JPS63227086A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPS63227086A JPS63227086A JP6150487A JP6150487A JPS63227086A JP S63227086 A JPS63227086 A JP S63227086A JP 6150487 A JP6150487 A JP 6150487A JP 6150487 A JP6150487 A JP 6150487A JP S63227086 A JPS63227086 A JP S63227086A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gas
- detecting
- discharge
- oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 claims abstract description 15
- 230000005856 abnormality Effects 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims description 16
- 230000002159 abnormal effect Effects 0.000 abstract description 6
- 230000001105 regulatory effect Effects 0.000 abstract description 4
- 230000002950 deficient Effects 0.000 abstract 2
- 239000011521 glass Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
童業上の利用分野
本発明は工業用（切断、溶接、熱処理等）、または医療
用に利用されるガスレーザ発振器に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Use The present invention relates to a gas laser oscillator used for industrial purposes (cutting, welding, heat treatment, etc.) or medical purposes.
従来の技術
第２図に従来例を示す。同図はＣＯ２レーザ媒体ガスを
高速に循環させるＣｏ２ レーザ発振器の概略構成図で
ある。１は放電ガラス管であり、両端に直流電圧を印加
し放電させている。２はガスを高速に循環させるための
ブロア、３はこの循環系内を一定圧力に維持するための
真空ポンプ、４は新鮮ガスの導入系である。そして系内
圧力検出機能回路６により、系内圧力を検出し、真空ポ
ンプ３前に設けた排気圧力調整パルプ６により、真空ポ
ンプ３と新鮮ガス系からのガスの導入のバランスを保持
しながら、循環系内を一定圧力に維持する様に構成され
ている。Prior Art FIG. 2 shows a conventional example. This figure is a schematic configuration diagram of a Co2 laser oscillator that circulates CO2 laser medium gas at high speed. 1 is a discharge glass tube, and a DC voltage is applied to both ends to cause discharge. 2 is a blower for circulating gas at high speed; 3 is a vacuum pump for maintaining a constant pressure within this circulation system; and 4 is a fresh gas introduction system. Then, the system pressure detection function circuit 6 detects the system pressure, and the exhaust pressure adjustment pulp 6 provided in front of the vacuum pump 3 maintains the balance between the introduction of gas from the vacuum pump 3 and the fresh gas system. It is configured to maintain a constant pressure within the circulation system.
発明が解決しようとする問題点
この様な構成の場合、第１にガス圧力が一定に保持され
た後の安定状態にでは何ら異常は発生しないが、ガス系
内に何らかの外的要因により、圧力変化が生じた場合（
例えば、排気圧力調整パルプ６の温度特性による真空ポ
ンプ３の能力変化等の場合）に、系内圧力変化が生じ、
異常放電を起こしたり、放電点燈不良による発振不良に
なる原因を有していた。Problems to be Solved by the Invention In the case of such a configuration, firstly, no abnormality occurs in a stable state after the gas pressure is maintained constant, but if the pressure If a change occurs (
For example, in the case of a change in the capacity of the vacuum pump 3 due to the temperature characteristics of the exhaust pressure adjustment pulp 6), a change in system pressure occurs,
This caused abnormal discharge and oscillation failure due to faulty discharge lighting.
第２に安定状態でこの循環系が運転されている場合、系
内の流路抵抗のため、プロアの吸入側と吐出側には一定
圧力差が生じ、この一定圧力差のもとで、放電の電圧が
規定されているが、この圧力差が変化すると、異常放電
を発生させる原因となっていた。この圧力差の変化はプ
ロアの停止又はガス循環スピードの変化である。Second, when this circulation system is operated in a stable state, a certain pressure difference occurs between the suction side and the discharge side of the proar due to the flow path resistance within the system, and under this constant pressure difference, the discharge However, if this pressure difference changes, it could cause abnormal discharge. This change in pressure difference is a stoppage of the proa or a change in gas circulation speed.
