JPS6327326A - Conveyance branching device - Google Patents

Abstract

PURPOSE:To convey and change the direction of a conveying object without bringing it into contact with ground by providing a supporting body having a guide on its outer peripheral face and the primary side part of a turning linear motor, on the fixed side of a rotary conveying passage. CONSTITUTION:A conveying table 1 which has been driven to travel by means of a driving linear motor 102 provided in a fixed conveying passage 2 while being floated up by nozzles 111..., is advance from the fixed conveying passage 2 to a rotary type conveying passage 3 and, by controlling a braking linear motor by means of a detected signal, the conveying table 1 is braked and stopped on the rotary conveying passage 3. Then, as the primary side parts 11 of a turning linear motor are electrified so as to generate driving forces in mutually opposite directions, a thrust is generated in reaction plates 13, a rotary bearing 8 is rotated with the conveying table 1 loaded on it, and the rotation is stopped by means of a detected signal. And, the conveying table 1 is advanced to a fixed conveying passage 5 and arrives at a desired object point.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is directed to a branching section of a conveying device suitable for changing the direction of a conveying platform at a branching section of a conveying device used in clean rooms where dust generation is extremely difficult. Regarding the outfit.

Conventional technology Conventionally, this type of conveyor has a hanging type endless trolley conveyor, but these generate fine dust in the movable contact parts, so they are used for assembling precision electronic parts or for pharmaceuticals. Since it cannot be used for manufacturing or the like, a conveyance device that uses a linear motor as a drive source while air-levitating a conveyance cart loaded with conveyed objects has been put into practical use. However, if the transported object has multiple destinations, there will be multiple transport paths, and it is necessary to transfer the transported object between these transport paths. There is a problem that the configuration of the on-board equipment is complicated and expensive.

Problems to be Solved by the Invention The present invention has been made in view of the above-mentioned points, and is capable of conveying and changing the direction of the conveyed object without contact, has high stopping accuracy after changing the direction, and has the ability to transfer objects from one path to another. The present invention provides a device that can be connected to a route without contact.

Means for Solving the Node Points The present invention provides a supporting stand that is fully guided on the outer circumferential surface on the fixed side of the rotating conveyance path, and a primary part of a linear motor for rotation, and a rotating conveyance path on the movable side. an air duct which has compressed air injection nozzles on the top and side to levitate the table with compressed air, and which has a built-in primary part of a linear motor for stopping and driving the conveyance table; The rotating magnetic fluid bearing is provided with a bearing and a rotating linear motor rear axis plate, the rotating magnetic fluid bearing is placed on the fixed side support of the rotating conveyance path, and the rotating magnetic fluid bearing is floated from the fixed side support of the conveying path. It is designed to rotate and branch the transport platform into transport paths in different directions.

EXAMPLES Below, examples of the present invention will be explained based on the drawings.

As an embodiment of the present invention, an example in which the conveyance path is branched into a T-shape will be described, but this branching form is not limited to this and can be applied to any shape.

FIG. 1 is an explanatory plan view showing the configuration of the apparatus of the present invention, FIG. 2 is a sectional view of the same, and FIG. 3 is a side view of the same. It travels between the conveyance path 2 and the fixed conveyance path 5 and reaches the destination point. Conveyance path 2, 4.5
is an air levitation nozzle 111 for injecting compressed air onto the upper surface of the sealed case to levitate the carrier 1. .

The conveyance platform 1 consists of a floor surface 101 having a flange extending over the fixed conveyance paths 2, 4.5, and an underframe for holding an object to be conveyed. Use it for both purposes.

In this embodiment, an aluminum plate was integrally bonded to the lower part of the iron plate floor surface.

