JPS63228058A - Electromagnetic ultrasonic wave generating device - Google Patents

Electromagnetic ultrasonic wave generating device

Info

Publication number
JPS63228058A
JPS63228058A JP62061676A JP6167687A JPS63228058A JP S63228058 A JPS63228058 A JP S63228058A JP 62061676 A JP62061676 A JP 62061676A JP 6167687 A JP6167687 A JP 6167687A JP S63228058 A JPS63228058 A JP S63228058A
Authority
JP
Japan
Prior art keywords
metal pipe
coil
metallic pipe
electromagnetic ultrasonic
transmitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62061676A
Other languages
Japanese (ja)
Inventor
Kazumi Sugino
杉野 一美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62061676A priority Critical patent/JPS63228058A/en
Publication of JPS63228058A publication Critical patent/JPS63228058A/en
Pending legal-status Critical Current

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  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

PURPOSE:To make the generation of an electromagnetic ultrasonic wave constant by running a metallic pipe to be inspected in an annular electromagnetic ultrasonic wave generating coil, blowing compressed air to the entire outer periphery of the metallic pipe, and making the interval between the metallic pipe and coil uniform. CONSTITUTION:The metallic pipe 4 is run in an annular ultrasonic wave transmission part 1. The generating coil 2 is provided to the coil case 3 of the transmission part 1. A gap is formed for the generating coil 2 on the surface of the coil case 3 and plural gaps are provided in the lengthwise direction of the metallic pipe 4. Then the compressed air from the air chamber C in the coil case 3 is blown uniformly from the gaps. Consequently, the coil case 3 and metallic pipe 4 are held at a uniform interval over the entire outer periphery. Consequently, the interval between the metallic pipe and transmission part is made uniform, so the generation efficiency of the electromagnetic ultrasonic wave can be made constant.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、を磁誘専現尿を利用して超音波の発生及び
検出を行なうことにより被検材である金属パイプの各種
計測または検査を可能とする電磁超音波発生装置に関す
るものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention is capable of various measurements or inspections of metal pipes as test materials by generating and detecting ultrasonic waves using magnetically induced urine. The present invention relates to an electromagnetic ultrasonic generator that enables.

〔従来の技術〕[Conventional technology]

従来、材料の非破壊検査の方法にはその材料の内部に超
音波を伝搬させ、その透過波を検出して各種計画や検査
を行なう方法が知られている。
BACKGROUND ART Conventionally, methods for non-destructive testing of materials include methods in which ultrasonic waves are propagated inside the material and the transmitted waves are detected to perform various planning and inspections.

第3図は被検材が金属バイブである場合、超音波をいわ
ゆるmfB誘導的に発生させる電磁超音波発生isを示
すものである。
FIG. 3 shows electromagnetic ultrasonic generation IS in which ultrasonic waves are generated in a so-called mfB induction manner when the object to be inspected is a metal vibrator.

同図において、(1)は電価超音波送信部(以下。In the same figure, (1) is a charge ultrasonic transmitter (hereinafter referred to as an ultrasonic transmitter).

単に送信部)、+2)は電磁超音波発生コイル(以下。Simply the transmitter), +2) is the electromagnetic ultrasonic generator coil (hereinafter referred to as "transmitter").

単に発生コイル)、(31は前記発生コイル(2)を収
納する絶縁物のケースであり、また、(4)は金属パイ
プであって、前記発生コイル(2)は前記金属パイプの
外周まわりにら旋状となるように巻き回して形成されて
いる。
(simply a generating coil), (31 is an insulating case that houses the generating coil (2), and (4) is a metal pipe, and the generating coil (2) is arranged around the outer periphery of the metal pipe. It is formed by winding it into a spiral shape.

同図を用いて更に詳しく説明すると、外部送信機より前
記発生コイル(2)に変位電流Iが送信されると、前記
金属パイプ(41の前言ピ発生コイル(2)と相対する
面の表面近傍に詩碑された渦電流I′及び磁界BH間の
相互作用によって前記金属パイプ(4)の前記発生コイ
ル(2)と相対する面の表面近傍にローレンツ力?が発
生し、このローレンツ力Fが超音波となって前記金属パ
イプ(4)の内部を伝搬していく。
To explain in more detail using the figure, when a displacement current I is transmitted from an external transmitter to the generating coil (2), a portion of the metal pipe (41) near the surface of the surface facing the generating coil (2). Due to the interaction between the eddy current I' and the magnetic field BH, a Lorentz force is generated near the surface of the metal pipe (4) facing the generating coil (2), and this Lorentz force F becomes superfluous. The sound waves become sound waves and propagate inside the metal pipe (4).

前記発生コイル(2)は前記金属パイプ(4)の外径に
合致したら旋状をなしており、前記発生コイル(2)に
よって前記金属パイプ(4)の表面近傍に均一に超音波
を発生させるためには、前記発生コイル(2) ト前記
金属バイブ(4)の間隔が全周に渡り一定である必要が
ある。何故ならば、前記渦電@ I /及び磁界Biの
発生効率は前記発生コイル(2)と前記金属パイプとの
間隔に影響されるからである。
The generating coil (2) has a spiral shape when it matches the outer diameter of the metal pipe (4), and the generating coil (2) uniformly generates ultrasonic waves near the surface of the metal pipe (4). In order to achieve this, the interval between the generating coil (2) and the metal vibrator (4) must be constant over the entire circumference. This is because the generation efficiency of the eddy electric @ I / and the magnetic field Bi is affected by the distance between the generation coil (2) and the metal pipe.

艮ち、前記金属パイプ(41の断面における外側に相当
する円と、前記発生コイル(2)の断面における円周と
が同心円をなす必要がある。
In other words, it is necessary that the circle corresponding to the outside in the cross section of the metal pipe (41) and the circumference in the cross section of the generating coil (2) form concentric circles.

ところで、前記金属パイプ(4)の搬送過程における上
下動などの変動があっても常に前記金属パイプ(4)の
外周と前記発生コイル(2)とが同心円をなすように前
記発生コイル(2)ヲなられせるには、一般的に次のよ
うな手法がとられていた。
Incidentally, the generating coil (2) is arranged so that the outer periphery of the metal pipe (4) and the generating coil (2) always form a concentric circle even if there are fluctuations such as vertical movement during the conveyance process of the metal pipe (4). Generally, the following methods were used to make people fall in love.

即ち、前記金属パイプ(4)の搬送中の上下変動を何ら
かの手段で検出し、その検出量を前記発生コイル(2)
即ち前記送信部(1)を保持している機構にフィードバ
ックするのである。
That is, the vertical fluctuation of the metal pipe (4) during transportation is detected by some means, and the detected amount is detected by the generating coil (2).
That is, it feeds back to the mechanism holding the transmitter (1).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

前記従来の電磁超音波発生装置では、前記金属パイプの
搬送による上下変動があっても、前記金属パイプの外周
表面と前r発生コイル即ち前記送信部との間隔を全周に
渡って一定にするべく前記送@sを前記金属パイプに追
従させるために、前記金属パイプの上下変動全検出し、
その検出量によって前記送信部の保持機′1sを制御す
る手法を用いていたために2次のような問題点があった
。即ち、搬送の上下変動をオンライン中リアルタイムで
検出するための設備及びその検出量に応じて前記送信部
の保持機IIIkを制御する設備が必要となるため、t
a超音狡発生装置全体の楢成が複雑になるという問題点
があった。
In the conventional electromagnetic ultrasonic generator, the distance between the outer circumferential surface of the metal pipe and the front r generating coil, that is, the transmitter, is constant over the entire circumference even if there is vertical fluctuation due to conveyance of the metal pipe. In order to make the feed@s follow the metal pipe, all vertical fluctuations of the metal pipe are detected,
Since the method of controlling the holding device '1s of the transmitting section based on the detected amount was used, the following problems occurred. That is, it is necessary to have equipment for detecting vertical fluctuations in conveyance in real time while online, and equipment for controlling holding machine IIIk of the transmitter according to the detected amount.
(a) There was a problem in that the structure of the entire ultrasonic generator was complicated.

この発明は以上のような問題点を解決するためになされ
たもので、前記送信部の前記金属パイプと相対する表面
から前記金属パイプに向かって気体を吹敦出させ、その
圧力によって前記送信部を前記金属パイプに対しである
間隔をもって空中に保つため、前記金属パイプの搬送の
上下変動があっても、気体の噴出を前記送信部の内周全
周に渡って均一にすることによって、前記金属パイプの
外周表面と前記送信部との間隔を全周に渡って等しくす
ることができるようにしたものである。
This invention was made to solve the above-mentioned problems. Gas is blown out toward the metal pipe from the surface of the transmitter facing the metal pipe, and the pressure of the gas is used to blow out the gas from the surface facing the metal pipe. In order to keep the gas in the air at a certain distance from the metal pipe, even if there is a vertical fluctuation in the conveyance of the metal pipe, the gas is ejected uniformly over the entire inner circumference of the transmitter. The distance between the outer peripheral surface of the pipe and the transmitter can be made equal over the entire circumference.

