JPS63237821A - Diamond tool and manufacture thereof - Google Patents
Diamond tool and manufacture thereofInfo
- Publication number
- JPS63237821A JPS63237821A JP7554487A JP7554487A JPS63237821A JP S63237821 A JPS63237821 A JP S63237821A JP 7554487 A JP7554487 A JP 7554487A JP 7554487 A JP7554487 A JP 7554487A JP S63237821 A JPS63237821 A JP S63237821A
- Authority
- JP
- Japan
- Prior art keywords
- cutting edge
- ions
- diamond
- atmospheric pressure
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 24
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000005520 cutting process Methods 0.000 claims abstract description 41
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 150000002500 ions Chemical class 0.000 claims abstract description 13
- 238000003754 machining Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000004435 EPR spectroscopy Methods 0.000 claims description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 4
- 125000004432 carbon atom Chemical group C* 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 4
- 229910052786 argon Inorganic materials 0.000 abstract description 2
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 229910052734 helium Inorganic materials 0.000 abstract description 2
- 239000001307 helium Substances 0.000 abstract description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 2
- 239000001257 hydrogen Substances 0.000 abstract description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract description 2
- 229910052754 neon Inorganic materials 0.000 abstract description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 abstract description 2
- 230000001133 acceleration Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- -1 carbon ions Chemical class 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 abstract 1
- 125000004429 atom Chemical group 0.000 description 19
- 238000009499 grossing Methods 0.000 description 10
- 230000004913 activation Effects 0.000 description 4
- 208000010392 Bone Fractures Diseases 0.000 description 3
- 206010017076 Fracture Diseases 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 208000013201 Stress fracture Diseases 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、ダイヤモンド単結晶を用いたダイヤモンド
工具とその製造方法に関し、詳しくは刃先の原子レベル
の平滑化を実現したダイヤモンド工具及びその製造方法
に関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a diamond tool using a diamond single crystal and a method for manufacturing the same, and more specifically, a diamond tool that achieves atomic level smoothness of the cutting edge and a method for manufacturing the same. It is related to.
従来のダイヤモンド工具における刃先の形成・仕上げは
研摩の研ぎ出しによっている。しかしこの方法では、す
くい面や逃げ面などの面の研摩は比較的容易Ｋできるが
、面と面で構成される切刃稜を精度良く仕上げることは
困難であった。即ち、切刃稜はほぼ数１０から１００程
度の原子で構成される幅でしかないため、研摩粉として
用いるダイヤモンド粉末が如何に粒度の細かい高精度の
ものであったとしても、切刃稜を均一で平滑に仕上げる
のは、事実上不可能である。このため、仕上げられた刃
先を原子レベルで見た場合、第１図に示すようＫ、突出
した原子や内部に入り込んだクランクにより激しい凹凸
状態を呈している。The cutting edge of conventional diamond tools is formed and finished by polishing. However, with this method, surfaces such as the rake face and flank surface can be polished relatively easily, but it is difficult to finish the cutting edge, which is composed of two surfaces, with high precision. In other words, the width of the cutting edge is only made up of approximately several tens to 100 atoms, so no matter how fine and precise the diamond powder used as the abrasive powder is, it is difficult to cut the cutting edge. It is virtually impossible to achieve a uniform and smooth finish. For this reason, when the finished cutting edge is viewed at the atomic level, it exhibits severe unevenness due to K, protruding atoms, and cranks that have entered the interior, as shown in FIG.
このような刃先の凹凸は、突出原子の脱落やクランク等
から亀裂が工具の内部に向けて進行して、加工中の思い
がけない破損やチフビングをうむ要因になる。即ち、切
削中過大な負荷が生じたとは考えられない切削条件下に
おいて、工具切刃が突発欠損する事故原因の一つは刃先
の形状によるものと考えられ、安定した精密切削の実現
を阻害する要因となっている。Such unevenness on the cutting edge causes cracks to propagate toward the inside of the tool from the falling off of protruding atoms and cranks, etc., resulting in unexpected breakage and chipping during machining. In other words, it is thought that one of the causes of accidental breakage of the tool cutting edge is due to the shape of the cutting edge under cutting conditions where it is not considered that an excessive load has occurred during cutting, which hinders the realization of stable precision cutting. This is a contributing factor.
