JPS63230989A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- JPS63230989A JPS63230989A JP6383887A JP6383887A JPS63230989A JP S63230989 A JPS63230989 A JP S63230989A JP 6383887 A JP6383887 A JP 6383887A JP 6383887 A JP6383887 A JP 6383887A JP S63230989 A JPS63230989 A JP S63230989A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- metal
- heat treatment
- tic
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 230000007797 corrosion Effects 0.000 claims abstract description 8
- 238000005260 corrosion Methods 0.000 claims abstract description 8
- 239000007769 metal material Substances 0.000 claims abstract description 7
- 150000002736 metal compounds Chemical class 0.000 claims description 7
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 3
- 229910026551 ZrC Inorganic materials 0.000 claims 3
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 3
- 239000002184 metal Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 3
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 229910000765 intermetallic Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 13
- 238000005524 ceramic coating Methods 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- -1 T i C Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は真空ポンプに係り、特に半導体製造装置のよう
に、腐食性ガスを取扱うプロセスに使用するのに好適な
真空ポンプに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a vacuum pump, and particularly to a vacuum pump suitable for use in processes that handle corrosive gases, such as semiconductor manufacturing equipment.
従来の装置は、特開昭６１−２４７８９３号あるいは特
開昭６１−２４７８９４号に記載のように、ポンプの機
械的な構成及びそれによる排気性能について論じている
。あるいは、特開昭５９−４１６９９に記載のよう
−に有機物の膜によって、タービン翼を薬品雰囲気から
保護する方法について論じられている。Conventional devices discuss the mechanical structure of the pump and its evacuation performance, as described in Japanese Patent Laid-Open No. 61-247893 or No. 61-247894. Or as described in JP-A-59-41699
- discusses methods of protecting turbine blades from chemical atmospheres with organic films.
（発明が解決しようとする問題点〕
上記従来技術は、ポンプの構成部品の全て、あるいは一
部について、腐食性有害ガスによる腐食の防止について
配慮がなされておらず、腐食性有害ガスを排気する目的
でポンプが使用された場合に、ポンプの全体あるいは一
部分が腐食されて寿命が短くなるという問題があった。(Problems to be Solved by the Invention) The above-mentioned prior art does not take into account the prevention of corrosion caused by corrosive gases in all or some of the components of the pump, and does not exhaust corrosive gases. When the pump is used for this purpose, there is a problem in that the whole or a part of the pump is corroded and its life is shortened.
また、従来技術は、保護膜の付着力について配慮がなさ
れておらず、回転にもとづく遠心力や振動による応力に
よって、膜の剥れ易さが問題となる可能性があった。Further, in the conventional technology, no consideration was given to the adhesion force of the protective film, and there was a possibility that the film could easily peel off due to centrifugal force due to rotation or stress due to vibration.
本発明の目的は、密着強度の大きな耐食性被膜を有し、
かつ高温加熱による脱ガス処理の容易な真空ポンプを提
供することにある。The object of the present invention is to have a corrosion-resistant coating with high adhesion strength,
Another object of the present invention is to provide a vacuum pump that facilitates degassing treatment by high-temperature heating.
上記目的は、腐食性の排気ガスと接触する、真空ポンプ
の部分を、熱処理を施すことによってその表面にＴｉＣ
，ＴｉＮあるいはＺｒＣ等の金属化合物が析出する金属
材料でもって構成し、その表面を耐腐食性のセラミック
スで被覆した後、熱処理を行うことにより達成される。The above purpose is to heat-treat the parts of the vacuum pump that come into contact with corrosive exhaust gas so that the surface of the parts can be coated with TiC.
, TiN, ZrC, or other metal material from which a metal compound is precipitated, the surface of which is coated with a corrosion-resistant ceramic, and then heat treated.
セラミックスを被覆した金属部分を熱処理することによ
って、セラミックスと金属の界面にＴｉＣ＊Ｔ ｉ Ｎ
あるいはＺｒＣ等の金属化合物が析出する。By heat-treating the metal part coated with ceramic, TiC*TiN is formed at the interface between the ceramic and metal.
Alternatively, metal compounds such as ZrC are precipitated.
