JPS63236566A - Membrane formation - Google Patents
Membrane formationInfo
- Publication number
- JPS63236566A JPS63236566A JP62072609A JP7260987A JPS63236566A JP S63236566 A JPS63236566 A JP S63236566A JP 62072609 A JP62072609 A JP 62072609A JP 7260987 A JP7260987 A JP 7260987A JP S63236566 A JPS63236566 A JP S63236566A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- ring
- band
- film
- reduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 16
- 230000015572 biosynthetic process Effects 0.000 title claims 2
- 230000004888 barrier function Effects 0.000 claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000005661 hydrophobic surface Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 5
- 239000012779 reinforcing material Substances 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
- 239000004809 Teflon Substances 0.000 abstract description 7
- 229920006362 Teflon® Polymers 0.000 abstract description 7
- 239000007788 liquid Substances 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000002787 reinforcement Effects 0.000 abstract description 2
- 230000002209 hydrophobic effect Effects 0.000 abstract 1
- 239000000088 plastic resin Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 19
- 230000006835 compression Effects 0.000 description 7
- 238000007906 compression Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002120 nanofilm Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- JZRWCGZRTZMZEH-UHFFFAOYSA-N thiamine Chemical compound CC1=C(CCO)SC=[N+]1CC1=CN=C(C)N=C1N JZRWCGZRTZMZEH-UHFFFAOYSA-N 0.000 description 2
- 241000226585 Antennaria plantaginifolia Species 0.000 description 1
- 206010011878 Deafness Diseases 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 231100000895 deafness Toxicity 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 208000016354 hearing loss disease Diseases 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 235000019157 thiamine Nutrition 0.000 description 1
- 239000011721 thiamine Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
Description
【発明の詳細な説明】
く技術分野〉
本発明は単分子膜の圧縮時に生ずる膜の不均一性を防止
する成膜方法に関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a film forming method for preventing film non-uniformity that occurs when compressing a monomolecular film.
く従来技術とその問題点〉
従来、水面上に展開した単分子膜を固体基板の表面に移
し取ることにより、該基板上に単分子膜または単分子′
A禎膜からなる薄膜を成膜する方法(ラングミュア・プ
ロジェット法)が知られている。Conventional technology and its problems> Conventionally, a monomolecular film developed on a water surface is transferred to the surface of a solid substrate, and a monomolecular film or a monomolecular film is deposited on the substrate.
A method (Langmuir-Prodgett method) of forming a thin film made of an A-layer film is known.
現在、水面上にh1関した単分子膜の圧縮には、バリア
を一方向から移動させるか、もしくは向かい合った2つ
のバリアを中心に向かって圧力を加えている。しかしな
がら、かかる方法においては圧縮時にバリアの移動方向
に膜の流動が生じ、膜が均一にならない、この水面上の
単分子膜の挙動を第1図に模式的に示す、第1図(a)
のように、水面上に展開した単分子膜上にイオウの粉末
で等間隔に鳩模禄を措いた後、バリア1を動かして表面
圧を高めることにより、膜の圧縮状態を観察することが
できる。その様子を第1図(b)に示す。Currently, compression of h1-related monolayers on the water surface is achieved by moving a barrier from one direction or by applying pressure between two facing barriers toward the center. However, in this method, the film flows in the direction of movement of the barrier during compression, and the film is not uniform.The behavior of this monomolecular film on the water surface is schematically shown in Fig. 1 (a).
As shown in the figure, it is possible to observe the compression state of the membrane by applying sulfur powder at equal intervals on a monomolecular membrane spread on the water surface, and then moving barrier 1 to increase the surface pressure. can. The situation is shown in FIG. 1(b).
更に、5咬を累積するために第1図(。)のように基板
3を丸字顕微鏡によりI!2.察すると、基板の中央部
と端では舞うのモホロゾーが異なっていることが明らか
にされている。このようにフングミュア・プロノエッ)
(LB)膜が水面上の1■分子膜を累積して得られるた
め、界面における膜の流動がL[3膜作成上重大な問題
となる。Furthermore, in order to accumulate 5 bites, the substrate 3 was inspected using a round microscope as shown in Figure 1 (.). 2. It has been revealed that the mohorozo of dance is different between the center and the edges of the substrate. In this way, Hungmuir Pronoët)
Since the (LB) film is obtained by accumulating one molecular film on the water surface, the flow of the film at the interface becomes a serious problem in the production of the L[3 film.
〈発明の目的〉
本発明の目的は、上述の問題、代を考慮してなされたも
ので、バリアを一方向もしくは双方向に動かして単分子
膜を圧縮するのではなく、全ての方向から均等に圧縮を
行うことにより、圧力が中心に向かって集中する効果を
利用して、膜の不均一な流動を防ぎ良質の膜を作成する
ことにある。<Objective of the Invention> The object of the present invention was made in consideration of the above-mentioned problems and costs. Instead of compressing the monolayer by moving the barrier in one direction or in both directions, it is possible to compress the monolayer evenly from all directions. By compressing the membrane, the pressure concentrates toward the center, which prevents uneven flow of the membrane and creates a high-quality membrane.
〈実施例〉
以下、図面を参照して本発明の実施例について詳細に説
明する。<Example> Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第2図は本発明の基本形の斜視図を示す。FIG. 2 shows a perspective view of the basic form of the invention.
同図の如く、表面が疎水性であるテフロン製の帯4を輪
にしたものの一端を糸車型滑車6で両脇から紋りながら
シャ7ト7とパイプ8を相対的に滑動させて輪を縮めて
水面上に展開した単分子膜の圧縮を打う。尚、2個の糸
車型滑11161+の開には崩壊膜を作らないように間
隔を空けておく。テア0ンの帯で作製した輪4には清白
の面積の大小に拘わらず常に円形を保つように弾力性の
あるプラスチック樹11社を補強材5として、帯の」二
側の液体に触れない位置に張り合わせである。As shown in the figure, one end of a loop made of a Teflon band 4 with a hydrophobic surface is threaded from both sides by a spinning wheel type pulley 6, and the shaft 7 and pipe 8 are slid relative to each other to make the loop. Hit the compression of the monomolecular film that is contracted and expanded on the water surface. Incidentally, a space is left between the openings of the two spinning wheel type slides 11161+ so as not to form a collapsing film. The ring 4 made from the strip of tare is made of elastic plastic wood as a reinforcing material 5 so that it always maintains a circular shape regardless of the size of the clean area, so that it does not come into contact with the liquid on the two sides of the band. It is glued in place.
これの代わりに補強材としてのステンレス金属の内外両
側(内側のみでも良い)をテフロン加工した帯を用いて
も構わない。Instead of this, a stainless steel band with Teflon treated on both the inner and outer sides (or only the inner side may be used) may be used as a reinforcing material.
13図は輪を同心円状に拡大縮・トするだめの実施例を
示す斜視図である。テフロン帯の輪4が円形に広がるよ
うにするためのがイド機構を備えたスライダー129輪
を同心円状に拡大縮小するだめの駆動vc装141輪を
円形に保持するための補強材5.水梢2.基@3と基板
33を上下動するための動腕11からなる。FIG. 13 is a perspective view showing an embodiment of a device for concentrically enlarging and contracting rings. 5. A slider equipped with an id mechanism to spread the Teflon band ring 4 in a circular shape; 129 a driving VC device for concentrically expanding and contracting the wheels; 141 a reinforcing member to hold the wheels in a circular shape; Water treetops 2. It consists of a movable arm 11 for moving the base@3 and the substrate 33 up and down.
犬に、バリアを同心円状に移動するための機構について
説明する。テフロンの輪4を同心円状に縮めるために、
放射線上にレール13を配置し、各レール13にはスラ
イダ−12を設は中心に向かって同時に同速度で動かす
。各スライダー12には裏面より見た第4図に示すよう
に2つの開店rるテフロン製の糸巻型滑車6Cにより保
持する機構が取り付けである。スライダ−12はワイヤ
ー16の一方をワイヤー止め19で固定し、もう−力の
ワイヤーはバイブ21の中をスムーズに動く構造になっ
ている。Explain to the dog the mechanism for moving the barrier in concentric circles. In order to shrink the Teflon ring 4 into a concentric circle,
Rails 13 are arranged on a radial line, and a slider 12 is installed on each rail 13 and moved toward the center at the same time and at the same speed. As shown in FIG. 4 when viewed from the back side, each slider 12 is fitted with a holding mechanism using two pincushion-type pulleys 6C made of Teflon. The slider 12 has a structure in which one side of the wire 16 is fixed with a wire stopper 19, and the other wire moves smoothly inside the vibrator 21.
スライダー12を動かす8!嬶を第5図1こ示す。Move slider 12 8! This is shown in Figure 5.
モータ15の回転はワイヤー16を介して滑車17゛1
ニイムわる。ワイヤー止め191こより固定されたスラ
イダ−12゛はワイヤーの移動距離だけ同図の左方向に
移動する。又、円周上に配置したスライダー12もワイ
ヤー16の移動を介して中心に向かって移動する様にな
っている。圧縮後のスライダーは破線で書いたスライダ
−18の位置となる。各スライダー12が中心に向かっ
てXe16移動、つまり円の半径がXCm短くなると・
聾びは2πxc+aゆるむことになり糸巻き型溝$12
°ヲX(πそち冑
−1)cmだけ円の中心にたいして ゛に動
かすことにより、ゆるんだ帯を常に引っ張るようにする
。これは滑11t17’の半(そ比を1:2゜14にす
ることにより容易に解決することが小米る。The rotation of the motor 15 is controlled by a pulley 17'1 via a wire 16.
