JPS6324476U - - Google Patents
Info
- Publication number
- JPS6324476U JPS6324476U JP11787486U JP11787486U JPS6324476U JP S6324476 U JPS6324476 U JP S6324476U JP 11787486 U JP11787486 U JP 11787486U JP 11787486 U JP11787486 U JP 11787486U JP S6324476 U JPS6324476 U JP S6324476U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas inlet
- chamber
- opening
- purge gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Lift Valve (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11787486U JPH039552Y2 (cs) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11787486U JPH039552Y2 (cs) | 1986-07-31 | 1986-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6324476U true JPS6324476U (cs) | 1988-02-18 |
| JPH039552Y2 JPH039552Y2 (cs) | 1991-03-11 |
Family
ID=31003797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11787486U Expired JPH039552Y2 (cs) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039552Y2 (cs) |
-
1986
- 1986-07-31 JP JP11787486U patent/JPH039552Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH039552Y2 (cs) | 1991-03-11 |