JPS63260932A - Thin film of fluorinated polymer and formation of thin film - Google Patents

Thin film of fluorinated polymer and formation of thin film

Info

Publication number
JPS63260932A
JPS63260932A JP9521687A JP9521687A JPS63260932A JP S63260932 A JPS63260932 A JP S63260932A JP 9521687 A JP9521687 A JP 9521687A JP 9521687 A JP9521687 A JP 9521687A JP S63260932 A JPS63260932 A JP S63260932A
Authority
JP
Japan
Prior art keywords
thin film
polymer
ring structure
fluorine
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9521687A
Other languages
Japanese (ja)
Other versions
JPH0822929B2 (en
Inventor
Hitoshi Matsuo
仁 松尾
Motoi Kanba
基 神庭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP62095216A priority Critical patent/JPH0822929B2/en
Publication of JPS63260932A publication Critical patent/JPS63260932A/en
Publication of JPH0822929B2 publication Critical patent/JPH0822929B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to produce a nondefective thin film smoothly in an industrially advantageous manner, by using a fluorinated polymer having a ring structure in the main chain and forming a thin polymer film from a solution formed by dissolving this polymer in a solvent. CONSTITUTION:A fluorinated polymer having a ring structure in the main chain (e.g., a polymer having a ring structure of formula I, II or III) is dissolved in a solvent (e.g., perfluorobenzene or trichlorotrifluoroethane), and the solution is formed into a thin polymer film by a thin film formation process such as dipping or spin coating. In this way, a thin film of a thickness <=50mu can be produced smoothly in an industrially advantageous manner. Because a polymer having a perfluoro ring in the main chain is soluble in a solvent even when it is a homopolymer, it is soluble when it is a polymer or copolymer of a high fluorine content. The obtained thin film does not undergo decrease in the characteristics as a fluororesin, such as low refractive index, high heat resistance, low moisture permeability, high electrical resistance, high dielectric breakdown strength, etc. and is transparent because of its low crystallinity.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、含フッ素ポリマー、特に−L鎖に環構造を有
する含フッ素ポリマーの薄膜及び薄1漠化方法に関する
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin film of a fluoropolymer, particularly a fluoropolymer having a ring structure in the -L chain, and a method for thinning the film.

[従来の技術] 従来、含フッ素ポリマーとしては、ポリテトラフルオロ
エチレン(PTFE)、パーフルオロアルコキシビニル
エーテル/テトラフルオロエチレン共重合体(PFΔ)
、テトラフルオロエチレン/ヘキサフルオロプロピレン
共重合体(FEP)、ポリクロロトリフルオロエチレン
(PCTFE)などが知られているが、これらの含フッ
素ポリマーは一般的に溶媒に不溶であるため、薄膜化は
溶融成形法あるいは溶融成形と切削との併用法などによ
り行なっている。
[Prior Art] Conventionally, fluorine-containing polymers include polytetrafluoroethylene (PTFE) and perfluoroalkoxy vinyl ether/tetrafluoroethylene copolymer (PFΔ).
, tetrafluoroethylene/hexafluoropropylene copolymer (FEP), and polychlorotrifluoroethylene (PCTFE), but these fluoropolymers are generally insoluble in solvents, so it is difficult to make them into thin films. This is done by melt molding or a combination of melt molding and cutting.

[発明の解決しようとする問題点] しかしながら、従来の含フッ素ポリマーにおいては、こ
れらを薄膜化する場合、特に50μ以下の薄膜を得よう
とする場合、ピンホール等の欠陥が生じたり、あるいは
大きな成形圧力、延伸力が必要であり、工業的実施に不
利を伴なうものであった。特にパーフルオロポリマーに
ついては上記の難点が顕著であり、厚さ50μ以下で無
欠陥の薄膜を円滑有利に得ることは困難であった。
[Problems to be solved by the invention] However, when making conventional fluorine-containing polymers into thin films, especially when trying to obtain a thin film of 50μ or less, defects such as pinholes or large defects occur. Molding pressure and stretching force are required, which is disadvantageous for industrial implementation. In particular, the above-mentioned difficulties are conspicuous with perfluoropolymers, and it has been difficult to smoothly and advantageously obtain a defect-free thin film with a thickness of 50 μm or less.