Niimuwaru. The slider 12' fixed by the wire stopper 191 moves to the left in the figure by the distance the wire moves. Further, the slider 12 arranged on the circumference is also moved toward the center through the movement of the wire 16. The slider after compression is at the position of slider 18, which is indicated by a broken line. When each slider 12 moves by Xe16 toward the center, that is, the radius of the circle becomes shorter by XCm.
Deafness is 2πxc+a loosened, pincushion groove $12
Make sure to constantly pull the loose belt by moving it ゛ to the center of the circle by ゛ x (π sochi-1) cm. This problem can be easily solved by setting the ratio to 1:2°14.
この機構により実現できる圧縮前と圧縮後の輪の大きさ
の比較を第6図に示す。FIG. 6 shows a comparison of the ring sizes before and after compression that can be achieved by this mechanism.
第3図に示す如く基板3を円の中心位置にすJいてj恋
の累積ができるようにレール13の交点には穴22を空
けておく。As shown in FIG. 3, holes 22 are made at the intersections of the rails 13 so that the board 3 can be placed at the center of the circle and the circles can be accumulated.
上記実施例では第3図のレールの数を8本としたが更に
本数を増すことは横わない。スライダ−13の移動には
本実施例ではワイヤー16による駆動伝搬方式を採用し
たものを示したが、すべらず確実に力が伝搬するように
ベルトまたは(iI車を組み合わせても構わない、又油
圧によるピストンの伸縮機構やリニアモータによる移!
I!lJ磯構を利用しても構わない。In the above embodiment, the number of rails in FIG. 3 is eight, but the number may be increased further. In this embodiment, the slider 13 is moved using a drive propagation method using a wire 16, but it is also possible to use a belt or (iI wheel) in combination to ensure that the force is transmitted without slipping. Movement using a piston expansion/contraction mechanism and a linear motor!
I! You may use lJ Isokai.
又テフロン装帯メ、tの代わりに面積減少時に余っ=5
をチアミン加工したものを用いても枯わない。Also, Teflon-equipped method, instead of t, when the area is reduced, the surplus = 5
It will not wither even if you use a thiamin-treated product.
又、第7図に示したように上記バリアの材質をドーナ・
ンツ状のチューブ(こしたもの23をバリアとして用い
、チューブ内の2L:A圧を空気穴24から調節するこ
とにより内側の面積を減少させれば複雑なメカニズムを
省略することができる。In addition, as shown in Figure 7, the material of the barrier is changed to a donor material.
A complicated mechanism can be omitted if the inner area is reduced by using a strained tube 23 as a barrier and adjusting the 2L:A pressure inside the tube through the air hole 24.
〈発明の効果〉
以上の本発明によれば従来の1.lj分子膜の圧縮時に
生ずる膜の不均一性を防止し、分子配向性の高い均一な
単分子膜または単分子累積膜を成膜することができる。<Effects of the Invention> According to the present invention described above, the conventional 1. It is possible to prevent film nonuniformity that occurs when compressing the lj molecular film, and to form a uniform monomolecular film or monomolecular cumulative film with high molecular orientation.
