JPS63261571A - Disk/turn table - Google Patents

Disk/turn table

Info

Publication number
JPS63261571A
JPS63261571A JP62095345A JP9534587A JPS63261571A JP S63261571 A JPS63261571 A JP S63261571A JP 62095345 A JP62095345 A JP 62095345A JP 9534587 A JP9534587 A JP 9534587A JP S63261571 A JPS63261571 A JP S63261571A
Authority
JP
Japan
Prior art keywords
disk
turntable
abutting face
urethane rubber
rubber piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62095345A
Other languages
Japanese (ja)
Inventor
Takashi Yoshizawa
高志 吉澤
Shinji Hara
原 臣司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62095345A priority Critical patent/JPS63261571A/en
Publication of JPS63261571A publication Critical patent/JPS63261571A/en
Pending legal-status Critical Current

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  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)

Abstract

PURPOSE:To actuate at high speed the disk having large moment of inertia by providing the member easy to be subjected to elastic deformation in a rotary shaft direction and having a high friction coefft. in the space with a recording medium inside the groove of the abutting face of the recording medium of a turn table so that the upper face becomes higher than the abutting face. CONSTITUTION:A notch shaped groove 2a is formed in the circumferential direction with equal interval on the disk abutting face of a turn table 2 and an urethane rubber piece 8 is fitted into this groove 2a. The thickness of the urethane rubber piece 8 is formed so as to attain to about 30mum projecting amt. delta from the abutting face 2b of the turn table 2. In the case of the disk being fixed, the urethane rubber piece 8 is completely deformed up to the abutting face 2b, so the disk is supported by the abutting face 2b and yet by the fixture of the disk to the abutting face 2b, the friction coefft. becomes larger because of the respective contact of the abutting face 2b and disk, and urethane rubber piece 8 and disk. The high speed actuation of the disk having large moment of inertia is thus enabled.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、情報の記録・再生を行なう場合に駆動される
ディスク状の記録媒体のドライブ装置において、記録媒
体を支持して回転するターンテーブルに関する。
Detailed Description of the Invention <Industrial Application Field> The present invention relates to a turntable that supports and rotates a recording medium in a drive device for a disk-shaped recording medium that is driven when recording and reproducing information. Regarding.

〈従来の技術と問題点〉 情報の記録媒体のうちディスク状のものは、高速回転が
行なわれて、記録・再生が行なわれるが、この回転に当
り記録媒体、例えば光ディスクなどはターンテーブル上
に搭載され固定される。この種ターンテーブルはステン
レスなどの金属で作られ、第4図に示すような構造とな
っている。第4図において、1は光ディスク、2はター
ンテーブル、3は光ディスクを吸引・固定するための永
久磁石、4は光ディスクの一部分であって強磁性体を有
するディスクへブ、5はスピンドルモータである。
<Prior art and problems> Disc-shaped information recording media are rotated at high speed for recording and reproduction. During this rotation, the recording medium, such as an optical disc, is placed on a turntable. mounted and fixed. This type of turntable is made of metal such as stainless steel and has a structure as shown in FIG. In Fig. 4, 1 is an optical disk, 2 is a turntable, 3 is a permanent magnet for attracting and fixing the optical disk, 4 is a disk drive that is a part of the optical disk and has a ferromagnetic material, and 5 is a spindle motor. .

このようなターンテーブル2を用いて、慣性モーメント
の大きな光ディスク1を高速に起動する場合、光ディス
ク1がターンテーブル2上にてスリップしないためには
、光ディスク1がターンテーブル2上に強固に固定され
る必要がある。すなわち、ターンテーブル2の光デイス
ク当接面と光ディスク1との間で立上り加速度に対抗で
きる伝達トルクが必要である。
When starting an optical disc 1 with a large moment of inertia at high speed using such a turntable 2, in order to prevent the optical disc 1 from slipping on the turntable 2, the optical disc 1 must be firmly fixed on the turntable 2. It is necessary to That is, a transmission torque is required between the optical disk abutting surface of the turntable 2 and the optical disk 1 that can counter the rising acceleration.

