JPS63225629A - Polyimide resin - Google Patents

Polyimide resin

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Publication number
JPS63225629A
JPS63225629A JP29806286A JP29806286A JPS63225629A JP S63225629 A JPS63225629 A JP S63225629A JP 29806286 A JP29806286 A JP 29806286A JP 29806286 A JP29806286 A JP 29806286A JP S63225629 A JPS63225629 A JP S63225629A
Authority
JP
Japan
Prior art keywords
polyamic acid
formula
aromatic
siloxane
polyimide resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29806286A
Other languages
Japanese (ja)
Inventor
Seiji Oka
誠次 岡
Fumiyuki Miyamoto
宮本 文行
Makoto Doi
誠 土井
Mitsuhiro Nonogaki
光裕 野々垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP29806286A priority Critical patent/JPS63225629A/en
Publication of JPS63225629A publication Critical patent/JPS63225629A/en
Pending legal-status Critical Current

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  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Abstract

PURPOSE:To obtain a polyimide resin excellent in solubility, tensile strength, heat stability, moldability, insulation property, adhesiveness, etc. and suitable as an insulating film or the like, by ring-closing, by heating, a specified polyamic acid having a main chain to which a siloxane structure is introduced. CONSTITUTION:A polyamic acid of the formula (wherein R' is a siloxane, R'' is a bivalent aromatic residue, R''' is a tetravalent aromatic residue, and n is a positive integer) is prepared. This polyamic acid is ring-closed by heating to obtain the purpose polyimide resin. The polyamic acid of the formula is produced by reacting a diamine structure-terminated aromatic diamine compound (e.g., 4,4'-diaminodiphenyl ether) with a diamine structure-terminated siloxane compound [e.g., 1,3-bis(3-aminopropyl)-1,1,3,3-tetramethyldisiloxane] and an aromatic tetracarboxylic acid dianhydride (e.g., pyromellitic dianhydride).

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は熱費定性、機械的特性、接着性、溶解性、耐薬
品性および電気的特性に優れた新規なポリイミド系樹脂
に関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a novel polyimide resin that has excellent thermal cost properties, mechanical properties, adhesive properties, solubility, chemical resistance, and electrical properties. .

〔従来の技術〕[Conventional technology]

従来、 4.4’−ジアミノジフェニルエーテルなどの
芳香族ジアミン成分と、ピロメリット酸二無水物、 3
.3’、4.4’−ベンゾフェノンテトラカルボン酸二
無水物などの芳香族酸二無水物とを有機極性溶媒中で反
応させて得られるポリアミック酸を成形し、加熱するこ
とにより1強度および耐熱性に優れたポリイミド成形物
が得られることが知られている(特公昭58−8394
号)。
Conventionally, an aromatic diamine component such as 4.4'-diaminodiphenyl ether, pyromellitic dianhydride, 3
.. 1 strength and heat resistance by molding and heating a polyamic acid obtained by reacting an aromatic acid dianhydride such as 3',4,4'-benzophenonetetracarboxylic dianhydride in an organic polar solvent. It is known that polyimide molded products with excellent properties can be obtained (Japanese Patent Publication No. 58-8394).
issue).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、かかるポリイミド成形物はその引張り強度は優
れているが、その前駆体であるポリアミック酸は限られ
た高沸点有機極性溶媒(N、N−ジメチルホルムアミド
、N、N−ジメチルアセトアミド。
However, although such polyimide molded products have excellent tensile strength, their precursor polyamic acids are limited to high boiling point organic polar solvents (N,N-dimethylformamide, N,N-dimethylacetamide).

N−メチル−2−ピロリドン、ジメチルスルホキシド)
のみに可溶で、一般の低沸点溶媒(トルエン、ジオキサ
ン、テトラヒドロフラン、メチルエチルケトンなど)に
は不溶であり1作業性が著しく悪い。
N-methyl-2-pyrrolidone, dimethyl sulfoxide)
It is insoluble in common low-boiling point solvents (toluene, dioxane, tetrahydrofuran, methyl ethyl ketone, etc.) and has extremely poor workability.