本発明の目的は、含フッ素ポリマー、特にパーフルオロ
ポリマーについて、その特性を損なうことなく、厚さ5
0μ以下で無欠陥の薄膜を提供すること及び工業的に円
滑有利に実施可能な含フッ素ポリマーの薄膜化方法を提
供することにある。
The object of the present invention is to improve the thickness of fluorine-containing polymers, especially perfluoropolymers, without impairing their properties.
The object of the present invention is to provide a defect-free thin film with a thickness of 0μ or less, and to provide a method for forming a fluoropolymer into a thin film that can be smoothly and advantageously carried out industrially.

[問題点を解決するだめの手段] 本発明者は、種々研究、検討を重ねた結果、主鎖に環構
造を有する含フッ素ポリマーを採用することにより、パ
ーフルオロポリマーの場合であっても、薄膜化が容易で
あり、50μ以下で欠陥のない薄膜を円滑有利に製造可
能であることを見出した。さらには、前記特定の含フッ
素ポリマーをフッ素系溶媒などに溶かし、その溶液を用
いることによって、これまでには得られなかったような
20μ以下、例えば0,02〜5μ程度の超薄膜でも欠
陥のない膜とすることができることを見出した。
[Means to Solve the Problem] As a result of various studies and examinations, the present inventor has found that by adopting a fluorine-containing polymer having a ring structure in the main chain, even in the case of a perfluoropolymer, It has been found that it is easy to form a thin film, and that a defect-free thin film of 50 μm or less can be produced smoothly and advantageously. Furthermore, by dissolving the specific fluorine-containing polymer in a fluorine-based solvent and using that solution, it is possible to create ultra-thin films with a thickness of 20μ or less, for example 0.02 to 5μ, which has never been possible before, without defects. It has been found that it is possible to form a film without the need for a film.

か(して本発明は、上記知見に基いて完成されたもので
あり、主鎖に環構造を有する含フッ素ポリマーが厚さ5
0μ以下に薄膜化されていることを特徴とする含フッ素
ポリマーの薄膜を新規に提供するものである。
(Thus, the present invention was completed based on the above findings, and the fluorine-containing polymer having a ring structure in the main chain has a thickness of 5
The present invention provides a novel fluorine-containing polymer thin film characterized by being thinned to 0μ or less.

本発明において、主鎖に環構造を有する含フッ素ポリマ
ーとしては、例えば一般式 %式%) の如き環構造を有するものが挙げられる。これらの内、
次の如き環構造を有するポリマーが代表的である。ただ
し、本発明の内容はこれらのみに限定されるものではな
い。
In the present invention, examples of the fluorine-containing polymer having a ring structure in the main chain include those having a ring structure represented by the general formula %. Among these,
Polymers having the following ring structures are typical. However, the content of the present invention is not limited to these only.

CF。C.F.

CF3        CPCI これら重合体の製造法を示すと、次の2通りである。た
だし、これら製造法に限定されるものではない。
CF3 CPCI There are two methods for producing these polymers. However, it is not limited to these manufacturing methods.

!、環化重合によるもの (11CFa・CF−0−CF、−CF2−0−CF=
CF。
! , by cyclization polymerization (11CFa・CF-0-CF, -CF2-0-CF=
C.F.

CF、−CF、        CF2−CF2(US
P 3418303. GB 1106344など)+
2)   CF 2=CF−CF 2−CFCI−CF
、−CF=CF。
CF, -CF, CF2-CF2 (US
P 3418303. GB 1106344 etc.) +
2) CF2=CF-CF2-CFCI-CF
, -CF=CF.

CF。C.F.

CFCI (USP 3202643など) +3) CF2=CF−0−CF2−CF=CF。C.F.C.I. (USP 3202643 etc.) +3) CF2=CF-0-CF2-CF=CF.