Inside the air duct of the fixed conveyance path 2, 4.5, a driving linear motor next part 102 is arranged at an appropriate interval, and the conveyance table 1 is connected to the nozzle hole 111°1. By injecting air from the air duct, the carrier is floated above the conveyance path, and the conveyor table is driven by a linear motor that is constructed by connecting the primary side portion of the linear motor and the floor surface of the conveyor table 1, or the secondary side portion of the near motor. 1 goes straight. Reference numeral 3 denotes a swing-type transfer path, and both ends of the swing-type transfer path 3 can be connected to the fixed conveyance paths 2, 4.5, respectively, at a slight distance from each other when turning. The structure of the rotating transfer path 3 is the same as that of the transfer paths 2 and 4.5, and includes an air duct.
A braking linear motor next side portion 6 is provided inside the turning center point 14 adduct.

It should be noted that the nozzle holes provided in the air duct (K) of the swiveling transfer path 3 are appropriately provided not only on the top surface but also on both sides.

The swivel type vibration path 3 is held by a swivel bearing 8,
The swing bearing 8 is formed into a cylindrical shape, and a magnetic fluid 17 is injected into a non-magnetic guide 15 provided on the outer peripheral surface of the support base 9.
The magnetic fluid 18 is attracted to the lower surface of the permanent magnet 16 by the vertical magnetic field of the permanent magnet 16 disposed around the lower surface of the slewing bearing 8, magnetically buoyant force is generated, and the slewing bearing 8 floats.

17 is a permanent magnet placed #! on a part of the lower surface of the swing bearing 8.
In this embodiment, 4
Place it around the place.

The magnetic field generated by the permanent magnet 17 attracts the magnetic fluid 18 in the direction of the rotation axis, generating magnetic buoyancy and providing the rotation bearing 8 with a guiding force in the radial direction, forming a magnetic fluid bearing. It turns out.

As a result, the slewing bearing 8 can obtain buoyancy in the thrust direction and guiding force in the radial direction.
floats from the support base 9 without contact, and can be turned with no dust generation and low turning resistance. In addition, a lower vibe 7 is disposed at the center axis of the rotation, passing through the support base 9 and the rotation bearing 8 and reaching the air duct, and the compressed air supplied from the pipe 7 is jetted out from a number of nozzles provided at the top and side of the air duct. When the conveyance table 1 enters the rotating transfer path 3, it is supported.

A plurality of rotating linear motor next parts 11 and 12 are arranged at appropriate intervals on the outer periphery of the swing bearing, depending on the desired branching direction (in the illustrated example, 2x21 is fixed for two directions) on the same radius circumferential line. Install it opposite the floor.

In addition, on the outside of the swing bearing 8, there is a suspension K (in the illustrated example, a reaction brake in the shape of a fan bone plate) 13 that covers the next side portion 11 and 12 of the swing linear motor (in the illustrated example, in the 3-axis direction of the swing type conveyance path and 900). .A pair of 13t tl are connected so that both operate as a turning linear motor. Although not shown, there is a linear motor 10 for driving, braking, and turning.
2,,,6,11.12. 10201. is controlled by detecting a signal by a position detecting means.

Next, regarding the operation of the device of the present invention, the conveyance table 1 is moved to the fixed conveyance path 2.
A case in which the vehicle travels from the station to the fixed conveyance path 5 will be explained.

Nozzle 111 Floats by +e+\Fixed conveyance path 2
When the conveyance table 1, which has been driven and traveled by a driving linear motor 102 provided inside the vehicle, enters the revolving conveyance path 3 from the fixed conveyance path 2, and the position of the conveyance table is detected by a separate detection means (not shown), this detection occurs. By controlling the braking linear motor 6 with a signal, a conveyor table l is placed on the rotating conveyor path 3.
brake to a stop. Then, the compressed air supplied by the vibrator 7 is cut off, and the conveyance platform 1 is landed on the rotating conveyance path 3. However, depending on the type of conveyed object and the degree of stop position accuracy, it may not necessarily be necessary to land the object.

Next, when the next parts u and 11 of the swinging linear motors are energized so as to generate driving forces in opposite directions, a thrust is generated in the rear axis plate 13.13, and the swinging bearing 8
The next parts 12, 12 of the linear motors, which are rotated with the conveyor table 1 placed thereon and are provided at positions in the desired direction, are activated by signals detected by separate detection means (not shown) to move the rear-axis templates 13, 1. The slewing bearing is actuated to stop the slewing through the ll, thereby stopping the slewing.

