JPS6324259U - - Google Patents
Info
- Publication number
- JPS6324259U JPS6324259U JP11854486U JP11854486U JPS6324259U JP S6324259 U JPS6324259 U JP S6324259U JP 11854486 U JP11854486 U JP 11854486U JP 11854486 U JP11854486 U JP 11854486U JP S6324259 U JPS6324259 U JP S6324259U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- gas
- reflective surface
- chamber
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11854486U JPS6324259U (enExample) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11854486U JPS6324259U (enExample) | 1986-07-31 | 1986-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324259U true JPS6324259U (enExample) | 1988-02-17 |
Family
ID=31005095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11854486U Pending JPS6324259U (enExample) | 1986-07-31 | 1986-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324259U (enExample) |
-
1986
- 1986-07-31 JP JP11854486U patent/JPS6324259U/ja active Pending