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係わるti超音波発生装置は、前記送信部の
内周表面から均一に外側に向かって気体を吹き出させる
ことによって、前記送信部と前記金属パイプとの間隔を
前記送信部の内周に渡って一定に保たせるので、前記金
属パイプの搬送の上下変動があった場合でも、常に前記
金属パイプと前記送信部との間隔が一定となり、前記送
信部より前記金属パイプに発生される電磁超音波の発生
効率が前記送信部の内周全周に渡り一定になるようにし
たものである。
The ti ultrasonic generator according to the present invention reduces the distance between the transmitter and the metal pipe to the inner circumference of the transmitter by uniformly blowing gas outward from the inner circumferential surface of the transmitter. Since the distance between the metal pipe and the transmitter is kept constant even if the conveyance of the metal pipe fluctuates up and down, the distance between the metal pipe and the transmitter is always constant, and the electromagnetic energy generated by the transmitter in the metal pipe is The sound wave generation efficiency is made constant over the entire inner circumference of the transmitter.

〔作用〕[Effect]

この発明においては、1!磁超音波を発生させる送信部
と前記送信部との間隔を前r送信部の内周表面から外側
へ気体を吹き出させることによって一定に保たせるよう
にしたため、前記金属パイプに搬送の上下変動があって
も、!磁超音波発生効率金前記送信部の内周全周にわた
り一定となるようにした。
In this invention, 1! Since the distance between the transmitter that generates magnetic ultrasonic waves and the transmitter is kept constant by blowing gas outward from the inner circumferential surface of the front r transmitter, vertical fluctuations in conveyance are prevented from occurring in the metal pipe. Even so,! The magneto-ultrasonic wave generation efficiency was made constant over the entire inner circumference of the transmitter.

〔実施例〕〔Example〕

第1図は、この発明による1[磁超音波発生装置の一実
施例を示した図である。同図において、(1)は送信部
、(2)は発生コイル、(3Iは絶縁物で形成されたコ
イルケースである。なお、(4)は被検材である金属パ
イプである。図中、前記発生コイル(2)及び前記金属
バイブ(4)を糾線にて示した。
FIG. 1 is a diagram showing an embodiment of a magneto-ultrasonic generator according to the present invention. In the figure, (1) is a transmitter, (2) is a generating coil, and (3I is a coil case made of an insulator. Furthermore, (4) is a metal pipe that is the material to be inspected. In the figure , the generating coil (2) and the metal vibrator (4) are shown in outline.

前記コイルケース(3)の底面は前記発生コイル(2)
が巻かれる時のボビンを兼ねており、前記発生コイル(
21ii前記金属パイプの外周まわりにら旋状に巻かれ
た状態をなしている。従って前記送信5(1)の形状は
パイプ状であって、前記余積パイプ(4)は前記送信部
(1)の中を搬送される。
The bottom surface of the coil case (3) is the generating coil (2).
It also serves as a bobbin for winding the generator coil (
21ii It is wound in a spiral around the outer periphery of the metal pipe. Therefore, the shape of the transmitter 5 (1) is a pipe, and the extra volume pipe (4) is conveyed inside the transmitter (1).

また、第2図は、前記金属パイプ(4)の長手力向くお
ける前記送信部(1)の断面図を示したものである。
Moreover, FIG. 2 shows a cross-sectional view of the transmitter (1) when facing the longitudinal force of the metal pipe (4).

即ち、前Vコイルケース(3)の表面の前記発生コイル
(2)のすき間には前記金属パイプ(4)の長手方向に
n個、前記金属パイプ(4)の周方向にm個で、総数m
Xn個のスロツ) H11〜町□が均一に設けられてい
る。
That is, in the gap between the generating coils (2) on the surface of the front V coil case (3), there are n pieces in the longitudinal direction of the metal pipe (4) and m pieces in the circumferential direction of the metal pipe (4), in total. m
Xn slots) H11~Machi□ are uniformly provided.