−CF2 2、環状モノマーを使用するものCll5P 3978
030など) 重合反応としては、ラジカル的に進行するものであれば
特に限定されないが、例えば有機、フ1((機ラジカル
開始剤、光、電離性放射線あるいは熱による重合などが
挙げられる。また重合の方法も特に限定されるものでは
なく、千ツマ−をそのまま重合に供するいわゆるバルク
重合5モノマーを溶解する有機溶媒中で行なう溶液重合
、水性媒体中で適当な有機溶剤の存在下あるいは非存在
下に行なう懸濁重合、水性媒体に乳化剤を添加して行な
う乳化重合などが例示される。
-CF2 2, those using cyclic monomers Cll5P 3978
030, etc.) The polymerization reaction is not particularly limited as long as it proceeds in a radical manner, but examples include polymerization using an organic radical initiator, light, ionizing radiation, or heat. The method is not particularly limited, and may include solution polymerization, which is carried out in an organic solvent in which so-called bulk polymerization monomers are dissolved, in which the polymer is directly subjected to polymerization, and solution polymerization carried out in an aqueous medium in the presence or absence of a suitable organic solvent. Examples include suspension polymerization carried out by adding an emulsifier to an aqueous medium, and emulsion polymerization carried out by adding an emulsifier to an aqueous medium.

また、これらの成分の本質を損なわない程度に共重合成
分を使用することは何ら差し支えがない。共重合せしめ
る他の単量体としては、ラジカル重合性を有するモノマ
ーであれば、特に限定されずに含フッ素系、炭化水素系
その他が広範囲にわたって例示され得る。当然のことで
あるが、これら他の単量体は一種単独で前記の如き特定
環構造を主鎖に導入可能な千ツマ−とラジカル共重合せ
しめても良く、あるいは適宜の2種類以上を併用して上
記共重合反応を行なわせても良い。本発明においては、
通常は他の単量体としてフルオロオレフィン、フルオロ
ビニルエーテルなどの含フッ素系モノマーを選定するの
が望ましい。例えば、テトラフルオロエチレン、パーフ
ルオロビニルエーテルなどは好適な具体例であり、弗化
ビニリデン、弗化ビニル、クロロトリフルオロエチレン
なども例示され得る。
Further, there is no problem in using copolymerized components to the extent that the essence of these components is not impaired. Other monomers to be copolymerized are not particularly limited as long as they are radically polymerizable monomers, and include a wide range of fluorine-containing monomers, hydrocarbon monomers, and others. Of course, these other monomers may be used alone in radical copolymerization with the above-described specific ring structure capable of introducing a specific ring structure into the main chain, or two or more of these monomers may be used in combination. The above-mentioned copolymerization reaction may be carried out in this manner. In the present invention,
Usually, it is desirable to select fluorine-containing monomers such as fluoroolefins and fluorovinyl ethers as other monomers. For example, tetrafluoroethylene, perfluorovinyl ether, etc. are preferable examples, and vinylidene fluoride, vinyl fluoride, chlorotrifluoroethylene, etc. may also be exemplified.

共重合体組成としては、溶解性、製膜性および含フッ素
ポリマーとしての特性などを生かすために、環状構造の
組成が20%以上が好ましく、更に好ましくは40%以
上であることが望ましい。このようなポリマーは溶媒に
可溶であり、用いられる溶媒としては、上記ポリマーを
溶解するもののであれば限定はないが、パーフルオロベ
ンセン、″アフルート” (商品名:旭硝子社製のフッ
素系溶剤)、“フロリナート”(商品名:3M社製のパ
ーフルオロ(2−ブチルテトラヒドロフラン)を含んだ
液体)、トリク。
As for the copolymer composition, in order to take advantage of solubility, film-forming properties, and properties as a fluorine-containing polymer, the composition of the cyclic structure is preferably 20% or more, more preferably 40% or more. Such polymers are soluble in solvents, and the solvent used is not limited as long as it dissolves the above polymer, but perfluorobenzene, "Aflute" (trade name: fluorinated solvent manufactured by Asahi Glass Co., Ltd.) ), “Florinate” (trade name: liquid containing perfluoro(2-butyltetrahydrofuran) manufactured by 3M Company), Trique.

