JPS6324483U - - Google Patents
Info
- Publication number
- JPS6324483U JPS6324483U JP11869786U JP11869786U JPS6324483U JP S6324483 U JPS6324483 U JP S6324483U JP 11869786 U JP11869786 U JP 11869786U JP 11869786 U JP11869786 U JP 11869786U JP S6324483 U JPS6324483 U JP S6324483U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- rubber
- concave grooves
- cushion plate
- elasticity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Gasket Seals (AREA)
Description
第１図はこの考案の実施例の平面図、第２図は
第１図の―線断面図、第３図及び第４図は実
施例の製造方法を示す説明図、第５図は実施例の
使用状態を示す断面図である。
Fig. 1 is a plan view of an embodiment of this invention, Fig. 2 is a sectional view taken along the line - - of Fig. 1, Figs. 3 and 4 are explanatory diagrams showing the manufacturing method of the embodiment, and Fig. 5 is an embodiment. FIG.
Claims (1)
、中央孔周縁で外周面中央に周方向に沿つて突条
を有する短筒体で、前記凹設条溝を内側にして平
行に一体連接されてなる弗素樹脂製外被により形
成されるリング条凹溝内に、ゴム状弾性を有する
リング状クツシヨン板が表面及び中心孔内面を前
記凹設条溝及び短筒体外周突条部に嵌合させて密
嵌一体化されて成ることを特徴とするガスケツト
。 It is a short cylindrical body with two ring-shaped concentrically grooved concave grooves and a protrusion along the circumferential direction at the center of the outer circumferential surface at the periphery of the central hole, and parallel to each other with the concave grooves inside. A ring-shaped cushion plate having rubber-like elasticity is placed in a ring-like groove formed by an integrally connected fluororesin jacket, and a ring-shaped cushion plate having rubber-like elasticity extends between the surface and the inner surface of the center hole. A gasket characterized in that it is integrated into a tightly fitted gasket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11869786U JPS6324483U (en) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11869786U JPS6324483U (en) | 1986-07-31 | 1986-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324483U true JPS6324483U (en) | 1988-02-18 |
Family
ID=31005397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11869786U Pending JPS6324483U (en) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324483U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007251223A (en) * | 2001-06-01 | 2007-09-27 | Tokyo Electron Ltd | Plasma processing device |
| JP2007295001A (en) * | 2001-06-01 | 2007-11-08 | Tokyo Electron Ltd | Plasma processing apparatus |
| WO2015098994A1 (en) * | 2013-12-28 | 2015-07-02 | 日本バルカー工業株式会社 | Fluororesin packaging gasket |
-
1986
- 1986-07-31 JP JP11869786U patent/JPS6324483U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007251223A (en) * | 2001-06-01 | 2007-09-27 | Tokyo Electron Ltd | Plasma processing device |
| JP2007295001A (en) * | 2001-06-01 | 2007-11-08 | Tokyo Electron Ltd | Plasma processing apparatus |
| WO2015098994A1 (en) * | 2013-12-28 | 2015-07-02 | 日本バルカー工業株式会社 | Fluororesin packaging gasket |