この発明は、上記の問題点に漏みてなされたもので、刃
先の原子レベルでの平滑化を達成して、超精密切削工具
に要求される鋭い切れ味と、刃先の安定性を満足させた
ダイヤモンド工具とその製造方法を提供することを目的
としている。This invention was made to address the above-mentioned problems, and it is a diamond that has smoothed the cutting edge at the atomic level and satisfies the sharpness and stability of the cutting edge required for ultra-precision cutting tools. The purpose is to provide tools and methods of manufacturing them.
上記の目的を達成するための本発明のダイヤモンド工具
は、機械加工により刃先を形成後、工具材にイオンを照
射し、その後、少なくとも上記刃先を大気圧中で５００
〜６３０Ｋ、又は真空中で５００〜１．５００ Ｋで熱
処理して成る。またその製造方法は、機械加工により刃
先を形成した後、工具材にイオンを照射し、その後、そ
の少なくとも刃先を大気圧中で５００〜６３０Ｋ、又は
、真空中で５００〜１．５００ Ｋで熱処理することを
特徴とする。In the diamond tool of the present invention for achieving the above object, after forming a cutting edge by machining, the tool material is irradiated with ions, and then at least the cutting edge is heated for 500 minutes at atmospheric pressure.
~630K, or heat treated at 500~1.500K in vacuum. In addition, the manufacturing method includes forming a cutting edge by machining, irradiating the tool material with ions, and then heat-treating at least the cutting edge at 500 to 630 K in atmospheric pressure or 500 to 1.500 K in vacuum. It is characterized by
以下、その内容を詳述する。The details are detailed below.
固体を加熱すると、その固体を構成している原子の熱振
動が増大し、ある活性化エネルギ以上のエネルギを持つ
に至った原子は、原子間に介在する空孔等分して移動す
ることができる。（所謂原子の拡散現象が生じる。）
上記の原子の移動を規制する活性化エネルギの大きさは
、原子の界面部においては、その界面部に作用する表面
張力に影響される。When a solid is heated, the thermal vibrations of the atoms that make up the solid increase, and atoms that have more than a certain activation energy are able to move by dividing the vacancies between them into equal parts. can. (The so-called atomic diffusion phenomenon occurs.) The magnitude of the activation energy that regulates the movement of the atoms described above is influenced by the surface tension acting on the atomic interface at the interface.
すなわち、第１図において１を半円形のクランクとした
場合、そのクラックの先端部にある原子には、表面張力
により外部空間に向かう力が作用し、クラック側から外
部空間側への移動に対する活性化エネルギの大きさを小
さくする。このため、クランクの先端部においては、原
子がクランク界面から外部空間に向かって張り出す頻度
が相対的に高くなると共Ｋ、先端部近傍での空孔濃度が
高くなり、先端部分は第３図のａ部分に示すごとく移動
してくる原子により埋められて、クラック長さが小さく
なっていく。（これはクランク・ヒーリング現象と称さ
れている。）
一方、刃先表面から外側に突出した原子には、上記のク
ラブク先端部とは逆の表面張力が作用し、表面から内側
に向かう力が作用する。このため、表面から内側への移
動に対する活性化エネルギの大きさが低下し、原子の刃
先内側に移動する頻度は、刃先の外側に向かう頻度によ
り相対的に大きくなる。In other words, if 1 is a semicircular crank in Fig. 1, a force toward the external space acts on the atoms at the tip of the crack due to surface tension, and the atoms are activated to move from the crack side to the external space side. Reduce the amount of energy. Therefore, at the tip of the crank, as the frequency of atoms protruding from the crank interface toward the external space becomes relatively high, the vacancy concentration near the tip increases, and As shown in part a, the crack is filled with moving atoms and the crack length becomes smaller. (This is called the crank-healing phenomenon.) On the other hand, on the atoms protruding outward from the surface of the cutting edge, a surface tension opposite to that at the tip of the blade acts on the atoms, and a force moves inward from the surface. do. For this reason, the magnitude of activation energy for movement from the surface to the inside decreases, and the frequency at which atoms move toward the inside of the cutting edge becomes relatively greater than the frequency at which atoms move toward the outside of the cutting edge.
