JPS6326403A - Static pressure non-contact type cylinder device - Google Patents

Static pressure non-contact type cylinder device

Info

Publication number
JPS6326403A
JPS6326403A JP16960086A JP16960086A JPS6326403A JP S6326403 A JPS6326403 A JP S6326403A JP 16960086 A JP16960086 A JP 16960086A JP 16960086 A JP16960086 A JP 16960086A JP S6326403 A JPS6326403 A JP S6326403A
Authority
JP
Japan
Prior art keywords
cylinder
static pressure
piston
piston rod
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16960086A
Other languages
Japanese (ja)
Inventor
Susumu Horikane
堀金 進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP16960086A priority Critical patent/JPS6326403A/en
Publication of JPS6326403A publication Critical patent/JPS6326403A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent stick-slip in low-speed operation by providing static pressure pockets and restriction parts between a piston head and the inner wall of a cylinder and between a piston rod and the rod insertion hole of a cylinder end in order to support a piston in non-contact manner. CONSTITUTION:In case of a cylinder device 1 which is fixed on the back side of a working table making reciprocating motion on the body 2 of a surface grinder, fluid passages 17 and 17' and a plurality of restriction passages 12 and 12' which extend radially from these fluid passages 17 and 17' to the outer peripheral part of a head are formed in piston heads 5 and 5' fixed to the tip end of a hollow piston rod 6 into which static pressure oil supply pipes 7 and 7' are inserted. Also, a plurality of static pressure pockets 11 and 11' where restriction passages 12 and 12' open are formed on the outer peripheral part of the head. Furthermore, a plurality of static pressure pockets 14 are formed approximately in the middle of the inner peripheral part of an end bush 8 fixed to each end of a cylinder 3, and a restriction passage 15 connecting each static pressure pocket 14 to a cylinder house 16 are formed.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、例えば平面研削盤等の低速テーブル送り用油
圧駆動装置に用いられるシリンダ装置、49′/C静圧
流体膜によってピストンとシリンダを非接触状態で作動
せしめるようにした静圧非接触形シリンダ装置に関する
Detailed Description of the Invention (Industrial Field of Application) The present invention is a cylinder device used in a hydraulic drive device for low-speed table feeding such as a surface grinder, in which a piston and a cylinder are connected by a 49'/C static pressure fluid film. The present invention relates to a static pressure non-contact type cylinder device that is operated in a non-contact state.

(従来技術) 工作機械のテーブル送り用シリンダ装置は、通常シリン
ダをテーブル裏側に固着し、ピストンロッドをベッドて
固定し、シリンダ内に導入された作動油によってピスト
ンて対しシリンダをテーブルと共に往復移動させるよう
構成されている。従来のこの種の油圧シリンダ装置では
、作動油をシリンダ室内に封止するためにピストンヘッ
ドの外周面とシリンダ内壁との間、およびピストンロッ
ドとシリンダ端部のピストンロッド挿入穴部との間に0
1Jング、パツキンその他のシール装置ヲ設けている。
(Prior art) A cylinder device for feeding a table in a machine tool usually has a cylinder fixed to the back side of the table, a piston rod fixed on a bed, and hydraulic oil introduced into the cylinder to move the cylinder back and forth with the table against the piston. It is configured like this. In this type of conventional hydraulic cylinder device, in order to seal the hydraulic oil in the cylinder chamber, there are gaps between the outer peripheral surface of the piston head and the inner wall of the cylinder, and between the piston rod and the piston rod insertion hole at the end of the cylinder. 0
1J ring, packing and other sealing devices are provided.

この場合、ピストンヘッドとシリンダ内壁は密着して相
対的に摺動する。
In this case, the piston head and the cylinder inner wall are in close contact with each other and slide relative to each other.

