JPS63216904A - Magnetic particle and production thereof - Google Patents
Magnetic particle and production thereofInfo
- Publication number
- JPS63216904A JPS63216904A JP62049028A JP4902887A JPS63216904A JP S63216904 A JPS63216904 A JP S63216904A JP 62049028 A JP62049028 A JP 62049028A JP 4902887 A JP4902887 A JP 4902887A JP S63216904 A JPS63216904 A JP S63216904A
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- core
- magnetic particles
- magnetic
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006249 magnetic particle Substances 0.000 title abstract description 32
- 238000004519 manufacturing process Methods 0.000 title description 8
- 239000011247 coating layer Substances 0.000 claims abstract description 39
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 10
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims abstract description 9
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 7
- 230000005389 magnetism Effects 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 5
- 238000007254 oxidation reaction Methods 0.000 abstract description 5
- 230000035939 shock Effects 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- 239000000843 powder Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- -1 titanium halide Chemical class 0.000 description 3
- 229910003074 TiCl4 Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- 239000012792 core layer Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
■ 発明の背景
技術分野
本発明は、磁性粒子、特に、電磁クラッチ等の電磁連結
装置に用いる耐久性に優れた磁性粒子およびその製造方
法に関する。DETAILED DESCRIPTION OF THE INVENTION 1. Background Technical Field of the Invention The present invention relates to magnetic particles, particularly highly durable magnetic particles used in electromagnetic coupling devices such as electromagnetic clutches, and a method for producing the same.
先行技術とその問題点
電磁クラッチは、磁性粒子を媒体としてトルクの伝達を
行うものであるが、高負荷あるいは高頑度で使用される
と、例えば磁性粒子が純鉄であるような場合、磁性粒子
が微細な粉末にまで破壊されたり、磁性粒子が過熱して
その表面が酸化されて磁気特性が劣化し、伝達トルクが
低下してしまう。Prior art and its problems Electromagnetic clutches transmit torque using magnetic particles as a medium, but when used under high loads or high robustness, for example, when the magnetic particles are made of pure iron, the magnetic The particles may be broken down to fine powder, or the magnetic particles may become overheated and their surfaces may be oxidized, deteriorating their magnetic properties and reducing transmission torque.
このような問題点に対し、磁性粒子の耐久性を向上する
ために、磁性粒子の材質としてＦｅにＡ Ｉ −Ｓ ｉ
％Ｃｒ ｓ Ｂ ｓ Ｎ ｂ等を添加したものを用い
たり（特公昭５６−３１４５１号公報等）、あるいは純
鉄粒子の表面にＣｒやＡ１をメッキした粒子などを用い
ることも試みられたが、十分な耐久性は得られていない
。To solve these problems, in order to improve the durability of the magnetic particles, A I -S i is added to Fe as the material of the magnetic particles.
Attempts have been made to use particles to which %CrsBsNb etc. have been added (Japanese Patent Publication No. 56-31451, etc.), or to use particles whose surfaces are plated with Cr or A1 on pure iron particles. Sufficient durability has not been achieved.
また、磁性粒子の硬度を高めるために、アモルファス磁
性粉の使用も提案されている（特開昭５９−１５９４３
５号、特開昭６１−１７５３２９号公報等）が、アモル
ファス磁性粉はビッカース硬度７００以上の硬いものが
得られる反面、熱に対する信頼性が低く、また、トルク
伝達効率に優れた球状性粉が得られない。Furthermore, in order to increase the hardness of magnetic particles, the use of amorphous magnetic powder has also been proposed (Japanese Patent Laid-Open No. 59-15943
No. 5, JP-A No. 61-175329, etc.), although amorphous magnetic powder can be hard with a Vickers hardness of 700 or more, it has low reliability against heat, and spherical powder with excellent torque transmission efficiency is I can't get it.