ここで、伝達トルクを考慮するに、一定寸法のターンテ
ーブル2から光ディスク1への伝達トルクは永久磁石3
の吸着力Fが大きい程太き(またターンテーブル2の光
デイスク当接面のj@擦係数μが大きい程大きい。そし
て、特に光ディスク1のスリップが生じないだけの吸着
力Fと起動条件との関係は次式で表される。
Here, considering the transmission torque, the transmission torque from the turntable 2 of a certain size to the optical disk 1 is
The larger the adsorption force F is, the thicker it is (and the larger the j@friction coefficient μ of the optical disk abutting surface of the turntable 2 is, the greater the adsorption force F and startup conditions are. The relationship is expressed by the following equation.

ここで、Fは吸着力、Cはターンテーブル寸法による定
数、Jは光デイスク慣性モーメント、μは摩擦係数、礼
は定常回転数、τは起動時間である。
Here, F is the adsorption force, C is a constant depending on the turntable dimensions, J is the moment of inertia of the optical disk, μ is the friction coefficient, R is the steady rotation speed, and τ is the starting time.

すなわち、摩擦係数μが大きかったり起動時間τが長く
なれば吸着力Fは小さくてよいが、逆の場合吸着力Fは
大きくなり慣性モーメントJや定常回転数鴨が大きけれ
ば大きな吸着力Fが必要となる。
In other words, if the friction coefficient μ is large or the startup time τ is long, the adsorption force F may be small, but in the opposite case, the adsorption force F will be large, and if the moment of inertia J or steady rotational speed is large, a large adsorption force F is required. becomes.

第6図は、ガラスディスクを240 Orpmまで定常
回転させる場合、起動時間rとスリップを生じさせない
ための吸着力Fとの関係を示している。図から判明する
ように定常回転までの立上りを短時間にすればする程、
吸着力は加速度的に大きくなる。この場合で(よ、ガラ
スディスクとターンテーブルの当接面である研摩ステン
レス面との摩擦係数μは0.14程度あるので、図示の
如く2秒息下で定常回転までさせるためには、1kgf
以上の大きな吸着力が必要となる。
FIG. 6 shows the relationship between the startup time r and the adsorption force F to prevent slippage when the glass disk is rotated steadily up to 240 Orpm. As can be seen from the figure, the shorter the rise to steady rotation, the more
The adsorption force increases at an accelerating rate. In this case, the coefficient of friction μ between the glass disk and the polished stainless steel surface that is the contact surface of the turntable is about 0.14, so in order to achieve steady rotation for 2 seconds as shown in the figure, 1 kgf is required.
A greater adsorption force is required.

ところが、吸着力Fを大きくする場合に永久磁石3の吸
引力を大きくすることは高価な高性能永久磁石3を必要
とするという問題点を含むと同時に、光ディスクをアン
ロードさせる時の負荷が大きくなり、機構信頼度を低下
させる欠点があった。すなわち、高速起動のため永久磁
石3の吸引力を大きくして吸着力Fを大きくするには問
題がある。
However, when increasing the attractive force F, increasing the attractive force of the permanent magnet 3 involves the problem that an expensive high-performance permanent magnet 3 is required, and at the same time, the load when unloading the optical disk is large. This has the disadvantage of lowering the reliability of the mechanism. That is, there is a problem in increasing the attractive force of the permanent magnet 3 to increase the attractive force F for high-speed startup.