(発明が解決しようとする問題点) 上述した従来のシリンダ装置ではシリンダとピストンと
が直接あるいはパツキン等のシールRfを介して摺動接
触するので、送り動作がスムーズにいかない場合があり
、%て低速送りの場合にはスティックスリップと称する
詰り送り現象が生ずる。iた高速送りの場合は、摺動部
とシール装置間の摺動摩擦抵抗による発熱が生じ、シー
ル装置を劣化させるとともに本体の熱変位によって精度
が阻害される。摺動部の摩耗があるため補修が必要とな
る等の欠点があった。またシールレスシリンダのように
シール装fを不要としたものもあるが、この場合は、高
速で送り方向を反転したときサージ正によりピストンと
シリンダが衝突する念め、高速反転動作をするものVC
は適さず、またストロークの長いものには不向きである
などの欠点があった。
(Problems to be Solved by the Invention) In the above-mentioned conventional cylinder device, the cylinder and the piston come into sliding contact directly or through a seal Rf such as a packing, so the feeding operation may not be smooth. In the case of low-speed feed, a jammed feed phenomenon called stick-slip occurs. In the case of high-speed feeding, heat generation occurs due to sliding frictional resistance between the sliding part and the sealing device, which deteriorates the sealing device and impairs accuracy due to thermal displacement of the main body. There were drawbacks such as the need for repairs due to wear of the sliding parts. There are also sealless cylinders that do not require a seal f, but in this case, in order to prevent the piston and cylinder from colliding due to positive surge when the feed direction is reversed at high speed, cylinders that perform high-speed reversal operations (VC)
It also had drawbacks such as being unsuitable for long strokes.

(問題点を解決するための手段) 本発明による静圧非接触形シリンダ装置は、ピストンヘ
ッドとシリンダ内壁の間およびピストンロッドとシリン
ダ端部のピストンロッド挿通穴の間に極少の隙間および
絞り部をもっ静圧ポケット部を形成し、前記ピストンヘ
ッド内に前記静圧ポケット部に連通ずる静圧油供給管路
を設け、さらに前記静圧ポケット部に導入される静圧油
をシリンダ装置作動油の圧力より高くして前記隙間がら
流出せしめ、これによって前記隙間て静圧油膜を形成す
るようにしたものである。
(Means for Solving the Problems) The static pressure non-contact cylinder device according to the present invention has extremely small gaps and constrictions between the piston head and the cylinder inner wall and between the piston rod and the piston rod insertion hole at the end of the cylinder. A static pressure pocket is formed with a static pressure pocket, a static pressure oil supply pipe is provided in the piston head and communicates with the static pressure pocket, and the static pressure oil introduced into the static pressure pocket is supplied to cylinder device hydraulic oil. The pressure is increased to a pressure higher than 1 to cause the oil to flow out of the gap, thereby forming a hydrostatic oil film in the gap.

(実施例5 次に1本発明を図面を参照しながら実施例について説明
する。
(Example 5) Next, an example of the present invention will be described with reference to the drawings.

