JPS63262458A - Direct-current power source device - Google Patents

Abstract

PURPOSE:To rapidly eliminate the disturbance due to the variations in the load of the title DC power source device by detecting the load condition, and instantly controlling the energy inputted to the load. CONSTITUTION:When a load voltage drops for some reason or other in ion plating, etc., the drop is detected by a detecting circuit 15 and inputted to the reversal input terminal 100a of a comparator 100 as a voltage signal I0. Since a judging voltage is inputted to the other reversal input terminal 100b, arc is generated, and an H-active signal SP1 is outputted. Signals SP2 and SP3 are outputted from monostable multivibrators 103 and 104 in conformity with the signal SP1. The signal SP1 is inputted to a driver 105 and an AC/DC converter 103. As a result, the stored energy of a filter 14 is consumed, and the energy inputted to the load is reduced. A switch 102 is turned on by the signal S2, and the load voltage is increased to a value higher than the judging voltage or returned to the stationary state.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a power supply device, and more particularly to a DC power supply device that can detect the state of a load and immediately limit the energy injected into the load.

"Prior art" A conventional ion brating device that applies a DC electric field to a field to accelerate the movement of ions has a configuration as shown in Figure 4, and requires a DC power supply to apply a DC electric field to the field. .

That is, in this figure, "" is a vacuum chamber and is grounded.

A titanium target plate housing portion 2 is formed at the left end of the vacuum chamber 1 in the drawing, at a side surface IL. A titanium target plate 3 is housed in the housing section 2. An electrode rod 4 is fixedly connected to one surface 3a of the titanium target plate 3, and the left end of the electrode rod 4 protrudes outside the vacuum chamber while being insulated from the vacuum 1121.

Further, a hole 5 is formed in the left end side surface IL of the vacuum chamber 1, and an arc starting electrode 6 is attached to the hole 5 so as to be slidable in the X and Y directions and electrically connected to the hole 5. .

7 is a first DC power supply. The negative side of this DC power supply is connected to the mold/fence rod 4, while the positive side is connected to the vacuum chamber I, and this DC power supply connects the electrode rod 4 and the titanium target plate 3 to the ground. biased negatively.

8 is a second DC power supply. The positive side of this DCII source 8 is connected to the vacuum chamber 1, while the negative side is connected to the vacuum chamber 1.
It is connected to a rotating shaft 9 that rotates slowly while maintaining a vacuum state.

This rotating shaft 9 protrudes into the inside of the vacuum chamber l,
A substrate 11 (material to be coated) is attached to the protrusion 9a.

The substrate 11 is electrically connected to the rotating shaft 9.

The ion brating device has the above-described configuration, and the tip 6a of the arc starting electrode 6 is once brought into contact with the titanium target plate surface 3b, and then pulled away to start the arc. When the arc starting electrode 6 is further pulled apart, the anode side of the generated arc moves to the vacuum chamber 1 which is closer than the separated arc starting electrode 6 and continues. The end of the arc on the cathode side becomes a spot and moves randomly on the titanium target plate surface 3b due to the current throttling action.

This cathode spot generates heat due to electron collision and dissolves and evaporates titanium.

The advantage of such an arc-type ion blating device is that it uses a low voltage and a large current, and because of this large electron density, the vaporized titanium atoms are immediately bombarded with electrons and ionized.

These positively ionized titanium atoms are attracted to the substrate II by the negative voltage applied by the second DC power source 8, and as a result, the substrate is ion-blated.

The configuration of the second DC power supply 8 used in this ion blating apparatus is shown in FIG.

That is, the DC power supply shown in FIG. 6 includes an AC/DC converter 12 equipped with a control circuit, and a smoothing filter 14 composed of LP and CF for smoothing the ripple-containing DC voltage output from the converter 12. , and an output terminal voltage detection circuit 15 constituted by a voltage dividing circuit consisting of resistors 15a (resistance value R,) and 15b (resistance value R1) for detecting the output terminal voltage (load voltage) of the filter 14, etc. It is configured.

The control circuit included in the AC/DC conversion circuit 12 outputs a control signal according to the difference between the output terminal voltage and a preset reference voltage, and controls the DC voltage output from the AC/DC converter 12. It is something. This A C/D
The C converter 12 has a configuration as shown in FIGS. 7 and 8, for example.