他方、高速起動のために永久磁石3の吸引力をさほど太
き(しないで、摩擦係数を高めることも考えられ、例え
ばウレタンゴムの如き高II[WA材でターンテーブル
の当接面を覆う例もあるが、別の問題がある。すなわち
、光記録用ドライブ装置では、光ディスクとヘッドとの
間の相対的傾きが6 m radを越えると記録再生特
性が著しく劣化することは周知のとおりであり、このた
め、光ディスクのそりを厳しく管理すると共に、この光
デイスク装着のためのターンテーブルの当接面には、ヘ
ッド光軸に対する高精度な面角度(通常1m rad〜
2 m rad以下)が要求される。したがって、ター
ンテーブルの高精度な当接面には、従来より精密に研磨
された金属面が使用されている。このため、ウレタンゴ
ムなどを表面に貼り付けて摩擦係数μを高めたターンテ
ーブルの当接面を使用するのは、実用上極めて困難であ
った。
On the other hand, for high-speed startup, it is also possible to increase the friction coefficient without increasing the attraction force of the permanent magnet 3, for example, by covering the contact surface of the turntable with a high II [WA material such as urethane rubber]. However, there is another problem.In other words, it is well known that in optical recording drive devices, if the relative tilt between the optical disk and the head exceeds 6 m rad, the recording and reproducing characteristics will deteriorate significantly. Therefore, in addition to strictly controlling the warping of the optical disk, the abutment surface of the turntable for mounting the optical disk has a highly accurate surface angle (usually 1 m rad ~
2 mrad or less) is required. Therefore, a precisely polished metal surface is conventionally used for the highly accurate contact surface of the turntable. For this reason, it has been extremely difficult in practice to use a contact surface of a turntable whose surface is coated with urethane rubber or the like to increase the coefficient of friction μ.

第5図は従来のターンテーブルの他の例を示すもので、
ターンテーブル2内に弱いばね(図示省略)によって支
えられた回り止めピン6を少なくとも1個配設し、ディ
スクハブ4の対応位置にはこれと嵌合可能なスリップ防
止孔7を設けておくという構造である。かかる構造のた
め、ディスクがスリップしてスリップ防止孔7に回り止
めビン6が致ると、ばねにより回り止めピン6がわずか
にとび出してスリップ防止孔7にはまり、嵌合する。
Figure 5 shows another example of a conventional turntable.
At least one anti-rotation pin 6 supported by a weak spring (not shown) is disposed inside the turntable 2, and a slip prevention hole 7 that can be fitted with the anti-slip pin 6 is provided at a corresponding position on the disc hub 4. It is a structure. Due to this structure, when the disk slips and the anti-rotation pin 6 hits the anti-slip hole 7, the anti-rotation pin 6 slightly protrudes due to the spring and fits into the anti-slip hole 7.

ところが、このような機構は、ディスクのスリップが不
可避であることや回り止めビン6の動特性を考慮したば
ねの設計が必要であり、ターンテーブルの構造が複雑に
なるという欠点を有する。
However, such a mechanism has the drawback that the spring must be designed in consideration of the unavoidable slippage of the disk and the dynamic characteristics of the detent pin 6, making the structure of the turntable complicated.

そこで、本発明は上述の問題点に鑑み、永久磁石の吸着
力をさほど大きくせず、当接面全体に高摩擦係数材を貼
くことな(、また複雑な構造にすることなく、慣性モー
メントの大きなディスクを高速起動できて、高精度と簡
便性を兼ね備えた低価格のディスク・ターンテーブルを
提供する。
Therefore, in view of the above-mentioned problems, the present invention has been developed to reduce the moment of inertia without increasing the attraction force of the permanent magnet, without attaching a high friction coefficient material to the entire contact surface (and without creating a complicated structure). To provide a low-priced disc turntable which can start up a large disc at high speed, combines high precision and simplicity.

く問題点を解決するための手段〉 上述の目的を達成する本発明は、情報の記録・再生を行
なう場合に駆動されるディスク状の記録媒体のドライブ
装置のうち、上記記録・再生時に上記記録媒体を支持し
て回転させるターンテーブルにおいて、このターンテー
ブルの記録媒体当接面の一部に溝を設け、この溝内に回
転軸方向に弾性変形しゃすくかつ記録媒体との間の摩擦
係数が高い部材を、上面が上記当接面より高くなるよう
に備えたことを特徴とする。
Means for Solving the Problems〉 The present invention achieves the above-mentioned object by providing a drive device for a disk-shaped recording medium that is driven when recording and reproducing information. In a turntable that supports and rotates a medium, a groove is provided in a part of the recording medium abutting surface of the turntable, and a groove is formed in the groove that is elastically deformed in the direction of the rotation axis and has a coefficient of friction with the recording medium. The present invention is characterized in that it includes a tall member such that its upper surface is higher than the abutment surface.

