distribution change due to track deviation is detected. A track deviation signal can be obtained by inputting the signal into the track deviation signal and detecting the difference. The light spot is controlled to follow the center of the track by moving the light beam in a direction perpendicular to the track direction in accordance with this track deviation signal. As a tracking means for moving the light beam, for example, a means for moving the objective lens by supplying a track deviation signal to an actuator attached around the objective lens O, a light deflection means such as a galvanometer mirror, or a means for moving the entire optical head. There are well-known methods.

ところで、第10図に示すように情報記録媒体(5)が
角α頌くと、0次および±1次回折光束の方向も同じ方
向に約2α傾くので、第11図に示すように、対物レン
ズ(4)の開口ri(4a )を通過できる各回折光束
+73.GA)、(9)の領域も第5図と比べて横方向
に平行移動する。゛ 〔発明が解決しようとする問題点1 以上のような従来の光学的トラック追跡装f ff。
By the way, when the information recording medium (5) is tilted at an angle α as shown in FIG. Each diffracted light beam that can pass through the aperture ri (4a) of the lens (4) +73. The regions GA) and (9) are also translated in the lateral direction compared to FIG.゛[Problem to be Solved by the Invention 1] The conventional optical track tracking device as described above.

おいて、第12図および第13図は、第5図のAABB
と師1じようにglt図のAAとBB線上の光強度分布
断面を示すもので、第8図と第9図に対応している、デ
ィスク傾きがない場合のトラックずれによって変化する
部分を実線(15)で、変化しない部分を実線(16)
で示す。ディスクの傾きが生じると、それぞれ破線(1
5a)と(16a)で示すように平行移動する。その結
果、光強度分布のピーク部がずれるため、トラック方向
に対称な2分割光検出器を用いたトラックずれ検出方式
では、直流的なバイアス(トラッキングオフセット)が
生じてしまい、正確なトラックずれ検出を行うことがで
きないという問題点があった。
12 and 13 are AABB in FIG.
As in Figure 1, this shows the cross section of the light intensity distribution on the AA and BB lines of the GLT diagram, and the solid line indicates the portion that changes due to track misalignment when there is no disk tilt, which corresponds to Figures 8 and 9. In (15), the part that does not change is shown as a solid line (16)
Indicated by When the disc tilts, the dashed line (1
Translation is performed as shown in 5a) and (16a). As a result, the peak part of the light intensity distribution shifts, and in the track misalignment detection method using a two-split photodetector symmetrical in the track direction, a DC-like bias (tracking offset) occurs, making it difficult to detect track misalignment accurately. The problem was that it was not possible to do so.

この発明は、上記のような問題点を解消するためになさ
れたもので、記録媒体の頌きKよるオフセットを検出し
てオフセットによるトラックずれを補正し、より安定な
トラックずれ信号を得ることができる光学的トラック追
跡装置を得ることを目的とする。
This invention was made in order to solve the above-mentioned problems, and it is possible to detect the offset caused by the recording medium K and correct the track deviation due to the offset, thereby obtaining a more stable track deviation signal. The objective is to obtain an optical track tracking device that can.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係る光学的トラック追跡装置は、トラックの
位置ずれ検出手段として、記録媒体からの回折光束に対
してトラック方向に関して対称に配置された1対の第1
の受光部(トラックずれ検出用)と、記録媒体の傾きが
ないとき、上記回折光束が照射されない領域でトラック
方向に関して対称に配置された1対の第2の受光部(媒
体の傾き検出用)とを有する光検出器を備えたものであ
る。
The optical track tracking device according to the present invention includes, as a track positional deviation detecting means, a pair of first
a pair of second light receiving parts (for detecting the tilt of the medium) arranged symmetrically with respect to the track direction in an area where the diffracted light beam is not irradiated when the recording medium is not tilted. It is equipped with a photodetector having the following.

ずれ検出用)の光検出器に第2の受光部(媒体の傾き検
出用)の光検出器を併設し、第1の受光部によるトラッ
クずれ検出信号ml第2の受光部による媒体の傾き検出
信号により補正し、正確なトラックずれ検出信号を得る
A photodetector for a second light-receiving section (for detecting the inclination of the medium) is attached to the photodetector (for detecting deviation), and the second light-receiving section detects the inclination of the medium. Correction is performed using the signal to obtain an accurate track deviation detection signal.

〔実施例〕〔Example〕

第1図はこの発明の一実施例を示し、図において、全回
折光束(17)に対して、トラック方向に関して対称に
トラックずれ検出用光検出器の1対の第1の受光部(1
0a)、(10b)が配置されている。また、記録媒体
(5)が光源(1)と垂直に配置されたとき、回折光束
(17)が照射されない領域に、トラック方向に関して
対称に媒体(5)の傾き検出用光検出器の1対の第2の
受光部(18a)、(18b)が配置されている。この
第2の受光部(18a)、(18b)は、回折光束(1
7)の照射領域にできるだけ近づけて配置されている。
FIG. 1 shows an embodiment of the present invention. In the figure, a pair of first light receiving sections (1
0a) and (10b) are arranged. Furthermore, when the recording medium (5) is arranged perpendicularly to the light source (1), a pair of photodetectors for detecting the inclination of the medium (5) are arranged symmetrically with respect to the track direction in an area that is not irradiated with the diffracted light beam (17). second light receiving sections (18a) and (18b) are arranged. The second light receiving portions (18a) and (18b) have a diffracted light beam (1
7) is placed as close as possible to the irradiation area.

その他の構成は第3図に示したと同様であり、説明を省
略する。
The other configurations are the same as shown in FIG. 3, and their explanation will be omitted.

次に動作について説明する。回折形トラックずれ検出方
式の動作原理については、従来装曾と同様なのでここで
の説明は省略する。
Next, the operation will be explained. The operating principle of the diffraction-type track deviation detection method is the same as that of the conventional system, so a description thereof will be omitted here.

第1図において、いま、トラックずれかない場合、トラ
ックずれ検出用光検出器(10a)、(10b)の差動
出力信号および媒体(5)の傾き検出用光検出器(18
aL(18b)の差動出力信号は双方共ゼロである。
In FIG. 1, if there is no track deviation, the differential output signals of the track deviation detection photodetectors (10a) and (10b) and the tilt detection photodetector (18) of the medium (5) are shown.
The differential output signals of aL (18b) are both zero.

次にトラックずれが生じた場合(ただし、媒体(5)の
傾きはないものとする。)、全回折光束(17)の光強
度分布は、第6図〜第9図に示したように変化するが、
全回折光束(17)が照射される光検出器(10a ”
) 、(10b )−(18a )* (18b )上
の位置は変化しないため、媒体(5)の傾き検出用光検
出器(18a)、(18b)の差動出力信号はゼロであ
り、トラックずれ検出用光検出器(10a)、(10b
)の差動出力信号によりトラックずれ検出ができる。
Next, when a track shift occurs (assuming that the medium (5) is not tilted), the light intensity distribution of the total diffracted light beam (17) changes as shown in Figures 6 to 9. However,
A photodetector (10a”) that is irradiated with the total diffracted light beam (17)
), (10b)-(18a)*(18b), the differential output signals of the photodetectors (18a) and (18b) for detecting the inclination of the medium (5) are zero, and the position on the track Displacement detection photodetector (10a), (10b
) Track deviation can be detected using the differential output signals.

媒体(5)に傾きが生じると、第2図に示すように、全
回折光束(17)が平行移動するとともに全回折光束(
17)の光強度分布も第12図、第13図に示したよう
に変化する。したがって、トラックずれ検出用光検出器
(tOa)、(10b)の差動出力信号を、媒体(5)
の傾き検出用光検出器(18aL(18b)の差動出力
信号により補正し、かつ、媒体(5)の傾き検出用光検
出器(18a)、(18b)の差動出力信号を最少に制
御することにより、安定なトラックずれ制御を行うこと
ができる。
When the medium (5) is tilted, the total diffracted light flux (17) moves in parallel and the total diffracted light flux (
17) The light intensity distribution also changes as shown in FIGS. 12 and 13. Therefore, the differential output signal of the photodetector (tOa), (10b) for detecting track deviation is transmitted to the medium (5).
The differential output signal of the tilt detection photodetector (18aL (18b)) of the medium (5) is corrected, and the differential output signal of the tilt detection photodetector (18a), (18b) of the medium (5) is controlled to the minimum. By doing so, stable track deviation control can be performed.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、トラックの位置ずれ
検出手段として、記録媒体からの回折光束に対して、ト
ラック方向に関して対称に配置された1対の第1の受光
部と、記録媒体の傾きがないときに上記回折光束が照射
されない領域でトラック方向に関して対称に配置された
1対の第2の受光部とを有する光検出器を備えたことに
より、記録媒体が鵠いても、そのオフセット量を第2の
受光部の光検出器の出力信号で補正することにより、記
録媒体の傾きに関係なく、常に安定した正確な位置決め
制御ができる効果がある。
As described above, according to the present invention, the track positional deviation detection means includes a pair of first light receiving parts arranged symmetrically with respect to the track direction with respect to the diffracted light beam from the recording medium, and a pair of first light receiving parts arranged symmetrically with respect to the track direction, and By including a photodetector having a pair of second light-receiving parts arranged symmetrically with respect to the track direction in an area where the diffracted light beam is not irradiated when there is no inclination, even if the recording medium shifts, its offset can be avoided. By correcting the amount using the output signal of the photodetector of the second light receiving section, it is possible to always perform stable and accurate positioning control regardless of the inclination of the recording medium.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例の要部正面図、第2図は第
1図のものの動作を説明するだめの要部正面図である。 第3図〜第13図は従来の光学的トラック追跡装置を示
し、第3図は光学配置図、第4図と第5図はそれぞれ回
折光の出力を説明する模式図、第6図〜第9図はそれぞ
れトラックずれによる回折光の光強度分布の変化を説明
する線図、第10図と第11図はそれぞれ記録媒体が傾
いた場合の回折光の出力を説明する模式図、第12図と
第13図はそれぞれ記録媒体が傾いた場合の回折光の光
強度分布の変化を説明する線図である。 (11・・光源、(4)・・対物レンズ、(5)・・情
報記録媒体、(6) −−)ラック、(10a)、(1
0b)・轡第1Q受光部、(17)−−全回折光束、(
18a)。 (18b)・・第2の受光部。 なお、各図中、同一符号は同−又は相当部分を示す。 代理人    曾  我  道  照   1.;第1
閤 Isa、 18k): 12の受光部 第2g:J 第3図 第4rA    85図 第7図 第8図 欅、10図 ソ 12図 第9図 IC:1 11 図 $113図
FIG. 1 is a front view of essential parts of an embodiment of the present invention, and FIG. 2 is a front view of essential parts for explaining the operation of the apparatus shown in FIG. 3 to 13 show a conventional optical track tracking device, FIG. 3 is an optical layout diagram, FIGS. 4 and 5 are schematic diagrams explaining the output of diffracted light, and FIGS. 6 to 13 show a conventional optical track tracking device. Figure 9 is a diagram illustrating changes in the light intensity distribution of diffracted light due to track deviation, Figures 10 and 11 are schematic diagrams illustrating the output of diffracted light when the recording medium is tilted, and Figure 12. and FIG. 13 are diagrams illustrating changes in the light intensity distribution of diffracted light when the recording medium is tilted. (11...Light source, (4)...Objective lens, (5)...Information recording medium, (6) --) Rack, (10a), (1
0b)・轡1st Q light receiving section, (17) --Total diffracted light flux, (
18a). (18b)...Second light receiving section. In each figure, the same reference numerals indicate the same or corresponding parts. Agent Teru Tseng 1. ;1st
Isa, 18k): 12 light receiving parts 2g:J Fig. 3 Fig. 4rA 85 Fig. 7 Fig. 8 Keyaki, Fig. 10 Fig. 12 Fig. 9 IC: 1 11 Fig. $113 Fig.

Claims (2)

【特許請求の範囲】[Claims] (1)光源と、この光源から出た光を情報記録媒体上に
設けられたトラックに集束する光学的手段と、前記情報
記録媒体からの回折光束により前記光の集束位置と前記
トラックの位置間の変位を検出する検出手段と、この検
出手段の出力により前記光の位置と前記トラックの位置
の相対間隔を変位させる変位手段とを備えた光学的トラ
ック追跡装置において、 前記検出手段は、前記回折光束に対して前記トラック方
向に関して対称に配置された1対の第1の受光部と前記
情報記録媒体が前記光源と垂直に配置されたとき前記回
折光束が照射されない領域にトラック方向に関して対称
に配置された少なくとも1対の第2の受光部とからなり
、前記第1の受光部の出力の差信号を前記第2の受光部
の出力の差信号により補正することを特徴とする光学的
トラック追跡装置。
(1) A light source, an optical means for focusing the light emitted from the light source onto a track provided on an information recording medium, and a distance between the focusing position of the light and the position of the track using a diffracted light beam from the information recording medium. an optical track tracking device comprising: a detection means for detecting the displacement of the diffraction; and a displacement means for displacing the relative distance between the position of the light and the position of the track by the output of the detection means; a pair of first light receiving sections arranged symmetrically with respect to the track direction with respect to the light beam; and a pair of first light receiving sections arranged symmetrically with respect to the track direction in an area that is not irradiated with the diffracted light beam when the information recording medium is arranged perpendicularly to the light source. and at least one pair of second light-receiving sections, wherein a difference signal between the outputs of the first light-receiving section is corrected by a difference signal between the outputs of the second light-receiving section. Device.
(2)第2の受光部が回折光束の照射領域に近づけて配
置されている特許請求の範囲第1項記載の光学的トラッ
ク追跡装置。
(2) The optical track tracking device according to claim 1, wherein the second light receiving section is arranged close to the irradiation area of the diffracted light beam.
JP12243887A 1987-05-21 1987-05-21 Optical track tracing device Pending JPS63288430A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12243887A JPS63288430A (en) 1987-05-21 1987-05-21 Optical track tracing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12243887A JPS63288430A (en) 1987-05-21 1987-05-21 Optical track tracing device

Publications (1)

Publication Number Publication Date
JPS63288430A true JPS63288430A (en) 1988-11-25

Family

ID=14835850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12243887A Pending JPS63288430A (en) 1987-05-21 1987-05-21 Optical track tracing device

Country Status (1)

Country Link
JP (1) JPS63288430A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5566151A (en) * 1995-06-07 1996-10-15 International Business Machines Corporation Optical devices having array detectors with light receiving photo arrays larger than an incident laser beam cross-section

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5566151A (en) * 1995-06-07 1996-10-15 International Business Machines Corporation Optical devices having array detectors with light receiving photo arrays larger than an incident laser beam cross-section

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