ロロトリフルオロエタン等が好適である。当然のことで
あるが、適宜の2種類以上を併用して溶媒として用いる
ことができる。特に混合溶媒の場合、炭化水素系、塩化
炭化水素、弗塩化炭化水素、アルコール、その他の有機
溶媒も併用できる。溶液濃度はtl、olwt、%〜5
0wt%で、好ましくはQ、1wt%〜2Qwt%であ
る。
Lorotrifluoroethane and the like are preferred. As a matter of course, two or more appropriate types can be used in combination as a solvent. Particularly in the case of a mixed solvent, hydrocarbons, chlorinated hydrocarbons, fluorochlorinated hydrocarbons, alcohols, and other organic solvents can also be used in combination. Solution concentration is tl, olwt, %~5
0wt%, preferably Q, 1wt% to 2Qwt%.

薄膜化方法は上記の溶液を用い、ロールコータ−法、キ
ャスト法、ディッピング法、スピンコード法、水上キャ
スト法、ラングミュア・プロジェット法等の溶液から膜
を形成させる方法であれば特に限定はない。
The method for forming a thin film is not particularly limited as long as it is a method of forming a film from a solution using the above solution, such as a roll coater method, a casting method, a dipping method, a spin cord method, a water casting method, a Langmuir-Prodgett method, etc. .

得られた薄膜は、基材上に接着させたまま、あるいは基
材から剥離させて用いることができ、基材上に接首させ
たまま用いる場合、基材はあらゆる形状、あらゆる材料
が適用される。
The obtained thin film can be used while attached to a substrate or peeled off from the substrate. When used while attached to a substrate, the substrate can be of any shape and any material can be applied. Ru.

例えば、磁気ディスク基板、光ファイバー、電線、レン
ズ材料、分離膜支持体、ホローファイバー、磁気テープ
など各種テープ、光学ガラス材料、電極、血液バッグ等
医用材料、各種建材、ステンレス、ガラス、アルミニウ
ム、金属、さらには現在用いられているフッ素樹脂塗料
、PFA、ETFE、PTFE、PCTFE、PVdF
、FEP等の含フッ素樹脂のコーティングされている基
材なとも例示され得る。
For example, magnetic disk substrates, optical fibers, electric wires, lens materials, separation membrane supports, hollow fibers, various tapes such as magnetic tapes, optical glass materials, electrodes, medical materials such as blood bags, various building materials, stainless steel, glass, aluminum, metals, etc. Furthermore, currently used fluororesin paints, PFA, ETFE, PTFE, PCTFE, PVdF
, a base material coated with a fluororesin such as FEP.

薄膜は、ピンホールなどの欠陥がなく、透明で屈折率が
低く、耐熱性、耐桑品性に優れているため、各種コーテ
ィング材、電子部材、光学部材、分離膜等に用いること
ができる。
The thin film has no defects such as pinholes, is transparent, has a low refractive index, and has excellent heat resistance and mulberry resistance, so it can be used for various coating materials, electronic components, optical components, separation membranes, etc.

[作用] 本発明において、主鎖に環構造を有する含フッ素ポリマ
ーが薄膜を形成しやすい理由は、このポリマーは溶媒に
可溶で、ディッピング、スピンコードなと種々の薄膜形
成方法を用いることができるためである。また、このポ
リマーが特殊な溶媒に可溶である理由は明らかではない
が、溶媒とポリマーの環構造が類似していること、この
ポリマーの結晶性が低いこと等が考えられる。
[Function] In the present invention, the reason why a fluorine-containing polymer having a ring structure in its main chain easily forms a thin film is that this polymer is soluble in a solvent, and various thin film forming methods such as dipping and spin cording can be used. This is because it is possible. Although the reason why this polymer is soluble in a special solvent is not clear, it is thought that the ring structures of the solvent and the polymer are similar and that the crystallinity of this polymer is low.

[実施例] 合成例1 パーフルオロアリルビニルエーテルの30g、トリクロ
ロトリフルオロエタンの30g及び重合■ 開始剤(C−F7CO) 2の10mgを50ccの耐
圧アンプルに入れた。凍結脱気を2回繰り返した後に2
0”Cで15時間重合した。重合中の圧力は大気圧より
も低かった。重合の結果、重合体を16g得た。
[Examples] Synthesis Example 1 30 g of perfluoroallyl vinyl ether, 30 g of trichlorotrifluoroethane, and 10 mg of polymerization initiator (C-F7CO) 2 were placed in a 50 cc pressure-resistant ampoule. After repeating freezing and degassing twice, 2
Polymerization was carried out at 0"C for 15 hours. The pressure during polymerization was lower than atmospheric pressure. As a result of polymerization, 16 g of polymer was obtained.

