JPS6326763Y2 - - Google Patents
Info
- Publication number
- JPS6326763Y2 JPS6326763Y2 JP10716482U JP10716482U JPS6326763Y2 JP S6326763 Y2 JPS6326763 Y2 JP S6326763Y2 JP 10716482 U JP10716482 U JP 10716482U JP 10716482 U JP10716482 U JP 10716482U JP S6326763 Y2 JPS6326763 Y2 JP S6326763Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- polarizer
- light
- plane
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000010287 polarization Effects 0.000 claims description 33
- 239000010408 film Substances 0.000 description 70
- 230000003287 optical effect Effects 0.000 description 18
- 238000001228 spectrum Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 238000000411 transmission spectrum Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10716482U JPS5912042U (ja) | 1982-07-14 | 1982-07-14 | 透明フイルムの光学定数測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10716482U JPS5912042U (ja) | 1982-07-14 | 1982-07-14 | 透明フイルムの光学定数測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5912042U JPS5912042U (ja) | 1984-01-25 |
JPS6326763Y2 true JPS6326763Y2 (US07943777-20110517-C00090.png) | 1988-07-20 |
Family
ID=30250491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10716482U Granted JPS5912042U (ja) | 1982-07-14 | 1982-07-14 | 透明フイルムの光学定数測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5912042U (US07943777-20110517-C00090.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0820358B2 (ja) * | 1986-03-03 | 1996-03-04 | オリンパス光学工業株式会社 | 光学的記録媒体用基盤の屈折率の測定装置 |
-
1982
- 1982-07-14 JP JP10716482U patent/JPS5912042U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5912042U (ja) | 1984-01-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5368507B2 (ja) | 自己較正機能を備える表面特性解析用システム | |
US4332476A (en) | Method and apparatus for studying surface properties | |
US6804003B1 (en) | System for analyzing surface characteristics with self-calibrating capability | |
US6734968B1 (en) | System for analyzing surface characteristics with self-calibrating capability | |
US4453828A (en) | Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes | |
JPH0678892B2 (ja) | 被膜厚さ測定器 | |
JP3520379B2 (ja) | 光学定数測定方法およびその装置 | |
JPS6326763Y2 (US07943777-20110517-C00090.png) | ||
JPS62266439A (ja) | 分光偏光測定装置 | |
JP3131242B2 (ja) | 光ビーム入射角の測定方法、測定装置及び該装置を距離測定に使用する方法 | |
JPS60122333A (ja) | 偏光解析装置 | |
JPH0721405B2 (ja) | フーリェ変換方式赤外線膜厚測定方法 | |
CN108759689A (zh) | 基于双光路红外反射法的涂层测厚仪的测厚方法 | |
JPS628131B2 (US07943777-20110517-C00090.png) | ||
JP2787809B2 (ja) | ガラス物質から成るウエハーの屈折率を測定する方法及び装置 | |
Rao | Spectrographic technique for determining refractive indices | |
CN110455745B (zh) | 一种测量液体折射率色散的方法及其应用 | |
JPH07325025A (ja) | 光減衰法による粒子径及び濃度測定装置 | |
JPS6041732B2 (ja) | 偏光解析装置 | |
SU737817A1 (ru) | Интерференционный способ измерени показател преломлени диэлектрических пленок переменной толщины | |
JPS6244215B2 (US07943777-20110517-C00090.png) | ||
SU568034A1 (ru) | Фотоэлектрический автоколлиматор | |
JPH0445103B2 (US07943777-20110517-C00090.png) | ||
SU1642334A1 (ru) | Способ определени показател преломлени материала | |
Azzam et al. | Conventional and generalized Mueller-matrix ellipsometry using the four-detector photopolarimeter |