さらに、上記前駆体であるポリアミック酸を熱的に閉環
させてなるポリイミドは高沸点有機極性溶媒には不溶と
なる。またポリイミドは金属やプラスチックなどに対す
る接着性が劣り、さらに脱水閉環に伴う水分発生により
、成形時にボイド、クラックを生じ易いという問題点が
あった。
Furthermore, the polyimide obtained by thermally ring-closing the polyamic acid precursor is insoluble in high-boiling organic polar solvents. Further, polyimide has problems in that it has poor adhesion to metals, plastics, etc., and also tends to produce voids and cracks during molding due to the generation of moisture accompanying dehydration and ring closure.

本発明は上記問題点を解決するためのもので。The present invention is intended to solve the above problems.

従来のポリイミドの欠点である溶解性、成形性および接
着性を改良し、熱安定性1機械的特性、接着性、溶解性
、耐薬品性および電気的特性に優れたポリイミド系樹脂
を得ることを目的としている。
We aim to improve the solubility, moldability, and adhesiveness, which are the shortcomings of conventional polyimides, and to obtain polyimide resins with excellent thermal stability, mechanical properties, adhesiveness, solubility, chemical resistance, and electrical properties. The purpose is

〔問題点を解決するための手段〕[Means for solving problems]

本発明者等はポリイミド系樹脂に関して鋭意研究を重ね
た結果、ポリイミド系樹脂の前駆体であるポリアミック
酸化合物の主顔中にシロキサン構造を導入することによ
り、従来のポリイミド成形物と同等な熱安定性を有し、
さらに機械的、電気的特性、溶解性、他の物質との接着
性等を高度に改善できることを見い出し、この発明を完
成したのである。
As a result of extensive research into polyimide resins, the present inventors have found that by introducing a siloxane structure into the main face of a polyamic acid compound, which is a precursor of polyimide resins, we have achieved thermal stability equivalent to that of conventional polyimide molded products. have sex,
Furthermore, they discovered that mechanical and electrical properties, solubility, adhesion to other substances, etc. could be highly improved, and this invention was completed.

即ち、本発明は、一般式 (但し、式中R′はシロキサン基、R′は2価の芳香族
残基、R1は4価の芳香族残基、nはこの整数である。
That is, the present invention is based on the general formula (wherein R' is a siloxane group, R' is a divalent aromatic residue, R1 is a tetravalent aromatic residue, and n is this integer.

) で表わされるポリアミック酸を加熱閉環してなる新規な
ポリイミド系樹脂である。
) is a novel polyimide resin made by thermally ring-closing a polyamic acid represented by

本発明のポリイミド系樹脂の前駆体は上記の一般式(1
)で表わされるポリアミック酸である。このポリアミッ
ク酸は次式で表わされる末端ジアミン構造をもつ芳香族
ジアミン化合物 H,N−R’−NH,・・・(2) (但し1式中R′は2価の芳香族残基である。)および
次式で表わきれる末端ジアミン構造をもつシロキサン化
合物 1(dJ−(cHJsR’)CHshNH*     
” (3)(但し1式中R′はシロキサン基である。)
を、次式で表わされる芳香族テトラカルボン酸二無水物 (但し1式中R′は4価の芳香族残基である。)の1種
以上と1モル比1:1=2で、極性溶媒中で反応させて
得られる。
The precursor of the polyimide resin of the present invention has the above general formula (1
) is a polyamic acid represented by This polyamic acid is an aromatic diamine compound H,NR'-NH,...(2) (where R' in formula 1 is a divalent aromatic residue) having a terminal diamine structure represented by the following formula. ) and a siloxane compound 1 having a terminal diamine structure represented by the following formula (dJ-(cHJsR')CHshNH*
” (3) (However, R' in formula 1 is a siloxane group.)
and one or more aromatic tetracarboxylic dianhydrides represented by the following formula (in formula 1, R' is a tetravalent aromatic residue) in a molar ratio of 1:1=2, and polar Obtained by reaction in a solvent.

