JPS63257478A - Surface wave actuator - Google Patents
Surface wave actuatorInfo
- Publication number
- JPS63257478A JPS63257478A JP62090814A JP9081487A JPS63257478A JP S63257478 A JPS63257478 A JP S63257478A JP 62090814 A JP62090814 A JP 62090814A JP 9081487 A JP9081487 A JP 9081487A JP S63257478 A JPS63257478 A JP S63257478A
- Authority
- JP
- Japan
- Prior art keywords
- surface wave
- moving body
- body plate
- actuator
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims description 42
- 239000002131 composite material Substances 0.000 abstract description 16
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000000750 progressive effect Effects 0.000 abstract 1
- 239000013598 vector Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 210000002500 microbody Anatomy 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 241000124033 Salix Species 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000012840 feeding operation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
Landscapes
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、平面上の位置決め装置に係り、特にＸＹθ移
動に好適な表面波利用のアクチェエータに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a positioning device on a plane, and particularly to an actuator using surface waves suitable for XYθ movement.
［従来の技術〕
近年、エレクトロニクス技術の高度化に伴ないエレクト
ロメカ製品の高密度化高精度化が進められつつある。[Background Art] In recent years, as electronics technology has become more sophisticated, electromechanical products have become more dense and precise.
それにつれ製品の組立工程において高精度且つコンパク
ト化した位置決め機構が要求され、特にＸＹ軸に加えθ
軸の位置決め機構のニーズが生じてきている。As a result, highly accurate and compact positioning mechanisms are required in the product assembly process, and in particular, in addition to the XY axes, θ
A need has arisen for a shaft positioning mechanism.
従来においては、特開昭５７−１７５４８８号、昭和５
８年度２４巻５号応用機械工学「振動片影超音波モータ
と表面波形超音波モータ」記載の様にＸ方向あるいけ回
転方向の定まった１軸方向の位置決め装置はあるが平面
上ＸＹθの３軸に移動可能とするためにはこれらの装置
を組み合わせ積層構造を取る方式とする必要がある。In the past, Japanese Patent Application Laid-Open No. 57-175488, 1973
As described in 8th year Vol. 24, No. 5 Applied Mechanical Engineering "Vibrating half-shadow ultrasonic motor and surface wave ultrasonic motor", there is a uniaxial positioning device with a fixed rotational direction in the In order to be able to move around the axis, it is necessary to combine these devices into a laminated structure.
又、さらに、一層構造になったＸＹθ移動可能の移動テ
ーブルとして、昭５５年度精機学会秋季大会学術講演会
論文集Ｐ７７記載の「マイクロボジシに／グ用ステージ
」がある。Furthermore, as a movable table having a single-layered structure and capable of XYθ movement, there is a "micro body/gu stage" described on page 77 of the academic lecture collection of the Autumn Conference of the Japan Society of Precision Machinery Engineers in 1982.
同様に一層構造においてＸＹθ移動可能テーブルとして
昭６１年度８月号精密工学会誌Ｐ１４４３記載の「圧電
素子を用いたＸＹθテーブル」がある。Similarly, as an XYθ movable table with a single layer structure, there is an “XYθ table using piezoelectric elements” described in P1443 of the August 1986 issue of the Journal of the Japan Society for Precision Engineering.
上記の従来技術は、積層構造のため形状及び重量が大き
くなり１層構造にてＸＹθ等の多軸方向を同時に駆動す
るという点において配慮されておらず装置の小形化軽量
化において問題があった。The above conventional technology has a laminated structure, which increases its shape and weight, and it does not take into account the fact that it drives in multiple axes such as XYθ simultaneously with a single layer structure, which causes problems in reducing the size and weight of the device. .
又５ 「マイクロボジシｌ二／グ用ステージ」や「圧電
素子を用い九Ｘ’ｌθテーブル」の様にＸＹθ移動可能
な移動テーブルが考えられているが、前者においては一
層構造であるもののとンジ部の部材そのものの弾性変形
を利用するため、ストロークの点において制約が生じ長
ストロークでの使用ができないこと、後者においては、
長ストロークにて使用することは可能であるが、微動移
動量を１ステツプとしてこれを複数ステップ送って移動
する方式であるため、長ストロークに使用するには移動
時間が大きくなってしまうという問題があった。Furthermore, moving tables capable of moving in XYθ have been considered, such as the ``stage for microbodies'' and the ``9X'lθ table using piezoelectric elements,'' but although the former has a single-layer structure, the Since the elastic deformation of the member itself is utilized, there are restrictions in terms of stroke and it cannot be used with long strokes.
It is possible to use it with long strokes, but since the fine movement amount is taken as one step and this is sent in multiple steps, there is a problem that the travel time becomes long when used with long strokes. there were.
）″″＃′Ａ″１“・４゛“１化’）ＩＳ４６ｊ、Ｍ“
１な１層構造であって、ＸＹθδ軸を駆動することので
きる長ストロークに適したアクチ晶二一タを提供するこ
とにある。)""#'A"1"・4゛"1ization') IS46j, M"
The object of the present invention is to provide an actuator which has a single layer structure and is suitable for long strokes and can drive in the XYθδ axes.
上記目的は、表面波モータを応用し、移動させる動体板
上に、弾性体上に電歪素子を貼り付けた表面波発生機構
を、３組以上平面的にそれぞれが互いに平行関係になる
事のない様に配置して挾み込む構成を取り、それぞれの
表面波発生機構の電歪素子に高周波電圧を印加すること
で表面波を発生させて、その表ＷＩ波がもつ波の進行エ
ネルギーを動体板に伝える事で動体板を動かす方式とし
、それぞれの表面波発生機構が発生する表面波による動
体板を移動させようとする力を制御すＺｌことで、達成
される。The above purpose is to apply a surface wave motor to move three or more surface wave generation mechanisms, each consisting of an electrostrictive element attached to an elastic body, on a moving body plate, so that they are parallel to each other in a plane. By applying a high frequency voltage to the electrostrictive element of each surface wave generation mechanism, a surface wave is generated, and the traveling energy of the surface WI wave is transferred to the moving object. This is achieved by using a system in which the moving body plate is moved by transmitting information to the plate, and by controlling the force that attempts to move the moving body plate due to the surface waves generated by each surface wave generating mechanism.
表面波発生機構は、弾性体上に電歪素子が貼り付けられ
た機構となっており、電歪素子に印加電圧を加えると縦
振動用電歪素子が縦振動を、横振動用電歪素子が横振動
を発生することとなるためこれにより表面波発生機構は
横撮動と縦振動の合成波を与えることができるようにな
る。The surface wave generation mechanism is a mechanism in which an electrostrictive element is pasted on an elastic body. When an applied voltage is applied to the electrostrictive element, the electrostrictive element for longitudinal vibration generates longitudinal vibration, and the electrostrictive element for transverse vibration generates longitudinal vibration. generates transverse vibration, which allows the surface wave generation mechanism to provide a composite wave of transverse imaging and longitudinal vibration.
上下の表面波発生機構により挟着れた動体板は表面波発
生機構より発生した合成波の進行エネルギの伝達により
移動させる事ができるため、表面波発生機構３つの合成
波を制御することにより平面よＸＹθの３軸方向に移動
可能となる。The moving body plate sandwiched between the upper and lower surface wave generation mechanisms can be moved by transmitting the traveling energy of the composite waves generated by the surface wave generation mechanisms, so by controlling the composite waves of the three surface wave generation mechanisms, it can be moved from a flat surface to a It becomes possible to move in the three axis directions of XYθ.
又１表面波を生じない場合には、動体板は上下の表面波
発生機構により挾まれ固く固定された状態となる。If no surface waves are generated, the moving body plate is held between the upper and lower surface wave generating mechanisms and remains firmly fixed.