That is, the AC/DC converter 17 shown in FIG.
A diode bridge 16a for rectifying the AC input voltage Vin, a transistor bridge 16b for further converting the DC voltage rectified by the bridge 16a into AC, a step-up transformer 16c for boosting the output voltage of the bridge +6b, A second diode bridge circuit 1 that rectifies again the output boosted by the transformer 16c.
6d, the magnitude of the output signal of the detection circuit 15, and the reference voltage setting means 16.
The difference between the reference voltage Vrer and the preset reference voltage Vrer is calculated by
and a control circuit 16e that performs off control.

The A C/DC converter 18 shown in FIG. 8 also includes a step-up transformer 19 for boosting the AC input voltage, a Zyrister bridge 20 for rectifying the output of the step-up transformer 19, and the bridge 20. It consists of a phase control circuit (not shown) etc. that controls the phase of each Zyristor.

In the AC/DC converter 17.18 described above, the detection circuit 1
Although the DC output voltage is controlled based on the difference between the magnitude of the output signal No. 5 and the reference voltage V rer, there is a delay in the transient state when the control is performed.

"Problems to be Solved by the Invention" By the way, the above-mentioned conventional ion blating apparatus has the following problems.

The electric field applied between the titanium target plate 3 and the substrate 1 by the second DC power supply 8 is likely to cause an unequal electric field due to irregularities on the surface of the barbed plate, fluctuations in the power supply, etc. In an electric field, energy is concentrated in one part as shown in FIG. 5(b), and as a result, an arc is generated, and this arc damages the substrate. This wound has been ion blasted 1
This will reduce the commercial value of the substrate.

In order to eliminate this problem, measures have been taken to (a) prevent the arc from occurring or (b) immediately interrupt the arc once it has occurred.

In the bender (a), for example, the second D
In the latter case (b), as shown in Figures 7 and 8, the DC voltage of the C power supply is lowered to reduce the probability of arc occurrence. A sudden increase in load current is detected and the AC/
By stopping the DC converter 17, 19 or controlling the output voltage, the uneven electric field is removed and the generated arc is extinguished.

However, according to the above-mentioned former means (a), there is no other option if an arc occurs, and according to the latter means (b), the energy stored in the smoothing filter 14 is concentratedly injected into the arc generating part, For example, D shown in FIG.
Even if the conversion frequency is 100KHz in the AC/DC converter 17 including the C/DC converter, 100OV, 2
When the OA is loaded, the energy stored in the filter 14 is several hundred millijoules to several joules, and the injection of this energy also causes scratches on the substrate surface.

However, if the injected energy is on the order of tens of millijoules to hundreds of millijoules, the scratches on the substrate will be very slight or will not occur at all.

AC/DC including the DC/DC converter shown in Figure 7
If you increase the conversion frequency in converter 17, it becomes a filter! The energy stored in 4 becomes small, but in order to reduce it to about tens of millijoules, it is necessary to use D C/D of several M to several tens of MHz.
A C converter is required, and manufacturing such a converter is difficult and impractical.

This invention was made in view of the above-mentioned circumstances, and the present invention can limit the energy injected into the load by detecting the state of the load and immediately suppressing the energy injected into the load. The purpose is to provide a DC power supply device.

"Means for Solving the Problem" The present invention provides a DC power supply device that applies a DC voltage to a load connected to a terminal, including a detection means for detecting the state of the load, and a detection signal outputted by the detection means. identification means for identifying whether or not the load is in a predetermined state based on; The above-mentioned problem is solved by a DC power supply device characterized by comprising a suppressing means for suppressing the energy generated by the DC power supply.

"Operation" According to the present invention, the state of the load is detected by the detection means, and the state of the load is identified based on the detection signal output from the detection means. Then, an identification signal output as a result of the identification operates a suppressing means connected in series to the load that suppresses the energy injected into the load. Therefore, even if the load condition changes, the power supply side can quickly respond to the change.

"Embodiments" Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is an electrical circuit diagram showing the configuration of an embodiment of the present invention. In this figure, parts that are the same as those in FIG. 7 are given the same numbers and their explanations will be omitted.