！■ 発明の目的
本発明の目的は、高負荷あるいは高頻度の使用において
も表面の熱酸化、破壊等が無く、耐久性に優れた電磁ク
ラッチ等の電磁連結装置用の磁性粒子およびその製造方
法を提供することにある。! ■ Purpose of the Invention The purpose of the present invention is to provide magnetic particles for use in electromagnetic coupling devices such as electromagnetic clutches that have excellent durability and do not undergo surface thermal oxidation or destruction even under high loads or frequent use, and a method for producing the same. It is about providing.
ＩＩＩ 発明の開示 このような目的は、以下の本発明によって達成される。III Disclosure of the invention Such objects are achieved by the present invention as described below.
すなわち、第１の発明は、磁性を有する芯部と、この芯
部を被覆する被覆層とを有し、被覆層がＴｉならびにＮ
および／もしくはＣを含有するかまたはＡｌおよびＮを
含有することを特徴とする磁性粒子である。That is, the first invention has a magnetic core and a coating layer that covers the core, and the coating layer is made of Ti and N.
It is a magnetic particle characterized by containing C and/or Al and N.
また、第２の発明は、磁性を有する芯部と、この芯部を
被覆する被覆層とを有し、被覆層がＴｉならびにＮおよ
び／もしくはＣを含有するかまたはＡ１およびＮを含有
する磁性粒子の製造方法であって、
前記芯部に振動を与えながら、プラズマＣＶＤ法により
前記被覆層を設層することを特徴とする磁性粒子の製造
方法である。Further, the second invention has a magnetic core and a coating layer covering the core, and the coating layer contains Ti and N and/or C, or contains A1 and N. A method for producing magnetic particles, the method comprising: applying the coating layer to the core by a plasma CVD method while applying vibration to the core.
■ 発明の具体的構成 以下、本発明の具体的構成を詳細に説明する。■Specific structure of the invention Hereinafter, the specific configuration of the present invention will be explained in detail.
本発明の磁性粒子は、磁性を有する芯部と、この芯部を
被覆するＴｉならびにＮおよび／またはＣを含有するか
、あるいはＡｌおよびＮを含有する被覆層を有する。The magnetic particles of the present invention have a magnetic core and a coating layer that covers the core and contains Ti and N and/or C, or Al and N.
被覆層がＴｉならびにＣおよび／またはＮを含有する場
合、被覆層は主としてＴｉＮ。When the covering layer contains Ti and C and/or N, the covering layer is mainly TiN.
ＴｉｃまたはＴ ｉ Ｎ ｘ ＣＩ−ｘ （０＜ Ｘ
＜ １ ）から形成される。Tic or T i N x CI-x (0<
< 1).
これらは一般に上記の化学量論組成として含有されるが
、これらから偏奇したものであってもよい。 偶奇の程
度は、ＴＬを１とした場合、Ｎおよび／またはＣは０．
９〜１．１程度である。These are generally contained in the above-mentioned stoichiometric composition, but may be deviated from these. The degree of evenness is as follows: When TL is 1, N and/or C are 0.
It is about 9 to 1.1.
被覆層がＡ１およびＮを含有する場合、被覆層は主とし
てＡｌＮから形成される。 この場合も上記の化学量論
組成から偏奇したものであってもよく、偶奇の程度は、
Ａ１を１とした場合、Ｎは０．９〜１．１程度である。When the covering layer contains A1 and N, the covering layer is mainly formed from AlN. In this case as well, the stoichiometric composition may be biased from the above, and the degree of evenness is as follows:
When A1 is 1, N is about 0.9 to 1.1.
また、被覆層中には、これらの他、ＨｌＣｌ、Ｏ等が含
有されてもよく、０が含有される場合、その含有量は１
５ａｔ％以下が好ましい。In addition, the coating layer may contain HlCl, O, etc. in addition to these, and when 0 is contained, the content is 1
It is preferably 5 at% or less.
このような被覆層の厚さは、２〜７μｍ程度、より好ま
しくは、３〜５μｍ程度が好ましい。The thickness of such a coating layer is preferably about 2 to 7 μm, more preferably about 3 to 5 μm.
被覆層の厚さが２μｍ未満であると耐久性が不十分であ
り、７μｍを越えると芯部との接着強度が不十分となり
、被覆層が剥れやすくなる。If the thickness of the coating layer is less than 2 μm, the durability will be insufficient, and if it exceeds 7 μm, the adhesive strength with the core will be insufficient and the coating layer will easily peel off.
芯部を構成する材買は、磁性を有するものであればどの
ようなものであってもよいが、電磁クラッチ等の電磁連
結装置に用いる場合には、コスト等の点で、Ｆｅあるい
は、Ｆｅ−Ｃｒ。The material constituting the core may be of any material as long as it has magnetism, but when used in electromagnetic coupling devices such as electromagnetic clutches, Fe or Fe may be used for cost reasons. -Cr.
Ｆｅ−Ｃｒ−３ｉ、 Ｆｅ−Ｂ−Ｓ ｔ、 Ｆｅ−Ｂ
−３Ｌ−Ｃｒ％Ｆｅ−Ｐ−Ｃ，Ｆｅ−Ｐ−Ｃ−Ｃｒ等の
合金が好ましい。 また、これらは、アトマイズ粉で
あることが好ましい。 このような芯部の粒径は、用
途にもよるが３０〜８０μｍ程度である。Fe-Cr-3i, Fe-B-S t, Fe-B
-3L-Cr% Alloys such as Fe-P-C and Fe-P-C-Cr are preferred. Moreover, it is preferable that these are atomized powders. The particle size of such a core portion is approximately 30 to 80 μm, depending on the application.
なお、後述する本発明の磁性粒子の製造方法によれば、
磁性を有する芯部に限らず、一般の微細な粒子に上記の
ような高硬度で耐久性に優れた被覆層を設けることがで
きる。In addition, according to the method for manufacturing magnetic particles of the present invention described below,
The above-mentioned coating layer with high hardness and excellent durability can be provided not only on the magnetic core but also on general fine particles.
次に、本発明の磁性粒子の製造方法を説明する。Next, a method for producing magnetic particles of the present invention will be explained.
本発明の磁性粒子は、芯部が上記のような被覆層に被覆
されて構成されるが、芯部に被覆層を設層するに際して
は、芯部に振動を与え、振動している芯部にプラズマＣ
ＶＤ法により被覆層を設層する。The magnetic particles of the present invention are composed of a core covered with the above-mentioned coating layer, but when applying the coating layer to the core, vibration is applied to the core, and the vibrating core is Plasma C
A coating layer is applied by the VD method.
具体的には、例えば、設層時に芯部を多数載置する載置
盤に振動子を取り付け、載置盤を介して芯部に振動を与
える。 このとき載置盤上の芯部は一定の厚さをもった
粉体層として存在するが、振動が与えられると、この芯
部層が攪拌され層の内部で芯部の流れが生じ、芯部層表
面に存在する芯部が次々に入れ替わる。 この芯部層の
表面に存在する芯部の表面に、プラズマＣＶＤ法により
被覆層を設層することにより、すべての芯部の表面に被
覆層をムラなく均一な厚さに設層することができる。Specifically, for example, a vibrator is attached to a mounting board on which a large number of cores are placed during layering, and vibration is applied to the cores via the mounting board. At this time, the core on the mounting plate exists as a powder layer with a constant thickness, but when vibration is applied, this core layer is agitated and a flow of the core occurs inside the layer, causing the core to flow. The core parts present on the surface of the part layer are replaced one after another. By applying a coating layer to the surface of the core existing on the surface of this core layer using the plasma CVD method, it is possible to apply the coating layer to an even and uniform thickness on the surface of all the cores. can.
上記の載置盤に加える振動は、載置盤上のすべての芯部
にムラなく被覆層を設層するため、載置盤の周方向の成
分を有することが好ましい、 また、このような振動の
周波数は、載置盤の大きさにもよるが、５０〜２００Ｈ
ｚ程度、振幅は、０．２〜ｏ、５ｍｍ程度が好ましい。The vibration applied to the mounting plate described above preferably has a component in the circumferential direction of the mounting plate in order to evenly apply the coating layer to all the core parts on the mounting plate. The frequency is 50 to 200H, depending on the size of the mounting plate.