以下１本発明の実施例を第１図〜第８図により説明する
。第１図は本発明の１実施例である表面波アクチ為エー
タの外観図、第２図は、本発明の１実施例である表面波
アクチーエータ内にて使用する表面波発生機構６を説明
する機構断面図、第６図は第２図内表面波発生機構６の
ＸＸ矢視図、第４図は表面波発生機構６内にて用いられ
る横振動用電歪素子４２の外観図、第５図は表面波発生
機構６内にて用いられる柳振動用電歪素子４１の外観図
、第６図は表面波発生機構６によって発生した横振動８
と縦振動９との合成表面波１０を説明する原理図、第７
図は本発明の１実施例である表面波アクテ晶エータ内に
ある上下１組とした時の３組の表面波発生機構６ａ、６
ｂ、６Ｃの発生した合成表面波１０α、 １０ｂ、 １
０ｃの横振動力成分ベクトルｉ１ａ 、 １１ｂ、 １
１Ｇ を説明する説明図、第８図は動体板１を各句送
りするために必要な動体板１が・必要な；１ζδ合カベ
クトル１３を説明する説明図を示す。An embodiment of the present invention will be described below with reference to FIGS. 1 to 8. FIG. 1 is an external view of a surface wave actuator that is an embodiment of the present invention, and FIG. 2 is an illustration of a surface wave generation mechanism 6 used in the surface wave actuator that is an embodiment of the present invention. 6 is a sectional view of the internal surface wave generating mechanism 6 shown in FIG. The figure is an external view of the willow vibration electrostrictive element 41 used in the surface wave generation mechanism 6, and FIG. 6 is the lateral vibration 8 generated by the surface wave generation mechanism 6.
Principle diagram explaining the composite surface wave 10 of the vertical vibration 9 and the longitudinal vibration 9, 7th
The figure shows three sets of surface wave generating mechanisms 6a, 6 when one set is upper and lower in a surface wave actuator, which is an embodiment of the present invention.
b, 6C generated synthetic surface waves 10α, 10b, 1
Transverse vibration force component vector i1a, 11b, 1 of 0c
FIG. 8 is an explanatory diagram illustrating the 1ζδ sum vector 13 necessary for moving the moving body plate 1 to advance each phrase.
まず、第１図にて本発明の実施例について説明する。本
発明の１実施例である表面波アクチ具エータは、移動さ
せるべき動体板１と上ペース２と下ベース３と表面波発
生機構６（本実施例においては上下１組として５組用い
ているため、それぞれの組を６４．６に、６Ｑと呼んで
いる）と、表面波発生機４１１６に高周波電圧を供給す
る高周波電源（ｖｌ及びＶ２ ）とから構成されている
。動体板１け通常上ベース２、あるいは下ベース３に表
面波発生機Ｓ取り付はネジ７により取りつりられた表面
波発生機構６によって挾まれ締めつけ固定された状態に
なっている。そして、表面波発生機構６に高周波電源ｖ
１．ｖ２によって供給された高周波電圧が印加された時
、表面波発生機構６が発生した表面波によって動体板１
は平面上ＸＹθ３軸方向に動く。First, an embodiment of the present invention will be described with reference to FIG. A surface wave actuator, which is an embodiment of the present invention, includes a moving body plate 1 to be moved, an upper pace 2, a lower base 3, and a surface wave generating mechanism 6 (in this embodiment, five sets are used as one upper and lower set). Therefore, each set is called 64.6 and 6Q) and a high frequency power source (vl and V2) that supplies a high frequency voltage to the surface wave generator 4116. When the surface wave generator S is mounted on the upper base 2 or the lower base 3, the movable body plate 1 is held in place by the surface wave generating mechanism 6, which is attached by screws 7, and is tightened and fixed. Then, a high frequency power supply v is applied to the surface wave generation mechanism 6.
1. When the high frequency voltage supplied by V2 is applied, the surface wave generated by the surface wave generating mechanism 6 causes the moving body plate 1 to
moves in three axes of XYθ on a plane.