本発明は従来例の上記問題点に鑑み、ガス系内を、一定
圧力に調節できる様にするとともに、圧力変化等に起因
する異常放電による発振不良を防止することを目的とす
るものである。SUMMARY OF THE INVENTION In view of the above-mentioned problems of the conventional example, it is an object of the present invention to make it possible to adjust the pressure within a gas system to a constant level, and to prevent oscillation failures due to abnormal discharge caused by pressure changes or the like.
問題点を解決するための手段
上記問題点を解決するために、本発明のガスレーザ発振
器は、ガス循環用プロアのガス吸入側の圧力を検出し、
この検出した圧力によりレーザ発振の動作圧力を調節す
る系内圧力検出・調整装置と、ガス吐出側のガス圧力を
検出する圧力検出装置と、吸入側はレーザ発振器の動作
圧力を規定。Means for Solving the Problems In order to solve the above problems, the gas laser oscillator of the present invention detects the pressure on the gas suction side of the gas circulation proa,
There is an internal pressure detection/adjustment device that adjusts the operating pressure of laser oscillation based on this detected pressure, a pressure detection device that detects the gas pressure on the gas discharge side, and a pressure detection device that regulates the operating pressure of the laser oscillator on the suction side.
調節し、さらに吐出側によりガス循環量の変化又は停止
に゛よる異常を、ガス圧力の変化から検出し、発振を停
止する安全停止装置とを備えたものである。The system is equipped with a safety stop device that detects an abnormality caused by a change in gas circulation amount or stoppage on the discharge side from a change in gas pressure, and stops the oscillation.
作 用
本発明は上記手段により、放電管内のガス圧力の変化を
小さくするとともに、圧力変化が急激に発生した場合に
安全機能を動作させ、異常放電による発振不良を防止す
ることができる。Operation The present invention can reduce the change in gas pressure within the discharge tube by using the above-mentioned means, operate the safety function when a sudden pressure change occurs, and prevent oscillation failure due to abnormal discharge.
実施例 本発明を第１図の実施例に基づき説明する。Example The present invention will be explained based on the embodiment shown in FIG.
同図において放電ガラス管１．プロア２、真空ポンプ３
．新鮮ガスの導入系４は第１図と同じである。７はガス
圧力を検出し、さらに調節できる機能を有する系内圧力
検出・調節装置、８は排気圧力調節パルプ、９はガス循
環量の変化又は停止によるメカプ吐出側のガス圧力を検
出する圧力検出装置、１０は系内圧力検出、調節装置７
と圧力検出装置９にて検出されたガス圧力により、異常
検出による安全機能を働かせる安全停止装置である。In the figure, discharge glass tube 1. Proa 2, vacuum pump 3
．． The fresh gas introduction system 4 is the same as that shown in FIG. 7 is a system pressure detection/adjustment device that has the function of detecting and further regulating gas pressure; 8 is an exhaust pressure regulating pulp; 9 is a pressure detection device that detects gas pressure on the mechanical discharge side due to a change in gas circulation amount or stoppage. 10 is a system pressure detection and adjustment device 7
This is a safety stop device that activates a safety function by detecting an abnormality based on the gas pressure detected by the pressure detection device 9.
従来は系内を５０Ｔｏｒｒにて動作している時、運転開
始時と一定時間運転後では、真空ポンプのオイルの粘度
及び温度特性又は他の部品の温度特性から、圧力が４７
〜４８ Ｔｏｒｒへと低下の傾向があったが、本実施例
では系内圧力検出、調節装置７によりガス系内のガス循
環用プロア２の吸入側の圧力を検出し、排気圧力調節パ
ルプ８で真空ポンプ３の能力を調整することにより、一
定圧力５０±０．５ Ｔｏｒｒに調節できる。さらに通
常動作時にガス循環用プロア２の吐出側は５ｏＴｏｒｒ
程度となり、ガス循環用プロア２の吸入側と吐出側は約
３０ Ｔｏｒｒの圧力差が生じ吐出側が高くなっている
が、ガス循環用プロア２の回転が減じたり、停止したり
すると、この圧力差が小さくなり、放電ガラス管１に印
加されている電圧が過電圧となり、放電ガラス管１に異
常放電を発生させるため、これを防止するために吐出側
圧力又は吸入側と吐出側との圧力差を検出し、放電管に
印加されている高電圧をＯＦＦ する。Conventionally, when operating the system at 50 Torr, the pressure at the start of operation and after a certain period of operation is 47 Torr due to the viscosity and temperature characteristics of the vacuum pump oil or the temperature characteristics of other parts.