こうして得られたポリアミック酸は加熱処理によって脱
水閉環し、ポリイミド系樹脂に変換されるが、この場合
の加熱処理温度は160℃以上、好ましくは200〜3
00℃であればよい。
The polyamic acid thus obtained undergoes dehydration and ring closure through heat treatment and is converted into polyimide resin. In this case, the heat treatment temperature is 160°C or higher, preferably 200°C to
00°C is sufficient.

本発明で用いる上記(2)式の末端ジアミン構造をもつ
芳香族ジアミン化合物としては、4.4’−ジアミノジ
フェニルメタン、4.4’−ジアミノジフェニルエーテ
ル、4,4′−ジアミノジフェニルスルフォンなどが挙
げられる。
Examples of the aromatic diamine compound having the terminal diamine structure of formula (2) used in the present invention include 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenyl ether, and 4,4'-diaminodiphenyl sulfone. .

また(3)式の末端ジアミン構造をもつシロキサン化合
物としては、1,3−ビス(3−7ミノプロビル)−1
,1,3,3−テトラメチルジシロキサン、1.5−ビ
ス(3−アミノプロピル)−1,1,3,3,5,5−
ヘキサメチルトリシロキサン、1.ツービス(3−アミ
ノプロピル)−1゜1.3,3,5,5,7,7−オク
タメチルテトラシロキサンなど、シロキサン基が2〜5
のシロキサン化合物がある。
In addition, as a siloxane compound having a terminal diamine structure of formula (3), 1,3-bis(3-7minoprobyl)-1
, 1,3,3-tetramethyldisiloxane, 1,5-bis(3-aminopropyl)-1,1,3,3,5,5-
Hexamethyltrisiloxane, 1. Two-bis(3-aminopropyl)-1゜1.3,3,5,5,7,7-octamethyltetrasiloxane, etc. with 2 to 5 siloxane groups
There are siloxane compounds.

(4)式の芳香族テトラカルボン酸二無水物としては、
 3.3’、4.4’−ベンゾフェノンテトラカルボン
酸二無水物、ピロメリット酸二無水物、3.3’、 4
゜4′−ビフェニルテ°トラカルボン酸二無水物などが
挙げられる。上記の反応に使用される反応溶媒としては
、N−メチル−2−ピロリドン、 N、 N−ジメチル
ホルムアミド、N、N−ジメチルアセトアミドなどの不
活性溶媒が用いられる。そして使用目的に応じて、上記
溶媒にトルエン等を併用することもできる。
As the aromatic tetracarboxylic dianhydride of formula (4),
3.3', 4.4'-benzophenonetetracarboxylic dianhydride, pyromellitic dianhydride, 3.3', 4
Examples include 4'-biphenyltetracarboxylic dianhydride. As the reaction solvent used in the above reaction, inert solvents such as N-methyl-2-pyrrolidone, N,N-dimethylformamide, and N,N-dimethylacetamide are used. Depending on the purpose of use, toluene or the like may be used in combination with the above solvent.

〔作 用〕[For production]

本発明のポリイミド系樹脂においては、前駆体であるポ
リアミック酸の主鎖にシロキサン構造を導入したため、
従来のポリイミド系樹脂が有する熱安定性1機械的強度
を損うことなく、その前駆体および樹脂の溶解性、成形
性および接着性が向上し、耐熱性樹脂として半導体多層
配線層間絶縁膜、絶縁フィルム、耐熱性フィルム、成形
材料など、幅広い用途に利用可能である。
In the polyimide resin of the present invention, since a siloxane structure is introduced into the main chain of the polyamic acid precursor,
Thermal stability possessed by conventional polyimide resins 1 The solubility, moldability, and adhesion of its precursor and resin are improved without compromising mechanical strength, making it suitable for use as a heat-resistant resin in semiconductor multilayer wiring interlayer insulating films, and insulation. It can be used in a wide range of applications, including films, heat-resistant films, and molding materials.