表面波発生機構６は第２図の様になっている。The surface wave generating mechanism 6 is shown in FIG.
即ち、２個の表面波発生機ｓ６は上ペース２及び下ベー
ス３にそれぞれ表面波発生機構取り付はネジ７によって
取り付けられ、上ベース２と下ベース３をネジ固定した
際、動体板１を上下から挾み込み通常締め付は固定した
状態になっている。That is, the two surface wave generators s6 are attached to the upper pace 2 and the lower base 3 with the screws 7, respectively, and when the upper base 2 and the lower base 3 are fixed with the screws, the moving body plate 1 is It is inserted from the top and bottom and is normally tightened in a fixed state.
表面波発生機構は縦振動用電歪素子４１と横振動用電歪
素子４２と弾性板５で構成されている。それぞれの電歪
素子は弾性板５に貼り付けられ、弾性板５と上ベース２
（又は下ベース５）とは表面波発生機構取り付はネジ７
とで連結されている。The surface wave generation mechanism includes an electrostrictive element 41 for longitudinal vibration, an electrostrictive element 42 for horizontal vibration, and an elastic plate 5. Each electrostrictive element is attached to an elastic plate 5, and the elastic plate 5 and the upper base 2
(or lower base 5) is the surface wave generation mechanism installation screw 7
It is connected with.
第５図は第２図のＸＸ矢視図を示している。FIG. 5 shows a view taken along the XX arrow in FIG.
第４図は表面波発生機構６内に用いられる横振動用の電
歪素子４２の外観図を示す。今電歪素子４２に高周波印
加電圧ｖ２を与えると印加周波数に応じた横振動８を得
ることができる。FIG. 4 shows an external view of an electrostrictive element 42 for transverse vibration used in the surface wave generating mechanism 6. Now, by applying a high frequency applied voltage v2 to the electrostrictive element 42, it is possible to obtain a transverse vibration 8 according to the applied frequency.
第５図は表面波発生機構６内に用いられる縦振動用の電
歪素子４１の外観図を示す。今電歪素子４１に高周波印
加電圧ｖ１を与えると印加周波数に応じた縦振動９を得
ることができる。FIG. 5 shows an external view of an electrostrictive element 41 for longitudinal vibration used in the surface wave generating mechanism 6. Now, when a high frequency applied voltage v1 is applied to the electrostrictive element 41, longitudinal vibration 9 can be obtained according to the applied frequency.
それぞれの電歪素子によって発生した横振動８及び縦振
動９より合成された合成表面波１０は、第６図に示す様
に弾性体５０表面に生じた横振動８と弾性体自体に伝わ
る縦振動９との合成により作られ、動体板１に合成表面
波１０が伝搬され動体板１は第６図内矢印の方向へ移動
することができる。As shown in FIG. 6, a composite surface wave 10 synthesized from the transverse vibration 8 and longitudinal vibration 9 generated by each electrostrictive element is composed of the transverse vibration 8 generated on the surface of the elastic body 50 and the longitudinal vibration transmitted to the elastic body itself. 9, the composite surface wave 10 is propagated to the moving body plate 1, and the moving body plate 1 can move in the direction of the arrow in FIG.
ここで、動体板１が実際に進行に関与する波は横振動９
であるから、動体板１に与える進行エネルギの大小は横
振動８の大小により決定する。横振動８の振幅は、横振
動用電歪素子４２に印加する高周波電圧ｖ２の振幅に比
例することから、動体板１が受ける進行エネルギの大小
は高周波電圧ｖ２の振幅で制御することができる。ただ
し、ここで動体板１が受ける進行エネルギを有効に得る
ためには電歪素子の共振点を利用することが望ましく、
ここでは横振動用電歪素子４にの振幅を共振点となる様
に設定すると良い。Here, the wave actually involved in the movement of the moving body plate 1 is the transverse vibration 9
Therefore, the magnitude of the traveling energy given to the moving body plate 1 is determined by the magnitude of the lateral vibration 8. Since the amplitude of the lateral vibration 8 is proportional to the amplitude of the high frequency voltage v2 applied to the lateral vibration electrostrictive element 42, the magnitude of the traveling energy that the moving body plate 1 receives can be controlled by the amplitude of the high frequency voltage v2. However, in order to effectively obtain the traveling energy received by the moving body plate 1, it is desirable to use the resonance point of the electrostrictive element.
