JPS6322404U - - Google Patents

Info

Publication number
JPS6322404U
JPS6322404U JP11630586U JP11630586U JPS6322404U JP S6322404 U JPS6322404 U JP S6322404U JP 11630586 U JP11630586 U JP 11630586U JP 11630586 U JP11630586 U JP 11630586U JP S6322404 U JPS6322404 U JP S6322404U
Authority
JP
Japan
Prior art keywords
bellows unit
bellows
drive mechanism
utility
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11630586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11630586U priority Critical patent/JPS6322404U/ja
Publication of JPS6322404U publication Critical patent/JPS6322404U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Ventilation (AREA)
JP11630586U 1986-07-29 1986-07-29 Pending JPS6322404U (US06330241-20011211-M00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11630586U JPS6322404U (US06330241-20011211-M00004.png) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11630586U JPS6322404U (US06330241-20011211-M00004.png) 1986-07-29 1986-07-29

Publications (1)

Publication Number Publication Date
JPS6322404U true JPS6322404U (US06330241-20011211-M00004.png) 1988-02-15

Family

ID=31000770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11630586U Pending JPS6322404U (US06330241-20011211-M00004.png) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPS6322404U (US06330241-20011211-M00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013518224A (ja) * 2010-01-29 2013-05-20 バット ホールディング アーゲー 扉機構
JP2014199106A (ja) * 2013-03-29 2014-10-23 住友重機械工業株式会社 微動アクチュエータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013518224A (ja) * 2010-01-29 2013-05-20 バット ホールディング アーゲー 扉機構
JP2014199106A (ja) * 2013-03-29 2014-10-23 住友重機械工業株式会社 微動アクチュエータ

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