第1図は本発明の実施例に係る静圧非接触形シリンダ装
置の部分的な縦断面図であり、第2図は第1図の■−■
線に沿う横断面図、第3図は同じく第1図のI−■線に
沿った横断面図である。また第4図は本発明に係るシリ
ンダ装置を平面研削盤のテーブル送り駆動部に用いた場
合の全体側面図である。第4図を参照すれば、平面研削
盤の本体(ベッド)2上を往復摺動する加工テーブル1
の裏側にブラケット4を介して不発明に係るシリンダ3
が1両端および中央部の3個所で固着されている。先端
にピストンヘッドを有する一対のピストンロッド6.6
′がシリンダ両端から挿入され、かつ各ピストンロッド
6.6′の後端が作動油供給路9a(第1図)をもつフ
ート部材9.9′に固着されている。フート部材9,9
′はベッド2YC固定されかつ図示しない作動油供給源
に連絡されている。後述する如くピストンロッド6.6
′は中空に形成され、この中空部に静圧油供給パイプ7
.7′が挿入されている。第4図で作動油の圧油が一方
(入側)のフート部材9から中空のピストンロッド6を
通してシリンダ室内で導入されるときは、他方(B側)
のフート部材9′から背圧の作動油が排出され、これに
よってシリンダ3、したがってテーブル1は同図の矢印
方向へ送られる。圧油の作動油と背圧油の流れ方向を逆
にすればシリンダ3の移動方向は逆になる。
FIG. 1 is a partial vertical sectional view of a static pressure non-contact type cylinder device according to an embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view taken along line I--■ in FIG. 1 as well. Moreover, FIG. 4 is an overall side view when the cylinder device according to the present invention is used in a table feed drive section of a surface grinder. Referring to FIG. 4, a processing table 1 that reciprocates on a main body (bed) 2 of a surface grinder.
Cylinder 3 according to the invention via bracket 4 on the back side of
is fixed at three locations: one at both ends and the center. A pair of piston rods 6.6 with piston heads at their tips
' are inserted from both ends of the cylinder, and the rear end of each piston rod 6.6' is fixed to a foot member 9.9' having a hydraulic oil supply passage 9a (FIG. 1). Foot members 9, 9
' is fixed to the bed 2YC and connected to a hydraulic oil supply source (not shown). As described later, the piston rod 6.6
' is formed hollow, and a static pressure oil supply pipe 7 is installed in this hollow part.
.. 7' is inserted. In Fig. 4, when hydraulic oil is introduced into the cylinder chamber from the foot member 9 on one side (inlet side) through the hollow piston rod 6, it is introduced into the cylinder chamber from the foot member 9 on the other side (on the B side).
Back-pressure hydraulic oil is discharged from the foot member 9', and the cylinder 3, and therefore the table 1, are sent in the direction of the arrow in the figure. If the flow directions of the hydraulic oil and the back pressure oil are reversed, the direction of movement of the cylinder 3 will be reversed.

第1図および第2図、第3図を参照してシリンダの内部
構造を詳細に説明する。中空のピストンロッド6の先端
に固着されたピストンヘッド5には、流体通路17およ
び該通路17からヘッド外周部まで放射方向にのびる複
数本の1図示実施例でVi4Xの絞り通路12が形成さ
れ、またヘッド外周部に前記絞り通路12が開口する静
圧ポケット11が周方向に4個形成されている。静圧ポ
ケット11以外のピストンヘッド外周部はシリンダ内壁
に対してわずかな隙間(ピストンヘッド隙間)18を有
する。
The internal structure of the cylinder will be described in detail with reference to FIGS. 1, 2, and 3. The piston head 5 fixed to the tip of the hollow piston rod 6 is formed with a fluid passage 17 and a plurality of Vi4X throttle passages 12 in the illustrated embodiment extending radially from the passage 17 to the outer circumference of the head. Furthermore, four static pressure pockets 11 are formed in the circumferential direction on the outer periphery of the head, into which the throttle passages 12 are opened. The outer peripheral portion of the piston head other than the static pressure pocket 11 has a slight gap (piston head gap) 18 with respect to the inner wall of the cylinder.

−y−t一部材9yc保持されかつピストンロッド6の
中空部にのびる静圧油供給バイブ7はピストンヘッド5
の流体通路17に連結される。ピストンロッド6の先端
近くの外周部には該ロッドの中空部とシリンダ室16と
t連通する連通穴10が周方向に複数個設けられている
-y-t One member 9yc is held and the static pressure oil supply vibe 7 extending into the hollow part of the piston rod 6 is connected to the piston head 5.
is connected to the fluid passage 17 of. A plurality of communication holes 10 are provided in the circumferential direction on the outer periphery near the tip of the piston rod 6, which communicate with the hollow portion of the rod and the cylinder chamber 16.