The amplitude is preferably about 0.2 to about 5 mm.
さらに、上記と同様な理由から、載置盤には溝を設ける
ことが好ましい、 溝は載置盤に放射状に設けられるこ
とが好ましく、より好ましくは、載置盤の径方向に対し
一定の角度を有する溝を設ける。 なお、溝は湾曲して
いてもよい。Furthermore, for the same reason as above, it is preferable that the mounting plate be provided with grooves. The grooves are preferably provided radially on the mounting plate, and more preferably, the grooves are formed at a certain angle with respect to the radial direction of the mounting plate. A groove is provided. Note that the groove may be curved.
プラズマＣＶＤ法は、高周波法によっても、また、マイ
クロ波法によってもよい。The plasma CVD method may be a high frequency method or a microwave method.
高周波法を用いるときは、１〜３０ＭＨｚ。1 to 30 MHz when using the high frequency method.
１００Ｗ〜数百Ｗ程度の電力を投入すればよい。It is sufficient to input power of about 100 W to several hundred W.
また、マイクロ波法によるときは、１〜１０ＧＨｚ、１
００〜５００Ｗ程度の電力を投入すればよい。In addition, when using the microwave method, 1 to 10 GHz, 1
It is sufficient to input power of about 00 to 500W.
原料ガスとしては、被覆層の組成に応じ種々のものを用
いる。Various raw material gases are used depending on the composition of the coating layer.
例えば、ＴｉＮ被覆層を形成する場合は、ＴｉＣｌ４等
のハロゲン化チタンとＮ２、Ｎ Ｈｓ等を用い、Ｔｉｃ
被覆層を形成する場合は、ＴｉＣｌ４等とＣＨ４、Ｃ２
Ｈ１１等の炭化水素ガスを用いる。 ”ｒｉＮｘｃ、−
×被覆層の場合は、これらを混合して用いればよい。For example, when forming a TiN coating layer, use a titanium halide such as TiCl4 and N2, NHs, etc.
When forming a coating layer, use TiCl4 etc. and CH4, C2
A hydrocarbon gas such as H11 is used. ”riNxc,-
x In the case of a coating layer, these may be used in combination.
また、ＡｌＮ被覆層の場合は、ＡｌＣｌ３等のハロゲン
化アルミニウムまたは
Ａｌ （ＯＣ２Ｈｓ ）！ 、Ａｌ （ＯＣＨ３）ｓ等
のアルミニウムアルコキシド等とＮ２、ＮＨ３等を用い
ればよい。In addition, in the case of an AlN coating layer, aluminum halides such as AlCl3 or Al (OC2Hs)! , Al 2 (OCH3)s, etc., and N2, NH3, etc. may be used.
さらに、酸素ドープを行う場合は、０２、ＣＯ２、Ｃｏ
、Ｎ２０ガス等を用いればよい。Furthermore, when performing oxygen doping, 02, CO2, Co
, N20 gas, etc. may be used.
キャリアーガスとしては、Ｎ２、Ａｒ％Ｈｅ等、特にＮ
２を用いることが好ましい。As a carrier gas, N2, Ar%He, etc., especially N
It is preferable to use 2.
作動圧力は０．１〜１．５Ｔｏｒｒ程度、芯部の温度は
３００〜５００℃程度とすればよい。The operating pressure may be approximately 0.1 to 1.5 Torr, and the core temperature may be approximately 300 to 500°C.
また、パワー密度は０．１〜１０Ｗ／
ｃｍ２、成膜速度は１００〜５００人／ ｍ ｉ ｎ程
度とすればよい。Further, the power density may be 0.1 to 10 W/cm2, and the film forming rate may be approximately 100 to 500 people/min.
以上のようにして製造された本発明の磁性粒子は、磁性
を有する芯部の表面全面に、ムラなく均一で耐摩耗性、
耐衝撃性および耐酸化性に優れた被覆層を有することに
なる。The magnetic particles of the present invention produced as described above have uniformity and wear resistance over the entire surface of the magnetic core.