〔実施例〕〔Example〕

以下実施例により、この発明を具体的に説明する。 The present invention will be specifically described below with reference to Examples.

実施例1 窒素雰囲気中、温度計および攪拌器を備えた500履Q
の4つロフラスコにピロメリット酸二無水物17.45
g(0,08モル)を、 N、N−ジメチルアセトアミ
ド236@Qに溶解させ攪拌しておく、以下の実施例の
場合も濃度は15%である。
Example 1 A 500-seater equipped with a thermometer and a stirrer in a nitrogen atmosphere
Pyromellitic dianhydride 17.45 in a four-bottle flask
The concentration is also 15% in the following example, in which 0.08 mol) is dissolved in N,N-dimethylacetamide 236@Q and stirred.

反応系を10℃に保った後、1,3−ビス(3−アミノ
プロピル)−1,1,3,3−テトラメチルジシロキサ
ン9.94g(0,04モル)、さらに4,4′−ジア
ミノジフェニルエーテル8.01g(0,04モル)の
末端ジアミン化合物2種を約2分かけて滴下した。激し
く攪拌しながら10℃で2時間、さらに室温で5時間反
応させ。
After keeping the reaction system at 10°C, 9.94 g (0.04 mol) of 1,3-bis(3-aminopropyl)-1,1,3,3-tetramethyldisiloxane and further 4,4'- 8.01 g (0.04 mol) of diaminodiphenyl ether and two types of terminal diamine compounds were added dropwise over about 2 minutes. The reaction was carried out at 10° C. for 2 hours and then at room temperature for 5 hours with vigorous stirring.

本発明のポリイミド系樹脂の前駆体であるポリアミック
酸溶液を得た。
A polyamic acid solution which is a precursor of the polyimide resin of the present invention was obtained.

実施例2〜18 表1に示した種々のシロキサン化合物、芳香族ジアミン
化合物および芳香族テトラカルボン酸二無水物の組合せ
とした以外は、実施例1と同様の反応条件でポリアミッ
ク酸溶液を得た。
Examples 2 to 18 A polyamic acid solution was obtained under the same reaction conditions as in Example 1, except that the combinations of various siloxane compounds, aromatic diamine compounds, and aromatic tetracarboxylic dianhydrides shown in Table 1 were used. .

表  1 注) BAPTMS : 1,3−ビス(3−アミノプ
ロピル)−1,1,3,3−テトラメチルジシロキサン BAPOMS : 1,7−ビス(3−7ミノプロビル
)−1,1,3,3,5,5゜7.7−オクタメチルテ
トラシロキサンODE  : 4,4’−ジアミノジフ
ェニルエーテルDDM  : 4.4’−ジアミノジフ
ェニルメタンDO5=4.4’−ジアミノジフェニルス
ルフォンPMOA  :ピロメリット酸二無水物BTD
A  : 3,3’、4,4’−ベンゾフェノンテトラ
カルボン酸二無水物 BPDA  : 3,3’、4,4’−ビフェニルテト
ラカルボン酸二無水物 上記実施例1〜18で合成したポリアミック酸溶液をガ
ラス板上で数回スピンキャストした後、200℃窒素中
で2時間、さらに280℃で3時間熱処理し、膜厚12
〜18μmのポリイミドフィルムを得た、フィルム形成
能は上記実施例1〜18において全て満足するものであ
った。
Table 1 Note) BAPTMS: 1,3-bis(3-aminopropyl)-1,1,3,3-tetramethyldisiloxane BAPOMS: 1,7-bis(3-7minoprovir)-1,1,3, 3,5,5゜7.7-octamethyltetrasiloxane ODE: 4,4'-diaminodiphenyl ether DDM: 4.4'-diaminodiphenylmethane DO5=4.4'-diaminodiphenylsulfone PMOA: pyromellitic dianhydride BTD
A: 3,3',4,4'-benzophenonetetracarboxylic dianhydride BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride Polyamic acid solution synthesized in Examples 1 to 18 above After spin-casting several times on a glass plate, heat treatment was performed in nitrogen at 200°C for 2 hours and then at 280°C for 3 hours, resulting in a film thickness of 12
A polyimide film of ~18 μm was obtained, and the film forming ability was satisfactory in all Examples 1 to 18 above.