シリンダ3の各端部′/cはシリンダエンドブツシュ8
が固着され、該ブツシュによりピストンロッド挿通穴が
構成される。シリンダエンドブツシュ8の内周部はピス
トンロッド6に対してわずかな隙間(ブツシュ隙間)2
1を有するように内径が定められ、また該内周部のほぼ
中間位置で複数個の、図示実施例では第3図に示すよっ
て周方向に4個の静圧ポケット14が形成されている。
Each end '/c of the cylinder 3 has a cylinder end bushing 8
is fixed, and the bush defines a piston rod insertion hole. The inner circumference of the cylinder end bushing 8 has a slight gap (bushing gap) 2 with respect to the piston rod 6.
1, and a plurality of static pressure pockets 14 (in the illustrated embodiment, four in the circumferential direction as shown in FIG. 3) are formed approximately in the middle of the inner periphery.

さらに前記ブツシュ8YCは各静圧ポケット14とシリ
ンダ室16とを連通ずる放射方向にのびた絞り通路15
が形成されている。シリンダ3の軸方向中央位置にはピ
ストンヘッド5の靜圧ポケット11から前記ピストンヘ
ッド隙間18を経て排出された静圧油の排出口13が設
けられている。
Furthermore, the bushing 8YC has a throttle passage 15 extending in the radial direction that communicates each static pressure pocket 14 with the cylinder chamber 16.
is formed. A discharge port 13 for the hydrostatic oil discharged from the static pressure pocket 11 of the piston head 5 through the piston head gap 18 is provided at the axial center of the cylinder 3 .

以上はシリンダ3の中央から片側の構造について説明し
たが、他方の片側についても同様である。
Although the structure of one side of the cylinder 3 from the center has been described above, the same applies to the other side.

このような構成で、一方のフート部材9の作動油供給路
9aから圧油をピストンロッド6の中空部へ、さらに連
通穴10から一万のシリンダ室16内へ、矢印Aの如く
供給し、他方のシリンダ室16′の背圧油を他方のピス
トンロッド6′の連通穴10′からピストンロッド中空
部を通して矢印Bの如く送出し、他方の7ツト部材(第
1図には図示省略)から排出すると、第4図でも述べた
ようにシリンダ3 ij ?nl記一方のフート部材9
側へ移動する。このとき同時に両側の静圧油供給パイプ
7゜7′から前記作動油の油圧よりも高圧の静圧油を矢
印Cの如く供給する。静圧油はピストンヘッド5゜5′
の絞り通路12 、12’で負荷能力を有して静圧ポケ
ット11.11’lC圧入され、ピストンヘッド外周の
極少隙間18 、18’で油膜剛性をもたらし、さらに
両側のシリンダ室16 、16’へ流れ込む。
With this configuration, pressure oil is supplied from the hydraulic oil supply path 9a of one foot member 9 to the hollow part of the piston rod 6, and further from the communication hole 10 into the 10,000 cylinder chambers 16 as shown by arrow A. The back pressure oil in the other cylinder chamber 16' is sent out from the communication hole 10' of the other piston rod 6' through the hollow part of the piston rod as shown by arrow B, and from the other 7-piece member (not shown in FIG. 1). When discharged, cylinder 3 ij ? nl One foot member 9
Move to the side. At this time, static pressure oil having a pressure higher than the hydraulic pressure of the hydraulic oil is simultaneously supplied from the static pressure oil supply pipes 7° 7' on both sides as shown by arrow C. Static pressure oil is piston head 5°5'
The static pressure pockets 11.11'lC are press-fitted with load capacity in the throttle passages 12 and 12', and the rigidity of the oil film is provided in the extremely small gaps 18 and 18' on the outer periphery of the piston head, and furthermore, the cylinder chambers 16 and 16' on both sides are flows into.

