JPS6324258U - - Google Patents

Info

Publication number
JPS6324258U
JPS6324258U JP11725186U JP11725186U JPS6324258U JP S6324258 U JPS6324258 U JP S6324258U JP 11725186 U JP11725186 U JP 11725186U JP 11725186 U JP11725186 U JP 11725186U JP S6324258 U JPS6324258 U JP S6324258U
Authority
JP
Japan
Prior art keywords
evaporation material
plate
crucible
shaped evaporation
storage guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11725186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11725186U priority Critical patent/JPS6324258U/ja
Publication of JPS6324258U publication Critical patent/JPS6324258U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11725186U 1986-07-30 1986-07-30 Pending JPS6324258U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11725186U JPS6324258U (enrdf_load_stackoverflow) 1986-07-30 1986-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11725186U JPS6324258U (enrdf_load_stackoverflow) 1986-07-30 1986-07-30

Publications (1)

Publication Number Publication Date
JPS6324258U true JPS6324258U (enrdf_load_stackoverflow) 1988-02-17

Family

ID=31002591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11725186U Pending JPS6324258U (enrdf_load_stackoverflow) 1986-07-30 1986-07-30

Country Status (1)

Country Link
JP (1) JPS6324258U (enrdf_load_stackoverflow)

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