表2に上記実施例1〜18のポリアミック酸溶液から得
られたポリイミドフィルムのそれぞれのガラス転移温度
および熱安定性を示し、表3にそのポリイミドフィルム
の引張り強度、加熱収縮率。
Table 2 shows the glass transition temperature and thermal stability of each of the polyimide films obtained from the polyamic acid solutions of Examples 1 to 18, and Table 3 shows the tensile strength and heat shrinkage rate of the polyimide films.

線膨張係数および絶縁破壊電圧を示す、また表4に実施
例1〜18のポリアミック酸、さらに表5にそれらから
得られたポリイミド系樹脂の種々の溶剤に対する溶解性
を示す。
Table 4 shows the linear expansion coefficient and dielectric breakdown voltage of the polyamic acids of Examples 1 to 18, and Table 5 shows the solubility of the polyimide resins obtained from them in various solvents.

表2 表 2(つづき) ・:5%重重量減湿温(昇温速度10℃/分。Table 2 Table 2 (continued) ・:5% weight dehumidification temperature (heating rate 10℃/min.

窒素雰囲気中) 表  3 表   4 注)O:可溶、Δニ一部溶解、×:不溶DMAc : 
N、N−ジメチルアセトアミドDNF : N、N−ジ
メチルホルムアミドNNP : N−メチル−2−ピロ
リドンTHF :テトラヒドロフラン 表5 注)o:可溶、Δニ一部溶解、×:不溶DMAc : 
N、N−ジメチルアセトアミドDMF : N、N−ジ
メチルホルムアミドNMP:N−メチル−2−ピロリド
ン THF :テトラヒドロフラン 次に実施例1〜18で合成したポリアミック酸溶液をア
ルミ板上で数回キャストして、窒素中。
(in nitrogen atmosphere) Table 3 Table 4 Note) O: soluble, ∆ partially dissolved, ×: insoluble DMAc:
N,N-dimethylacetamide DNF: N,N-dimethylformamide NNP: N-methyl-2-pyrrolidone THF: Tetrahydrofuran Table 5 Note) o: Soluble, ∆ partially dissolved, ×: Insoluble DMAc:
N,N-dimethylacetamide DMF: N,N-dimethylformamide NMP: N-methyl-2-pyrrolidone THF: Tetrahydrofuran Next, the polyamic acid solutions synthesized in Examples 1 to 18 were cast several times on an aluminum plate. in nitrogen.

200℃で2時間1次いで280℃で3時間熱処理を行
い、基盤目試験(JIS K−5400)により、それ
らのアルミ板との接着強度を評価し、その結果を表6に
示した。
Heat treatment was performed at 200° C. for 2 hours and then at 280° C. for 3 hours, and the adhesive strength with the aluminum plate was evaluated by a substrate test (JIS K-5400). The results are shown in Table 6.

表  6 表6(つづき) (JIS K−5400の基盤目試験による評価点数を
示す、)比較例 芳香族テトラカルボン酸二無水物としてピロメリット酸
二無水物(0,08モル)、およびジアミン化合物とし
て芳香族系ジアミンである4、4′−ジアミノジフェニ
ルエーテル(0,08モル)を反応させたポリアミック
酸を用いた結果を表2〜6に併記する。
Table 6 Table 6 (Continued) (Showing the evaluation scores according to the basic test of JIS K-5400) Comparative example Pyromellitic dianhydride (0.08 mol) as aromatic tetracarboxylic dianhydride, and diamine compound The results using polyamic acid reacted with 4,4'-diaminodiphenyl ether (0.08 mol), which is an aromatic diamine, are also shown in Tables 2 to 6.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、ポリイミドの主鎖にシロキサン構造を
有するため、ポリイミド系樹脂の前駆体であるポリアミ
ック酸の溶解性が向上し、さらにこのポリアミック酸の
熱処理により生成するポリイミド系樹脂は溶解性、引張
り強度、加熱収縮性。
According to the present invention, since the main chain of polyimide has a siloxane structure, the solubility of polyamic acid, which is a precursor of polyimide resin, is improved, and the polyimide resin produced by heat treatment of this polyamic acid has a high solubility. Tensile strength, heat shrinkability.

