JPS6324476U - - Google Patents

Info

Publication number
JPS6324476U
JPS6324476U JP11787486U JP11787486U JPS6324476U JP S6324476 U JPS6324476 U JP S6324476U JP 11787486 U JP11787486 U JP 11787486U JP 11787486 U JP11787486 U JP 11787486U JP S6324476 U JPS6324476 U JP S6324476U
Authority
JP
Japan
Prior art keywords
valve
gas inlet
chamber
opening
purge gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11787486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH039552Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11787486U priority Critical patent/JPH039552Y2/ja
Publication of JPS6324476U publication Critical patent/JPS6324476U/ja
Application granted granted Critical
Publication of JPH039552Y2 publication Critical patent/JPH039552Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP11787486U 1986-07-31 1986-07-31 Expired JPH039552Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11787486U JPH039552Y2 (enrdf_load_html_response) 1986-07-31 1986-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11787486U JPH039552Y2 (enrdf_load_html_response) 1986-07-31 1986-07-31

Publications (2)

Publication Number Publication Date
JPS6324476U true JPS6324476U (enrdf_load_html_response) 1988-02-18
JPH039552Y2 JPH039552Y2 (enrdf_load_html_response) 1991-03-11

Family

ID=31003797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11787486U Expired JPH039552Y2 (enrdf_load_html_response) 1986-07-31 1986-07-31

Country Status (1)

Country Link
JP (1) JPH039552Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH039552Y2 (enrdf_load_html_response) 1991-03-11

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