JPS63250018A - Superconductive wire rod and its manufacture - Google Patents
Superconductive wire rod and its manufactureInfo
- Publication number
- JPS63250018A JPS63250018A JP62085153A JP8515387A JPS63250018A JP S63250018 A JPS63250018 A JP S63250018A JP 62085153 A JP62085153 A JP 62085153A JP 8515387 A JP8515387 A JP 8515387A JP S63250018 A JPS63250018 A JP S63250018A
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- film
- superconducting
- glass
- oxide superconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 26
- 239000000835 fiber Substances 0.000 claims abstract description 20
- 239000011521 glass Substances 0.000 claims abstract description 14
- 238000009987 spinning Methods 0.000 claims abstract description 11
- 238000004544 sputter deposition Methods 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 18
- 239000003365 glass fiber Substances 0.000 abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 11
- 239000010409 thin film Substances 0.000 abstract description 11
- 239000000377 silicon dioxide Substances 0.000 abstract description 4
- 239000000843 powder Substances 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 16
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000004925 denaturation Methods 0.000 description 2
- 230000036425 denaturation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- -1 alkyl compound Chemical class 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Light Guides In General And Applications Therefor (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
一１＝ 11 =
この発明は、超伝導マグネットコイル、超伝導パワー伝
送、超伝導通信などに用いられる超伝導線材及びその製
造方法に関する。The present invention relates to a superconducting wire used in superconducting magnet coils, superconducting power transmission, superconducting communications, etc., and a method for manufacturing the same.
従来の超伝導線材は超伝導材料を単に丸棒状にしたもの
であり、超伝導材料のアモルファス金属を溶融状態で押
し出し成型し、急冷し、酸素雰囲気で焼きいれ酸化して
作るようにしている。Conventional superconducting wires are simply round bars made of superconducting material, and are made by extruding superconducting amorphous metal in a molten state, rapidly cooling it, and oxidizing it by annealing it in an oxygen atmosphere.
しかしながら、従来の超伝導線材では、適当な可撓性が
得られないため、実際に適用しようとすると困難があっ
た。
また、従来の製造方法では、細いものを作るのが困難で
あったり、可視性の高いものを製造することが困難であ
った。
この発明は、細くて可撓性のある超伝導線材を提供する
とともに、そのような超伝導線材を容易に製造すること
ができる製造方法を提供することを目的とする。However, since conventional superconducting wires do not have adequate flexibility, it is difficult to actually apply them. Furthermore, with conventional manufacturing methods, it is difficult to manufacture thin products or products with high visibility. An object of the present invention is to provide a thin and flexible superconducting wire, and also to provide a manufacturing method that can easily manufacture such a superconducting wire.
この発明による超伝導線材は、ガラス材料よりなるファ
イバと、該ファイバ上に形成された酸化物超伝導材料の
膜と、該膜の上に形成された密閉層とからなることを特
徴とする。
また、この発明による超伝導線材の製造方法は、ガラス
母材よりファイバを紡糸する工程と、酸化物超伝導材料
をスパッタリングして上記ファイバ上に酸化物超伝導材
料の膜を形成する工程と、該酸化物超伝導材料の膜の上
に密閉層を形成する工程とからなる。The superconducting wire according to the present invention is characterized by comprising a fiber made of a glass material, a film of an oxide superconducting material formed on the fiber, and a sealing layer formed on the film. Further, the method for manufacturing a superconducting wire according to the present invention includes a step of spinning a fiber from a glass base material, a step of sputtering an oxide superconducting material to form a film of the oxide superconducting material on the fiber, forming a sealing layer over the film of oxide superconducting material.
細いガラスファイバの上に酸化物超伝導膜を形成しさら
にその上に密閉層を形成して超伝導線材としているので
、全体として細く、必要な可撓性を得ることが容易であ
るとともに、密閉層により酸化物超伝導膜の活性状態を
維持することができる。
スパッタリングにより酸化物超伝導膜を形成しているの
で、細いガラスファイバ上に酸化物超伏導膜を均一に薄
く形成することか簡単にできる。An oxide superconducting film is formed on a thin glass fiber, and a sealing layer is formed on top of it to create a superconducting wire, so it is thin as a whole, making it easy to obtain the necessary flexibility, and making it easy to seal. The layer can maintain the active state of the oxide superconducting film. Since the oxide superconducting film is formed by sputtering, it is easy to uniformly and thinly form the oxide superconducting film on a thin glass fiber.
