JPS63277798A - Device for exchanging anode in electroplating apparatus - Google Patents

Device for exchanging anode in electroplating apparatus

Info

Publication number
JPS63277798A
JPS63277798A JP11226887A JP11226887A JPS63277798A JP S63277798 A JPS63277798 A JP S63277798A JP 11226887 A JP11226887 A JP 11226887A JP 11226887 A JP11226887 A JP 11226887A JP S63277798 A JPS63277798 A JP S63277798A
Authority
JP
Japan
Prior art keywords
anode
exchange
plating
anodes
truck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11226887A
Other languages
Japanese (ja)
Other versions
JPH0686678B2 (en
Inventor
Kenichi Yanagi
謙一 柳
Junkichi Yoneda
米田 順吉
Hajime Shimazaki
島崎 元
Toshio Taguchi
田口 俊夫
Junichi Uchida
淳一 内田
Hironaru Nakabayashi
中林 寛考
Hirohisa Seto
瀬戸 宏久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Corp
Original Assignee
Mitsubishi Heavy Industries Ltd
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Sumitomo Metal Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP11226887A priority Critical patent/JPH0686678B2/en
Publication of JPS63277798A publication Critical patent/JPS63277798A/en
Publication of JPH0686678B2 publication Critical patent/JPH0686678B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To safely and efficiently exchange consumed soluble anodes in a plating tank by connecting an anode exchange truck to the opening in the side wall of the plating tank, transferring the anodes into an exchange case in the truck and fitting new anodes. CONSTITUTION:When soluble anodes 6a, 6b consumed by use in the plating of a steel strip 1 in a plating tank 2 are exchanged, the level of a plating soln. 3 is first lowered to below the opening 10 in the side wall of the tank 2 and an anode exchange truck 12 having wheels 13 is connected to the opening 10. A gate 11 is opened to allow the tank 2 to communicate with the truck 12 and the consumed anodes 6a, 6b are pulled out by sliding on electrifying bars 7a, 7b with pusher bars (not shown) and set on rails 14a, 14b in an exchange case 16 in the truck 12. The case 16 contg. the anodes 6a, 6b is moved on rails 18 through sliding members 17 and new anodes in other exchange case (not shown) in the truck 12 are fitted on the bars 7a, 7b with the pusher bars.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電解メッキ装置、特に鋼帯の連続電解メッキ装
置の陽極交換装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an electrolytic plating apparatus, particularly to an anode exchange apparatus for a continuous electrolytic plating apparatus for steel strip.

〔従来の技術〕[Conventional technology]

第7.8,9図に可溶性陽極を用いた銅帯の連続メッキ
装置の従来装置の一例を示す、可溶性陽極とは、メッキ
のための電気回路に通電することによシ陽極が電解して
メッキ浴液の中に溶は出すものを言う。
Figures 7.8 and 9 show an example of a conventional continuous plating device for copper strips using a soluble anode. A substance that is released into the plating bath solution.

第7図において、鋼帯1はコンダクタロー〃4a、4b
、デフレクタローA15に案内されて、メッキ槽2内の
メッキ浴液3内を通過する間に、相対する可溶性陽極6
a、6b、6c、6dよシメツキ浴液3中に溶は出した
金属によってメッキされる。従って、可溶性陽極6a〜
6dはメッキのために通電した電気量に応じて消耗する
ので、消耗が著しくなったら新しいものと交換している
In Fig. 7, the steel strip 1 is connected to conductor rows 4a, 4b.
, while being guided by the deflector row A15 and passing through the plating bath solution 3 in the plating tank 2, the opposing soluble anode 6
A, 6b, 6c, and 6d are plated with the metal dissolved in the smearing bath solution 3. Therefore, the soluble anode 6a~
The 6d is consumed depending on the amount of electricity applied for plating, so when it becomes significantly worn, it is replaced with a new one.

第8図は第7図に示す可溶性陽極部分の拡大図であシ、
第9図はその矢視Aを示す図であるが、可溶性陽極6a
は銅帯10幅とほぼ同じ幅に配置され、ある高さを持つ
金属板であシ、陽極ブリッジ8に固定された通電パー7
によって懸吊されるよう上端は鉤様をしておシ、かつ下
端はふらつかないよう陽極ガイド9a、9alに挟さま
れるよう薄くなっている。
Figure 8 is an enlarged view of the soluble anode portion shown in Figure 7;
FIG. 9 is a view showing the arrow A, and the soluble anode 6a
is a metal plate arranged with approximately the same width as the width of the copper strip 10 and has a certain height, and is fixed to the anode bridge 8.
The upper end has a hook-like shape so that it can be suspended, and the lower end is thin so that it can be sandwiched between the anode guides 9a and 9al to prevent it from wobbling.

また、可溶性電極6a−m−は第9図に示すような1枚
の板のかわシに、図示省略の複数の短冊状のブロックに
分割したものもある。
Further, the soluble electrodes 6a-m- may be formed into a single plate as shown in FIG. 9, or may be divided into a plurality of strip-shaped blocks (not shown).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

可溶性陽極6a−−−−一は大、小様々あるが、一般に
は数10kg(短冊状)から数100に9(一枚板)の
重量のものである。このような可溶性陽極を交換するに
は、人力でかつぐか、チエンブロックあるいはクレーン
で懸吊するのが一般的でアシ、その際支障となるメッキ
槽カバーを交換に先立って撤去するか、あるいは該カバ
ーに開口部が設けられている。
The soluble anode 6a is available in various sizes, large and small, but generally weighs from several 10 kg (strip shape) to several 100 kg (single plate). To replace such a soluble anode, it is common to lift it manually or suspend it using a chain block or crane.In this case, the plating tank cover that becomes an obstacle must be removed before replacement, or the An opening is provided in the cover.

特に、溶融塩を利用した連続電解メッキ装置等の特殊な
メッキ条件(高温、有害ガス発生、大気この遮断が必要
等)下で運転されるメッキ装置の場合、可溶性陽極を上
記の手段で交換することは、作業性、安全性、メッキ処
理条件への影響等の面で問題があった。
In particular, in the case of plating equipment that is operated under special plating conditions (high temperature, generation of harmful gas, need to shut off atmospheric pressure, etc.) such as continuous electrolytic plating equipment that uses molten salt, the soluble anode should be replaced using the above method. This has caused problems in terms of workability, safety, influence on plating processing conditions, etc.

また、交換作業時間の短縮、生産性の向上等が求められ
ていた。
Additionally, there was a need to shorten replacement work time and improve productivity.

本発明は、かかる問題点を解決した連続電解メッキ装置
の陽極交換装置を提案するものである。
The present invention proposes an anode exchange device for a continuous electrolytic plating apparatus that solves these problems.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は、上記問題点を、可溶性陽極を用いる電解メッ
キ装置のメッキ槽側壁に設けられた開閉自在なゲートを
有する開口部に、密閉状態で連結、切り放し可能な可溶
性陽極交換台車を備えることによシ、解決するものであ
る。
The present invention solves the above problem by providing a soluble anode exchange cart that can be connected and disconnected in a sealed manner to an opening having a gate that can be opened and closed provided on the side wall of a plating tank of an electrolytic plating apparatus using a soluble anode. Yes, it will be resolved.

すなわち本発明は、可溶性陽極を用いる電解メッキ装置
のメッキ槽側壁に設けられた開閉ゲート部に連結される
交換台車と、この台車内で、該台車が上記ゲート部に連
結された状態で上記陽極に対し直角方向に、移動可能な
交換函と、この交換函の上部に設けられ、陽極を懸吊移
動させるためのレールと、陽極を水平移動させるための
手段とを備えた電解メッキ装置の陽極交換装置に関する
That is, the present invention provides an exchange cart connected to an opening/closing gate section provided on a side wall of a plating tank of an electrolytic plating apparatus using a soluble anode, and an exchange truck connected to the gate section in the exchange truck, and an exchange truck connected to the gate section in an electrolytic plating apparatus using a soluble anode. An anode of an electrolytic plating apparatus, comprising a replacement box movable in a direction perpendicular to the replacement box, a rail provided on the top of the replacement box for suspending and moving the anode, and means for horizontally moving the anode. Relating to a switching device.

〔作用〕[Effect]

本発明では、メッキ槽の側壁に設けられた開口に、予め
新陽極を装着した交換函と空の交換函を載置した可溶性
陽極交換台車を連結し、この開口に設けられたゲートを
外部よジ開き、ここから先ずメッキ槽中の消耗陽極を交
換台車の空の交換函に移し、次に交換面内の新陽極をメ
ッキ槽へ移し、この新陽極を通電パーに懸吊させる。し
かる後、ゲートを再び閉じ、陽極交換台車を切離した上
、運転を再開する。
In the present invention, a soluble anode exchange cart on which a new anode has been previously installed and an empty exchange box is connected to an opening provided in the side wall of the plating tank, and a gate provided in this opening is opened from the outside. Open the plating tank, and from here first transfer the consumable anode in the plating tank to the empty replacement box of the replacement cart, then transfer the new anode in the replacement surface to the plating tank, and suspend this new anode on the energizing bar. After that, the gate is closed again, the anode exchange cart is disconnected, and operation is resumed.

〔実施例〕〔Example〕

本発明の実施例を第1〜4図に示す。第1図は第7図に
示した電解メッキ装置の陽[6a*6bと鋼帯1とが相
対する部分を拡大したものであるが、陽極交換に先立ち
メッキ液3の液面を陽極交換に支障のないレベルまで下
げている(レベル低下用装置は図示していない)。第2
図はメッキ槽2の開口10と陽極交換台車12とを連結
した状況を示したもの、第S図はそのA−A矢視を示し
たもの、そして第4図はメッキ槽2の開口10と陽極交
換台車12とを連結し、陽極6を交換する手順を示した
ものである。
Examples of the present invention are shown in FIGS. 1-4. Figure 1 is an enlarged view of the part where the anode [6a*6b and the steel strip 1] of the electrolytic plating apparatus shown in Figure 7 face each other. The level has been lowered to a level that does not cause any problems (the device for lowering the level is not shown). Second
The figure shows a state in which the opening 10 of the plating tank 2 and the anode exchange cart 12 are connected, Figure S shows the A-A direction, and Figure 4 shows the opening 10 of the plating tank 2 and the anode exchange cart 12. This figure shows the procedure for connecting the anode exchange cart 12 and exchanging the anode 6.

第1〜4図において、10はメッキ槽2の側壁に設けら
れたゲート11を有する開口、13は台車の車輪、14
a、14bは陽fJi、 6 a −−一一一を懸吊移
動するためのレール、15a115bは陽極65L−−
−一をはさみ案内するためのガイド、16はV−A/1
4a、 14b、ガイド15a、15bを固定し、かつ
交換台車12内をレーA/ 14 a −−−一に垂直
な方向に移動可能な交換函、17.18は交換函を14
a−一一一に垂直な方向に移動させるための摺動部材と
そのレールである。その他の符号は第7〜9図と共通で
ある。なお、陽極ガイド9a、9al 、 9 b 、
 9−はメッキ槽2に固定されておシ、ガイド9aと9
a4この間49bと9blこの間のスキマは陽極6a、
6bの下部の厚さよシ若干大きくシ、陽極6a 、6b
の取出し、取入れがスムーズに行えるようにしである。
In FIGS. 1 to 4, 10 is an opening provided on the side wall of the plating tank 2 and has a gate 11, 13 is a wheel of a cart, and 14
a, 14b are positive fJi, 6 a -- rail for suspending and moving 111, 15a115b is anode 65L --
- Guide for guiding 1, 16 is V-A/1
4a, 14b, the guides 15a, 15b are fixed, and the exchange box is movable in the direction perpendicular to the tray A/14 a --- within the exchange cart 12; 17.18 is the exchange box 14;
This is a sliding member and its rail for movement in a direction perpendicular to the a-111. Other symbols are the same as in FIGS. 7-9. Note that the anode guides 9a, 9al, 9b,
9- is fixed to the plating tank 2, and the guides 9a and 9
a4 The gap between 49b and 9bl is the anode 6a,
The thickness of the lower part of 6b is slightly larger than that of anode 6a, 6b.
This makes it possible to take out and take in things smoothly.

レール14は通電パー7と上面が同一傾斜をしておシ、
交換函16をレー/I/18を滑らせ、レール14を通
電パー7の延長線に来るようにすれば、陽極6a−一−
−−を懸吊したttメツキ槽2−陽極交換台車12間を
移動可能である。同様に交換台車12の陽極ガイド15
a−−−一例もメッキ槽2内の陽極ガイド95L−一一
一一も同一レベルにあシ、両者を同二線上に合わせると
とによ)、前記レール14と連携して、陽極6a−−−
一をふらつかせることなく、メッキ槽2−陽極交換台車
12間を移動可能である。
The upper surface of the rail 14 has the same slope as the energized par 7,
If the replacement box 16 is slid on the rail/I/18 and the rail 14 is placed on the extension line of the energized par 7, the anode 6a-1-
-- can be moved between the TT plating tank 2 and the anode exchange cart 12 on which the tt plating tank 2 is suspended. Similarly, the anode guide 15 of the exchange cart 12
(a) In this example, the anode guide 95L-1111 in the plating tank 2 is on the same level, and both are arranged on the same line. ---
It is possible to move between the plating tank 2 and the anode exchange trolley 12 without causing any wobbling.

陽極6h−−一例の交換操作手順を第2〜4図によシ述
べる。第4図■に示すように開口部10、グー)11が
閉じられているメッキ槽2の陽極4a、6bが消耗し、
新しい陽極と交換する必要を生じた場合、8g4図■に
示すように先ず開口部10の蓋をあけ、交換台車12を
これに連結し、次いでゲート11をあげ、消耗陽極6a
、6bを交換台車12へ引出せるようにする。交換台車
12の隅には予め新しい陽極6tL1m6b’tv−ル
14a、14bに懸吊させ、陽極ガイド15a、15b
−−−一にはさむように装填した交換函16′が置いて
あり、また空の交換函16が開口部11に面して置いで
ある。
Anode 6h -- An example of the replacement operation procedure will be described with reference to FIGS. 2 to 4. As shown in FIG. 4, the anodes 4a and 6b of the plating tank 2, whose openings 10 and 11 are closed, are worn out.
When it becomes necessary to replace the anode with a new one, first open the lid of the opening 10, connect the replacement trolley 12 to it, and then raise the gate 11, as shown in Figure 8g4, ■.
, 6b can be pulled out to the exchange cart 12. At the corner of the exchange cart 12, new anodes 6tL1m6b'TV-rues 14a, 14b are hung in advance, and anode guides 15a, 15b are installed.
---There is a loaded replacement box 16' placed between them, and an empty replacement box 16 is placed facing the opening 11.

開口部10のゲート11が開くと、先ずメッキ槽2内の
陽極6a 、 6bを、通電パー7a。
When the gate 11 of the opening 10 is opened, the anodes 6a and 6b in the plating bath 2 are first energized by the energizer 7a.

7b、陽極ガイド9 a 、 9al  、 9 b 
、 9blからV−ル14a、14b、陽極ガイド15
a−−一−へと滑らせながら移し、交換函16へ移す。
7b, anode guide 9a, 9al, 9b
, 9bl to V-rules 14a, 14b, anode guide 15
Transfer it to a--1- while sliding it, and then transfer it to the exchange box 16.

次に第4図■に示すように、交換函16゜161tV−
A/18上を滑らせながら移し、交換函16′が第4図
■に示すように開口部1oに而するようにする。ここで
、交換函16′内の陽極6a’、6b’がレーJ%/ 
14 a 、 141) a陽極ガイド15a−一−−
から通電パー7a、7b、陽極ガイド9 m 、 9a
l  、 9 b 、 9bl ヘ来るよう移動させる
。最後にゲート11をおろし、開口部10の蓋をしめる
Next, as shown in Figure 4 ■, the exchange box 16°161tV-
Transfer it while sliding it on the A/18 so that the replacement box 16' is placed in the opening 1o as shown in FIG. Here, the anodes 6a' and 6b' in the exchange box 16' are
14a, 141) aAnode guide 15a-1--
energized from pars 7a, 7b, anode guides 9m, 9a
Move it so that it comes to l, 9b, and 9bl. Finally, the gate 11 is lowered and the opening 10 is closed.

交換函16 、16’、陽極6a−−−−の移動、停止
は、外部よシ操作できる手段によって適正速度、方向、
停止位置が設定され、容易に短時間に行えるようKしで
ある。
The exchange boxes 16, 16', anode 6a---- are moved and stopped at appropriate speeds, directions, and by means that can be operated externally.
The stopping position is set and K is set so that it can be done easily and in a short time.

例えば陽極6の移動(水平移動)は、第5図とそのA−
A矢視図である第6図に示すようK。
For example, the movement (horizontal movement) of the anode 6 is shown in FIG.
K as shown in FIG. 6, which is a view from arrow A.

油圧シリンダないしは電動フックビニオンで出し入れす
るブツシャパー20と、そのプッシャパー20の先端に
取付けられた陽極6この連結装置21によって行ない、
上記したように、陽極6を通電パー7、陽極ガイド9か
らV−ル14゜陽極ガイド15へ滑らせ交換函16に移
し、またこの逆のルートによ)陽極6をメッキ槽2へ移
すのである。なお、第6図中、22は陽極6に取付けら
れているピン、23はシリンダ作動式の昇降ラッチ、2
4はプッVヤパ−20を押すときに陽極6に当る面であ
る。
A pusher 20 that is moved in and out using a hydraulic cylinder or an electric hook pinion, an anode 6 attached to the tip of the pusher 20, and a connecting device 21.
As described above, the anode 6 is transferred to the plating tank 2 by sliding the anode 6 from the energized par 7 and the anode guide 9 to the V-ru 14° anode guide 15 and into the exchange box 16, and by the reverse route. be. In FIG. 6, 22 is a pin attached to the anode 6, 23 is a cylinder-operated lift latch, and 2 is a pin attached to the anode 6.
4 is the surface that comes into contact with the anode 6 when pushing the pusher 20.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、陽極6h 、6bの交換に支障となる
メッキ槽2のカバーの撤去等の作業も不要となシ、交換
時間が短縮される。また、特殊なメッキ条件(前記)下
で運転されるメッキ装置でも、安全で、能率的で、しか
もメッキ条件の悪化を招くことなく交換が行なわれて、
良好なメッキ処理を安定に継続して行え生産性が大巾に
向上する。すなわち本発明によれば、メッキ槽2内を大
気と遮断した特殊な雰囲気が要求される場合でも、陽極
交換台車12とメッキ槽2この接合あるいは分離に当っ
て、ガスの漏出入なしに、すなわち大気によるメッキ槽
2内浴液の変質あるいは有害ガスの漏出等の問題なしに
、陽1i6a、4bの交換を迅速に行なうことができる
According to the present invention, there is no need for work such as removing the cover of the plating tank 2, which is a hindrance to replacing the anodes 6h and 6b, and the replacement time is shortened. In addition, even in plating equipment operated under special plating conditions (described above), replacement can be performed safely, efficiently, and without deteriorating the plating conditions.
Good plating processing can be performed stably and continuously, greatly improving productivity. That is, according to the present invention, even when a special atmosphere is required in which the interior of the plating tank 2 is isolated from the atmosphere, the anode exchange cart 12 and the plating tank 2 can be joined or separated without leakage or ingress of gas. The positive electrodes 1i6a and 4b can be quickly replaced without problems such as deterioration of the bath liquid in the plating tank 2 due to the atmosphere or leakage of harmful gases.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の電極部の一例を示す構成図、第2図は
本発明の陽極交換台車とメッキ槽とを連結した状態での
陽極交換手段の一例を示す説明図、第3図はその平面図
、第4図は第1〜3図に示す場合の陽極交換の手順を示
す説明図、第5図は陽極のメツキル内への出入れ手段の
一例を示す図、第6図は第5図0A−A矢視図、第7図
は従来のメッキ槽の概略図、第8図はその陽極構造図、
第9図は第8図の側面図を示も第5図 第6図
FIG. 1 is a configuration diagram showing an example of the electrode section of the present invention, FIG. 2 is an explanatory diagram showing an example of the anode exchange means in a state where the anode exchange cart and plating tank of the present invention are connected, and FIG. Its plan view, FIG. 4 is an explanatory diagram showing the procedure for replacing the anode in the case shown in FIGS. 1 to 3, FIG. 5. Figure 0A-A arrow view, Figure 7 is a schematic diagram of a conventional plating tank, Figure 8 is its anode structure diagram,
Figure 9 shows the side view of Figure 8, and Figure 5 and Figure 6.

Claims (1)

【特許請求の範囲】[Claims] 可溶性陽極を用いる電解メッキ装置のメッキ槽側壁に設
けられた開閉ゲート部に連結される交換台車と、この台
車内で、該台車が上記ゲート部に連結された状態で上記
陽極に対し直角方向に、移動可能な交換函と、この交換
函の上部に設けられ、陽極を懸吊移動させるためのレー
ルと、陽極を水平移動させるための手段とを備えた電解
メッキ装置の陽極交換装置。
An exchange cart connected to an opening/closing gate provided on the side wall of a plating tank of an electrolytic plating apparatus using a soluble anode; An anode exchange device for an electrolytic plating apparatus, comprising a movable exchange box, a rail provided on the top of the exchange box for suspending and moving the anode, and means for horizontally moving the anode.
JP11226887A 1987-05-11 1987-05-11 Anode exchange device for electrolytic plating device Expired - Lifetime JPH0686678B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11226887A JPH0686678B2 (en) 1987-05-11 1987-05-11 Anode exchange device for electrolytic plating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11226887A JPH0686678B2 (en) 1987-05-11 1987-05-11 Anode exchange device for electrolytic plating device

Publications (2)

Publication Number Publication Date
JPS63277798A true JPS63277798A (en) 1988-11-15
JPH0686678B2 JPH0686678B2 (en) 1994-11-02

Family

ID=14582451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11226887A Expired - Lifetime JPH0686678B2 (en) 1987-05-11 1987-05-11 Anode exchange device for electrolytic plating device

Country Status (1)

Country Link
JP (1) JPH0686678B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07102397A (en) * 1993-10-05 1995-04-18 Mitsubishi Heavy Ind Ltd Anodic electrode exchanging device for electroplating device
KR100793587B1 (en) * 2001-12-27 2008-01-14 주식회사 포스코 Apparatus for exchanging the carbon bridge for the electro plating
KR100951244B1 (en) * 2002-10-18 2010-04-05 주식회사 포스코 An electroplating cell apparatus
US9728435B2 (en) 2010-10-21 2017-08-08 Ebara Corporation Plating apparatus and plating method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07102397A (en) * 1993-10-05 1995-04-18 Mitsubishi Heavy Ind Ltd Anodic electrode exchanging device for electroplating device
KR100793587B1 (en) * 2001-12-27 2008-01-14 주식회사 포스코 Apparatus for exchanging the carbon bridge for the electro plating
KR100951244B1 (en) * 2002-10-18 2010-04-05 주식회사 포스코 An electroplating cell apparatus
US9728435B2 (en) 2010-10-21 2017-08-08 Ebara Corporation Plating apparatus and plating method
US9984910B2 (en) 2010-10-21 2018-05-29 Ebara Corporation Plating apparatus and plating method
US9991145B2 (en) 2010-10-21 2018-06-05 Ebara Corporation Plating apparatus and plating method

Also Published As

Publication number Publication date
JPH0686678B2 (en) 1994-11-02

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