シリンダ端部ておいては作動油およびピストンヘッドの
前記隙間から流入した静圧油がシリンダエンドブツシュ
8の絞り通路15f!:通ってブツシュ側の静圧ポケッ
ト14に圧入され、ピストンロッド6とブツシュ8の極
少隙間21で油膜剛性をもたらす。シリンダの背圧油側
のブツシュ部分でも同様である。シリンダ内の静圧油お
よび作動油(圧油)、背圧油は最後にシリンダエンドブ
ツシュの前記隙間から外部へ漏れ出るが、前記隙間が任
意の半径方向にかたよると、隙間の大きい側のポケット
圧力が低下し、隙間の小さい側のポケット圧力が増大し
、こfllcよって自己補正作用を発揮してピストンヘ
ッドおよびピストンロッドをシリンダおよびシリンダエ
ンドブツシュと同芯位置にもたらし、ピストンヘッドお
よびロッドはシリンダおよびブツシュとの金属接触を起
すことなく非接触支持がなされる。なお、排出口13お
よびシリンダ両端から流れ出た油はシリンダ下側の油受
で回収される。
At the cylinder end, the hydraulic oil and the static pressure oil flowing from the gap in the piston head flow into the throttle passage 15f of the cylinder end bushing 8! : Passed through and press-fitted into the static pressure pocket 14 on the bushing side, providing oil film rigidity in the extremely small gap 21 between the piston rod 6 and the bushing 8. The same applies to the bushing on the back pressure oil side of the cylinder. The static pressure oil, hydraulic oil (pressure oil), and back pressure oil in the cylinder eventually leak out from the gap in the cylinder end bushing, but if the gap is uneven in any radial direction, the side with the larger gap The pocket pressure decreases and the pocket pressure on the side with the smaller clearance increases, which exerts a self-correcting action to bring the piston head and piston rod into a concentric position with the cylinder and cylinder end bushings, causing the piston head and rod to become concentric. Non-contact support is provided without metal contact with the cylinder and bushing. Incidentally, the oil flowing out from the discharge port 13 and both ends of the cylinder is collected by an oil receiver on the lower side of the cylinder.

上述の実施例ではピストンが固定され、シリンダ側か移
動する場合九ついて述べたが、これを逆にしてシリンダ
をペッドて固定し、ピストンを移動テーブルに連結する
ように構成することもできる。
In the above-described embodiment, the piston is fixed and the cylinder side is moved, but this can be reversed and the cylinder is fixed with a pedestal and the piston is connected to the moving table.

(発明の効果) 以上説明したように本発明によれば、ピストンヘッドと
シリンダ内壁間およびピストンロッドとシリンダ端部の
ロンド挿通穴の間に静圧ポケットおよび絞り部を設けて
ピストンを非接触で支持するよってしたので、低速作動
でもスティックスリップ現象が起らず、低速可能範囲が
拡大し、高速作動においても摩擦接触による発熱、摩耗
の問題が発生せず、保守上も有利で高精度が維持できる
等の効果がある。
(Effects of the Invention) As explained above, according to the present invention, a static pressure pocket and a constriction portion are provided between the piston head and the inner wall of the cylinder, and between the piston rod and the rod insertion hole at the end of the cylinder, so that the piston can be moved without contact. Because it is supported, stick-slip phenomenon does not occur even in low-speed operation, expanding the possible low-speed range, and even in high-speed operation, there is no problem of heat generation or wear due to frictional contact, which is advantageous in terms of maintenance, and maintains high accuracy. There are effects such as being able to do it.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例に係る静圧非接触形シリンダ装
置の部分的な縦断面図、第2図は第1図の[[−11線
に沿った横断面図、第3図は第1図のI−1線′F−沿
った横断面図、第4図は本発明を平面研削盤のテーブル
駆@機構に適用した実施例の全体側面図である。 3・・・シリンダ%   5,5′・・−ピストンヘッ
ド、6.6′・・・ピストンロッド、 7.7′・・・静圧油供給パイプ、 8・・・シリンダエンドブツシュ、 9.9′・・・7一ト部材、 10 、10’・・・連
通穴、11 、11’・・・ピストンヘッド側静圧ポケ
ット、12.12’、15・・・絞り通路、 13・・・排出穴。 14・・・シリンダ端部側静圧ポケット。 16 、 l 6’・・・シリンダ室、18 、18’
 、 21・・・隙間。 復代理人 弁理士 染川利吉 第2図
FIG. 1 is a partial longitudinal cross-sectional view of a static pressure non-contact type cylinder device according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along the [[-11 line] of FIG. 1, and FIG. FIG. 1 is a cross-sectional view taken along line I-1'F--, and FIG. 4 is an overall side view of an embodiment in which the present invention is applied to a table drive mechanism of a surface grinder. 3... Cylinder % 5,5'...-Piston head, 6.6'... Piston rod, 7.7'... Hydrostatic oil supply pipe, 8... Cylinder end bushing, 9. 9'... 7 parts, 10, 10'... Communication hole, 11, 11'... Piston head side static pressure pocket, 12.12', 15... Restriction passage, 13... drain hole. 14... Cylinder end side static pressure pocket. 16, l6'... cylinder chamber, 18, 18'
, 21...Gap. Sub-Agent Patent Attorney Rikichi Somekawa Diagram 2