この発明の一実施例にかかる超伝導線材は第１図に示す
ような断面構造を有する。すなわち、ガラスファイバ１
１の表面に酸化物超伝導薄膜１２が形成されさらにその
上に密閉層１３が形成されてなる。この実施例では、ガ
ラスファイバ１１は石英ガラスを直径１２ ’ｙｙｈに
紡糸したものであり、酸化物超伝導薄膜１２はＢ ａｏ
、６Ｙｏ、４ｃ ｕ ０４の酸化物超伝導材料を用い、
厚さ０．３ｐ、ｍとしている。
密閉層］３は厚さ０．０５．ｇｒ／ＬのＳ ｉ ０２膜
である。
なお、ガラスファイバ１１としては、他に、多成分ガラ
ス等の光学ガラスやセラミックなどを材料とすることが
できる。また、酸化物超伝導材料としてはＢａＹＣｕＯ
，系、Ｌａ５ｒＣｕＯｘ系などを用いることができる。
密閉層１３は、シリカの他に光学ガラスや石英ガラスな
どのガラス類、あるいはＩｎ、Ａ 、Ｃｕ、Ｎｉ、Ａ
ｕなどの金属で形成することができる。さらに密閉層１
３の上にシリコーンや有機物などの保護層を適宜設はる
ことかできる。
このような構造の超伝導線材は、るつぼ線引法やロット
線引法等によりガラスファイバを紡糸するとともに、そ
れに引き続いて、連続的に酸化物超伝導膜１２と密閉層
１３とを形成することにより作ることができる。酸化物
超伝導薄膜１２は、酸化物超伝導材料自体の連続的なス
パッタリング、蒸着、ＣＶＤ （化学気相堆積）、アル
キル化合物の分解等により形成でき、゛あるいは超伝導
材料をこれらの方法により付着した後酸化して作ること
ができるほか、ゾルゲル法などによってもよい。
密閉層１３は、ガラス材料を付着す、る場合にはスパッ
タ法やゾルゲル法などによればよく、金属材料を付着す
る場合はスパッタ法、溶融メッキ法、ＣＶＤ法などによ
る。
このうち、スパッタリングによって酸化物超伝導薄膜を
形成する方法は、細いガラスファイバの上に薄い、均一
な膜を容易に形成できる点で有利である。つぎに、この
スパッタリングによる製造方法の一実施例について説明
する。
第２図に示すように、紡糸炉２と直流スパッタ装置３．
４と引っ張りローラ５とが垂直方向に１直線に並べられ
ており、紡糸炉２において紡糸されたガラスファイバが
引っ張りローラ５により引っ張られて巻き取られる過程
で、紡糸に連続して、スパッタ装置３．４によりファイ
バの表面への超伝導薄膜及びそ、の上への密閉層の形成
が行われる。
すなわち、紡糸炉２は加熱炉により溶融されたガラスを
線引きして紡糸するものである。加熱炉には押し込みレ
バー２１によりガラス母材が所定の速度で押し込まれる
。直径測定器６１によりファイバの直径を測定してガラ
ス母材の押し込み速度を変えるなどの制御を行って一定
の直径のファイバが紡糸されるようにする。ここでは、
ガラス母材として直径２０ｍｍの石英棒を用い、紡糸炉
２から線引きされるファイバを２ ｍ ７分の速度でロ
ーラ５により引っ張り、直径１２５％ｍ：ｆ＝ ２ｐｍ
のファイバを紡糸した。
スパッタ装置３．４の両端には、低圧ポンプ、ロータリ
ーポンプ、メカニカルブースターポンプに連結された差
動排気装置６３．６４が設けられていて、真空のスパッ
タ装置３．４内と大気との圧力差か次第に形成されるよ
う、低圧ポンプ側からロータリーポンプ及びメカニカル
ブ′−スターポンプ側に向けて吸引力が増すようにされ
ている。
クリーナ６５は、アルコンガスプラズマを発生させてプ
ラズマイオンでファイバ表面を叩いて表面の汚れを落と
すために挿入されている。
直流スパッタ装置３．４は円筒同軸型スパッタ装置を用
いている。この円筒同軸型スパッタ装置３（構造的には
スパッタ装置４も同じ）では、第３図に示すように中央
に垂直に中量されたガラスファイバ１１を囲むように３
本のアノード３１が配置され、その周囲に円筒状のター
ゲット（陰極）３２が設けられている。このターゲラ１
−３２は、その寸法が内径４０ｍｍ、外径５０ｍｍ、長
さ６００ｍｍ、有効長５００ｍｍであり、スパッタ装置
３の場合、Ｂ ａｏ６Ｙｏ４ｃ ｕ ０４の構成の酸化
物粉末をシンターしたものである。スパッタ装置４では
ターゲット３２の材料は５ｉ０２としである。いずれも
炉内は、イオンガスとしてアルゴンガスを用い、これを
１Ｏ−３Ｔｏｒｒの圧力とした。この炉内は小量の酸素
を含む雰囲気としである。このようにして、上記のよう
に２ｍ／分の速度で連続的に紡糸されてくるファイバ表
面に、まず、スパッタ装置３で酸化物超伝導薄膜を連続
的に形成し、引き続いてその上にスパッタ装置４によっ
て５ｊＯ２膜を形成した。
これらの膜厚は、前者が０．３Ｐｆｉ、後者が屹０５μ
電である。さらに、そのＳ ｉ ０２膜上に直ちにシリ
コーン樹脂を塗布した。
こうして、屈曲可能な超伝導線材を製造した。
この超伝導線材では、酸化物超伝導薄膜１２の上に５ｊ
０２の密閉層１３が形成されているため、密閉構造とな
っており、酸化物超伝導薄膜１２の変性、すなわちスパ
ッタ後の活性な状態からの酸化を、防止できる。この線
材を８５°Ｋに冷却したところ超伝導現象がみられた。
つぎに製造方法に関する第２に実施例について説明する
。この実施例では、第２図と同じようにして、まず、直
径８ザ電のガラスファイバを紡糸し、それに引き続いて
高周波スパッタ装置によりＢａｏ６Ｙｏ。４Ｃｕ０４組
成の厚さ０．３ハの酸化物超伝導薄膜を形成し、つぎに
上記第１の実施例とは異なり金属ディップ装置を用いて