However, in this example, the system pressure detection and adjustment device 7 detects the pressure on the suction side of the gas circulation proar 2 in the gas system, and the exhaust pressure adjustment pulp 8 By adjusting the capacity of the vacuum pump 3, the pressure can be adjusted to a constant pressure of 50±0.5 Torr. Furthermore, during normal operation, the discharge side of gas circulation proa 2 is 5oTorr.
There is a pressure difference of about 30 Torr between the suction side and the discharge side of the gas circulation proar 2, and the pressure on the discharge side is higher, but if the rotation of the gas circulation proar 2 decreases or stops, this pressure difference becomes smaller, the voltage applied to the discharge glass tube 1 becomes an overvoltage, and abnormal discharge occurs in the discharge glass tube 1. To prevent this, the discharge side pressure or the pressure difference between the suction side and the discharge side is increased. The high voltage applied to the discharge tube is turned off.
発明の効果
ガス循°環用ブロアのガス吸入、ガス吐出両側のガス圧
力を検出する機能を有し、さらに吸入側は圧力検出のみ
ならず、調節機能を有し、吐出側の圧力検出又は吸入側
と吐出側の差圧力によるガス循環系の異常検出をし、安
全機能を動作させる機能を有することにより、レーザ発
振を安定化するとともに異常時にすばやく異常を検出し
、発振を停止することができる。Effects of the invention It has the function of detecting the gas pressure on both the gas suction and gas discharge sides of the gas circulation blower.Furthermore, the suction side has not only a pressure detection function but also an adjustment function, and the discharge side has a pressure detection or suction function. By having a function that detects an abnormality in the gas circulation system based on the differential pressure between the side and discharge side and activates a safety function, it is possible to stabilize laser oscillation and quickly detect an abnormality in the event of an abnormality and stop oscillation. .
第１図は本発明の一実施例によるガスレーザ発振器のブ
ロック図、第２図は従来のガスレーザ発振器のブロック
図である。
１・・・・・・放電ガラス管、２・・・・・・ガス循環
用プロア、３・・・・・・真空ポンプ、４・・・・・新
鮮ガス供給系、７・・・・・・系内圧力検出・調節装置
、８・・・・・・排気圧力調節パルプ、９・・・・・・
圧力検出装置、１０・・・・・・安全停止装置。FIG. 1 is a block diagram of a gas laser oscillator according to an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional gas laser oscillator. 1... Discharge glass tube, 2... Gas circulation proa, 3... Vacuum pump, 4... Fresh gas supply system, 7...・System pressure detection/adjustment device, 8... Exhaust pressure adjustment pulp, 9...
Pressure detection device, 10...Safety stop device.