これらの金属化合物は被覆したセラミックスと金属のい
ずれにも侵入しており、セラミックスと金属との接着性
を高める作用をするので、セラミックス被膜がはがれに
くくなる。また、ポンプによって排気されるガスは、被
覆したセラミックスにのみ接触するので、金属部分が腐
食されることがなく、腐食性のガスを排気してもポンプ
の記械的寿命が短くなることがない、また、高温での後
処理に耐える金属材料、及びセラミックスを用いている
ので、高温での加熱脱ガスを行うことができる。These metal compounds invade both the coated ceramic and metal, and have the effect of increasing the adhesion between the ceramic and metal, making it difficult for the ceramic coating to peel off. In addition, the gas exhausted by the pump comes into contact only with the coated ceramics, so metal parts will not be corroded, and the mechanical life of the pump will not be shortened even if corrosive gas is exhausted. Furthermore, since metal materials and ceramics that can withstand post-treatment at high temperatures are used, heating and degassing can be performed at high temperatures.
以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
ロータ１．動翼２．静翼３．ケーシング４及び排気管８
を、熱処理することによって表面にＴｉＣが偏析する金
属材料１例えば炭素を０．１重量％以下、Ｔｉを０．４
重量％以上含むステンレス鋼ＳＵＳ ３２１を用いて
作製し、その排気ガスと接触する部分には耐腐食性のあ
るセラミックス、例えばＡｊｌｚＯａを厚さ１μｍから
数μｍにコーティング９する。セラミックスを被覆した
部品を約７００℃で、１時間から数時間加熱処理する。Rotor 1. Moving blade 2. Static wings 3. Casing 4 and exhaust pipe 8
Metal material 1 on which TiC segregates on the surface by heat treatment, for example, 0.1% by weight or less of carbon and 0.4% of Ti
It is manufactured using stainless steel SUS 321 containing at least % by weight, and the parts that come into contact with the exhaust gas are coated 9 with a corrosion-resistant ceramic such as AjlzOa to a thickness of 1 μm to several μm. The ceramic-coated parts are heat-treated at about 700° C. for one to several hours.
この加熱処理によって、被覆したセラミックスと下地の
金属との界面に°ｒｉＣが析出するとともに、このＴｉ
Ｃが被覆セラミックス及び下地金属の両方に侵入する。By this heat treatment, °riC is precipitated at the interface between the coated ceramic and the underlying metal, and this Ti
C penetrates both the coating ceramic and the underlying metal.
このため、被覆したセラミックスと金属とがあたかもＴ
ｉＣで接合されたようになって、密着強度が増大するの
で、被覆したセラミックスは剥がれ難くなる。こうして
熱処理した後にポンプとして組立てると、排気ガスに接
触するポンプの部分は、全てセラミックスに被われるこ
ととなり、このセラミックスは強固に付着しているため
振動。For this reason, the coated ceramics and metal are
Since it becomes like being joined by iC and the adhesion strength increases, the coated ceramic becomes difficult to peel off. When assembled as a pump after heat treatment in this way, all parts of the pump that come into contact with exhaust gas are covered with ceramics, and this ceramics is firmly adhered to it, causing vibrations.
遠心力及び熱にもとづく応力にさらされても容易に剥が
れることはない、またポンプの主要な構成材料である金
属部分は、被覆したセラミックスにへだてられて、排気
に直接に接触することがない。It does not easily peel off even when exposed to centrifugal force and thermal stress, and the metal part, which is the main component of the pump, is separated by the ceramic coating and does not come into direct contact with the exhaust air.
また、セラミックス被覆した部分を加熱することによっ
て、容易に脱ガスすることができる。Further, by heating the ceramic-coated portion, gas can be easily degassed.
本実施例においては、ＴＭＰへの適用について説明した
が、その他の形式のポンプであるロータリーポンプ、ス
クリューポンプ、遠心式ポンプ。In this embodiment, application to TMP has been explained, but other types of pumps such as rotary pumps, screw pumps, and centrifugal pumps are also applicable.
スクロールポンプ等においても、排気ガスに接触する部
分に、上記実施例と同様に、付着力の強固なセラミック
被膜を形成することができ、ポンプの耐腐食性を向上す
ることができる。Also in a scroll pump or the like, a ceramic coating with strong adhesion can be formed on the parts that come into contact with exhaust gas, as in the above embodiment, and the corrosion resistance of the pump can be improved.
（発明の効果〕
本発明によれば、ポンプの主要構成材料である金属は被
覆したセラミックスに保護されて排気ガスに接触しない
ので腐食されることがない。また。(Effects of the Invention) According to the present invention, the metal, which is the main constituent material of the pump, is protected by the ceramic coating and does not come into contact with exhaust gas, so it is not corroded.