１５０℃の温度でインジウムをコーティングすることに
より、厚さ２０ＰＬの密閉層を作った。この実施例で得
た超伝導線材の場合も、８５°にで超伝導状態を示した
。A superconducting wire according to an embodiment of the present invention has a cross-sectional structure as shown in FIG. That is, glass fiber 1
An oxide superconducting thin film 12 is formed on the surface of 1, and a sealing layer 13 is further formed thereon. In this embodiment, the glass fiber 11 is made by spinning quartz glass to a diameter of 12'yyh, and the oxide superconducting thin film 12 is made of Bao
, 6Yo, 4c u 04 using oxide superconducting materials,
The thickness is 0.3p, m. Sealing layer] 3 has a thickness of 0.05. It is a gr/L S i 02 film. The glass fiber 11 may also be made of optical glass such as multi-component glass, ceramic, or the like. In addition, as an oxide superconducting material, BaYCuO
, La5rCuOx system, etc. can be used. In addition to silica, the sealing layer 13 is made of glass such as optical glass or quartz glass, or In, A2, Cu, Ni, or A2.
It can be made of metal such as u. Furthermore, sealing layer 1
A protective layer such as silicone or an organic substance may be appropriately provided on the layer 3. A superconducting wire having such a structure is obtained by spinning glass fibers by a crucible drawing method, a lot drawing method, etc., and subsequently forming an oxide superconducting film 12 and a sealing layer 13 continuously. It can be made by The oxide superconducting thin film 12 can be formed by continuous sputtering, vapor deposition, CVD (chemical vapor deposition), decomposition of an alkyl compound, etc. of the oxide superconducting material itself, or by depositing the superconducting material by these methods. It can be made by oxidation after the reaction, or it can also be made by a sol-gel method. The sealing layer 13 may be formed by a sputtering method, a sol-gel method, or the like when a glass material is attached, or by a sputtering method, a hot-dip plating method, a CVD method, or the like when a metal material is attached. Among these methods, the method of forming an oxide superconducting thin film by sputtering is advantageous in that a thin, uniform film can be easily formed on a thin glass fiber. Next, an embodiment of this manufacturing method using sputtering will be described. As shown in FIG. 2, a spinning furnace 2 and a DC sputtering device 3.