以上のような現象により、刃先は原子レベルで凹凸状態
が矯正され、平滑化がはかられることになる。Due to the above-mentioned phenomenon, the uneven state of the cutting edge is corrected at the atomic level, and the cutting edge is smoothed.
ところで、上記のような平滑化現象における原子の移動
や原子配列の組み替えは、結晶構造内に空孔が多く存在
している方がより活発に生じ、クランク長さの変化や破
壊強度の上昇が著しい。By the way, the movement of atoms and rearrangement of atomic arrangement in the above-mentioned smoothing phenomenon occurs more actively when there are many vacancies in the crystal structure, which leads to changes in crank length and increase in fracture strength. Significant.
このため、この発明では、熱処理前にダイヤモンド表面
に各種のイオンを照射して表面を改質することにより、
界面部近傍の空孔濃度の増大処理を実施する。Therefore, in this invention, by irradiating the diamond surface with various ions to modify the surface before heat treatment,
Perform a process to increase the vacancy concentration near the interface.
これは高速度に加速させたイオンをダイヤモンド表面に
照射し、そのイオンのエネルギにより、表面近傍の結晶
構造内の炭素原子をはじき飛ばし、空孔の数を増大させ
るものである。この場合、照射するイオンは比較的原子
半径の小さいもの、例えば水素、ヘリウム、ネオン、ア
ルゴン、カーボン等のイオンを使用する。また照射条件
としては、加速電圧がＩＫＶ〜１万ＫＶの範囲でそのう
ち高い方が好ましく、照射量は１０”〜１０′９個ノＣ
１）２程度が適当である。This method involves irradiating the diamond surface with ions accelerated at high speed, and using the energy of the ions to repel carbon atoms in the crystal structure near the surface, increasing the number of vacancies. In this case, the ions to be irradiated are those having a relatively small atomic radius, such as hydrogen, helium, neon, argon, carbon, etc. ions. In addition, as for the irradiation conditions, the accelerating voltage is in the range of IKV to 10,000 KV, the higher of which is preferable, and the irradiation amount is 10'' to 10'9 C.
1) About 2 is appropriate.
なお、上記の平滑化現象は、加熱温度が一定の範囲、即
ちダイヤモンド表面に酸化が生じる温度以下で、かつ移
動のために十分な熱振動工矛ルギを原子に付与できる温
度以上であることが必要である。Note that the smoothing phenomenon described above requires that the heating temperature be within a certain range, that is, below the temperature at which oxidation occurs on the diamond surface, and above the temperature at which sufficient thermal vibrational force is imparted to the atoms for movement. is necessary.
一般に大気圧下で加熱した場合、ダイヤモンド表面は、
５００に以下の温度までは酸素分子を吸着した状態で安
定し、６３０にの温度までは大きな変化が見られないが
、６３０Ｋを超えると、連続的酸化（燃焼）が始まり、
約１）５０Ｋで急激に燃焼することが観察されている。Generally, when heated under atmospheric pressure, the diamond surface becomes
Up to a temperature below 500K, it remains stable with oxygen molecules adsorbed, and no major changes are seen up to a temperature of 630K, but when it exceeds 630K, continuous oxidation (combustion) begins.
Approximately 1) Rapid combustion has been observed at 50K.
加熱温度が６３０Ｋを越えると、界面から張り出して活
性化状態にある炭素原子が、活発に酸素と化学的に結合
して酸化物として取り去られ、このためクランクの長さ
は逆に大きくなり、刃先の凹凸はより激しくなっていく
、この場合、微小破壊強度の低下も著しい。When the heating temperature exceeds 630K, the activated carbon atoms protruding from the interface actively chemically combine with oxygen and are removed as oxides, which causes the length of the crank to increase. The unevenness of the cutting edge becomes more severe, and in this case, the microfracture strength also decreases significantly.
一方、加熱温度が５００に以下の場合は、原子の熱振動
エネルギが活性化エネルギまでを越えて十分に大きくな
らず、このため原子の移動が生じないため、平滑化の現
象が得られない。On the other hand, if the heating temperature is below 500° C., the thermal vibrational energy of the atoms will not be sufficiently large beyond the activation energy, and therefore no movement of the atoms will occur, so that the smoothing phenomenon cannot be obtained.
以上のことから平滑化の加熱温度は大気圧中では５００
〜６３０にの範囲であることが条件となり、特に６００
〜６３０ Ｋの範囲にあるときが最も良好な結果が得ら
れる。From the above, the heating temperature for smoothing is 500 at atmospheric pressure.
The condition is that it is in the range of ~630, especially 600
The best results are obtained in the range of ~630K.
また加熱時間は、１０分以上であれば、時間が長くなる
ほど平滑化が進行し、より均一な刃先が得られる。なお
、工具の量産性等を併せ考慮すると、６００〜６３０に
の最適温度において、数時間以上の加熱時間をとるのが
適当である。Further, if the heating time is 10 minutes or more, the longer the heating time, the more smoothing will progress and a more uniform cutting edge will be obtained. In addition, considering the mass productivity of the tool, etc., it is appropriate to take several hours or more of heating time at the optimum temperature of 600 to 630 degrees Celsius.
以上大気圧下の熱処理条件について示したが、真空中で
は、酸化が少ない為Ｋ、加熱温度をより高くすることが
でき、かつ加熱時間も短縮することができる。真空下に
おける加熱条件は、５００ Ｋから、最高温度が１０−
’Ｐａの圧力下で１．５００ Ｋであり、１．５００
Ｋを超えると、ダイヤモンド表面の変化が発生する。Although the heat treatment conditions under atmospheric pressure have been described above, in a vacuum, there is less oxidation, so the heating temperature can be increased, and the heating time can also be shortened. Heating conditions under vacuum range from 500 K to a maximum temperature of 10-
1.500 K under the pressure of 'Pa and 1.500
Above K, changes in the diamond surface occur.
また、原子の移動による平滑化現象は、物体内に介在す
るクランクの長さを小さくする現象であるため、物体の
微小破壊強度の増強にも寄与していると考えられる。実
際Ｋ、熱処理前後における破壊強度の変化を測定した結
果を第２図に示すが、熱処理前後において、約１２％の
明らかな強度上昇が見られた。テスト条件は５７３にの
温度で２時間加熱したものである。このように破壊強度
と平滑化現象とは明らかな相関関係があり、云い換えれ
ば、破壊強度の上昇の度合を知ることにより、平滑化の
進行度を判別する目安とすることができる。Furthermore, the smoothing phenomenon due to the movement of atoms is a phenomenon that reduces the length of cranks interposed within the object, and is therefore considered to also contribute to increasing the microfracture strength of the object. In fact, the results of measuring the change in breaking strength before and after heat treatment are shown in Figure 2, and a clear increase in strength of about 12% was observed before and after heat treatment. The test conditions were heating at a temperature of 573 °C for 2 hours. As described above, there is a clear correlation between the breaking strength and the smoothing phenomenon.In other words, by knowing the degree of increase in the breaking strength, it can be used as a guide for determining the degree of progress of smoothing.
また、ダイヤモンド内部の欠陥や不純物は、電子スピン
共鳴（ＥＳＲ）により同定することができ、さらに不純
物等の含有を示す相対値を基準にすることにより、ダイ
ヤモンド原石の品質を選別することができる。そこで、
ＥＳＲを用いて、予め欠陥の少ない高品質のダイヤモン
ド原石を選別し、その原石に機械加工により刃先を形成
後、イオンを照射し、熱処理を行なうようにすれば、よ
り高い平滑化処理を行なうことができる。In addition, defects and impurities inside the diamond can be identified by electron spin resonance (ESR), and the quality of rough diamonds can be selected based on relative values indicating the presence of impurities. Therefore,
If you use ESR to select high-quality rough diamonds with few defects in advance, form cutting edges on the rough diamonds by machining, and then irradiate them with ions and heat treat them, you can achieve a higher level of smoothing. Can be done.
