JPS6324666U - - Google Patents
Info
- Publication number
- JPS6324666U JPS6324666U JP11859686U JP11859686U JPS6324666U JP S6324666 U JPS6324666 U JP S6324666U JP 11859686 U JP11859686 U JP 11859686U JP 11859686 U JP11859686 U JP 11859686U JP S6324666 U JPS6324666 U JP S6324666U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- casing
- board
- storage container
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 6
- 235000012431 wafers Nutrition 0.000 claims 4
- 230000010354 integration Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11859686U JPS6324666U (enExample) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11859686U JPS6324666U (enExample) | 1986-07-31 | 1986-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324666U true JPS6324666U (enExample) | 1988-02-18 |
Family
ID=31005197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11859686U Pending JPS6324666U (enExample) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324666U (enExample) |
-
1986
- 1986-07-31 JP JP11859686U patent/JPS6324666U/ja active Pending
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