被覆したセラミックスは、加熱処理によって析出したＴ
ｉＣ，ＴｉＮ、ＺｒＣ等の金属化合物によって強固に金
属に接合されるので、振動、遠心力及び熱によって容易
に剥がれることがない。このように、腐食性のガスを排
気するポンプに用いても、腐食することなく長持ちする
真空ポンプを形成することができる。また、ポンプの主
要部分である排気ガスに接触する部分が、同一の高温処
理に耐える材料によって構成されているため、ポンプ使
用時において高温の加熱脱ガスを行うことができるので
、排気性能を高めることが容易である。The coated ceramic is coated with T precipitated by heat treatment.
Since it is firmly bonded to metal using a metal compound such as iC, TiN, or ZrC, it will not easily peel off due to vibration, centrifugal force, or heat. In this way, even when used as a pump for exhausting corrosive gases, a long-lasting vacuum pump without corrosion can be formed. In addition, the main parts of the pump that come into contact with exhaust gas are made of materials that can withstand the same high-temperature treatment, making it possible to perform high-temperature heating and degassing when the pump is in use, improving exhaust performance. It is easy to do.
加熱はＴ ｉ Ｃ、Ｔ ｉ Ｎ 、 Ｚ ｒ Ｃ等の金
属化合物の析出を促進する作用があるので、加熱脱ガス
によって被覆したセラミックスの付着が強固となり、一
層剥がれにくくなる。Since heating has the effect of promoting the precipitation of metal compounds such as T i C, T i N, Z r C, etc., the adhesion of the coated ceramic becomes stronger by heating and degassing, making it even more difficult to peel off.
第１図は、本発明の一実施例を示すポンプの縦断面図で
ある。
１・・・ロータ、２・・・動翼、３・・・静翼、４・・
・ケーシング、５・・・駆動装置、６・・・吸気口、７
・・・排気口、８第 １ 図FIG. 1 is a longitudinal sectional view of a pump showing one embodiment of the present invention. 1... Rotor, 2... Moving blade, 3... Stationary blade, 4...
・Casing, 5... Drive device, 6... Intake port, 7
...Exhaust port, 8 Figure 1
Claims (1)
って表面にＴｉＣ（炭化チタン）、ＴｉＮ（窒化チタン
）、ＺｒＣ（炭化ジルコニウム）等の金属化合物が析出
する金属材料を用いて構成し、その表面にセラミックス
を被覆し、その熱加熱処理を行うことによって、金属材
料と被覆セラミックスとの界面に、ＴｉＣ、ＴｉＮ及び
ＺｒＣ等の金属化合物を析出させ耐食性に優れたことを
特徴とする真空ポンプ。1. The part that comes into contact with the gas to be exhausted is made of a metal material on which metal compounds such as TiC (titanium carbide), TiN (titanium nitride), and ZrC (zirconium carbide) are precipitated by heat treatment. A vacuum pump characterized in that its surface is coated with ceramics and thermally heated to precipitate metal compounds such as TiC, TiN, and ZrC at the interface between the metal material and the coated ceramics, resulting in excellent corrosion resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6383887A JPS63230989A (en) | 1987-03-20 | 1987-03-20 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6383887A JPS63230989A (en) | 1987-03-20 | 1987-03-20 | Vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63230989A true JPS63230989A (en) | 1988-09-27 |
Family
ID=13240886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6383887A Pending JPS63230989A (en) | 1987-03-20 | 1987-03-20 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63230989A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5350275A (en) * | 1992-06-05 | 1994-09-27 | Zaidan Houjin Shinku Kagaku Kenkyujo | Turbomolecular pump having vanes with ceramic and metallic surfaces |
| WO2000045054A1 (en) * | 1999-01-27 | 2000-08-03 | Seiko Seiki Co., Ltd. | Vacuum pump device |
| EP1314891A1 (en) * | 2001-11-16 | 2003-05-28 | BOC Edwards Technologies, Limited | Vacuum pump |
-
1987
- 1987-03-20 JP JP6383887A patent/JPS63230989A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5350275A (en) * | 1992-06-05 | 1994-09-27 | Zaidan Houjin Shinku Kagaku Kenkyujo | Turbomolecular pump having vanes with ceramic and metallic surfaces |
| WO2000045054A1 (en) * | 1999-01-27 | 2000-08-03 | Seiko Seiki Co., Ltd. | Vacuum pump device |
| EP1314891A1 (en) * | 2001-11-16 | 2003-05-28 | BOC Edwards Technologies, Limited | Vacuum pump |
| KR100880504B1 (en) * | 2001-11-16 | 2009-01-28 | 에드워즈 가부시키가이샤 | Vacuum pump |
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