JPS6324666U - - Google Patents

Info

Publication number
JPS6324666U
JPS6324666U JP11859686U JP11859686U JPS6324666U JP S6324666 U JPS6324666 U JP S6324666U JP 11859686 U JP11859686 U JP 11859686U JP 11859686 U JP11859686 U JP 11859686U JP S6324666 U JPS6324666 U JP S6324666U
Authority
JP
Japan
Prior art keywords
opening
casing
board
storage container
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11859686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11859686U priority Critical patent/JPS6324666U/ja
Publication of JPS6324666U publication Critical patent/JPS6324666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP11859686U 1986-07-31 1986-07-31 Pending JPS6324666U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11859686U JPS6324666U (enrdf_load_stackoverflow) 1986-07-31 1986-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11859686U JPS6324666U (enrdf_load_stackoverflow) 1986-07-31 1986-07-31

Publications (1)

Publication Number Publication Date
JPS6324666U true JPS6324666U (enrdf_load_stackoverflow) 1988-02-18

Family

ID=31005197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11859686U Pending JPS6324666U (enrdf_load_stackoverflow) 1986-07-31 1986-07-31

Country Status (1)

Country Link
JP (1) JPS6324666U (enrdf_load_stackoverflow)

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