JPS63260301A - Coaxial waveguide converter - Google Patents

Abstract

PURPOSE:To prevent high frequency leakage from a joint part by using a metallic ring with excellent conductivity and an elastic metallic washer. as a buffer member covering a gap caused at the contact face between a coaxial line and a waveguide. CONSTITUTION:The metallic ring 4 being a buffer member is in contact with a dielectric sleeve 2 and buried to a ring slot 4a notched at the upper circumference of the waveguide 1. As the metallic ring 4, a soft metal with high conductivity such as copper or brass is used. Since the contact with the case bottom and the waveguide wall face of a semiconductor device is obtained sufficiently, even if the flatness of each contact face is deteriorated, the metallic ring 4 acts like an outer conductor of the coaxial line efficiently to make the close contact easy. Thus, the coaxial waveguide converter from the contact face of which no leakage of electromagnetic wave is caused, is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of a coaxial waveguide converter, and particularly to the structure of a connecting portion between a coaxial line and a waveguide that protrude into the waveguide.

[Conventional technology]

Conventionally, in a coaxial waveguide converter in which the inner conductor of a coaxial connector or the high-frequency input/output terminal of a semiconductor device is directly protruded into a waveguide, the surface of the connector or semiconductor device that comes in contact with the waveguide is the contacted surface. The outer surface of the waveguide has a high level of flatness to prevent gaps from forming during connection.

[Problem that the invention seeks to solve]

FIG. 4 is a diagram showing a state in which a semiconductor device is connected to a conventional coaxial waveguide converter. The coaxial part protruding into the waveguide 1 has an inner conductor 3 surrounded by a dielectric sleeve 2;
The inner conductor 3 is connected to an input terminal or an output terminal (not shown) inside the semiconductor device 5 . Semiconductor ti! When this coaxial waveguide converter is used for the test measurement at t5, the number of times the semiconductor device 50 is attached and detached increases, and the flatness of this contact surface deteriorates, creating a gap from which electromagnetic waves are transmitted. Often.

An object of the present invention is to provide a coaxial waveguide converter that does not cause leakage of electromagnetic waves from a contact surface even if the number of times a connector or a semiconductor device is attached and detached increases.

[Means for solving problems]

The waveguide in the coaxial waveguide converter of the present invention is provided with an annular groove in which the upper peripheral edge in contact with the through hole of the coaxial line is cut out. hand,
It has a buffer member with good 4-electroconductivity.

〔Example〕

Hereinafter, one embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows (a) a front sectional view and (b) a plan view of a measurement jig for a semiconductor device using a coaxial waveguide transducer. FIG. 2 is a sectional view of a semiconductor device mounted on this jig. 1 is a waveguide, 2 is a dielectric sleeve, 3 is an inner conductor, and 5 is a semiconductor device. Reference numeral 4 denotes a gold IJ ring, which is a buffer member according to the present invention, and is in contact with the dielectric sleeve 2 and embedded in an annular groove 4a cut out in the upper periphery of the waveguide 1. This metal ring 4 is made of a soft metal with good conductivity such as copper or brass. For example, when using a WR75 waveguide, the waveguide wall thickness is 2 rm and the inner conductor diameter is 1.3
If wm + 211 electric conductor IJ-blade diameter is 4.3 wn, then the annular groove 4a with a depth of 1 ridge and an outer diameter of 6 ridges has a thickness of 1.2 mm.
Insert the fin metal ring 4. At this time, the upper surface of the metal ring 4 is in a state of slightly protruding from the waveguide wall.

Since the metal ring 4 has good conductivity and is made of a soft material, it can make sufficient contact with the bottom surface of the case of the semiconductor device and the wall surface of the waveguide, so that the flatness of each contact surface is poor. Even in this case, the metal ring 4 acts effectively with the outer conductor of the coaxial line to facilitate close contact.

Next, as another example, FIG. 3 shows a case where a springy metal washer 6 is embedded instead of the metal ring 4 as a buffer member. Phosphorous blue mt- is used as the metal washer 6,
Provides springiness.

The metal ring and shi have spring properties, so the adhesion is good.

〔Effect of the invention〕

According to the present invention, a highly conductive metal ring and a springy metal washer serve as a buffer member that closes the gap created at the contact surface of the coaxial line and waveguide. Therefore, even if coaxial connectors, semiconductor devices, etc. are repeatedly attached to and detached from the coaxial waveguide converter, and even if the flatness of the contact surface deteriorates, leakage of high frequency waves from the connecting portion can be prevented.

[Brief explanation of drawings]

1 is a front sectional view and a plan view of an embodiment of the present invention, FIG. 2 is a sectional view of a semiconductor device mounted on a jig using the coaxial waveguide converter of FIG. 1, and FIG. This figure is a front sectional view of another embodiment, and FIG. 4 is a sectional view of a conventional example in which a semiconductor device is mounted. 1... Waveguide, 2... Dielectric sleeve,
3... Inner conductor, 4... Metal ring (buffer member), 5... Semiconductor device, 6... Metal washer (buffer member). Figure 1

Claims (1)

[Claims] A coaxial waveguide converter in which an inner conductor of a coaxial line and a dielectric sleeve surrounding it protrude and are fixed within a waveguide at a certain distance from the short-circuit surface of the waveguide. The wave tube is provided with an annular groove cut out at the upper peripheral edge in contact with the through hole of the coaxial line, and has a buffer member partially embedded in the annular groove, having a flat upper part and having good conductivity. A coaxial waveguide converter featuring: