JPS6324826U - - Google Patents
Info
- Publication number
- JPS6324826U JPS6324826U JP11930886U JP11930886U JPS6324826U JP S6324826 U JPS6324826 U JP S6324826U JP 11930886 U JP11930886 U JP 11930886U JP 11930886 U JP11930886 U JP 11930886U JP S6324826 U JPS6324826 U JP S6324826U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- semiconductor manufacturing
- electrode
- stainless steel
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11930886U JPS6324826U (no) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11930886U JPS6324826U (no) | 1986-07-31 | 1986-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324826U true JPS6324826U (no) | 1988-02-18 |
Family
ID=31006557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11930886U Pending JPS6324826U (no) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324826U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6348832A (ja) * | 1986-08-19 | 1988-03-01 | Tokyo Electron Ltd | Ｃｖｄ装置 |
-
1986
- 1986-07-31 JP JP11930886U patent/JPS6324826U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6348832A (ja) * | 1986-08-19 | 1988-03-01 | Tokyo Electron Ltd | Ｃｖｄ装置 |