Claims (1)
循環用ブロアの吸入側の圧力を検出し、前記検出された
吸入側圧力によりレーザ発振の動作圧力を調節する系内
圧力検出・調節装置と、前記ガス循環用ブロアの吐出側
の圧力を検出する圧力検出装置と、前記圧力検出装置に
より検出された吐出側圧力または吸入側圧力と吐出側圧
力の圧力差により、レーザ発振の異常を検出し発振を停
止させる安全停止装置とを具備したガスレーザ発振器。A gas circulation blower disposed in a gas circulation system, and system pressure detection and adjustment that detects the pressure on the suction side of the gas circulation blower and adjusts the operating pressure of laser oscillation based on the detected suction side pressure. a pressure detection device that detects the pressure on the discharge side of the gas circulation blower, and a pressure difference between the discharge side pressure or the suction side pressure and the discharge side pressure detected by the pressure detection device to detect abnormality in laser oscillation. A gas laser oscillator equipped with a safety stop device that detects and stops oscillation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6150487A JPH06103768B2 (en) | 1987-03-17 | 1987-03-17 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6150487A JPH06103768B2 (en) | 1987-03-17 | 1987-03-17 | Gas laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63227086A true JPS63227086A (en) | 1988-09-21 |
| JPH06103768B2 JPH06103768B2 (en) | 1994-12-14 |
Family
ID=13172990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6150487A Expired - Fee Related JPH06103768B2 (en) | 1987-03-17 | 1987-03-17 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06103768B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005104308A1 (en) * | 2004-04-21 | 2005-11-03 | Mitsubishi Denki Kabushiki Kaisha | Gas laser oscillator and gas laser material processing machine |
| KR100846239B1 (en) | 2006-10-18 | 2008-07-16 | 미쓰비시덴키 가부시키가이샤 | Gas laser oscillator and gas laser material processing machine |
| US20120006798A1 (en) * | 2009-03-12 | 2012-01-12 | Panasonic Corporation | Laser oscillator and laser machining apparatus |
-
1987
- 1987-03-17 JP JP6150487A patent/JPH06103768B2/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005104308A1 (en) * | 2004-04-21 | 2005-11-03 | Mitsubishi Denki Kabushiki Kaisha | Gas laser oscillator and gas laser material processing machine |
| JPWO2005104308A1 (en) * | 2004-04-21 | 2008-03-13 | 三菱電機株式会社 | Gas laser oscillator and gas laser processing machine |
| US7664154B2 (en) | 2004-04-21 | 2010-02-16 | Mitsubishi Electric Corporation | Gas laser oscillator and gas laser beam machine |
| JP4656058B2 (en) * | 2004-04-21 | 2011-03-23 | 三菱電機株式会社 | Gas laser oscillator and gas laser processing machine |
| KR100846239B1 (en) | 2006-10-18 | 2008-07-16 | 미쓰비시덴키 가부시키가이샤 | Gas laser oscillator and gas laser material processing machine |
| US20120006798A1 (en) * | 2009-03-12 | 2012-01-12 | Panasonic Corporation | Laser oscillator and laser machining apparatus |
| US9379511B2 (en) * | 2009-03-12 | 2016-06-28 | Panasonic Intellectual Property Management Co., Ltd. | Laser oscillator and laser machining apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06103768B2 (en) | 1994-12-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61216011A (en) | Control system for cooling system of electronic equipment | |
| JPS63227086A (en) | Gas laser oscillator | |
| US7664154B2 (en) | Gas laser oscillator and gas laser beam machine | |
| US9379511B2 (en) | Laser oscillator and laser machining apparatus | |
| KR930000404B1 (en) | Refrigerant heating type air conditioner | |
| US9502853B2 (en) | Gas laser device having function for discriminating type of alarm | |
| JP2004011503A (en) | Screw compressor | |
| EP1376786B1 (en) | Gas laser transmitter | |
| JPH0632697Y2 (en) | Gas laser oscillator | |
| JPH0315887A (en) | Laser output securing device for laser drawing device | |
| JP2000074369A (en) | Petroleum warm air heater | |
| JPH0719599A (en) | Combustion controlling method for heating medium boiler | |
| JP2003336503A (en) | Gas turbine device | |
| JPH10199560A (en) | Fuel cell power generating device | |
| JPH03255687A (en) | Gas laser device | |
| KR200181802Y1 (en) | Damage preventing circuit of voltage off a case abnormal be caused in a crt | |
| JPH0255685A (en) | Nc laser device | |
| JPH01142461A (en) | Liquid feed pump | |
| JPH0458730A (en) | Method of detecting abnormality in battery charging circuit | |
| JPH0468214A (en) | Control device for combustion device | |
| JPH07167474A (en) | Control method for heater circuit of air conditioner | |
| JP2003097989A (en) | Thermal flowmeter | |
| JPS62178818A (en) | Exhaust gas detector attaching structure for burner | |
| JPS5815641B2 (en) | Oil level control device for pressure storage tank | |
| JPH02310981A (en) | Gas laser oscillation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |