JPS6322472U - - Google Patents

Info

Publication number
JPS6322472U
JPS6322472U JP11529886U JP11529886U JPS6322472U JP S6322472 U JPS6322472 U JP S6322472U JP 11529886 U JP11529886 U JP 11529886U JP 11529886 U JP11529886 U JP 11529886U JP S6322472 U JPS6322472 U JP S6322472U
Authority
JP
Japan
Prior art keywords
ports
cylinder
valve
pistons
valve bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11529886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440052Y2 (me
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11529886U priority Critical patent/JPH0440052Y2/ja
Publication of JPS6322472U publication Critical patent/JPS6322472U/ja
Application granted granted Critical
Publication of JPH0440052Y2 publication Critical patent/JPH0440052Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP11529886U 1986-07-29 1986-07-29 Expired JPH0440052Y2 (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11529886U JPH0440052Y2 (me) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11529886U JPH0440052Y2 (me) 1986-07-29 1986-07-29

Publications (2)

Publication Number Publication Date
JPS6322472U true JPS6322472U (me) 1988-02-15
JPH0440052Y2 JPH0440052Y2 (me) 1992-09-18

Family

ID=30998815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11529886U Expired JPH0440052Y2 (me) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPH0440052Y2 (me)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009122762A1 (ja) * 2008-03-31 2009-10-08 東京エレクトロン株式会社 三方弁

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009122762A1 (ja) * 2008-03-31 2009-10-08 東京エレクトロン株式会社 三方弁

Also Published As

Publication number Publication date
JPH0440052Y2 (me) 1992-09-18

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