前記スロットHH〜)Imnd前配コ前記ケース(3)
の内部に設けられた気体qcに通じている。更に前記気
体室Cは図示していない外部の圧縮空気供給源に通じて
いる。即ち、前記スロツ)H1〜Hmnより気体室Cを
経て圧縮空気を外側に吹き出させることによって前記コ
イルケース(3)全前記金属パイプ(4)の外側にしか
も百に浮かせて保持することができる。また、前記スロ
ツ) U11〜Hmnが前記コイルケース(31の表面
に均一に設けられているため、圧縮空気を前記コイルケ
ース(3)の表面より均一に吹き出させることができ、
前記金属パイプ(4)と前記コイルケース(3)との間
隔を前記金属パイプの外周全周に渡り保つことができる
The slot HH~) Imnd front case (3)
It communicates with the gas qc provided inside. Furthermore, the gas chamber C communicates with an external compressed air supply source (not shown). That is, by blowing compressed air outward from the slots H1 to Hmn through the gas chamber C, the coil case (3) can be held entirely outside the metal pipe (4) and suspended. Further, since the slots) U11 to Hmn are uniformly provided on the surface of the coil case (31), compressed air can be uniformly blown out from the surface of the coil case (3),
The distance between the metal pipe (4) and the coil case (3) can be maintained over the entire outer circumference of the metal pipe.

一方、11磁超音波発生の原理は先に従来技術の項で説
明した通りであって、前記金属パイプ(4)の外周表面
に均一に超音波振動、または言い換えればローレンツ力
Fを起こすためKは前記渦電流工′及び磁界giを前記
金属パイプ(4)の外周表面に渡って等しく発生させる
必要があり、即ち、そのためには、前記渦電@ X /
及び磁界niが前述したように前記発生コイル(2)と
前記金属パイプ(4)との間隔が大きいほど低下するた
め、前記発生コイル(2)と前記金属パイプ(4)との
間隔を前記金属バイブ(4)の外周全周に護って一定と
する必要がある。
On the other hand, the principle of generating 11-magnetic ultrasonic waves is as explained in the prior art section. It is necessary to generate the eddy current ' and the magnetic field gi equally over the outer peripheral surface of the metal pipe (4), that is, in order to do so, the eddy current @
As described above, the magnetic field ni decreases as the distance between the generating coil (2) and the metal pipe (4) increases. It is necessary to protect the entire outer circumference of the vibrator (4) and keep it constant.

そこで、この発明によれば、前記金属パイプ(4)Km
送の上下変動がある場合でも、常に前記金属パイプ(4
1と前記送信部(1)との間隔を全周に渡り保つことが
できるため、前記送m 部(11が相対している前記金
槁バイブ(4)の表面全てに渡り、前記発生コイル(2
)による1m電磁超音波発生効率を一定に保つことが可
能となる。
Therefore, according to the present invention, the metal pipe (4) Km
Even if the feed rate fluctuates up and down, the metal pipe (4) is always
1 and the transmitting section (1) can be maintained over the entire circumference, the generating coil ( 2
) makes it possible to keep the 1m electromagnetic ultrasonic generation efficiency constant.

なお9本実施例では前記コイルケース(3)より吹き出
させる圧縮気体として圧縮空気を用いているが他の気体
であっても同様の効果があることは言うまでもない。
In this embodiment, compressed air is used as the compressed gas blown out from the coil case (3), but it goes without saying that other gases can also have the same effect.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、従来搬送の上下変動が
ある金属パイプに金属パイプがその中を通るパイプ状の
送信部をなられせるために、上下変動の変動量を検出し
てその検出量を送信部にフィードバックさせる手法を用
いていたために上下変atオンラインでリアルタイムに
検出するには装置が全体として複雑化するのに対し、送
信部の金属パイプの外側における保持方法として圧縮気
体を送信部から金属パイプの外周表面に均一に吹き出さ
せる手法を用いるので、*送の上下変動があっても常に
圧縮気体によって金属パイプの外周表面と送信部との間
隔が前記送信部の内周全周に渡り一定となるため電磁超
音波の発生効率も一定となる効果がある。
As described above, according to the present invention, in order to make a pipe-shaped transmitting section through which a metal pipe passes through a metal pipe that has conventionally been subject to vertical fluctuations in conveyance, the amount of fluctuation in vertical fluctuations is detected and detected. Because the method used was to feed back the amount of gas to the transmitter, the device as a whole would be complicated to detect up and down changes online in real time. Since we use a method that uniformly blows air from the outer circumferential surface of the metal pipe to the outer circumferential surface of the metal pipe, even if the feed rate fluctuates up and down, the compressed gas always maintains the distance between the outer circumferential surface of the metal pipe and the transmitting section to the entire inner circumference of the transmitting section. Since the transition is constant, there is an effect that the generation efficiency of electromagnetic ultrasonic waves is also constant.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例による電磁超音波発生装f
ltf示す図、第2図はこの発明の特徴をな′t11磁
超音波送信部の断面を示す図、第2図は従来の電磁超音
波発生装置を示す図であり、(1)は電磁超音波送信部
、(2)は電磁超音波発生コイル、(3)はコイルケー
ス、■11〜)fmn ハスロット Cは気体室である
。 なお9図中、同一あるいは相当部分には同一符号を付し
示しである。
FIG. 1 shows an electromagnetic ultrasonic generator f according to an embodiment of the present invention.
Fig. 2 is a diagram showing a cross section of a magnetic ultrasonic transmitter that shows the features of the present invention, Fig. 2 is a diagram showing a conventional electromagnetic ultrasonic generator, and (1) is a diagram showing a conventional electromagnetic ultrasonic generator. A sound wave transmitter, (2) is an electromagnetic ultrasonic wave generating coil, (3) is a coil case, (11~)fmn Haslot C is a gas chamber. In FIG. 9, the same or corresponding parts are designated by the same reference numerals.

Claims (1)

【特許請求の範囲】[Claims] 被検材である金属パイプがその中を通る大きさで、しか
も金属パイプの外周まわりにら旋状となるように巻回し
て形成してあるら旋状コイルとそのら旋状コイルを固定
及び保持するケースよりなる送信部を有する電磁超音波
発生装置において、前記コイルケースの前記金属パイプ
と相対する表面の全周に渡つて均一に設けられ、かつ前
記コイルケースの内部に設けられた気体室に溜められた
圧縮気体を前記コイルケースの内周の表面から前記金属
パイプの表面に向うように噴出させるための複数個のス
ロットを備えたことを特徴とする電磁超音波発生装置。
A helical coil is sized to allow the metal pipe to pass through it, and is wound in a spiral around the outer circumference of the metal pipe, and the helical coil is fixed and fixed. In an electromagnetic ultrasonic generator having a transmitter made of a holding case, a gas chamber provided uniformly over the entire circumference of a surface of the coil case facing the metal pipe and provided inside the coil case. An electromagnetic ultrasonic generator comprising a plurality of slots for ejecting compressed gas stored in the coil case from the inner peripheral surface of the coil case toward the surface of the metal pipe.
JP62061676A 1987-03-17 1987-03-17 Electromagnetic ultrasonic wave generating device Pending JPS63228058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62061676A JPS63228058A (en) 1987-03-17 1987-03-17 Electromagnetic ultrasonic wave generating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62061676A JPS63228058A (en) 1987-03-17 1987-03-17 Electromagnetic ultrasonic wave generating device

Publications (1)

Publication Number Publication Date
JPS63228058A true JPS63228058A (en) 1988-09-22

Family

ID=13178092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62061676A Pending JPS63228058A (en) 1987-03-17 1987-03-17 Electromagnetic ultrasonic wave generating device

Country Status (1)

Country Link
JP (1) JPS63228058A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010528282A (en) * 2007-05-24 2010-08-19 バシリエビチ キリコフ,アンドレイ Electromagnetic acoustic converter
US8193827B2 (en) 2001-05-15 2012-06-05 Semiconductor Energy Laboratory Co., Ltd. Measuring method, inspection method, inspection device, semiconductor device, method of manufacturing a semiconductor device, and method of manufacturing an element substrate
JP2012122976A (en) * 2010-12-10 2012-06-28 Mitsubishi Heavy Ind Ltd Method for installing guide wave sensor and method for guide wave inspection

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8193827B2 (en) 2001-05-15 2012-06-05 Semiconductor Energy Laboratory Co., Ltd. Measuring method, inspection method, inspection device, semiconductor device, method of manufacturing a semiconductor device, and method of manufacturing an element substrate
JP2010528282A (en) * 2007-05-24 2010-08-19 バシリエビチ キリコフ,アンドレイ Electromagnetic acoustic converter
JP2012122976A (en) * 2010-12-10 2012-06-28 Mitsubishi Heavy Ind Ltd Method for installing guide wave sensor and method for guide wave inspection

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