Then, compressed air is again supplied from the pipe 7 to the air duct of the revolving conveyance path 3 to levitate the conveyance platform 1, and the linear motor 6 is activated to drive the conveyance platform 1, so that the conveyance platform 1 is moved to the fixed conveyance path 5. proceed towards the desired destination.

As an embodiment of the position detection means for arriving at the branch turning point of the conveyance platform 1, a photointerrupter having three pairs of light emitting and light receiving parts such as phototubes is provided, and two of the three pairs are placed approximately equally inside the conveyance vehicle. If it is set, the position of the transport vehicle 1 can be detected by the combination of ON and OFF of the three pairs of light receiving sections.

In addition, the conveyor table can be accelerated or decelerated to a desired speed by controlling an inverter to supply an output of a predetermined frequency to some coils of the linear motor, or can be braked by applying a reverse phase voltage. .

It is also possible to arbitrarily combine conveyor stockers, automated warehouses, etc. that connect to the next process with a transfer machine or the like that connects to the next process at the final destination point.

The operation sequence of the above-mentioned conveyance device, that is, the air injection of the conveyance path, I
J Near motor drive, rotating transport path position detection, braking I
Each operation, such as J near motor activation, air injection stop, rotation linear motor activation, position detection, rotation stop, air injection for floating the transport platform, and drive linear motor activation, is equipped with a detection means for each operation, and the basic movement pattern of the conveyed object is detected in advance. By storing this information in your MyFun, it will automatically operate.

Although the above description has been made regarding the case of a T-shaped branch, the branching direction is not limited to this, but any angle may be used, and even if there are a plurality of branching directions, the above-mentioned method can be applied.

Effects of the Invention When the present invention is used, there are no contact points in each operation, completely preventing dust generation, and there is no need for a special operation mechanism when lifting the swivel bearing, and there is no need for a power outage. Since it is possible to provide a device that can be transferred in a wide variety of branching directions using only a single conveyance path without any adverse effects and without compromising the above advantages, it is suitable for conveyance in clean rooms etc. where dust generation is extremely disliked. It is something.

[Brief explanation of the drawing]

Fig. 1 is an explanatory plan view showing the configuration of the apparatus of the present invention, Fig. 2 is a partial plan sectional view, Fig. 3 is a side view of the same, Fig. 4 is a side sectional view, and Fig. 5 is a schematic diagram showing the conveyance path. It is a diagram. 1...Transportation vehicle 2, 4.5...Transportation path 3...Swivel type transfer path 6...Linear motor next side portion 7...Vibe 8...Air bearing 9...Support stand 10...Pipe 11.12...Next side part of turning linear motor 13.
・・Turning reactor plate 15 ・Non-magnetic guide 18 ・Magnetic fluid 16 ・Permanent magnet (generates a magnetic field in the vertical direction)・
- Vertical load 17...l (Magnetic field perpendicular to the circumference g)...Horizontal Patent applicant Hitachi Kiden Kogyo Co., Ltd. Agent Hayashi
Kiyoshi Imei and 1 other figure 1 figure 3 figure 4 figure 5

Claims (1)

[Claims] (1) In a device that transports a conveyance table on which an object is placed to a destination, a support table having a guide on the outer peripheral surface and a primary part of a rotation linear motor are arranged on the fixed side of the rotation conveyance path. and an air duct on the movable side of the rotating conveyance path, which has compressed air injection nozzles on the upper and side parts to levitate the conveyance table with compressed air, and has a built-in linear motor next part for stopping and driving the conveyance table; A rotating magnetic fluid bearing that holds the air duct and a rotating linear motor reaction plate are provided, the rotating magnetic fluid bearing is placed on the fixed side support of the rotating conveyance path, and the rotating magnetic fluid bearing is conveyed. A conveyance branching device characterized in that the conveyance platform is floated and rotated from a path-fixed support base to branch the conveyance platform into conveyance paths in different directions.