Claims (1)

【特許請求の範囲】[Claims] ピストンヘッドとシリンダ内壁の間およびピストンロッ
ドとシリンダ端部のピストンロッド挿通穴の間に極少の
隙間および絞り部をもつ静圧ポケット部を形成し、前記
ピストンロッド内に前記静圧ポケット部に連通する静圧
油供給管路を設け、さらに前記静圧ポケット部に導入さ
れる静圧油をシリンダ装置作動油の圧力より高くして前
記隙間から流出せしめ、これによつて前記隙間に静圧油
膜を形成することを特徴とする静圧非接触形シリンダ装
置。
A static pressure pocket having an extremely small gap and a constriction is formed between the piston head and the inner wall of the cylinder and between the piston rod and the piston rod insertion hole at the end of the cylinder, and communicates with the static pressure pocket in the piston rod. Further, the static pressure oil introduced into the static pressure pocket is made higher than the pressure of the hydraulic oil of the cylinder device and flows out from the gap, thereby forming a hydrostatic oil film in the gap. A static pressure non-contact type cylinder device characterized by forming.
JP16960086A 1986-07-18 1986-07-18 Static pressure non-contact type cylinder device Pending JPS6326403A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16960086A JPS6326403A (en) 1986-07-18 1986-07-18 Static pressure non-contact type cylinder device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16960086A JPS6326403A (en) 1986-07-18 1986-07-18 Static pressure non-contact type cylinder device

Publications (1)

Publication Number Publication Date
JPS6326403A true JPS6326403A (en) 1988-02-04

Family

ID=15889497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16960086A Pending JPS6326403A (en) 1986-07-18 1986-07-18 Static pressure non-contact type cylinder device

Country Status (1)

Country Link
JP (1) JPS6326403A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH025602U (en) * 1988-06-24 1990-01-16
JPH05138469A (en) * 1991-09-23 1993-06-01 Takeshi Yanagisawa Two-dimensional movement mechanism
JPH061808U (en) * 1992-06-17 1994-01-14 三立精機株式会社 Low friction type cylinder
WO2005011942A3 (en) * 2003-07-29 2005-04-21 Haberman Machine Concrete block mold with moveable liner

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4951468A (en) * 1972-09-25 1974-05-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4951468A (en) * 1972-09-25 1974-05-18

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH025602U (en) * 1988-06-24 1990-01-16
JP2513838Y2 (en) * 1988-06-24 1996-10-09 株式会社 コガネイ Pneumatic cylinder device
JPH05138469A (en) * 1991-09-23 1993-06-01 Takeshi Yanagisawa Two-dimensional movement mechanism
JPH061808U (en) * 1992-06-17 1994-01-14 三立精機株式会社 Low friction type cylinder
WO2005011942A3 (en) * 2003-07-29 2005-04-21 Haberman Machine Concrete block mold with moveable liner

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