First, 100 is a comparator. The inverting input terminal 100a of the comparator 100 receives a voltage signal (Vo.Rt/(R++Rt)) proportional to the load voltage Vo detected by the output terminal voltage detection circuit I5 described above. has been added. lOl is an arc judgment voltage generation circuit,
Resistor 101a (resistance value rt), resistor 101b (resistance value r
t) is connected in series and divides a constant voltage +Vc,
+V c- from the connection between resistor 101a and resistor 101b
rt/ (r+ + rt) determination voltage value V det
is being taken out. This determination voltage V det is applied to the normal rotation input terminal 100b of the comparator 100.

As a result, the comparator 100 becomes υ. <When Vdet, I (active pulse signal SP) is output. Also, υ.> When Vdet, the output of the comparator 100 is at L level.

102 is the inverting input terminal 100 of the comparator 100
This is a switch to ground b. This switch 102 is a solid state relay contact or an analog switch configured to be turned on/off by a pulse signal SP, which will be described later.

+03 is a monostable multivibrator, a so-called one-shot circuit, which is triggered by the rising edge of the pulse signal S P + and generates a constant pulse width T.
It outputs a pulse signal SP2.

104 is a monostable multi-by-break similar to the above, and outputs a pulse signal SP3. 03 is that the pulse width of the output pulse signal SP3 is t3, and the pulse width t3 is smaller than the pulse width 'r of the pulse signal S P t. 105 is a driver for a contact 106, which will be described later. This driver 105 is
A pulse signal SP4 matching the signal SP is output, and the contact 106 is turned on/off by the signal SP4.

106 is a solid state relay contact connected in series with the load.

Reference numeral 107 denotes a current limiting glue handle, which is inserted between the filter and the load for the purpose of suppressing an increase in the load current flowing into the load due to the occurrence of an arc.

109 is an AC/DC converter. The configuration of this converter 109 is similar to that of the converter 17 described in FIG.
Diode bridges 16a, 16d.

They are the same in that they include a transistor bridge 16b and a step-up transformer 16c, but the transistor bridge 1
The configuration of the control circuit (illustrated circuit) for controlling 6b is different. That is, in addition to the functions of the control circuit of the converter shown in FIG. While receiving SF5, it has a function of turning off each transistor constituting the bridge 16b and stopping its operation as an AC/DC converter. 110 is a resistor connected in parallel to the solid state relay contact 106. .

Next, the operation of this embodiment will be explained with reference to FIG.

The DC power supply shown in FIG. 1 is used as a second DC power supply,
Ion blating is performed on the substrate 11 by the ion blating apparatus shown in FIG.

Now, for some reason, such as irregularities on the surface of the substrate or fluctuations in the power supply, a distortion as shown in Figure 5 (b) occurs in the electric field, and energy is concentrated on a part of the surface of the target material II. An arc is generated. As a result, the load voltage (output terminal voltage) VO drops to about 115 and the load current increases. However, the reactor 107 alleviates the sudden change in the load current.

This dropping load voltage is detected by the detection circuit 15, and a voltage signal is sent to the inverting input terminal 100a of the comparator lOO. . You can close it and hold it in your mouth. On the other hand, the inverting input terminal 100
Since the judgment voltage V det is applied to b, an arc occurs and υ. < When the condition of V deL is satisfied, the comparator lOO outputs the active signal S P
Output t.

Monostable multi-by break 104 and 103
are pulse signals S P s with pulse widths T and t, respectively, aligned with the rising edge of the signal SPl,
Output SP.

Pulse signal SP3 is connected to driver 105 and AC/DC
It is added to the bend converter 109.

When the driver 105 receives the signal SP, it outputs the signal SP, thereby turning off the contact 106. On the other hand, A
The C/DC converter 109 stops operating. The time required from the generation of this arc until the contact 106 is turned off is tl. Contact 106 turns off and A C/D
As a result of C converter 109 stopping operation, the filter! 4
Most of the energy stored in the arc is consumed by the resistor 110, the energy injected into the load becomes small, and after time t, the arc is extinguished.

The time that the contact 106 is off and the time that the AC/DC converter 109 is stopped is t, and this time t is the time t until the arc disappears after the switch is turned off.
It is chosen more. When the time [, has elapsed, A
The C/DC converter 109 is restarted and the contact! 06 is in the on state.