4 and a tension roller 5 are arranged in a straight line in the vertical direction, and in the process in which the glass fiber spun in the spinning furnace 2 is pulled and wound by the tension roller 5, the sputtering device 3 .4 forms a superconducting thin film on the surface of the fiber and a sealing layer thereon. That is, the spinning furnace 2 draws and spins glass melted in a heating furnace. A glass base material is pushed into the heating furnace at a predetermined speed by a pushing lever 21. The diameter of the fiber is measured by a diameter measuring device 61, and control such as changing the pushing speed of the glass base material is performed so that a fiber of a constant diameter is spun. here,
A quartz rod with a diameter of 20 mm is used as a glass base material, and the fiber drawn from the spinning furnace 2 is pulled by a roller 5 at a speed of 2 m 7 min, with a diameter of 125% m: f = 2 pm.
The fiber was spun. At both ends of the sputtering device 3.4, differential pumping devices 63,64 connected to a low-pressure pump, a rotary pump, and a mechanical booster pump are provided to reduce the pressure difference between the vacuum inside the sputtering device 3.4 and the atmosphere. The suction force increases from the low-pressure pump side toward the rotary pump and mechanical booster pump side so that the pumps are gradually formed. The cleaner 65 is inserted to generate arcon gas plasma and hit the fiber surface with plasma ions to remove dirt on the surface. The DC sputtering device 3.4 uses a cylindrical coaxial type sputtering device. In this cylindrical coaxial type sputtering apparatus 3 (structurally, the sputtering apparatus 4 is also the same), as shown in FIG.
A book anode 31 is arranged, and a cylindrical target (cathode) 32 is provided around it. This targetera 1
-32 has dimensions of an inner diameter of 40 mm, an outer diameter of 50 mm, a length of 600 mm, and an effective length of 500 mm, and in the case of sputtering device 3, the oxide powder having the configuration of Bao6Yo4cu04 was sintered. In the sputtering apparatus 4, the material of the target 32 is 5i02. In each case, argon gas was used as the ion gas in the furnace, and the pressure was set at 10-3 Torr. The atmosphere inside this furnace contained a small amount of oxygen. In this way, an oxide superconducting thin film is first continuously formed in the sputtering device 3 on the surface of the fiber that is continuously spun at a speed of 2 m/min as described above, and then sputtered on top of the oxide superconducting thin film. A 5jO2 film was formed using apparatus 4. The thickness of these films is 0.3Pfi for the former and 05μ for the latter.
It is electric. Furthermore, a silicone resin was immediately applied onto the S i 02 film. In this way, a bendable superconducting wire was manufactured. In this superconducting wire, 5j
Since the sealing layer 13 of No. 02 is formed, it has a sealed structure and can prevent denaturation of the oxide superconducting thin film 12, that is, oxidation from the active state after sputtering. When this wire was cooled to 85°K, superconductivity was observed. Next, a second example regarding the manufacturing method will be described. In this example, in the same manner as in FIG. 2, a glass fiber with a diameter of 8 strands was first spun, and then Bao6Yo was spun using a high frequency sputtering device. By forming an oxide superconducting thin film with a thickness of 0.3mm and having a composition of 4Cu04, and then coating it with indium at a temperature of 150°C using a metal dip apparatus, unlike the first embodiment, the thickness was increased. A sealed layer of 20 PL was made. The superconducting wire obtained in this example also exhibited superconductivity at an angle of 85°.
この発明による超伝導線材は、細くて十分な可撓性を持
たせることが容易なため、超伝導マグネッ１−コイル、
超伝導パワー伝送、超伝導通信などの種々の分野に適用
することが容易である。さらに酸化物超伝導膜は密閉層
により密閉されているので、その変性が防止でき、活性
状態を保つことができる。
また、この発明の超伝導線材の製造方法によれば、細い
ガラスファイバの上に、薄い酸化物超伝導膜を均一に形
成することが簡単にできる。The superconducting wire according to the present invention is thin and easy to provide sufficient flexibility, so it can be used for superconducting magnets, coils,
It is easy to apply to various fields such as superconducting power transmission and superconducting communication. Furthermore, since the oxide superconducting membrane is sealed by the sealing layer, its denaturation can be prevented and the active state can be maintained. Further, according to the method for manufacturing a superconducting wire of the present invention, a thin oxide superconducting film can be easily and uniformly formed on a thin glass fiber.
第１図はこの発明の一実施例にかかる線材の断面図、第
２図は製造装置の一例を示す模式図、第３図はスパッタ
装置の断面を示す模式図である。
１１・・・ガラスファイバ、１２・・・酸化物超伝導薄
膜、１３・・・密閉層、２・・・紡糸炉、２１・・・押
し込みレバー、３．４・・・スパッタ装置、３１・・・
アノード、３２・・・ターゲット、５・・・引っ張りロ
ーラ、６１．６２・・・直径測定器、６３．６４・・・
差動排気装置、６５・・・クリーナ。FIG. 1 is a cross-sectional view of a wire rod according to an embodiment of the present invention, FIG. 2 is a schematic diagram showing an example of a manufacturing apparatus, and FIG. 3 is a schematic diagram showing a cross-section of a sputtering apparatus. DESCRIPTION OF SYMBOLS 11... Glass fiber, 12... Oxide superconducting thin film, 13... Sealing layer, 2... Spinning furnace, 21... Pushing lever, 3.4... Sputtering device, 31...・
Anode, 32... Target, 5... Pulling roller, 61.62... Diameter measuring device, 63.64...
Differential exhaust system, 65...Cleaner.
Claims (5)
形成された酸化物超伝導材料の膜と、該膜の上に形成さ
れた密閉層とからなる超伝導線材。(1) A superconducting wire consisting of a fiber made of a glass material, a film of an oxide superconducting material formed on the fiber, and a sealing layer formed on the film.
請求の範囲第１項記載の超伝導線材。(2) The superconducting wire according to claim 1, wherein the sealing layer is a metal layer.
許請求の範囲第１項記載の超伝導線材。(3) The superconducting wire according to claim 1, wherein the sealing layer is a glass layer.
物超伝導材料をスパッタリングして上記ファイバ上に酸
化物超伝導材料の膜を形成する工程と、該酸化物超伝導
材料の膜の上に密閉層を形成する工程とからなる超伝導
線材の製造方法。(4) A step of spinning a fiber from a glass base material, a step of sputtering an oxide superconducting material to form a film of the oxide superconducting material on the fiber, and a step of forming a film of the oxide superconducting material on the fiber. A method for manufacturing a superconducting wire comprising the step of forming a sealing layer on the
装置を用いて行われることを特徴とする特許請求の範囲
第４項記載の超伝導線材の製造方法。(5) The method for manufacturing a superconducting wire according to claim 4, wherein the sputtering step is performed using a cylindrical coaxial sputtering device.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62085153A JPS63250018A (en) | 1987-04-06 | 1987-04-06 | Superconductive wire rod and its manufacture |
| US07/178,264 US5093311A (en) | 1987-04-06 | 1988-04-06 | Oxide superconductor cable and method of producing the same |
| US07/740,947 US5196399A (en) | 1987-04-06 | 1991-08-06 | Apparatus for producing oxide superconductor cable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62085153A JPS63250018A (en) | 1987-04-06 | 1987-04-06 | Superconductive wire rod and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63250018A true JPS63250018A (en) | 1988-10-17 |
Family
ID=13850721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62085153A Pending JPS63250018A (en) | 1987-04-06 | 1987-04-06 | Superconductive wire rod and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63250018A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01143108A (en) * | 1987-11-30 | 1989-06-05 | Showa Electric Wire & Cable Co Ltd | Manufacture of ceramics superconductive wire |
| JPH01144518A (en) * | 1987-08-20 | 1989-06-06 | Sumitomo Electric Ind Ltd | Long-sized superconductor and manufacture thereof |
| CN102024525A (en) * | 2010-11-16 | 2011-04-20 | 宁波振亚电工机械厂 | Film sintering machine |
| CN115196889A (en) * | 2022-08-01 | 2022-10-18 | 中国科学院合肥物质科学研究院 | Method for modifying surface and enhancing insulation of glass fiber subjected to heat treatment of superconducting magnet |
-
1987
- 1987-04-06 JP JP62085153A patent/JPS63250018A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01144518A (en) * | 1987-08-20 | 1989-06-06 | Sumitomo Electric Ind Ltd | Long-sized superconductor and manufacture thereof |
| JPH01143108A (en) * | 1987-11-30 | 1989-06-05 | Showa Electric Wire & Cable Co Ltd | Manufacture of ceramics superconductive wire |
| CN102024525A (en) * | 2010-11-16 | 2011-04-20 | 宁波振亚电工机械厂 | Film sintering machine |
| CN115196889A (en) * | 2022-08-01 | 2022-10-18 | 中国科学院合肥物质科学研究院 | Method for modifying surface and enhancing insulation of glass fiber subjected to heat treatment of superconducting magnet |
| CN115196889B (en) * | 2022-08-01 | 2024-01-30 | 中国科学院合肥物质科学研究院 | Glass fiber surface modification and insulation enhancement method used after superconducting magnet heat treatment |
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