JPS6322506Y2 - - Google Patents

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Publication number
JPS6322506Y2
JPS6322506Y2 JP1981023307U JP2330781U JPS6322506Y2 JP S6322506 Y2 JPS6322506 Y2 JP S6322506Y2 JP 1981023307 U JP1981023307 U JP 1981023307U JP 2330781 U JP2330781 U JP 2330781U JP S6322506 Y2 JPS6322506 Y2 JP S6322506Y2
Authority
JP
Japan
Prior art keywords
pressure
intake pipe
pressure sensor
intake
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981023307U
Other languages
Japanese (ja)
Other versions
JPS57138037U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981023307U priority Critical patent/JPS6322506Y2/ja
Publication of JPS57138037U publication Critical patent/JPS57138037U/ja
Application granted granted Critical
Publication of JPS6322506Y2 publication Critical patent/JPS6322506Y2/ja
Expired legal-status Critical Current

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Description

【考案の詳細な説明】 本考案は、機関の吸気管圧力を、圧力センサを
用いて検出する吸気管圧力検出装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an intake pipe pressure detection device that detects the intake pipe pressure of an engine using a pressure sensor.

吸気管圧力に関する情報は、電子制御式燃料噴
射装置、運転台の計器板における表示、および気
化器における燃料供給量制御に利用されており、
圧力センサは、吸気管圧力を表わす電気信号を発
生する手段として用いられている。吸気管圧力検
出装置ではゴム管等により吸気管圧力が吸気分岐
管から圧力センサのダイヤフラムへ導かれてお
り、吸気管圧力取出しポートに設けられている金
属製網および不織布等から成るフイルタによつ
て、オイル、ガソリン、排気ガスの含有物として
の粒子が除去されている。しかしこれらのフイル
タは、IC化圧力センサ、すなわち半導体単結晶
の一部を薄く加工してダイヤフラムとし、このダ
イヤフラムの上に不純物拡散により抵抗を形成さ
れるようなIC化技術により製造されるIC化圧力
センサのダイヤフラム(2〜3mm角)に比べてか
なり寸法の大きいゴム製ダイヤフラム、金属製ダ
イヤフラムへの異物付着を防止するものとして選
定されており、また圧力伝幡の遅れを回避する必
要上、10μm以上の大きな粒子しか除去できない。
したがつて、IC化圧力センサの小面積のダイヤ
フラムへ吸気管圧力を導く場合には、このダイヤ
フラムに付着して出力特性の変動の原因となる異
物がフイルタを通過してしまい、IC化圧力セン
サの採用に対する阻害要因となつている。
Information regarding intake pipe pressure is used in the electronically controlled fuel injection system, the display on the driver's cab instrument panel, and the fuel supply amount control in the carburetor.
Pressure sensors are used as a means to generate electrical signals representative of intake pipe pressure. In the intake pipe pressure detection device, the intake pipe pressure is guided from the intake branch pipe to the diaphragm of the pressure sensor by a rubber pipe, etc., and is conducted by a filter made of metal mesh, non-woven fabric, etc. provided at the intake pipe pressure take-out port. , particles as inclusions in oil, gasoline, and exhaust gases are removed. However, these filters are manufactured using IC pressure sensors, in which a part of a semiconductor single crystal is processed into a thin diaphragm, and a resistance is formed on the diaphragm by impurity diffusion. It was selected to prevent foreign matter from adhering to the rubber diaphragm and metal diaphragm, which are considerably larger than the pressure sensor's diaphragm (2 to 3 mm square), and to avoid delays in pressure propagation. Only large particles larger than 10 μm can be removed.
Therefore, when introducing the intake pipe pressure to the small-area diaphragm of an IC-based pressure sensor, foreign matter that adheres to the diaphragm and causes fluctuations in output characteristics may pass through the filter, causing the IC-based pressure sensor to This has become an impediment to the adoption of

本考案の目的は、IC化圧力センサに適用され
ることができ、圧力センサのダイヤフラムへの異
物の付着を有効に防止できる吸気管圧力検出装置
を提供することである。
An object of the present invention is to provide an intake pipe pressure detection device that can be applied to an IC pressure sensor and can effectively prevent foreign matter from adhering to the diaphragm of the pressure sensor.