この重合体の赤外線吸収スペクトルを測定したところ、
モノマーにあった二重結合に起因する1790cm−’
付近の吸収はなかった。また、このポリマーをパーフル
オロベンゼンに溶解し19FのNMRスペクトルを測定
したところ、以下の繰り返し構造を示すスペクトルが得
られた。
When we measured the infrared absorption spectrum of this polymer, we found that
1790 cm-' due to the double bond in the monomer
There was no nearby absorption. Further, when this polymer was dissolved in perfluorobenzene and a 19F NMR spectrum was measured, a spectrum showing the following repeating structure was obtained.

F2 0−CF。F2 0-CF.

この重合体の固有粘度[η]は、“フロリナート“FC
−75(商品名:3M社製のパーフルオロ(2−ブチル
テトラヒドロフラン)を主成分とした液体、以下、FC
−75と略記する)中30℃で0、530であった。重
合体のガラス転移点は69℃であり、室温ではタフで透
明なガラス状の重合体である。またlO%熱分解温度は
462℃であり、さらにこの重合体は無色透明であり、
屈折率は1.34と低く、光線透過率は95%と高かっ
た。
The intrinsic viscosity [η] of this polymer is “Florinat” FC
-75 (Product name: Liquid mainly composed of perfluoro(2-butyltetrahydrofuran) manufactured by 3M Company, hereinafter referred to as FC
-75) at 30°C. The glass transition point of the polymer is 69°C, and it is a tough, transparent glass-like polymer at room temperature. In addition, the 1O% thermal decomposition temperature is 462°C, and furthermore, this polymer is colorless and transparent,
The refractive index was as low as 1.34, and the light transmittance was as high as 95%.

合成例2 パーフルオロアリルビニルエーテルの30g、トリクロ
ロトリフルオロエタンの30g及び重合鶴 開始剤(C3F?C口)2の10mgを50ccの耐圧
アンプルに入れた。凍結脱気を2回繰り返した後に30
℃で16時間重合した。重合中の圧力は大気圧よりも低
かった。重合の結果、重合体を19g得た。
Synthesis Example 2 30 g of perfluoroallyl vinyl ether, 30 g of trichlorotrifluoroethane, and 10 mg of polymerization Tsuru initiator (C3F?C port) 2 were placed in a 50 cc pressure-resistant ampoule. 30 after repeating freezing and degassing twice
Polymerization was carried out at ℃ for 16 hours. The pressure during polymerization was below atmospheric pressure. As a result of the polymerization, 19 g of polymer was obtained.

重合体の構造は、合成例1と同様な方法で確認した。こ
の重合体の固有粘度[η]は、FC−75溶液中30℃
で0.32であった。
The structure of the polymer was confirmed in the same manner as in Synthesis Example 1. The intrinsic viscosity [η] of this polymer is 30°C in FC-75 solution.
It was 0.32.

合成例3 パーフルオロアリルビニルエーテルのIOg、テトラフ
ルオロエチレンのIg、トリクロロトリフ韮 ルオロエタンの30g及び重合開始剤(C5FtCO)
 2の5 mgを100ccの耐圧アンプルに入れた。
Synthesis Example 3 IOg of perfluoroallyl vinyl ether, Ig of tetrafluoroethylene, 30g of trichlorotrifluoroethane and polymerization initiator (C5FtCO)
5 mg of No. 2 was placed in a 100 cc pressure-resistant ampoule.

凍結脱気を2回繰り返した後に30℃で6時間重合した
。重合の結果、重合体を4g得た。
After repeating freezing and degassing twice, polymerization was carried out at 30° C. for 6 hours. As a result of polymerization, 4 g of polymer was obtained.

”F NMRスペクトルの測定から、この共重合体−C
F2 のような構造と組成であることがわかった。
From the measurement of the F NMR spectrum, this copolymer-C
It was found to have a structure and composition similar to F2.

合成例4 パーフルオロアリルビニルエーテルの10g、CF2・
CFO(CF2) *C00Cllsの0.1g、 ト
リクロロトリフルオロエタンのlog及び重合開始剤(
C,F、CD) 。
Synthesis Example 4 10g of perfluoroallyl vinyl ether, CF2.
CFO (CF2) *0.1g of C00Cls, log of trichlorotrifluoroethane and polymerization initiator (
C, F, CD).

の5 mgを500ccの耐圧アンプルに入れた。凍結
脱気を2回繰り返した後に30℃で16時間重合した。
5 mg was placed in a 500 cc pressure-resistant ampoule. After repeating freezing and degassing twice, polymerization was carried out at 30° C. for 16 hours.

重合の結果、重合体を2.8g得た。As a result of polymerization, 2.8 g of polymer was obtained.

19F NMRスペクトルの測定から、以下の繰り返−
CF20 蒙 (cF21゜ ■ C00CI+3 また組成はカルボン酸基の滴定により求めた。
From the measurement of the 19F NMR spectrum, the following steps were repeated:
CF20 (cF21°■ C00CI+3) The composition was determined by titration of carboxylic acid groups.

実施例1 合成例1で得られた重合体5gを、95gの“アフル−
ド”E−1n (商品名:旭硝子社製のフッ素系溶剤)
に溶解した。
Example 1 5 g of the polymer obtained in Synthesis Example 1 was added to 95 g of “Aflu-
Do”E-1n (Product name: Fluorine solvent manufactured by Asahi Glass Co., Ltd.)
dissolved in

この溶液をステンレス基板−1−に流延し、窒素気流下
40℃16時間、減圧下110℃5時間で処理して溶媒
を除去したところ、20μのF、す膜が形成された。こ
の薄膜な基板−1,=から剥したところピンホールなど
の欠陥のない透明なフィルムであった。この膜の引張強
度は300kg/cm” 、引張り伸度は160%であ
った。
This solution was cast onto a stainless steel substrate-1- and treated under a nitrogen stream at 40° C. for 16 hours and under reduced pressure at 110° C. for 5 hours to remove the solvent, and a 20 μm F film was formed. When it was peeled off from this thin substrate-1, it was a transparent film with no defects such as pinholes. The tensile strength of this membrane was 300 kg/cm" and the tensile elongation was 160%.

実施例2 実施例1で用いた溶液をガラス板に流延し、窒素気流下
40℃16時間、減圧下110℃5時間で処理して溶媒
を除去したところ、3μの薄膜が形成された。
Example 2 The solution used in Example 1 was cast onto a glass plate and treated under a nitrogen stream at 40°C for 16 hours and under reduced pressure at 110°C for 5 hours to remove the solvent, and a 3μ thin film was formed.

実施例3 実施例1で用いた溶液にプラスチックレンズ(ジエチレ
ングリコールビスアリルカーボネート系)をつけスピン
コードを行なった。スピン速度1500rpmで5秒間
スピンコードな行なった後、60℃ 1.5時間窒素気
流ドで乾燥したところ、1μの薄膜がレンズ−ににコー
トされた。このレンズは低反射加工レンズとして使11
することができる。
Example 3 A plastic lens (diethylene glycol bisallyl carbonate type) was attached to the solution used in Example 1, and spin coding was performed. After spin coding at a spin speed of 1500 rpm for 5 seconds, the lens was dried at 60° C. for 1.5 hours in a nitrogen stream, and a 1 μm thin film was coated on the lens. This lens is used as a low-reflection processed lens.
can do.

実施例4 実施例1で用いた溶液を石英ガラスファイバーに塗布し
、400℃に保持された加熱硬化炉に導入し、2秒間で
通過させることによって、石英ガラスファイバー」二に
5μの被膜が形成された光伝送ファイバーを得た。
Example 4 The solution used in Example 1 was applied to a quartz glass fiber, introduced into a heating curing furnace maintained at 400°C, and passed through for 2 seconds to form a 5 μ thick coating on the quartz glass fiber. An optical transmission fiber was obtained.

実施例5 合成例2の重合体1gを99gの“アフルード”E−1
6(商品名:旭硝子社製のフッ素系溶剤)に溶解し金属
基板上にスピンコードな行なった。スピン速度は500
0rpmで1分間回転させた。その後50℃で乾燥する
と、0.05μの薄膜が金属基板上に形成された。この
薄膜のピンホールのないことは、この薄膜の電気抵抗を
測定したところ〉10ISΩcmであることから確認さ
れた。
Example 5 1 g of the polymer of Synthesis Example 2 was mixed with 99 g of "Afluid" E-1
6 (trade name: fluorine-based solvent manufactured by Asahi Glass Co., Ltd.) and spin coded onto a metal substrate. spin speed is 500
Rotate for 1 minute at 0 rpm. After drying at 50°C, a 0.05μ thin film was formed on the metal substrate. The absence of pinholes in this thin film was confirmed by measuring the electrical resistance of this thin film, which was >10 ISΩcm.

実施例6 合成例3の共重合体1gを’19gのパーフルオロベン
ゼンに溶解させた。」1記溶液にアルミニウム基板を浸
した後40℃で1時間乾燥したところ、1.5μの薄膜
がアルミ基板上に形成された。
Example 6 1 g of the copolymer of Synthesis Example 3 was dissolved in 19 g of perfluorobenzene. When an aluminum substrate was immersed in the solution mentioned above and dried at 40° C. for 1 hour, a 1.5 μm thin film was formed on the aluminum substrate.

実施例7 合成例4の共重合体0,2gを20gのFC−75に溶
解し、この溶液にガラス板を浸し40℃で1.5時間窒
素気流下で乾燥したところ、0.08μの薄膜がガラス
板上に形成された。
Example 7 0.2 g of the copolymer of Synthesis Example 4 was dissolved in 20 g of FC-75, and a glass plate was immersed in this solution and dried at 40°C for 1.5 hours under a nitrogen stream, resulting in a 0.08μ thin film. was formed on a glass plate.

[発明の効果] 本発明は、主鎖に環構造を有するパーフルオロポリマー
を特殊な溶媒に溶解し、この溶液を用い薄膜を形成する
ことにより、50μ以下の薄膜を工業的に円滑有利に製
造することができるという効果を有し、また主鎖にパー
フルオロ環構造を有するポリマーはホモポリマーでも溶
媒に可溶なため、フッ素含量の高い重合体、共重体であ
っても可溶である。したがって得られた薄膜はフッ素樹
脂としての特性、例えば低屈折率、耐熱性、低透湿性、
高い抵抗、高い絶縁破壊強度笠を低下することがない。
[Effects of the Invention] The present invention enables industrially smooth and advantageous production of thin films of 50μ or less by dissolving a perfluoropolymer having a ring structure in the main chain in a special solvent and forming a thin film using this solution. Furthermore, since a polymer having a perfluoro ring structure in its main chain is soluble in a solvent even if it is a homopolymer, even a polymer or copolymer with a high fluorine content is soluble. Therefore, the obtained thin film has the characteristics as a fluororesin, such as low refractive index, heat resistance, low moisture permeability,
High resistance, high dielectric breakdown strength, no loss of shade.

さらに主鎖に環構造を有しているため結晶性が低く透明
な薄膜を得ることができるとい・)特徴なイ1する。
Furthermore, since it has a ring structure in its main chain, it has low crystallinity and can produce transparent thin films.

共重合体においては、コモノマーとして種々の有用な機
能を有するものを選択できるため、薄膜にさらに多くの
機能を付与せしめることができる。
In the copolymer, comonomers having various useful functions can be selected, so that even more functions can be imparted to the thin film.

