JPS6321815U - - Google Patents
Info
- Publication number
- JPS6321815U JPS6321815U JP11624686U JP11624686U JPS6321815U JP S6321815 U JPS6321815 U JP S6321815U JP 11624686 U JP11624686 U JP 11624686U JP 11624686 U JP11624686 U JP 11624686U JP S6321815 U JPS6321815 U JP S6321815U
- Authority
- JP
- Japan
- Prior art keywords
- electrode body
- electrode
- electrodes
- concave
- convex
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11624686U JPS6321815U (de) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11624686U JPS6321815U (de) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321815U true JPS6321815U (de) | 1988-02-13 |
Family
ID=31000656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11624686U Pending JPS6321815U (de) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321815U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| JP2009288058A (ja) * | 2008-05-29 | 2009-12-10 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58150865A (ja) * | 1982-12-06 | 1983-09-07 | Sony Corp | 容量変化型回転状態検出装置の電極製造方法 |
-
1986
- 1986-07-29 JP JP11624686U patent/JPS6321815U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58150865A (ja) * | 1982-12-06 | 1983-09-07 | Sony Corp | 容量変化型回転状態検出装置の電極製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| JP2009288058A (ja) * | 2008-05-29 | 2009-12-10 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |