JPS6327766U - - Google Patents

Info

Publication number
JPS6327766U
JPS6327766U JP12122986U JP12122986U JPS6327766U JP S6327766 U JPS6327766 U JP S6327766U JP 12122986 U JP12122986 U JP 12122986U JP 12122986 U JP12122986 U JP 12122986U JP S6327766 U JPS6327766 U JP S6327766U
Authority
JP
Japan
Prior art keywords
chamber
input
exhaust
output
air supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12122986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0522698Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986121229U priority Critical patent/JPH0522698Y2/ja
Publication of JPS6327766U publication Critical patent/JPS6327766U/ja
Application granted granted Critical
Publication of JPH0522698Y2 publication Critical patent/JPH0522698Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
  • Multiple-Way Valves (AREA)
JP1986121229U 1986-08-07 1986-08-07 Expired - Lifetime JPH0522698Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986121229U JPH0522698Y2 (enrdf_load_stackoverflow) 1986-08-07 1986-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986121229U JPH0522698Y2 (enrdf_load_stackoverflow) 1986-08-07 1986-08-07

Publications (2)

Publication Number Publication Date
JPS6327766U true JPS6327766U (enrdf_load_stackoverflow) 1988-02-23
JPH0522698Y2 JPH0522698Y2 (enrdf_load_stackoverflow) 1993-06-10

Family

ID=31010303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986121229U Expired - Lifetime JPH0522698Y2 (enrdf_load_stackoverflow) 1986-08-07 1986-08-07

Country Status (1)

Country Link
JP (1) JPH0522698Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607464U (ja) * 1983-06-27 1985-01-19 三菱電機株式会社 排気ガス通路切替バルブ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607464U (ja) * 1983-06-27 1985-01-19 三菱電機株式会社 排気ガス通路切替バルブ装置

Also Published As

Publication number Publication date
JPH0522698Y2 (enrdf_load_stackoverflow) 1993-06-10

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