This results in a coating layer with excellent impact resistance and oxidation resistance.
なお、特開昭５８−１７１５０２号公報には、セラミッ
クの表面層と金属の芯部とよりなるセラミックー金属複
合微粉末体の製造方法が記載されているが、この方法に
よっては本発明の磁性粒子は製造することができず、ま
た、この方法により磁性を有する粒子を製造しても、磁
気特性の良好な磁性粒子は得られない。Note that JP-A-58-171502 describes a method for manufacturing a ceramic-metal composite fine powder body comprising a ceramic surface layer and a metal core. cannot be produced, and even if magnetic particles are produced by this method, magnetic particles with good magnetic properties cannot be obtained.
また、硬度が高く、耐摩耗性、耐衝撃性に優れる被覆層
としては、切削工具等の被覆層に用いられているＳｉＣ
皮膜等があるが、このものは設層時に高温を必要とする
ため、磁性粒子に用いた場合、磁性粒子の磁気特性が劣
化してしまう。 さらに、ＳｉＣ皮膜は硬度が高すぎる
ため、磁性粒子との密着強度が低い。In addition, as a coating layer with high hardness and excellent wear resistance and impact resistance, SiC is used as a coating layer for cutting tools, etc.
There are films and the like, but since these require high temperatures during layer formation, when used on magnetic particles, the magnetic properties of the magnetic particles deteriorate. Furthermore, since the SiC film has too high hardness, its adhesion strength with magnetic particles is low.
■ 発明の効果
本発明の磁性粒子は、磁性を有する芯部と、この芯部を
被覆するＴｉならびにＮおよび／もしくはＣを含有する
かまたはＡ１およびＮを含有する被覆層を有する。(2) Effects of the Invention The magnetic particles of the present invention have a magnetic core and a coating layer that covers the core and contains Ti and N and/or C or A1 and N.
このため、本発明の磁性粒子は耐摩耗性、耐衝撃性およ
び耐酸化性が高く、電磁連結装置等に用いれば、高負荷
、高頻度の使用でも磁気特性の劣化がなく、耐久性が高
いものである。Therefore, the magnetic particles of the present invention have high abrasion resistance, impact resistance, and oxidation resistance, and when used in electromagnetic coupling devices, etc., there is no deterioration of magnetic properties even under high load and frequent use, and it is highly durable. It is something.
また、本発明の磁性粒子は、製造に際し、芯部に振動を
与えながらプラズマＣＶＤ法により被覆層を設層する。Further, during production of the magnetic particles of the present invention, a coating layer is formed by plasma CVD while applying vibration to the core.
このため、すべての芯部の表面全面にムラなく均一に被
覆層が設層でき、耐久性の高い磁性粒子が高生産性、高
信頼性で得られる。Therefore, the coating layer can be evenly and uniformly formed over the entire surface of all the core parts, and highly durable magnetic particles can be obtained with high productivity and high reliability.
■ 具体的実施例 以下、本発明を具体的実施例を挙げて詳細に説明する。■Specific examples Hereinafter, the present invention will be explained in detail by giving specific examples.
［実施例１］
下記表１に示す条件にて、プラズマＣＶＤ法により本発
明の磁性粒子を製造した（サンプルＮ０９１．３．４．
５．６）。[Example 1] Magnetic particles of the present invention were manufactured by the plasma CVD method under the conditions shown in Table 1 below (sample N091.3.4.
5.6).
なお、磁性粒子の芯部は表１に示す組成のアトマイズ粉
であり、その平均粒径は５０μｍとした。 また、被覆
層の厚さは３μｍとした。The core of the magnetic particles was atomized powder having the composition shown in Table 1, and the average particle size was 50 μm. Further, the thickness of the coating layer was 3 μm.