絶縁性、さらに他の物質との接着性など、機械的、電気
的および熱的特性が飛躍的に向上し、幅広い用途に利用
できる効果がある。
Mechanical, electrical, and thermal properties such as insulation and adhesion with other substances are dramatically improved, making it useful for a wide range of applications.

Claims (2)

【特許請求の範囲】[Claims] (1)一般式 ▲数式、化学式、表等があります▼・・・(1) (但し、式中R′はシロキサン基、R″は2価の芳香族
残基、R′″は4価の芳香族残基、nは正の整数である
。) で表わされるポリアミック酸を加熱閉環してなるポリイ
ミド系樹脂。
(1) General formula ▲ Numerical formula, chemical formula, table, etc. ▼... (1) (However, in the formula, R' is a siloxane group, R'' is a divalent aromatic residue, and R''' is a tetravalent aromatic residue. Aromatic residue, n is a positive integer.) A polyimide resin obtained by thermally ring-closing a polyamic acid represented by:
(2)ポリアミック酸が末端ジアミン構造をもつ芳香族
ジアミン化合物と、末端ジアミン構造をもつシロキサン
化合物と、芳香族テトラカルボン酸二無水物の反応生成
物である特許請求の範囲第1項記載のポリイミド系樹脂
(2) The polyimide according to claim 1, wherein the polyamic acid is a reaction product of an aromatic diamine compound having a terminal diamine structure, a siloxane compound having a terminal diamine structure, and an aromatic tetracarboxylic dianhydride. system resin.
JP29806286A 1986-12-15 1986-12-15 Polyimide resin Pending JPS63225629A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29806286A JPS63225629A (en) 1986-12-15 1986-12-15 Polyimide resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29806286A JPS63225629A (en) 1986-12-15 1986-12-15 Polyimide resin

Publications (1)

Publication Number Publication Date
JPS63225629A true JPS63225629A (en) 1988-09-20

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ID=17854639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29806286A Pending JPS63225629A (en) 1986-12-15 1986-12-15 Polyimide resin

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Country Link
JP (1) JPS63225629A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993024583A1 (en) * 1992-06-04 1993-12-09 Sumitomo Bakelite Company Limited Film adhesive and production thereof
US5643986A (en) * 1995-03-17 1997-07-01 Ube Industries, Ltd. Polyimidosiloxane compositions
CN111286196A (en) * 2020-03-16 2020-06-16 中国科学院兰州化学物理研究所 Self-lubricating fabric liner composite material and preparation method and application thereof
CN111892708A (en) * 2013-03-18 2020-11-06 旭化成株式会社 Resin precursor, resin composition containing the same, resin film and method for producing the same, and laminate and method for producing the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993024583A1 (en) * 1992-06-04 1993-12-09 Sumitomo Bakelite Company Limited Film adhesive and production thereof
US5739263A (en) * 1992-06-04 1998-04-14 Sumitomo Bakelite Company Limited Film adhesive and process for production thereof
US5643986A (en) * 1995-03-17 1997-07-01 Ube Industries, Ltd. Polyimidosiloxane compositions
CN111892708A (en) * 2013-03-18 2020-11-06 旭化成株式会社 Resin precursor, resin composition containing the same, resin film and method for producing the same, and laminate and method for producing the same
CN111892708B (en) * 2013-03-18 2023-06-13 旭化成株式会社 Resin precursor, resin composition containing the same, resin film and method for producing the same, and laminate and method for producing the same
CN111286196A (en) * 2020-03-16 2020-06-16 中国科学院兰州化学物理研究所 Self-lubricating fabric liner composite material and preparation method and application thereof

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