第1図は爪分子膜の圧縮法による膜流動についての説明
図、第2図は本発明の実施例を示す斜視図、第3図は同
心円状に輪を縮める実施例の斜視図、第・1図はスライ
ダーを移動させるための機構説明図、第6図は輪の大き
さの変化を上から見た平面図、第7し1はドーナンツ状
チューブを用いた実施例を示す斜視図である。
図中 1・・・バリア
2・・・水槽
3・・・基板
460.テフロンの帯
5・・・補強材
6・・・糸巻き型滑車
7・・・シャフト
8・・・パイプ
9・・・支持部
10・・・スペーサ
11・・・」二下腕
12・・・スライダー
13・・・レール
14・・・駆動装置
15・・・モータ
1G・・・ワイヤ
17・・・滑車
18・・・スライダー
19・・・ワイヤ止め
20・・・シャフト
21・・・バイブ
23・・・ドーナッツ型チューブ
24・・・空気穴
代理人 すt以上 杉 山 毅 至(他1名)(a)
(b)
第1因
手続補正書(方式)
(特許庁 殿)
1、事件の表示
特願昭62−72609
2、発明の名称
成膜方法
3、補正をする者
事件との関係 特許出願人
住 所 @545大阪市阿倍野区長池町22番22 ′
l;。
名 称 (504)シャープ株式会社
代表者 辻 晴 碓
4、代理人
第5図」と訂正する。Fig. 1 is an explanatory diagram of membrane flow due to the compression method of the nail molecular membrane, Fig. 2 is a perspective view showing an embodiment of the present invention, Fig. 3 is a perspective view of an embodiment in which rings are contracted concentrically, and Fig. Figure 1 is an explanatory diagram of the mechanism for moving the slider, Figure 6 is a plan view from above showing changes in the size of the ring, and Figure 7 and 1 is a perspective view showing an embodiment using a donut-shaped tube. . In the figure 1... Barrier 2... Water tank 3... Substrate 460. Teflon band 5... Reinforcement material 6... Pinwheel type pulley 7... Shaft 8... Pipe 9... Support part 10... Spacer 11..." Lower arm 12... Slider 13...Rail 14...Drive device 15...Motor 1G...Wire 17...Pulley 18...Slider 19...Wire stopper 20...Shaft 21...Vibe 23...・Doughnut-shaped tube 24...Air hole agent Sut or more Takeshi Sugiyama (1 other person) (a) (b) First cause procedural amendment (formality) (Japan Patent Office) 1. Special indication of the case Application No. 62-72609 2. Name of the invention Film forming method 3. Relationship with the case of the person making the amendment Patent applicant address @ 545 22-22 Nagaike-cho, Abeno-ku, Osaka-shi
l;. Name (504) Sharp Corporation Representative Haru Tsuji Usui 4, Agent Figure 5" is corrected.
Claims (1)
して用い、同心円状に輪内の面積を減少させて水面上に
展開した単分子膜を圧縮することを特徴とする成膜方法
。 2、放射線上に配置したレールに取り付けたスライダー
を中心へ移動することにより、同心円状に輪を縮小し円
の中心の位置を固定することを特徴とする特許請求の範
囲1項に記載の成膜方法。 3、前記帯が円形に広がるように補強材として弾力性に
富む材料を前記帯に貼着したことを特徴とする特許請求
の範囲第1項に記載の成膜方法。 4、前記帯として面積減少時に余った帯を引っ張る必要
がないように伸縮自在で表面が疎水性である材料を用い
ることを特徴とする特許請求の範囲第1項に記載の成膜
方法。 5、前記帯として伸縮自在で表面が疎水性の材料をドー
ナッツ状のチューブにしたものを用い、チューブ内の空
気圧を変えることにより内側の面積を減少させることを
特徴とする特許請求の範囲第1項に記載の成膜方法。[Claims] 1. A ring-shaped band with a hydrophobic surface is used as a barrier, and the area within the ring is reduced concentrically to compress the monomolecular film spread on the water surface. A film formation method that uses 2. The structure according to claim 1, characterized in that the ring is concentrically reduced and the position of the center of the circle is fixed by moving a slider attached to a rail arranged on a radial line to the center. Membrane method. 3. The film forming method according to claim 1, characterized in that a highly elastic material is attached to the band as a reinforcing material so that the band spreads in a circular shape. 4. The film forming method according to claim 1, characterized in that the band is made of a material that is stretchable and has a hydrophobic surface so that there is no need to pull the excess band when the area is reduced. 5. Claim 1, characterized in that the band is made of a doughnut-shaped tube made of a stretchable material with a hydrophobic surface, and the inner area is reduced by changing the air pressure inside the tube. The film-forming method described in section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62072609A JPS63236566A (en) | 1987-03-24 | 1987-03-24 | Membrane formation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62072609A JPS63236566A (en) | 1987-03-24 | 1987-03-24 | Membrane formation |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63236566A true JPS63236566A (en) | 1988-10-03 |
Family
ID=13494304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62072609A Pending JPS63236566A (en) | 1987-03-24 | 1987-03-24 | Membrane formation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63236566A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014175351A1 (en) * | 2013-04-25 | 2014-10-30 | 国立大学法人大阪大学 | Organic semiconductor thin film production method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60261569A (en) * | 1984-06-11 | 1985-12-24 | Canon Inc | Film forming device |
-
1987
- 1987-03-24 JP JP62072609A patent/JPS63236566A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60261569A (en) * | 1984-06-11 | 1985-12-24 | Canon Inc | Film forming device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014175351A1 (en) * | 2013-04-25 | 2014-10-30 | 国立大学法人大阪大学 | Organic semiconductor thin film production method |
CN105144417A (en) * | 2013-04-25 | 2015-12-09 | 国立大学法人大阪大学 | Organic semiconductor thin film production method |
US10205094B2 (en) | 2013-04-25 | 2019-02-12 | Pi-Crystal Inc. | Organic semiconductor thin film production method |
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