[℃埋入(7F理士)平石利子[℃Embedded (7F Physician) Toshiko Hiraishi

Claims (1)

【特許請求の範囲】 1、主鎖に環構造を有する含フッ素ポリマーが厚さ50
μ以下に薄膜化されていることを特徴とする含フッ素ポ
リマーの薄膜。 2、環構造が含フッ素環構造である特許請求の範囲第1
項記載の薄膜。 3、環構造がエーテル結合含有含フッ素環構造である特
許請求の範囲第1項又は第2項記載の薄膜。 4、含フッ素ポリマーがパーフルオロポリマーである特
許請求の範囲第1項〜第3項のいずれか一項に記載の薄
膜。 5、環構造が4〜7員環構造である特許請求の範囲第1
項〜第4項のいずれか一項に記載の薄膜。 6、主鎖に環構造を有する含フッ素ポリマーを溶媒に溶
解した溶液を用いて厚さ50μ以下の前記含フッ素ポリ
マーの薄膜を形成することを特徴とする薄膜化方法。 7、環構造が含フッ素環構造である特許請求の範囲第6
項記載の薄膜化方法。 8、環構造がエーテル結合含有含フッ素環構造である特
許請求の範囲第6項又は第7項記載の薄膜化方法。 9、含フッ素ポリマーがパーフルオロポリマーである特
許請求の範囲第6項〜第8項のいずれか一項に記載の薄
膜化方法。 10、環構造が4〜7員環構造である特許請求の範囲第
6項〜第9項のいずれか一項に記載の薄膜化方法。
[Claims] 1. The fluorine-containing polymer having a ring structure in its main chain has a thickness of 50 mm.
A thin film of a fluorine-containing polymer characterized by being thinned to less than μ. 2. Claim 1 in which the ring structure is a fluorine-containing ring structure
Thin film described in section. 3. The thin film according to claim 1 or 2, wherein the ring structure is a fluorine-containing ring structure containing an ether bond. 4. The thin film according to any one of claims 1 to 3, wherein the fluorine-containing polymer is a perfluoropolymer. 5. Claim 1 in which the ring structure is a 4- to 7-membered ring structure
The thin film according to any one of Items 1 to 4. 6. A method for forming a thin film, which comprises forming a thin film of the fluoropolymer having a thickness of 50 μm or less using a solution in which a fluoropolymer having a ring structure in its main chain is dissolved in a solvent. 7. Claim 6 in which the ring structure is a fluorine-containing ring structure
Thinning method described in section. 8. The method for forming a thin film according to claim 6 or 7, wherein the ring structure is a fluorine-containing ring structure containing an ether bond. 9. The method for forming a thin film according to any one of claims 6 to 8, wherein the fluorine-containing polymer is a perfluoropolymer. 10. The method for forming a thin film according to any one of claims 6 to 9, wherein the ring structure is a 4- to 7-membered ring structure.
JP62095216A 1987-04-20 1987-04-20 Method for forming thin film of perfluoropolymer Expired - Fee Related JPH0822929B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62095216A JPH0822929B2 (en) 1987-04-20 1987-04-20 Method for forming thin film of perfluoropolymer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62095216A JPH0822929B2 (en) 1987-04-20 1987-04-20 Method for forming thin film of perfluoropolymer

Publications (2)

Publication Number Publication Date
JPS63260932A true JPS63260932A (en) 1988-10-27
JPH0822929B2 JPH0822929B2 (en) 1996-03-06

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990015662A1 (en) * 1989-06-15 1990-12-27 Du Pont Canada Inc. Perfluorodioxole membranes

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5995630B2 (en) 2012-09-27 2016-09-21 三井・デュポンフロロケミカル株式会社 Amorphous fluorine-containing resin composition and method for producing thin film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978030A (en) * 1973-08-01 1976-08-31 E. I. Du Pont De Nemours And Company Polymers of fluorinated dioxoles
JPS5838707A (en) * 1981-08-20 1983-03-07 イ−・アイ・デユポン・デ・ニモアス・アンド・カンパニ− Amorphous copolymer of perfluoro-2,2-dimethyl- 1,3-dioxol

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978030A (en) * 1973-08-01 1976-08-31 E. I. Du Pont De Nemours And Company Polymers of fluorinated dioxoles
JPS5838707A (en) * 1981-08-20 1983-03-07 イ−・アイ・デユポン・デ・ニモアス・アンド・カンパニ− Amorphous copolymer of perfluoro-2,2-dimethyl- 1,3-dioxol

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990015662A1 (en) * 1989-06-15 1990-12-27 Du Pont Canada Inc. Perfluorodioxole membranes

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