JPS6322472U - - Google Patents
Info
- Publication number
- JPS6322472U JPS6322472U JP11529886U JP11529886U JPS6322472U JP S6322472 U JPS6322472 U JP S6322472U JP 11529886 U JP11529886 U JP 11529886U JP 11529886 U JP11529886 U JP 11529886U JP S6322472 U JPS6322472 U JP S6322472U
- Authority
- JP
- Japan
- Prior art keywords
- ports
- cylinder
- valve
- pistons
- valve bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11529886U JPH0440052Y2 (ru) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11529886U JPH0440052Y2 (ru) | 1986-07-29 | 1986-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6322472U true JPS6322472U (ru) | 1988-02-15 |
| JPH0440052Y2 JPH0440052Y2 (ru) | 1992-09-18 |
Family
ID=30998815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11529886U Expired JPH0440052Y2 (ru) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440052Y2 (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009122762A1 (ja) * | 2008-03-31 | 2009-10-08 | 東京エレクトロン株式会社 | 三方弁 |
-
1986
- 1986-07-29 JP JP11529886U patent/JPH0440052Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009122762A1 (ja) * | 2008-03-31 | 2009-10-08 | 東京エレクトロン株式会社 | 三方弁 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0440052Y2 (ru) | 1992-09-18 |