JPS63239U - - Google Patents
Info
- Publication number
- JPS63239U JPS63239U JP9380786U JP9380786U JPS63239U JP S63239 U JPS63239 U JP S63239U JP 9380786 U JP9380786 U JP 9380786U JP 9380786 U JP9380786 U JP 9380786U JP S63239 U JPS63239 U JP S63239U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- blower
- fluorocarbon gas
- gas
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 5
- 230000002093 peripheral effect Effects 0.000 claims 2
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9380786U JPS63239U (fr) | 1986-06-19 | 1986-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9380786U JPS63239U (fr) | 1986-06-19 | 1986-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63239U true JPS63239U (fr) | 1988-01-05 |
Family
ID=30956700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9380786U Pending JPS63239U (fr) | 1986-06-19 | 1986-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63239U (fr) |
-
1986
- 1986-06-19 JP JP9380786U patent/JPS63239U/ja active Pending