以上説明したようＫ、この発明のダイヤモンド工具及び
その製造方法によれば、炭素原子の拡散運動等を利用し
て原子レベルにおいて刃先の平滑化を達成するので、切
れ味の鋭い刃先とそれを長期にわたって維持しうる高い
安定性を得ることができ、超精密切削に最良の工具を提
供することができる。As explained above, according to the diamond tool and its manufacturing method of the present invention, the smoothing of the cutting edge is achieved at the atomic level by utilizing the diffusion movement of carbon atoms, etc., so that the cutting edge can be sharply cut and maintained for a long time. The high stability that can be maintained can be obtained, and the best tool for ultra-precision cutting can be provided.
第１図は刃先の原子レベルでの状態を模式的に示す図、
第２図は熱処理前後の破壊強度と破壊確率の関係を示す
グラフ、第３図はクランク長さの変化を模式的に示す図
である。
特許出願人 大阪ダイヤモンド工業株式会社同 日
新電機株式会社Figure 1 is a diagram schematically showing the state of the cutting edge at the atomic level.
FIG. 2 is a graph showing the relationship between fracture strength and fracture probability before and after heat treatment, and FIG. 3 is a diagram schematically showing changes in crank length. Patent applicant Osaka Diamond Industry Co., Ltd. Nissin Electric Co., Ltd.
Claims (3)
照射し、その後、少なくとも上記刃先を大気圧中で５０
０〜６３０Ｋ、又は、真空中で５００〜１，５００Ｋで
熱処理して成るダイヤモンド工具。(1) After forming the cutting edge by machining, the tool material is irradiated with ions, and then at least the cutting edge is heated at atmospheric pressure for 50 minutes.
A diamond tool heat treated at 0 to 630K or 500 to 1,500K in vacuum.
鳴）により工具材料として適と判別したものであること
を特徴とする特許請求の範囲第（１）項記載のダイヤモ
ンド工具。(2) The diamond tool according to claim (1), wherein the tool material before machining is determined to be suitable as a tool material by ESR (electron spin resonance).
ンを照射し、その後少なくとも上記刃先を大気圧中で５
００〜６３０Ｋ、又は、真空中で５００〜１，５００Ｋ
で熱処理することを特徴とするダイヤモンド工具の製造
方法。(3) After forming the cutting edge by machining, the tool material is irradiated with ions, and then at least the cutting edge is heated at atmospheric pressure for 5 minutes.
00-630K or 500-1,500K in vacuum
A method for manufacturing a diamond tool, characterized by heat treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7554487A JPS63237821A (en) | 1987-03-26 | 1987-03-26 | Diamond tool and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7554487A JPS63237821A (en) | 1987-03-26 | 1987-03-26 | Diamond tool and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63237821A true JPS63237821A (en) | 1988-10-04 |
| JPH0450136B2 JPH0450136B2 (en) | 1992-08-13 |
Family
ID=13579249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7554487A Granted JPS63237821A (en) | 1987-03-26 | 1987-03-26 | Diamond tool and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63237821A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013527117A (en) * | 2010-06-03 | 2013-06-27 | エレメント シックス リミテッド | Diamond tools |
| EP2813304A3 (en) * | 2013-05-20 | 2016-07-06 | Japan Aviation Electronics Industry Limited | Edge tool |
-
1987
- 1987-03-26 JP JP7554487A patent/JPS63237821A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013527117A (en) * | 2010-06-03 | 2013-06-27 | エレメント シックス リミテッド | Diamond tools |
| EP2813304A3 (en) * | 2013-05-20 | 2016-07-06 | Japan Aviation Electronics Industry Limited | Edge tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0450136B2 (en) | 1992-08-13 |
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