この目的を達成するために本考案によれば、吸
気管圧力通路を介して吸気管圧力を圧力センサの
ダイヤフラムへ導き、吸気管圧力に関係する電気
信号を圧力センサの出力として得る吸気管圧力検
出装置において、吸気管圧力通路が、屈曲して延
びる屈曲範囲を有し、屈曲範囲における吸気系側
部分と圧力センサ側部分との結合個所に吸気系側
部分に対して同軸的に接続される所定長さの閉口
管路が設けられる。
To achieve this object, the present invention provides intake pipe pressure detection by guiding the intake pipe pressure to the diaphragm of the pressure sensor through the intake pipe pressure passage and obtaining an electrical signal related to the intake pipe pressure as the output of the pressure sensor. In the device, the intake pipe pressure passage has a bending range extending in a bent manner, and a predetermined portion is coaxially connected to the intake system side portion at a joining point between the intake system side portion and the pressure sensor side portion in the bending range. A length of closed conduit is provided.

こうして、圧力センサのダイヤフラムへの吸気
管圧力導入の際、および吸気管圧力の脈動に因る
吸気管圧力通路内における異物としての粒子の往
復移動の際、粒子は慣性によつて閉口管路の閉口
部に衝突し、粘性よつて付着する。そして、閉口
部付近においては閉口部に衝突した気体の流れに
よつて逆流が生じるために気体の流速が小さくな
るのであつて、このため、閉口部に付着した粒子
が高速度の気流によつて閉口部から離散されるの
が防止され、閉口部に一旦付着した粒子は閉口部
に確実に捕獲され得る。したがつて異物として粒
子が圧力センサのダイヤフラムへ導かれるのが防
止され、ダイヤフラムに異物が付着して圧力セン
サの出力変動が生じるのが防止される。
In this way, when the intake pipe pressure is introduced into the diaphragm of the pressure sensor, and when the particles move back and forth as foreign objects in the intake pipe pressure passage due to the pulsation of the intake pipe pressure, the particles are moved by inertia into the closed pipe passage. It collides with the closed part and becomes sticky. Near the closed part, the flow of gas that collides with the closed part causes a reverse flow, which reduces the gas flow velocity.As a result, particles adhering to the closed part are affected by the high-velocity airflow. Particles are prevented from being dispersed from the closed part, and particles once attached to the closed part can be reliably captured by the closed part. Therefore, particles are prevented from being introduced as foreign matter to the diaphragm of the pressure sensor, and foreign matter is prevented from adhering to the diaphragm and causing fluctuations in the output of the pressure sensor.

図面を参照して本考案の実施例を説明する。An embodiment of the present invention will be described with reference to the drawings.

第1図はIC化圧力センサの感圧ダイヤフラム
1の構造を示している。Si(ケイ素)の基板結晶
2は、裏側においてエツチングにより約3mm径だ
けくり抜かれて所定の穴3を形成されて薄肉ダイ
ヤフラムとされ、表側において不純物拡散により
拡散リード部4を形成される。拡散リード部4の
中心には受感部(ゲージ)5が生じ、拡散リード
部4は、周辺側の端においてAl(アルミニウム)
電極6に接続され、さらに低融点ガラス7により
被覆されている。基板結晶2は圧力に関係してひ
ずみ、このひずみが受感部5の抵抗変化として検
出される。
FIG. 1 shows the structure of a pressure-sensitive diaphragm 1 of an IC pressure sensor. A substrate crystal 2 of Si (silicon) is hollowed out by etching to a diameter of about 3 mm on the back side to form a predetermined hole 3 to form a thin diaphragm, and on the front side a diffusion lead portion 4 is formed by diffusion of impurities. A sensing part (gauge) 5 is formed in the center of the diffusion lead part 4, and the diffusion lead part 4 is made of Al (aluminum) at the peripheral end.
It is connected to an electrode 6 and further covered with a low melting point glass 7. The substrate crystal 2 is strained in relation to the pressure, and this strain is detected as a resistance change in the sensing section 5.

第2図においてIC化圧力センサ10は、感圧
ダイヤフラム1、感圧ダイヤフラム1を載置しか
つ所定の圧力室11を区画する台座12、圧力室
11へ連通する入口管13、および感圧ダイヤフ
ラム1と台座12とを外側から包囲して真空室1
4を区画するケース15を備える。ゴム管19は
一端において吸気分岐管(図示せず)へ接続さ
れ、T形管20がゴム管19とIC化圧力センサ
10の入口管13との間に設けられる。T形管2
0は、直線部21と直線部21の軸線方向ほぼ中
心から鉛直方向上方へ分岐する分岐部22とを有
しており、直線部21は、一端23においてゴム
管19に接続され、他端24において閉口され、
分岐部22は入口管13に接続され、分岐部22
と入口管13との間にはシール用のOリング25
が設けられている。T形管20は、吸気管圧力通
路が屈曲して延びる屈曲範囲となり、屈曲範囲に
おけるIC化圧力センサ側部分としての分岐部2
2によつて分割される直線部21の部分はそれぞ
れ、屈曲範囲における吸気系側部分26、吸気系
側部分26と分岐部22との結合個所に吸気系側
部分26に対して同軸的に結合される所定長さl
の閉口管路27となる。
In FIG. 2, the IC-based pressure sensor 10 includes a pressure-sensitive diaphragm 1, a pedestal 12 on which the pressure-sensitive diaphragm 1 is mounted and which partitions a predetermined pressure chamber 11, an inlet pipe 13 communicating with the pressure chamber 11, and a pressure-sensitive diaphragm 1. 1 and the pedestal 12 from the outside to form a vacuum chamber 1.
4 is provided. The rubber tube 19 is connected at one end to an intake branch pipe (not shown), and a T-shaped tube 20 is provided between the rubber tube 19 and the inlet tube 13 of the IC pressure sensor 10. T-shaped tube 2
0 has a straight part 21 and a branch part 22 that branches vertically upward from approximately the center in the axial direction of the straight part 21, and the straight part 21 is connected to the rubber tube 19 at one end 23, and the other end 24. It was closed in
The branch part 22 is connected to the inlet pipe 13, and the branch part 22
An O-ring 25 for sealing is installed between the and the inlet pipe 13.
is provided. The T-shaped pipe 20 forms a bending range where the intake pipe pressure passage bends and extends, and a branch part 2 serves as an IC pressure sensor side portion in the bending range.
The portions of the straight portion 21 divided by 2 are coaxially connected to the intake system side portion 26 at the intake system side portion 26 in the bending range, and at the connection point between the intake system side portion 26 and the branch portion 22, respectively. predetermined length l
This becomes a closed pipe line 27.

吸気管圧力は吸気管圧力通路としてのゴム管1
9およびT形管を介してIC化圧力センサの感圧
ダイヤフラム1へ導かれる。オイル、ガソリン、
排気ガス等の異物としての微細粒子は、吸気管圧
力取出しポートのフイルタを通過してゴム管19
へ進入するが、屈曲範囲としてのT形管20を通
過する際に、慣性のために吸気系側部分26から
分岐部22へ曲がれず、そのまま閉口端管路27
へ進んで閉口他端24の壁に衝突し、粘性により
付着する。そして、T型管20の閉口部である閉
口他端24の壁面付近においては、その壁面に衝
突した気体の流れによつて逆流が生じるために気
体の流速が小さくなるのであつて、このため、壁
面に付着した微細粒子が高速度の気流によつて壁
面から離散されるのが防止され、閉口他端24の
壁面に一旦付着した微細粒子はその壁面に略確実
に捕獲され得る。これにより、T形管路20内に
進入した微細粒子が分岐管22に進入するのが阻
止される。また、吸気管圧力の脈動に起因して微
細粒子がT形管20の直線部21内で往復運動す
る際にも、微細粒子は閉口他端24の壁に衝突し
て付着する。そして、この場合にも閉口他端24
の壁面付近の気体の流速は上記と同様に小さいた
め、閉口他端24の壁面に一旦付着した微細粒子
はその壁面に略確実に捕獲され得る。したがつて
感圧ダイヤフラム1への異物の付着が防止され
る。閉口他端24の壁の材料は、微粒子の捕獲を
改善するために表面粗さおよび材質を選定され、
例えば、表面積の大きい焼結金属材料が好まし
い。
Intake pipe pressure is determined by rubber pipe 1 as an intake pipe pressure passage.
9 and a T-shaped pipe to the pressure-sensitive diaphragm 1 of the IC pressure sensor. oil, gasoline,
Fine particles as foreign substances such as exhaust gas pass through the filter of the intake pipe pressure takeout port and enter the rubber pipe 19.
However, when passing through the T-shaped pipe 20 as a bending range, it cannot turn from the intake system side part 26 to the branch part 22 due to inertia, and the closed end pipe 27 remains as it is.
It advances to collide with the wall of the other closed end 24 and adheres due to viscosity. In the vicinity of the wall surface of the closed other end 24, which is the closed portion of the T-shaped pipe 20, the flow of gas that collides with the wall surface causes a reverse flow, so that the flow velocity of the gas decreases. The fine particles adhering to the wall surface are prevented from being dispersed from the wall surface by the high-velocity airflow, and the fine particles once adhering to the wall surface of the other closed end 24 can be almost reliably captured by the wall surface. This prevents fine particles that have entered the T-shaped pipe 20 from entering the branch pipe 22. Further, when the fine particles reciprocate within the straight portion 21 of the T-shaped pipe 20 due to the pulsation of the intake pipe pressure, the fine particles collide with the wall of the other closed end 24 and adhere thereto. In this case as well, the other end 24 is closed.
Since the flow velocity of the gas near the wall surface is low as described above, the fine particles once attached to the wall surface of the other closed end 24 can almost certainly be captured by the wall surface. Therefore, adhesion of foreign matter to the pressure sensitive diaphragm 1 is prevented. The material of the wall of the other closed end 24 has a surface roughness and material selected to improve the capture of particulates,
For example, a sintered metal material with a large surface area is preferred.

このように本考案によれば、吸気圧力を圧力セ
ンサのダイヤフラムへ導く吸気管圧力通路が、屈
曲して延びる屈曲範囲を有し、この屈曲範囲に閉
口管路が接続されているので、吸気管圧力導入や
吸気管圧力の脈動によつて閉口管路に進入した異
物としての微細粒子は、閉口管路の閉口部に捕獲
され、圧力センサのダイヤフラムへの進入、付着
が防止される。
As described above, according to the present invention, the intake pipe pressure passage that guides the intake pressure to the diaphragm of the pressure sensor has a bending range that extends in a bent manner, and the closing pipe line is connected to this bending range. Fine particles as foreign matter that have entered the closed pipe line due to pressure introduction or pulsation of the intake pipe pressure are captured by the closed part of the closed pipe line, and are prevented from entering or adhering to the diaphragm of the pressure sensor.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はIC化圧力センサの感圧ダイヤフラム
を例示する断面図、第2図は本考案の一実施例を
示す断面図である。 1……感圧ダイヤフラム、10……IC化圧力
センサ、20……T形管、22……分岐部、26
……吸気系側部分、27……閉口管路。
FIG. 1 is a sectional view illustrating a pressure-sensitive diaphragm of an IC-based pressure sensor, and FIG. 2 is a sectional view illustrating an embodiment of the present invention. 1... Pressure sensitive diaphragm, 10... IC pressure sensor, 20... T-shaped pipe, 22... Branch, 26
...Intake system side part, 27...Closed pipe line.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model claims] 吸気管圧力通路を介して吸気管圧力を圧力セン
サのダイヤフラムへ導き、吸気管圧力に関係する
電気信号を圧力センサの出力として得る吸気管圧
力検出装置において、吸気管圧力通路が、屈曲し
て延びる屈曲範囲を有し、屈曲範囲における吸気
系側部分と圧力センサ側部分との結合個所に吸気
系側部分に対して同軸的に接続される所定長さの
閉口管路が設けられたことを特徴とする吸気管圧
力検出装置。
In an intake pipe pressure detection device that guides intake pipe pressure to a diaphragm of a pressure sensor via an intake pipe pressure passage and obtains an electrical signal related to the intake pipe pressure as an output of the pressure sensor, the intake pipe pressure passage extends in a bent manner. It has a bending range, and is characterized in that a closed pipe line of a predetermined length is provided coaxially to the intake system side part at the joining point of the intake system side part and the pressure sensor side part in the bending range. Intake pipe pressure detection device.
JP1981023307U 1981-02-23 1981-02-23 Expired JPS6322506Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981023307U JPS6322506Y2 (en) 1981-02-23 1981-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981023307U JPS6322506Y2 (en) 1981-02-23 1981-02-23

Publications (2)

Publication Number Publication Date
JPS57138037U JPS57138037U (en) 1982-08-28
JPS6322506Y2 true JPS6322506Y2 (en) 1988-06-21

Family

ID=29821065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981023307U Expired JPS6322506Y2 (en) 1981-02-23 1981-02-23

Country Status (1)

Country Link
JP (1) JPS6322506Y2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935645U (en) * 1982-08-31 1984-03-06 本田技研工業株式会社 Internal combustion engine pressure sensor mounting structure
JP2002310836A (en) * 2001-04-12 2002-10-23 Fuji Electric Co Ltd Pressure sensor device and pressure sensor housing vessel
JP5924223B2 (en) * 2012-10-01 2016-05-25 株式会社デンソー Pressure sensor for tire pressure
JP6079206B2 (en) * 2012-12-18 2017-02-15 株式会社デンソー Pressure sensor
JP2019163708A (en) * 2018-03-19 2019-09-26 トヨタ自動車株式会社 Internal combustion engine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910601Y2 (en) * 1976-10-20 1984-04-03 「ばん」歳工業株式会社 Damper for pressure measuring instruments

Also Published As

Publication number Publication date
JPS57138037U (en) 1982-08-28

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