く作   用〉 本発明によるターンテーブル面はこのような構成である
ので、ディスクロード時には永久磁石の吸着力によって
、ディスク面が高摩擦材を軸方向に変形させ、ディスク
面は高精度、に仕上げられたターンテーブルの金属面で
支持されるため、回転軸に対する傾き精度を損なうこと
はない。それと同時に、ディスクロード時のディスクが
受ける衝撃力を低減する効果も有する。また、高Wji
擦材に対応した部分での摩擦によって、ターンテーブル
面での伝達可能トルクが大きくなるので、慣性モーメン
トの大きなディスクの高速起動も可能である。更に、こ
のようなターンテーブルは、構造が簡単で低価格で供し
得る。
Since the turntable surface according to the present invention has such a structure, when the disk is loaded, the high friction material is deformed in the axial direction by the attraction force of the permanent magnet, and the disk surface is finished with high precision. Since the turntable is supported by the metal surface of the turntable, the tilt accuracy with respect to the rotation axis is not impaired. At the same time, it also has the effect of reducing the impact force applied to the disc when the disc is loaded. Also, high Wji
The friction in the area corresponding to the friction material increases the torque that can be transmitted on the turntable surface, making it possible to start up a disk with a large moment of inertia at high speed. Furthermore, such a turntable has a simple structure and can be provided at a low cost.

く実 施 例〉 ここで、第1図ないし第3図を参照して本発明の詳細な
説明する。なお、第4図と同一部分には同符号を付す。
EMBODIMENTS> The present invention will now be described in detail with reference to FIGS. 1 to 3. Note that the same parts as in FIG. 4 are given the same reference numerals.

第1図において、2はターンテーブル、3は永久磁石、
8はウレタンゴム片である。なお、ターンテーブル2は
金属材料以外にも剛性の高いエンジニアリングプラスチ
ック、例えばポリアセタールコポリマーなどが使用され
る。また、ウレタンゴム片8については高摩擦材である
ので、同様の性質を持つシリコンゴム、ブチルゴム、ニ
トリルゴムなどの合成ゴムが使用できる。
In Figure 1, 2 is a turntable, 3 is a permanent magnet,
8 is a urethane rubber piece. In addition to metal materials, the turntable 2 may also be made of highly rigid engineering plastics, such as polyacetal copolymer. Further, since the urethane rubber piece 8 is a high friction material, synthetic rubbers such as silicone rubber, butyl rubber, and nitrile rubber having similar properties can be used.

ターンテーブル2のディスク当接面には、円周方向等配
に(図では4箇所)切欠き状の溝2aが形成され、この
溝2a内にウレタンゴム片8がはまっている。そして、
ウレタンゴム片8の厚さは、ターンテーブル2の当接面
2bから約30μmの突き出し量δとなるように形成さ
れている。この実施例では約200gf以上の吸引力で
ディスクを固定1ノた場合、ウレタンゴム片8は完全に
当接面2bまで変形するので、ディスクは当接面2bで
支持されることになり、ウレタンゴム片8を設けたため
ディスクが傾くような原因とはならない。
Notch-shaped grooves 2a are formed on the disc contacting surface of the turntable 2 at equal intervals in the circumferential direction (at four locations in the figure), and urethane rubber pieces 8 are fitted into the grooves 2a. and,
The thickness of the urethane rubber piece 8 is formed so that it protrudes from the contact surface 2b of the turntable 2 by an amount δ of about 30 μm. In this embodiment, when the disk is fixed once with a suction force of about 200 gf or more, the urethane rubber piece 8 completely deforms to the contact surface 2b, so the disk is supported by the contact surface 2b, and the urethane rubber piece 8 deforms completely to the contact surface 2b. Since the rubber piece 8 is provided, the disk does not become tilted.

しかも、この当接面2bへのディスクの固定により、当
接面2bとディスク及びウレタンゴム片8とディスク、
それぞれの接触にて摩擦係数が大きくなる。
Moreover, by fixing the disk to this contact surface 2b, the contact surface 2b and the disk, the urethane rubber piece 8 and the disk,
The coefficient of friction increases with each contact.

第2図は他の実施例でターンテーブル2の当接面2bを
切欠いて溝2aを設けるのではなく、当接面2b上に穴
状の溝を設けて、この穴溝内にウレタンゴム片8をはめ
込むようにしてもよい。この場合も当接面2bからのウ
レタンゴム片8の突き出し長さは30μm程度のわずか
の押付力にて厚さが変化するようになっている。
Fig. 2 shows another embodiment in which a groove 2a is not provided by cutting out the contact surface 2b of the turntable 2, but a hole-shaped groove is provided on the contact surface 2b, and a piece of urethane rubber is inserted into the hole groove. 8 may be fitted. In this case as well, the length of the urethane rubber piece 8 protruding from the contact surface 2b is such that the thickness can be changed by a slight pressing force of about 30 μm.

第3図は、第1図の実施例の効果を示す。FIG. 3 shows the effect of the embodiment of FIG.

第3図で、10は第4図の従来例のターンテーブルにお
けるガラスディスクの摩擦特性の測定結果、11は第1
図の実施例のターンテーブルにおける摩擦特性の測定結
果を示す。
In FIG. 3, 10 is the measurement result of the friction characteristics of the glass disk in the conventional turntable shown in FIG.
The measurement results of the friction characteristics of the turntable of the example shown in the figure are shown.

図から、第1図の実施例のターンテーブルでは摩擦係数
が約5倍の0.65となり、第6図かられかるように、
数百gfの吸着力でも十分な高速起動が可能である。
From the figure, the coefficient of friction in the turntable of the embodiment shown in Fig. 1 is approximately 5 times that of 0.65, and as can be seen from Fig. 6,
Sufficient high-speed startup is possible even with an adsorption force of several hundred gf.

〈発明の効果〉 以上説明したように、本発明によるターンテーブルは構
造が単純で、小さなディスク固定力でも慣性モーメント
の大きいディスクの高速起動が可能である。また、高摩
擦材を配設したことによるターンテーブル面の傾きは生
じないという実用的利点がある。更に、ディスクロード
時にディスクに加わる衝撃を緩和するので、ディスクの
耐久性、信頼性を向上させる効果がある。
<Effects of the Invention> As explained above, the turntable according to the present invention has a simple structure and can start a disk with a large moment of inertia at high speed even with a small disk fixing force. Furthermore, there is a practical advantage that the turntable surface does not tilt due to the provision of the high-friction material. Furthermore, since the shock applied to the disc when loading the disc is alleviated, it has the effect of improving the durability and reliability of the disc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a) (b)は本発明によるターンテーブルの
一実施例の斜視図とA −A’断面図、第2図(al 
(blは他の実施例の斜視図とA −A’断面図、第3
図は第1図に示すターンテーブルの効果を表わす特性図
、第4図は従来例の構成図、第5図は従来例の分解斜視
図、第6図はスリップを生じないための吸着力とディス
ク起動時間との特性図である。 図  中、 :・・ディスク1 2・・・ターンテーブル、 3・・永久磁石、 4・・ディスクハブ、 5・・・スピンドルモータ、 6・・・回り止めピン、 7・・・スリップ防止孔、 8・・・ウレタンゴム片、 10・・・従来例のターンテーブル摩擦特性、11・・
・本実施例のターンテーブル摩擦特性である。
FIGS. 1(a) and 1(b) are a perspective view and an A-A' sectional view of an embodiment of the turntable according to the present invention, and FIG.
(bl is a perspective view and an A-A' sectional view of another embodiment,
The figure is a characteristic diagram showing the effect of the turntable shown in Fig. 1, Fig. 4 is a configuration diagram of a conventional example, Fig. 5 is an exploded perspective view of the conventional example, and Fig. 6 shows the adsorption force and force to prevent slipping. FIG. 3 is a characteristic diagram of disk startup time. In the figure: Disk 1 2 Turntable, 3 Permanent magnet, 4 Disc hub, 5 Spindle motor, 6 Stopping pin, 7 Slip prevention hole, 8... Urethane rubber piece, 10... Conventional turntable friction characteristics, 11...
- Turntable friction characteristics of this example.

Claims (1)

【特許請求の範囲】[Claims] 情報の記録・再生を行なう場合に駆動されるディスク状
の記録媒体のドライブ装置のうち、上記記録・再生時に
上記記録媒体を支持して回転させるターンテーブルにお
いて、このターンテーブルの記録媒体当接面の一部に溝
を設け、この溝内に回転軸方向に弾性変形しやすくかつ
記録媒体との間の摩擦係数が高い部材を、上面が上記当
接面より高くなるように備えたことを特徴とするディス
ク・ターンテーブル。
Among drive devices for disk-shaped recording media that are driven when recording and reproducing information, in a turntable that supports and rotates the recording medium during recording and reproduction, the recording medium contact surface of the turntable A groove is provided in a part of the groove, and a member that is easily deformed elastically in the direction of the rotational axis and has a high coefficient of friction with the recording medium is provided in the groove so that the upper surface thereof is higher than the contact surface. Disc turntable.
JP62095345A 1987-04-20 1987-04-20 Disk/turn table Pending JPS63261571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62095345A JPS63261571A (en) 1987-04-20 1987-04-20 Disk/turn table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62095345A JPS63261571A (en) 1987-04-20 1987-04-20 Disk/turn table

Publications (1)

Publication Number Publication Date
JPS63261571A true JPS63261571A (en) 1988-10-28

Family

ID=14135090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62095345A Pending JPS63261571A (en) 1987-04-20 1987-04-20 Disk/turn table

Country Status (1)

Country Link
JP (1) JPS63261571A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0527856U (en) * 1991-08-31 1993-04-09 日本電産株式会社 Rotary drive
WO1993010535A1 (en) * 1991-11-22 1993-05-27 Fujitsu Limited Disc device
JPH0927166A (en) * 1995-07-07 1997-01-28 Yamauchi Corp Turn table for recording disk used for information recording and reproducing device
US5608592A (en) * 1992-10-29 1997-03-04 Fujitsu Limited Head actuator
WO2004064058A1 (en) * 2003-01-16 2004-07-29 Minebea Co., Ltd. Turn table device manufacturing method and turn table device
US7566655B2 (en) 2005-05-26 2009-07-28 Applied Materials, Inc. Integration process for fabricating stressed transistor structure
US7732342B2 (en) 2005-05-26 2010-06-08 Applied Materials, Inc. Method to increase the compressive stress of PECVD silicon nitride films
US8129290B2 (en) 2005-05-26 2012-03-06 Applied Materials, Inc. Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
US8138104B2 (en) 2005-05-26 2012-03-20 Applied Materials, Inc. Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251068A (en) * 1985-08-30 1987-03-05 Canon Inc Disc device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251068A (en) * 1985-08-30 1987-03-05 Canon Inc Disc device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0527856U (en) * 1991-08-31 1993-04-09 日本電産株式会社 Rotary drive
WO1993010535A1 (en) * 1991-11-22 1993-05-27 Fujitsu Limited Disc device
US5880904A (en) * 1991-11-22 1999-03-09 Fujitsu Limited Disk drive having a thickness equal to an IC memory card
US6016237A (en) * 1991-11-22 2000-01-18 Fujitsu Limited Shaft construction of a disk drive
US5608592A (en) * 1992-10-29 1997-03-04 Fujitsu Limited Head actuator
JPH0927166A (en) * 1995-07-07 1997-01-28 Yamauchi Corp Turn table for recording disk used for information recording and reproducing device
WO2004064058A1 (en) * 2003-01-16 2004-07-29 Minebea Co., Ltd. Turn table device manufacturing method and turn table device
US7566655B2 (en) 2005-05-26 2009-07-28 Applied Materials, Inc. Integration process for fabricating stressed transistor structure
US7732342B2 (en) 2005-05-26 2010-06-08 Applied Materials, Inc. Method to increase the compressive stress of PECVD silicon nitride films
US8129290B2 (en) 2005-05-26 2012-03-06 Applied Materials, Inc. Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
US8138104B2 (en) 2005-05-26 2012-03-20 Applied Materials, Inc. Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure
US8753989B2 (en) 2005-05-26 2014-06-17 Applied Materials, Inc. Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure

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