なお、プラズマＣＶＤにおいて、芯部の載置盤は直径２
００ｍｍのディスク状とし、その表面には、放射状に溝
を設けた。 そして、載置盤には、振動子により振動数
１５０Ｈｚ、振幅０．４ｍｍの振動を与えた。In addition, in plasma CVD, the core mounting plate has a diameter of 2
The disk was shaped like a 00 mm disk, and grooves were provided radially on its surface. Then, a vibration with a frequency of 150 Hz and an amplitude of 0.4 mm was applied to the mounting plate using a vibrator.
このようにして設層された被覆層の厚さは、３μｍ±２
０％以内の均一なものであった。The thickness of the coating layer thus formed was 3μm±2
It was uniform within 0%.
［比較例１］
比較例として、被覆層を設けない他は実施例１のサンプ
ルと同様な磁性粒子を作製した（サンプルＮ０８２．７
）。[Comparative Example 1] As a comparative example, magnetic particles similar to the sample of Example 1 were produced except that no coating layer was provided (sample N082.7).
).
以上のサンプルについて、σ、（ｅｍｕ／ｇ）およびＨ
ｖ （Ｋ ｇ ／ ｍ ｍ ２）を測定した。For the above samples, σ, (emu/g) and H
v (K g/mm2) was measured.
結果を表１に示す。The results are shown in Table 1.
〔実施例２］
実施例１のサンプルＮｏ、１．３．４および５の磁性粒
子および比較例１のサンプルＮＯ１２および７の磁性粒
子を用いて耐久試験を行なった。 実施例１のサンプル
では１００００時間経過後もトルク伝達効率の低下はみ
られなかったが、比較例１のサンプルでは、１００００
時間経過後に４０％前後のトルク伝達効率の低下がみら
れた。[Example 2] A durability test was conducted using magnetic particles of samples Nos. 1, 3, 4 and 5 of Example 1 and magnetic particles of samples Nos. 12 and 7 of Comparative Example 1. In the sample of Example 1, no decrease in torque transmission efficiency was observed even after 10,000 hours, but in the sample of Comparative Example 1,
After time elapsed, a decrease in torque transmission efficiency of around 40% was observed.
以上の結果より、本発明の効果は明らかである。From the above results, the effects of the present invention are clear.
Claims (2)
とを有し、 被覆層がＴｉならびにＮおよび／もしくはＣを含有する
かまたはＡｌおよびＮを含有することを特徴とする磁性
粒子。(1) Magnetism characterized by having a magnetic core and a coating layer covering the core, the coating layer containing Ti and N and/or C, or containing Al and N. particle.
とを有し、被覆層がＴｉならびにＮおよび／もしくはＣ
を含有するかまたはＡｌおよびＮを含有する磁性粒子の
製造方法であって、前記芯部に振動を与えながら、プラ
ズマ ＣＶＤ法により前記被覆層を設層することを特徴とする
磁性粒子の製造方法。(2) It has a magnetic core and a coating layer that covers the core, and the coating layer is Ti, N and/or C.
or containing Al and N, the method comprising forming the coating layer by a plasma CVD method while applying vibration to the core. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62049028A JPS63216904A (en) | 1987-03-04 | 1987-03-04 | Magnetic particle and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62049028A JPS63216904A (en) | 1987-03-04 | 1987-03-04 | Magnetic particle and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63216904A true JPS63216904A (en) | 1988-09-09 |
Family
ID=12819644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62049028A Pending JPS63216904A (en) | 1987-03-04 | 1987-03-04 | Magnetic particle and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63216904A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102730A (en) * | 1988-10-13 | 1990-04-16 | Katsuo Tsutsumi | Production of multiple fine powdery material |
| JPH08176540A (en) * | 1994-12-27 | 1996-07-09 | Nec Kansai Ltd | Coating treatment of fluorescent substance for diffused electro-luminescence |
-
1987
- 1987-03-04 JP JP62049028A patent/JPS63216904A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02102730A (en) * | 1988-10-13 | 1990-04-16 | Katsuo Tsutsumi | Production of multiple fine powdery material |
| JPH08176540A (en) * | 1994-12-27 | 1996-07-09 | Nec Kansai Ltd | Coating treatment of fluorescent substance for diffused electro-luminescence |
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