Here, it is preferable to set the amplitude of the transverse vibration electrostrictive element 4 so as to reach a resonance point.
更に合成波の伝搬する進行方向（第６図中矢印方向）の
正転、逆転は横振動８を与える電歪素子４２に印加する
高周波電圧の位相を１８ｐ反転制御することで可能とな
る。Furthermore, normal rotation and reverse rotation of the propagating direction of the composite wave (arrow direction in FIG. 6) is made possible by controlling the phase of the high frequency voltage applied to the electrostrictive element 42 which gives the transverse vibration 8 by 18p inversion control.
ここで、動体板１に加わる縦振動成分は、上下−組の表
面波発生機８６の発生する縦振動９をキャンセルする様
に使用するため、動体板１内体の動作には影響を及ぼす
ことはない。Here, since the longitudinal vibration component applied to the moving body plate 1 is used to cancel the longitudinal vibration 9 generated by the upper and lower surface wave generators 86, it does not affect the operation of the internal body of the moving body plate 1. There isn't.
以上の方法により表面波発生機構６は動体板１に合成表
面波１０を与えることができる。By the above method, the surface wave generating mechanism 6 can provide the composite surface wave 10 to the moving body plate 1.
今、表面波発生機構６は第１図に示す様に上下１組とす
ると、３組取り付けられており、これらによりそれぞれ
合成表面波１０α、 １０４ 、１ｏｅを発生する。Now, as shown in FIG. 1, three sets of surface wave generating mechanisms 6 are installed, one set for upper and lower sides, and these generate synthetic surface waves 10α, 104, and 1oe, respectively.
ここで、前述した様に、合成表面波１０それぞれが動体
板１の進行に関与する波は横振動８であるからそれぞれ
の合成波の横振動の力成分を１１鼻。Here, as mentioned above, since the waves involved in the movement of the moving body plate 1 in each of the composite surface waves 10 are the lateral vibrations 8, the force components of the lateral vibrations of each composite wave are expressed as 11.
、１１４．１１とすれば２，１１ａ 、１１ｂ、１１（
、はそれぞれ振幅及び方向をもつことからベクトル（以
後進行方向ベクトルと呼ぶ）として扱うことができる。, 114.11, then 2, 11a , 11b, 11(
, can be treated as vectors (hereinafter referred to as traveling direction vectors) because they each have an amplitude and a direction.
第７図は表面波発生機構の発生した合成表面波→
→
１０ａ、１０６，１００の横振動力成分ベクトル１１４
．１１＆１１ を説明した説明図である。Figure 7 shows the composite surface wave generated by the surface wave generation mechanism →
→ Lateral vibration force component vector 114 of 10a, 106,100
．． 11&11 is an explanatory diagram illustrating.
ここでそれぞれの進行方向ベクトル１１４．１１！。Here, each traveling direction vector is 114.11! .
１１Ｃは動体板１が得た力ベクトル１２−４，１２ｂ、
１７Ｇとは比例関係にある。それぞれのベクトルを１１
４゜１１ｂ、１１Ｇ、 １２＆、１２６，１２６とすれ
ば。11C is the force vector 12-4, 12b obtained by the moving body plate 1,
There is a proportional relationship with 17G. 11 each vector
4゜11b, 11G, 12&, 126, 126.
１２ａ＝ｆｆ（１１↓） １２Ｍ ＝） （１１ｊ） （静止摩擦係数〕 となる。12a=ff(11↓) 12M =) (11j) (Static friction coefficient) becomes.