Therefore, the additional voltage V0 increases.

On the other hand, the pulse signal SP keeps the switch 102 on for a period of time T, and therefore the determination voltage V det is at the ground level. The output of the comparator 100 first rises to H level, and then falls to L level again. This is a monostable multivi break +0
This is because the pulse width T of the pulse signal SP t outputted by the monostable multi-bye break 104 is set larger than the pulse width t of the pulse signal SP3 outputted by the monostable multi-bye break 104. Even after this time t has elapsed, the signal SP! Outputs and switches! 02 remains on. During the elapse of time T, the load voltage v0 increases and is at least higher than the determination voltage V det, or is in a steady state (υ.> V det), so the switch 102 is turned off at the time T elapses. However, the comparator 100 never outputs the H active signal SP1.

When the load voltage decreases again due to arcing after this time T has elapsed, the above-described operation is repeated.

The time (t++ts) from arc generation to re-voltage application is sufficient time to prevent re-arc, and is usually several m5e.
It is about c.

In this embodiment, a solid state relay contact is used as the contact 106, but the same applies to other semiconductor switching elements. However, when using a semiconductor switch that does not have reverse blocking ability, such as a transistor, it is necessary to insert a diode in series in the collector circuit or connect a diode in antiparallel between the collector and emitter to protect the transistor.

As explained above, according to this embodiment, negative.

Suppression means connected in series with the load limit the energy injected to the point of arcing to a few tens of millijoules,
It is possible to prevent or minimize scratches on the substrate caused by concentration of energy at the location where the arc occurs.

Furthermore, in this example, a decrease in the output terminal voltage (load voltage) due to arc generation was detected, but in another example, as shown in Fig. 2, the absolute value of the current flowing through the load due to arc generation may be detection means, such as a current transformer CT;
Alternatively, the judgment value 1 det is detected by CT, Hall element, etc., and the value corresponding to the absolute value of the current is arbitrarily determined.
The occurrence of an arc may be detected when the

The output waveform of the current transformer CT or CT in this case is shown in FIG.

"Effects of the Invention" According to the present invention, it is possible to limit the energy injected into the load by detecting the state of the load and immediately suppressing the energy injected into the load. Obstacles can be quickly avoided.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the configuration of an electric circuit of a DC power supply device according to an embodiment of the present invention, FIG. 2 is a diagram showing the configuration of an electric circuit of a DC power supply device according to another embodiment, and FIG. is the second
Figure 4 shows the configuration of a conventional ion brating device; Figure 5 (A) shows the electric force in an equal electric field between parallel electrodes. (b) is a diagram showing lines of electric force in the same unequal electric field; FIG. 6 is a diagram showing a schematic configuration of a second DC power supply used in a conventional ion blating device; FIG. The figure shows that the AC/DC converter in Figure 6 is DC
Figure 8 shows a conventional DC power supply in which the AC/DC converter is composed of a step-up transformer and a silice bridge. FIG. 3 is a diagram showing the electric circuit configuration of FIG. 8...Second DC power supply, 14...Smoothing filter, 15...Load voltage detection circuit, 100
...Comparator, 10...Arc judgment voltage generation circuit, 102...Switch, 103
．． 104... Monostenal multi-by-break, 105... Driver, 106...
Solid state relay contact, 107...Reactor, 109...A C/DC converter.

Claims (1)

[Claims] 1. In a DC power supply device that applies DC voltage to a load connected to a terminal, there is a detection means for detecting the state of the load, and a detection means for detecting the state of the load based on a detection signal output from the detection means. operating based on an identification means for identifying whether or not the is in a predetermined state, and an identification signal outputted from the identification means,
A DC power supply device comprising: a suppressing means connected in series to the load to suppress energy supplied to the load. 2. The DC power supply device according to claim 1, wherein the detection means is a detection means for detecting arc occurrence by a drop in output terminal voltage. 3. The DC power supply device according to claim 1, wherein the detection means is a detection means for detecting occurrence of an arc based on an increase in load current. 4. Claim 2, characterized in that a reactor is inserted in series with the load, and its current limiting action limits the arc current until the arc is interrupted, thereby reducing the energy injected into the load. Or the DC power supply device described in paragraph 3.