JPS6324257U - - Google Patents
Info
- Publication number
- JPS6324257U JPS6324257U JP11481986U JP11481986U JPS6324257U JP S6324257 U JPS6324257 U JP S6324257U JP 11481986 U JP11481986 U JP 11481986U JP 11481986 U JP11481986 U JP 11481986U JP S6324257 U JPS6324257 U JP S6324257U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- evaporation source
- starting
- power source
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 239000003990 capacitor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 238000001883 metal evaporation Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11481986U JPS6324257U (en, 2012) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11481986U JPS6324257U (en, 2012) | 1986-07-25 | 1986-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6324257U true JPS6324257U (en, 2012) | 1988-02-17 |
Family
ID=30997903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11481986U Pending JPS6324257U (en, 2012) | 1986-07-25 | 1986-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6324257U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0280660A (ja) * | 1988-09-13 | 1990-03-20 | Wakayama Tekko Kk | 毛焼用水冷ロール洗浄装置 |
| JP2005150118A (ja) * | 2003-11-18 | 2005-06-09 | Unaxis Balzer Ag | 点火装置、電気的アーク蒸発器および工作物の加工方法 |
-
1986
- 1986-07-25 JP JP11481986U patent/JPS6324257U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0280660A (ja) * | 1988-09-13 | 1990-03-20 | Wakayama Tekko Kk | 毛焼用水冷ロール洗浄装置 |
| JP2005150118A (ja) * | 2003-11-18 | 2005-06-09 | Unaxis Balzer Ag | 点火装置、電気的アーク蒸発器および工作物の加工方法 |