本実施例では、表面波発生機＄６を上下１組としてそれ
ぞれ１２（１’方向に５組配設する方式をとっている。In this embodiment, a system is adopted in which 12 (5 sets) of surface wave generators $6 are arranged in the upper and lower directions, respectively (5 sets in the 1' direction).
そこでそれぞれの動体板１が得る力ベクトル１２４１２
６．１２Ｇの和が動体板１の受ける総合力ベクトル（１
５）となる。Therefore, the force vector 12412 obtained by each moving body plate 1
6. The sum of 12G is the total force vector (1
5).
今、Ｓ軸方向、！軸方向、θ軸方向それぞれ３軸を移動
可能にする場合、総合力ベクトル１３を、力ベクトル１
２Ｇ、１２４．１２Ｇによってどの様に組み合わせれば
良いかを示したものが第８図である。Now, in the S-axis direction! When making the three axes movable in the axial direction and the θ-axis direction, the total force vector 13 is changed to the force vector 1
FIG. 8 shows how to combine 2G and 124.12G.
１’ｊ ＝ １ｒ−＋１ｔｂ −１−１２１ｃ単にＸ軸
方向送抄を得たい場合、その条件式は（）３ｅ、（）ｙ
を各ベクトルのＸ成分及びｙ成分とすれば、
１ブ・−＝ ０ ＊ （１２”’５）ｙ＝−（１２’：
）ｙｌｉ ＝ １ｚｉ ＋１？Ｑ
となる。1'j = 1r-+1tb -1-121c If you simply want to obtain the paper feed in the X-axis direction, the conditional expressions are ()3e, ()y
Let be the X and y components of each vector, then 1b・-=0*(12'''5)y=-(12':
)yli = 1zi +1? It becomes Q.
同様にＹ軸方向送りを得る場合その条件式は、１２ｂ：
１２Ｃ：０
１３＝１２４
となる。又、θ軸方向送りは、力ベクトル１２α１八
１式 が偶力が働く様に加えれば良く、単にθ輸送ゆを
させたい場合、１２α＝ １２ ｋ ＝ １２ ｃであ
れば良い。その時のモーメントＭはＭ＝ｊ２ａ。Similarly, when obtaining feed in the Y-axis direction, the conditional expression is 12b:
12C:0 13=124. In addition, the θ-axis direction feed is caused by the force vector 12α18
1 equation should be added so that a couple acts, and if you simply want to cause a θ transport distortion, 12α = 12 k = 12 c is sufficient. The moment M at that time is M=j2a.
２ｒである。（ここでｒは表面波アクチェエータの中心
から表面波発生機構までの距離を示す。）更に、Ｘ軸方
向送り、Ｙ軸方向送り、θ軸方向送りを同時に行わせる
場合、総合力ベクトルとその時の偶力によるモーメント
を決めてやれば良い。It is 2r. (Here, r indicates the distance from the center of the surface wave actuator to the surface wave generation mechanism.) Furthermore, when performing X-axis direction feed, Y-axis direction feed, and θ-axis direction feed at the same time, the total force vector and the All you have to do is determine the moment due to the couple.
これにより、平面上のＸＹθ３軸方向へ動体板１を移動
することができる。Thereby, the moving body plate 1 can be moved in the three axes directions of XYθ on the plane.
尚、本実施例では、表面波発生機構６が水平面上に３組
使用しているが、もし、１組の場合にはＸ軸方向送りの
み、２組の場合は、それぞれを直角に配置することでＸ
Ｙ方向送りに用いることができる。又、４組以上の場合
には、ＸＹθ方向送りの動作そのものは変化ないが、よ
り円滑になる。In this embodiment, three sets of surface wave generating mechanisms 6 are used on the horizontal plane, but if one set is used, only the X-axis direction is fed, and if two sets are used, each set is arranged at right angles. That's X
It can be used for feeding in the Y direction. Furthermore, in the case of four or more sets, the XYθ direction feeding operation itself remains unchanged, but becomes smoother.
本表面波アクチェエータは一層構造にてＸＹθ３軸駆動
可能であり小形軽量化される利点があるが、更に、前述
した様に静止摩擦係数を利用するため表面波発生機構６
あるいは動体板１の摩耗が生じないためクリーン化を図
ることができるという利点がある。This surface wave actuator has a single-layer structure and can be driven in three axes of XYθ, which has the advantage of being small and lightweight.In addition, as mentioned above, since it utilizes the coefficient of static friction, the surface wave generation mechanism 6
Another advantage is that the moving body plate 1 does not wear out, so it can be kept clean.
又、本構造は動体板１の大きさに影響されないから、長
ストローク化が可能であり、動体板１の送りも、横振動
用電歪素子４２の印加電圧を制御して共振点で動作させ
ることにより稼動時間を短縮でき長ストロークにも対応
できる。Moreover, since this structure is not affected by the size of the moving body plate 1, a long stroke is possible, and the feeding of the moving body plate 1 is also controlled at the resonance point by controlling the voltage applied to the electrostrictive element 42 for transverse vibration. This reduces operating time and allows for long strokes.
本表面波アクチェエータは、平面上のＸＹθ５軸方向の
位置決め調整に大きく寄与するが、モータとして使用し
その中心軸をソフト的に自由に移動させたい場合やロボ
ットに取り付ける駆動部の様に小形軽量化が特に要求さ
れている場合等に有効である。This surface wave actuator greatly contributes to positioning adjustment in the XYθ5-axis directions on a plane, but it can be used as a motor to freely move its center axis using software, or as a drive unit attached to a robot.It can be made smaller and lighter. This is effective when there is a particular requirement.
更に高精度の位置決めをする際には１位置検出機能、（
変位センサ、角度センサ）を付加するシステムにすれば
良い。For even more precise positioning, the 1-position detection function (
A system that adds a displacement sensor, angle sensor) is sufficient.
本発明によれば１層構造にて平面上にＸＹθ３軸の移動
が可能にでき、従来の様に多層構造にする必要がないた
め、装置の小形軽量化を図ることができる。又、装置も
単純な為安価に製作できるｄ更にストロークに限界がな
いため実用範囲は非常に大きい。又、摩擦による発塵が
ないため、クリーンシステムの構築ができるうえに高精
度の位置決めを実現させるのＶこ２位置検出機能を付加
するだけでよく、システムが非常に簡単にできる等の効
果もある。According to the present invention, movement in the three axes of XYθ on a plane is possible with a single layer structure, and there is no need for a multilayer structure unlike the conventional one, so the device can be made smaller and lighter. Further, since the device is simple, it can be manufactured at low cost.Furthermore, since there is no limit to the stroke, the practical range is very wide. In addition, since there is no dust generation due to friction, it is possible to construct a clean system, and it is only necessary to add a V2 position detection function to achieve high-precision positioning, making the system extremely simple. be.
第１図は本発明の１実施例である表面波アクチェエータ
の外観図、第２図は本発明の１実施例である表面波アク
チェエータ内にて使用する表面波発生機構を説明する機
構断面図、第３図は第２図の表面波発生機構のＸＸ矢視
図、第４図は表面波発生機構内にて用いられる横振動用
電歪素子の外観図、第５図は表面波発生機構内にて用い
られる縦振動用電歪素子の外観図、第６図は表面波発生
機構によって発生した横振動と縦撮動との合成表面波を
説明する原理図、第７図は本発明の１実施例である表面
波アクチェエータ内にある上下１組とした時の３組の表
面波発生機構の発生した合成表面波の横振動力成分ベク
トルを説明する説明図、第８図は動体板を各軸通りする
プヒめに必要な動体板が必要な総合力ベクトルを説明す
る説明図である。
１−・動体板、 ２・・上ベース、３・
・・下ベース、
４１・・・電歪素子（縦振動用）、
４２・・・電歪素子（横振動用）、
５・・・弾性体、
６・・・表面波発生機構、
７・・・表面波発生機構取付はネジ、
８・・・横振動、
９・・・縦振動、
１０・・・合成表面波、
ｖｌ・・・高周波電源（縦振動用）、
ｖ２・・・高周波電源（横振動用）。
酒
胃FIG. 1 is an external view of a surface wave actuator that is an embodiment of the present invention, and FIG. 2 is a sectional view of a surface wave generation mechanism used in the surface wave actuator that is an embodiment of the present invention. Figure 3 is a view taken along the XX arrow of the surface wave generation mechanism in Figure 2, Figure 4 is an external view of the transverse vibration electrostrictive element used in the surface wave generation mechanism, and Figure 5 is inside the surface wave generation mechanism. Fig. 6 is a principle diagram illustrating the composite surface wave of transverse vibration and vertical imaging generated by the surface wave generation mechanism, and Fig. 7 is an illustration of the electrostrictive element for longitudinal vibration used in An explanatory diagram illustrating the transverse vibration force component vector of the composite surface waves generated by three sets of surface wave generation mechanisms when one set is upper and lower in the surface wave actuator according to the embodiment. FIG. 2 is an explanatory diagram illustrating a total force vector that requires a moving body plate to move along the axis. 1-・Moving body plate, 2・・Upper base, 3・・
...lower base, 41...electrostrictive element (for longitudinal vibration), 42...electrostrictive element (for transverse vibration), 5...elastic body, 6...surface wave generation mechanism, 7...・Surface wave generation mechanism is installed using screws, 8...Transverse vibration, 9...Longitudinal vibration, 10...Synthetic surface wave, vl...High frequency power supply (for longitudinal vibration), v2...High frequency power supply ( for lateral vibration). alcoholic stomach
Claims (1)
り付けた表面波発生機構を配置してそれぞれの表面波発
生機構の電歪素子に電圧を印加することにより発生した
表面波で動体板をＸＹθの３軸方向に移動可能とする表
面波アクチュエータ。1. A surface wave generation mechanism with an electrostrictive element attached to an elastic body is placed on the moving object plate to be moved, and a voltage is applied to the electrostrictive element of each surface wave generation mechanism to move the moving object using the surface waves generated. A surface wave actuator that allows the plate to move in the three axes of XYθ.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62090814A JPH0734660B2 (en) | 1987-04-15 | 1987-04-15 | Surface wave actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62090814A JPH0734660B2 (en) | 1987-04-15 | 1987-04-15 | Surface wave actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63257478A true JPS63257478A (en) | 1988-10-25 |
| JPH0734660B2 JPH0734660B2 (en) | 1995-04-12 |
Family
ID=14009064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62090814A Expired - Lifetime JPH0734660B2 (en) | 1987-04-15 | 1987-04-15 | Surface wave actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734660B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010063230A (en) * | 2008-09-02 | 2010-03-18 | Canon Inc | Vibration wave motor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587902A (en) * | 1978-12-27 | 1980-07-03 | Fujitsu Ltd | Dimension measuring device |
| JPS59198886A (en) * | 1983-04-25 | 1984-11-10 | Tokyo Electric Co Ltd | Motor |
| JPS61131443A (en) * | 1984-11-30 | 1986-06-19 | Canon Inc | Alignment device |
| JPS61224878A (en) * | 1985-03-29 | 1986-10-06 | Canon Inc | Vibration wave motor |
-
1987
- 1987-04-15 JP JP62090814A patent/JPH0734660B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5587902A (en) * | 1978-12-27 | 1980-07-03 | Fujitsu Ltd | Dimension measuring device |
| JPS59198886A (en) * | 1983-04-25 | 1984-11-10 | Tokyo Electric Co Ltd | Motor |
| JPS61131443A (en) * | 1984-11-30 | 1986-06-19 | Canon Inc | Alignment device |
| JPS61224878A (en) * | 1985-03-29 | 1986-10-06 | Canon Inc | Vibration wave motor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010063230A (en) * | 2008-09-02 | 2010-03-18 | Canon Inc | Vibration wave motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734660B2 (en) | 1995-04-12 |
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