JPS63237699A - 超音波トランスジユ−サ - Google Patents

超音波トランスジユ−サ

Info

Publication number
JPS63237699A
JPS63237699A JP7024287A JP7024287A JPS63237699A JP S63237699 A JPS63237699 A JP S63237699A JP 7024287 A JP7024287 A JP 7024287A JP 7024287 A JP7024287 A JP 7024287A JP S63237699 A JPS63237699 A JP S63237699A
Authority
JP
Japan
Prior art keywords
electrode
film
ultrasonic transducer
ultrasonic
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7024287A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547160B2 (enExample
Inventor
Kenichiro Suzuki
健一郎 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7024287A priority Critical patent/JPS63237699A/ja
Publication of JPS63237699A publication Critical patent/JPS63237699A/ja
Publication of JPH0547160B2 publication Critical patent/JPH0547160B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
JP7024287A 1987-03-26 1987-03-26 超音波トランスジユ−サ Granted JPS63237699A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7024287A JPS63237699A (ja) 1987-03-26 1987-03-26 超音波トランスジユ−サ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7024287A JPS63237699A (ja) 1987-03-26 1987-03-26 超音波トランスジユ−サ

Publications (2)

Publication Number Publication Date
JPS63237699A true JPS63237699A (ja) 1988-10-04
JPH0547160B2 JPH0547160B2 (enExample) 1993-07-15

Family

ID=13425902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7024287A Granted JPS63237699A (ja) 1987-03-26 1987-03-26 超音波トランスジユ−サ

Country Status (1)

Country Link
JP (1) JPS63237699A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015146972A (ja) * 2014-02-07 2015-08-20 キヤノン株式会社 静電容量型トランスデューサおよびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220600A (ja) * 1985-03-26 1986-09-30 Nec Corp 超音波センサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220600A (ja) * 1985-03-26 1986-09-30 Nec Corp 超音波センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015146972A (ja) * 2014-02-07 2015-08-20 キヤノン株式会社 静電容量型トランスデューサおよびその製造方法

Also Published As

Publication number Publication date
JPH0547160B2 (enExample) 1993-07-15

Similar Documents

Publication Publication Date Title
US4885781A (en) Frequency-selective sound transducer
US10536779B2 (en) Electroacoustic transducer
CN104891423B (zh) 不具有背板的双隔膜mems麦克风
CN109643378A (zh) 超声换能器件及电子装置
US7471034B2 (en) Ultrasound transducer and method of producing the same
GB2200211A (en) Vibration-type transducer for measuring fluid density or pressure
US10350636B2 (en) Capacitive transducer and sample information acquisition apparatus
US20020124656A1 (en) Electret transducer
JP2020057860A (ja) 静電容量型トランスデューサ、及びその製造方法
EP0767597A2 (en) Spherical piezoelectric speaker
CN209531368U (zh) 超声换能器件及电子装置
WO2021192417A1 (ja) 超音波トランスデューサ
WO1989005199A1 (en) An acoustic emission transducer and an electrical oscillator
JPS62149299A (ja) アレイ型超音波トランスデユ−サ
KR101877838B1 (ko) 멤스 마이크로폰 소자 및 이를 포함하는 멤스 마이크로폰 모듈
JP7088099B2 (ja) 超音波センサ
JP2545714B2 (ja) 超音波トランスジューサおよびその製造方法
JPH07121159B2 (ja) 超音波トランスジユ−サ
JPH0577240B2 (enExample)
JP2545713B2 (ja) 超音波トランスジューサとその製造方法
JPH0547160B2 (enExample)
JPH0476560B2 (enExample)
JPH0552120B2 (enExample)
JPH05672B2 (enExample)
JPS61220598A (ja) 超音波トランスジユ−サ

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term